Alignment and Calibration
MagnaTran 7.1 User’s Manual
Adjusting the Robot’s End Effector
MN-003-1600-00
Brooks Automation
7-8
Revision 2.2
This procedure assumes that the wafer delivery zones of all modules is at approxi-
mately the same radial extension of the robot’s arms.
The arm should be extended while measuring the end effector runout.
Adjustment Procedure
1.
Set an indicator base on the inside bottom of the module chamber being used,
i.e. Vacuum Cassette Elevator, Process Module, as shown in
NOTE:
To ensure the accuracy of all measurements, once the indicator base is set up it
should not be moved.
2.
Using the CDM, jog the robot’s end effector into the module and rest the tip of
the dial indicator on the end effector to measure “dip” where indicated in
, being careful not to deflect the end effector.
3.
Jog the robot’s arm in and out (radial direction) of the module while watching
the reading on the dial indicator. The “dip” is measured in two places. The
Figure 7-1: Locating the Dial Indicator
Module/Loadlock Chamber
Dial Gauge
End Effector
Access Slot
