Instruction Manual
µ-FLOW & LIQUI-FLOW series
Thermal Mass Flow Meters/Controllers for liquids
Doc. no.: 9.17.161A Date: 18-02-2022
µ-FLOW L01(V12)
LIQUI-FLOW L13(V12), L23(V12)
LIQUI-FLOW L13I, L23I
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.