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Brooks 5851EM Series, Инструкция по установке и эксплуатации

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Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Brooks

®

 Models 5965, 5851EM

Brooks

®

 Models 5965,  5851EM

Mass Flow Controllers

Model 5851EM

Mass Flow Controller

with D-Connector

Model 5851EM Downported

Mass Flow Controller

with Card Edge

Model 5965

Mass Flow Controller

with Card Edge

Содержание 5851EM Series

Страница 1: ... Number 541B122AAG September 2009 Brooks Models 5965 5851EM Brooks Models 5965 5851EM Mass Flow Controllers Model 5851EM Mass Flow Controller with D Connector Model 5851EM Downported Mass Flow Controller with Card Edge Model 5965 Mass Flow Controller with Card Edge ...

Страница 2: ...alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25...

Страница 3: ...esearch and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of...

Страница 4: ...Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Brooks Models 5965 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 5: ...aution 2 3 2 6 Removal from Storage 2 3 2 7 Gas Connections 2 3 2 8 In Line Filter 2 4 2 9 Installation 2 4 2 10 Electrical Interface 2 6 2 11 Configuring the PC Board 2 10 Section 3 Operation 3 1 Theory of Operation 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adjustment 3 3 3 4 Calibration Procedure 3 5 3 5 Response 3 10 Section 4 Maintenance Troubleshooting 4 1 Overview 4 1 4 2 Troubleshooting 4 2 ...

Страница 6: ...Allowable Loop Resistance 2 7 2 5 Common Electrical Hookups Current I O version 2 9 3 1 Flow Sensor Operational Diagram 3 1 3 2 Flow Controller System Block Diagram 3 2 3 3 Card Edge PC Board Jumper Location and Function 3 4 3 4 D Connector PC Board Jumper Location and Function Voltage I O Version 3 5 3 5 D Connector PC Board Jumper Location and Function Current I O Version 3 6 3 6 Model 5965 5851...

Страница 7: ...re required Models 5965 and 5851EM incorporate metal seals or welded joints insuring leak integrity for high purity and high vacuum applications Reducing the amount of internal threads makes the design less prone to system contamination The control electronics and flow sensor designs utilized in the Model 5965 and 5851EM have been well proven in precision gas delivery systems Standard features inc...

Страница 8: ...utput limiting prevents possible damage to delicate data aquisition devices by limiting the output signal of the mass flow controller Valve off Note 1 is accessed via Terminal J on the card Edge or Pin 4 on the D Connector version This feature allows the user to close independent of the command signal the control valve by supplying TTL level low signal to the proper terminal This function is usefu...

Страница 9: ...mes with minimal over undershoot 1 3 Specifications PERFORMANCE CHARACTERISTICS Flow Ranges Any range from 10 100 slpm nitrogen equivalent up to 200 slpm hydrogen Standard 0 C and 101 kPa 760 Torr Per SEMI Guideline E12 96 Accuracy 1 Full Scale including linearity at calibration conditions 68o F 3o F 50 R H Repeatability 0 25 of rate Settling Time Less than 3 seconds 6 seconds for 4 20 mA I O opti...

Страница 10: ...nickel plated copper D Connector DA 15P Electrical Pinouts Card Edge Compatible with Brooks Model 5965 5851EM as well as most competitve models D Connector Compatible with Brooks Models 5850C D and E Environmental Conditions Installation category I Pollution degree 2 Humidity 50 80 Relative Humidity Meter Altitude 2 000 meters 6562 feet For Indoor Use ONLY Mains supply voltage fluctuations not to ...

Страница 11: ... O Option 0 09 full scale of percent power supply voltage variation of full scale Current I O Option negligible effect over 22 5 to 28 Vdc PHYSICAL CHARACTERISTICS Materials of Construction 316L 316L VAR Vacuum Arc Remelt and high alloy ferritic stainless steel External seals Nickel Internal seals Nickel Valve Seat 316L Viton fluoroelastomers Buna N Kalrez or Teflon When 316L or Teflon seat is use...

Страница 12: ... Section 1 Introduction Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Figure 1 2 MFC MFM Dimensional Drawing for Models 5965 5851EM with D Connector or Card Edge with VCR Fittings ...

Страница 13: ...1EM Section 1 Introduction Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Figure 1 3 MFC MFM Dimensional Drawing for Models 5965 5851EM with D Connector or Card Edge Downported ...

Страница 14: ...1 8 Brooks Models 5965 5851EM Section 1 Introduction Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 15: ...packing list Outside of your clean area carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material lnspect for damaged or missing parts This device may have been assembled calibrated and double vacuum bagged in a Class 100 clean room ln your semi clean area remove the outer bag only Pass your Model 5965 5851EM into your clean area Note Re...

Страница 16: ...trument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 ...

Страница 17: ...o verify the condition of the equipment is as received lf the equipment has been in storage in conditions in excess of those recommended the device should be subjected to a pneumatic pressure test in accordance with applicable vessel codes Note lf the cleanliness of this device is critical service should be performed by the factory or one of the authorized service centers 2 7 Gas Connections Prior...

Страница 18: ...lateral scratches When installing the controller care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until time of installation CAUTION Recommended installation procedures a The Models 5965 and 5851EM should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to...

Страница 19: ...be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy lf possible have at least ten pipe diameters of straight tubing upstream of the Model 5965 5851EM Mass Flow Controller Figure 2 1 Model 5965 5851EM Card Edge Connector Arrangement CIRCUIT SIDE OF PC BOARD 1 CHASSIS GROUND 2 O 5 VOLT SIGNAL COMMON 3 O 5 VOLT SIGNAL OUTPUT 4...

Страница 20: ...ut off flow below 3 of full scale 2 10 Electrical Interface To insure proper operation the Model 5965 5851EM must be connected per Figures 2 1 through 2 6 depending upon the type of printed circuit board and connector As a minimum the following connections must be made Voltage I O Version Current I O Version Chassis Ground Chassis Ground Signal Common Signal Output Return Signal Output Voltage or ...

Страница 21: ...4 Valve Off Green 5 15 Vdc Supply Orange 6 15 Vdc Supply Blue 7 Valve Test Point Purge Wht Blk 8 Cmd Input or Cmd Pot S Red Blk 9 Supply Voltage Common Grn Blk 10 0 5 Signal Common Org Blk 11 5 Volt Reference Output Cmd Pot CW Blu Blk 12 Valve Override Blk Wht 13 Not Used Red Wht 14 Chassis Ground Grn Wht 15 Remote Transducer Input Blu Wht 1 15 9 8 Note 1 Cable shield tied to chassis ground in met...

Страница 22: ...or Connect the external command voltage to Terminal 9 and external command return to Terminal 1 Refer to Figures 2 2 and 3 4 Valve Override The valve override function allows full opening and closing of the valve independent of the command setting The unique command reset feature prevents flow overshoot when the controller goes from valve override closed to normal control The valve override for th...

Страница 23: ...nd input voltage Note For normally open valves grounding this pin will cause the valve to fully close Valve Off Refer to Figures 2 1 2 2 and 2 3 The control valve can be forced closed regardless of command input signal by applying a TTL level low 0 4 Vdc to Terminal L of the Card Edge version or Pin 4 of the D Connector version A TTL level high or floating at this pin has no effect Figure 2 5 Comm...

Страница 24: ...for jumper positions Both the current and voltage signals are returned on Pin 10 of the D Connector Supply The power for the mass flow controller is connected to Pin 5 22 5 to 28 Vdc and Pin 9 supply common of the D Connector Refer to Section 1 3 for the power requirements Chassis Ground Connect earth ground to pin 14 of the D Connector Valve Override connection optional The valve override functio...

Страница 25: ...jumper at J1 in the B C position Note lf the external valve return feature is not enabled the valve voltage is returned internally on the printed circuit board and the connection wiring resistance must be less than 0 2 ohms B D Connector Refer to Figures 2 2 and 3 4 for D Connector Voltage l O Version or Figures 2 3 and 3 5 for D Connector Current l O Version The 5 Volt reference is always availab...

Страница 26: ... reverse acting e g for an increase in transducer output the flow will correspondingly be decreased Configuring PC Board Current l O Option Setpoint Command lnput The mass flow controller can be configured for voltage or current setpoint command input Jumper J7 green must be in the right hand position for 0 5 Vdc setpoint and in the left hand position for a 4 20 mAdc setpoint input SignalOutput A ...

Страница 27: ...re the temperatures T1 and T2 are equal When gas flows through the tube the upstream sensor is cooled and the downstream sensor is heated producing a temperature difference The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is ΔT A P Cp m Where ΔT Temperature difference T2 T1 K Cp Specific heat of the gas at constant pressure kJ kg K P Heater power kJ s m M...

Страница 28: ...with different full scale flow rates The span adjustment in the electronics affects the fine adjustment of the controller s full scale flow ln addition to the mass flow sensor the Model 5965 5851EMEM mass flow controller has an integral control valve and control circuit as shown in Figure 3 2 The control circuit senses any difference between the flow sensor signal and adjusts the current in the mo...

Страница 29: ...f twenty minutes for the temperature of the controller and its environment to stabilize using a suitable voltmeter check the controller output signal lf it differs from the factory setting adjust it by removing the lower pot hole plug which is located closest to the controller body Adjust the zero potentiometer refer to Figure 3 6 until the desired output signal is obtained 3 4 Calibration Procedu...

Страница 30: ...dary electronics are being used as a power supply during the calibration the 5 volt reference must be enabled on the card Edge version for proper operation see Section 2 7 Remember to deactivate the 5 Volt reference before installing the calibrated mass flow controller in the system where Terminal 10 is grounded Figure 3 3 Card Edge PC Board Jumper Location and Function ...

Страница 31: ...dels 5965 5851EM Section 3 Operation Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Figure 3 4 D Connector PC Board Jumper Location and Function Voltage I O Version ...

Страница 32: ...oltage output Disabled Standard J2 RED SOFT START Enabled A A A J7 GREEN SETPOINT INPUT SIGNAL TYPE Mass Flow Controller only CS REV H AND HIGHER COMPONENT SIDE SHOWN SENSOR CONNECTOR R3 R2 R1 R4 VALVE CONNECTOR CIRCUIT COMMON TP4 LINEARITY VOLTAGE TP2 VALVE VOLTAGE TP3 TEST POINTS SENSOR VOLTAGE TP1 Multiplied by 100 A B A J4 B J3 A ANTICIPATE LINEARITY SPAN ZERO ADJUSTMENT POTENTIOMETERS 0 5 VOL...

Страница 33: ...ximately 45 minutes for warm up During the warm up adjustment and calibration check procedures do not allow the control valve to open when gas flow is not present This situation is not a normal operating mode and will cause abnormal heat up of the control valve with this abnormally warm valve the meter will be difficult to calibrate This situation can be prevented by switching the valve override c...

Страница 34: ...epeat check for leakage Note controllers supplied with all metal or Teflon valve seats do not provide tight shut oft A 0 3 leak through is typical For metal orTeflon seat controllers close a downstream shut off valve and observe the zero signal e Set the command potentiometer connected to Terminals A B and 10 of the Card Edge connector and Terminals 1 9 and 11 of the D Connector for 100 of flow 5 ...

Страница 35: ...djust the zero potentiometer for an output of zero mV 2 mV as necessary h Set the command potentiometer for 50 of flow 2 500 V and measure the flow rate Calculate the error as a percentage of full scale Example What is the percent of full scale error when full scale flow rate is equal to 100 slpm Measured flow rate 48 5 slpm Desired flow rate 50 0 slpm i Calculate theTP2 correction voltage error r...

Страница 36: ...ustment 1 describes a method that will get the step response close to optimum quickly and without any flow measuring equipment This method should be used when the response time of the flow controller is not critical to overall system performance Adjustment 2 describes a method that will allow adjustment of your Model 5965 5851EM mass flow controller to optimum step response performance This method...

Страница 37: ...low rate commanded in less than three seconds six seconds for Current l O Version after command change requires the use of a fast response flowmeter 500 millisecond response to be within 0 2 of final value or better in series with the Model 5965 5851EM and a storage oscilloscope or recorder a Make a step change in command to the controller from zero to 100 of full scale flow and record the output ...

Страница 38: ...3 12 Brooks Models 5965 5851EM Section 3 Operation Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 39: ...4 1 Brooks Models 5965 5851EM Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 4 1 Overview ...

Страница 40: ...is new 1 Verify a low resistance common connection correct power supply voltage and that signals are reaching and leaving the controller The breakout board P N S273Z649AAA Card Edge version or P N S273Z668AAA D Connector version listed in Section 5 will make this job much easier 2 Verify that the process gas connections have been correctly terminated and leak checked 3 If the mass flow controller ...

Страница 41: ...tage not returned Pin L at common Check jumper for external valve return Refer to Section 3 4 Valve off pin grounded Check Valve Off input Refer to Section 2 6 for terminal assignments Output signal stays at 6 8 Volts Valve stuck open or leaky Clean and or adjust control valve Refer to cleaning procedure and or Section 4 2D 26 mA for Current I O Vers regard less of command and there is flow 15 Vol...

Страница 42: ...ignal falls below 0 100 Volts lf possible connect a flow measurement device in series with the mass flow controller to observe the actual flow behavior and verify the accuracy of the mass flow controller lf the mass flow controller functions as described above it is functioning properly and the problem is most likely elsewhere Table 4 1 lists possible malfunctions which may be encountered during b...

Страница 43: ... using Table 4 2 If any of the steps do not produce expected results the sensor assembly is defective Return to Brooks lnstrument for sensor replacement Note Do not attempt to disassemble the sensor D Cleaning Procedures No routine external cleaning is required for Brooks thermal mass flow controller Should the Models 5965 or 585lEM Mass Flow Controller require cleaning due to deposition return th...

Страница 44: ...ed by using the ratio of the molar specific heat of the two gases or by sensor conversion factor A list of sensor conversion factors is given in Table 4 5 To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas used Example The controller is calibrated for Nitrogen The desired gas is Carbon Dioxide The output r...

Страница 45: ...uoromethane f 22 CHCLF2 0 505 1 770 3 906 Chloroform Trichloromethane CHCL3 0 442 2 066 5 340 Chloropentafluoroethane f 115 C2 CLF5 0 243 2 397 7 165 Chlorotrifluoroethylene C2 CLF3 0 337 2 044 5 208 Chlorotrifluoromethane f 13 CCLF3 0 430 1 985 4 912 Cyanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 De...

Страница 46: ...pton Kr 1 382 1 729 3 708 Methane CH4 0 763 0 763 0 717 Methylacetylene C3 H4 0 473 1 196 1 782 Methyl Bromide CH3 Br 0 646 1 834 4 236 3 Methyl 1 butene C5 H10 0 252 1 584 3 127 Methyl Chloride CH3 CL 0 687 1 347 2 308 Methyl Fluoride CH3 F 0 761 1 102 1 518 Methyl Mercaptan CH4 S 0 588 1 313 2 146 Methyl Silane CH6 Si 0 393 1 283 2 061 Methyl Trichlorosilane MTS CH3 Cl3 Si 0 267 2 310 6 675 Meth...

Страница 47: ... Trichlorosilane SiHCL3 0 329 2 201 6 038 Trimethyloxyborane TMB B OCH3 3 0 300 1 929 4 638 1 1 2 Trichloro 1 1 2 Triflouroet f 113 C2 CL3 F3 0 231 2 520 7 920 Trimethylamine CH3 3 N 0 316 1 467 2 639 Tungsten Hexafluoride WF6 0 227 3 264 13 28 Uranimum Hexafluoride UF6 0 220 3 548 15 70 Vinyl Bromide C2 H3 Br 0 524 1 985 4 772 Vinyl Chloride C2 H3 CL 0 542 1 492 2 788 Vinyl Fluoride C2 H3 F 0 576...

Страница 48: ...Note that the orifice is marked with its size in thousandths of an inch When changing the aforementioned factors calculate the new orifice size by following the procedure and example outlined in the following paragraphs Example Determine the orifice size for the following conditions Gas Hydrogen Flow Rate 2 000 sccm Outlet Pressure 30 psig Inlet Pressure 50 psig 1 Determine Nitrogen equivalent flo...

Страница 49: ...ks Models 5965 5851EM Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Figure 4 1 Model 5965 5851EM Orifice Sizing Nomograph ...

Страница 50: ...ure the following formula must be used Where P1 percentage by volume of gas 1 P2 percentage by volume of gas 2 Pn percentage by volume of gas n Example Find the Nitrogen equivalent for 20 slpm of a 20 Helium and 80 Chlorine gas mixture QNitrogen Qgas orifice conversion factor 20 x 1 439 28 78 slpm Nitrogen 2 If inlet and outlet pressures are given in gauge pressure psig add 14 7 to convert to abso...

Страница 51: ... pressure drop psi on the vertical line marked Dp Point A 5 Locate the Nitrogen equivalent flow rate sccm Nitrogen on the vertical line marked QNitrogen Point B 6 Draw a line connecting Dp and QNitrogen and extend it to the baseline Mark this point Point C 7 Locate inlet pressure psia on the vertical line marked Pin Point D 8 Draw a line connecting Pin Point D and baseline Point C and then extend ...

Страница 52: ...4 14 Brooks Models 5965 5851EM Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Figure 4 2 Example Nomograph ...

Страница 53: ...s flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel See Section 4 3 Disassembly and Assembly for restrictor removal and installation Restrictors The Model 5965 5851EM mass...

Страница 54: ...cale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen In this example a Size 4 Wire Mesh Assembly would be selected Table 4 4 Model 5965 5851EM Standard Restrictors Range Restrictor slpm Nitrogen Element Equivalent Flow Combination Part Number 4 6 to 15 1 40 micron 1 inch S613E666BMG 15 to 26 1 40 micron S613E657BMG...

Страница 55: ...uktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung für Massedurchflußgeräte Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Geräte elektrische elektronische Komponenten das ...

Страница 56: ... configuration Please refer to the enclosed Instruction Manual Español Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificación CE de los Equipos de Caudal Másico Fecha Enero 1996 Los equipos de Brooks eléctricos electrónicos en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de C...

Страница 57: ...un appareil portant le label CE Qualité du câble des presse étoupes et des connecteurs Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE Si vous approvisionnez vous même ce câble vous devez utiliser un câble blindé à 100 Les connecteurs D ou de type circulaire doivent être reliés à la terre Si des presse étoupes sont nécessaires ceux ci doivent être mét...

Страница 58: ... een bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennai...

Страница 59: ...il elektrisk jord på riktig pinne i pluggen for å møte CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se håndboken som hører til utstyret Vennlig hilsen Português Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruções Referência Certificação CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento eléctrico electrónico ...

Страница 60: ...kaisia Suoja on oltava maadoitettu Nastojen liittäminen katso liitteenä oleva manuaali Ystävällisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som är CE märkt har testats och godkänts enligt gällande regler för elekt...

Страница 61: ...Installation and Operation Manual X TMF 5965 5851EM MFC eng Part Number 541B122AAG September 2009 Brooks Models 5965 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Страница 62: ...y 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facil...

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