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EL-FLOW® Select series

Thermal Mass Flow Meters and Controllers

Doc. no.: 9.17.099 rev. J Date: 22-02-2022

Instruction Manual

ATTENTION

Please read this document carefully before installing and operating the product.

Not following the guidelines could result in personal injury and/or damage to the equipment.

Содержание EL-FLOW Select Series

Страница 1: ...rs and Controllers Doc no 9 17 099 rev J Date 22 02 2022 Instruction Manual ATTENTION Pleaseread this documentcarefully beforeinstalling and operating theproduct Notfollowing theguidelines could resultin personalinjury and ordamageto theequipment ...

Страница 2: ... or contributetoitsoptimal performance Additional informationavailableinthereferenceddocumentation ontheindicatedwebsite s or from your Bronkhorst representative Receipt of equipment Check the outside packaging box for damage incurred during shipment If the box is damaged the local carrier must be notified at once regarding his liability At the same time a report should be submitted to your Bronkh...

Страница 3: ...l safety precautions This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to prevent possible injury Read the operating information carefully before using the product Before operating make sure the line cord is connected to a properly grounded power receptacle Inspect the connecting cables for cracks or breaks bef...

Страница 4: ...Bronkhorst Instruction Manual EL FLOW Select 9 17 099J 4 ...

Страница 5: ...1 16 Modbus 2 7 2 16 Other fieldbuses 2 7 3 16 2 8 Communication interface 17 RS232 communication 2 8 1 18 Fieldbus communication 2 8 2 18 E 8000 power supply readout and control 2 8 3 19 BRIGHT readout and control 2 8 4 20 Operation 3 20 3 1 Powering up and powering down 20 3 2 First use 20 3 3 Mass flow measurement and control 21 Changing fluid set 3 3 1 22 3 4 Valve Safe State 22 3 5 Manual con...

Страница 6: ...arameters 36 Default control mode 4 1 1 37 4 2 Measurement and control 37 Advanced measurement and control 4 2 1 38 4 3 Device identification 39 4 4 Alarms 41 4 5 Counter 42 4 6 Network configuration 44 4 7 Fluid set 45 Advanced fluid set parameters 4 7 1 46 4 8 Master slave configuration FLOW BUS 48 Troubleshooting and service 5 48 5 1 Errors and warnings 48 5 2 Restoring factory settings 49 5 3 ...

Страница 7: ...onents suppliedbyBronkhorst suchaspumpsor valves withother mediaand or other conditions alwayscheckthewetted materials includingseals for compatibility Seethetechnical specificationsoftheproduct andconsult thirdparty documentation ifapplicable tochecktheincorporatedmaterials Responsibilityfor theuseoftheequipment withregardtoitsintendeduse suitabilityfor theintendedapplication cleaning andcompatib...

Страница 8: ...cially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications The base blocks of the mass flow meters and controllers have 1 4 face seal male VCR connections EL FLOW MetalSealed series are available for ranges from 0 12 6 mln min up to 1 50 ln min N2 equivalent and are suited for max 64 or 100 bar pressure ratings The digital features o...

Страница 9: ...RS232 9 16 119 Hook up diagram CANopen 9 16 217 Hook up diagram DeviceNet 9 16 122 Hook up diagram EtherCAT 9 16 124 Hook up diagram EtherNet IP 9 16 215 Hook up diagram FLOW BUS 9 16 120 Hook up diagram Modbus ASCII RTU 9 16 123 Hook up diagram Modbus TCP 9 16 234 Hook up diagram POWERLINK 9 16 237 Hook up diagram PROFIBUS DP 9 16 121 Hook up diagram PROFINET 9 16 147 Hook up diagram custom bus I...

Страница 10: ...elect 9 17 099J 10 1 7 Model key The model key on the serial number label contains information about the technical properties of the instrument as ordered The specific properties can be retrieved with the diagrams below 1 7 1 EL FLOW Select ...

Страница 11: ...Bronkhorst Instruction Manual EL FLOW Select 9 17 099J 11 1 7 2 EL FLOW Metal Sealed ...

Страница 12: ...ax 30 bar g C2F6 Freon 116 ü ü ü C2H2 Acetylene ü û2 ü ü C2H4 Ethylene max 10 bar g 3 max 10 bar g max 10 bar g C2H6 Ethane ü û ü C3H6 2 Propylene max 10 bar g û max 58 bar g 3 C3H8 Propane ü û ü Cl2 Chlorine ü û ü He Helium ü ü ü H2 Hydrogen ü ü ü H2S Hydrogen sulfide û ü ü Kr Krypton ü ü ü NF3 Nitrogen trifluoride û û ü NH3 Ammonia û ü ü NO Nitric oxide û û ü N2 Nitrogen ü ü ü N2O Nitrousoxide m...

Страница 13: ... or replacingfluidsystem relatedpartsofthedevicewill invalidatethetest pressureandleaktest specification Rapid gasdecompression explosivedecompression For instrumentsusedabove10 bar g Bronkhorst recommendsamaximum decompressionrateof70 bar min accordingtoNACE TM0297 Exceedingthisratecanhavenegativeinfluenceonthelifetimeofthesealingmaterials Ambientconditions Makesurethat processgasesdonot condensa...

Страница 14: ...ttings The use of Swagelok RS type stainless steel adapters is recommended in combination with Bronkhorst elastomer O rings Checkthefluidsystem for leaksbeforeapplyingfull operatingpressure especiallywhenusinghazardousmedia e g toxic or flammable 2 6 Electrical connection Electrical connections must be made with standard cables or according to the applicable hook up diagram The factory installed 9...

Страница 15: ...connection If the instrument is provided with a dedicated fieldbus interface it can be operated digitally in a fieldbus system using RS485 communication In FLOW BUS Modbus and DeviceNet systems the fieldbus connector can also be used to power the instrument In other fieldbus systems the instrument is always powered through the 9 pin D sub power connector on the side Neverpower theinstrument simult...

Страница 16: ...stem Characteristics Baud rate selectable between 9600 and 256000 Baud default 19200 Baud 15 24 Vdc supply voltage Connection of up to 247 instruments on a single bus Supports RTU and ASCII protocols Consult Instruction manual Modbus interface document no 9 17 035 for moreinformationabout settingupa Modbusnetwork 2 7 3 Other fieldbuses For other fieldbuses consult the concerning fieldbus manual 2 ...

Страница 17: ...able art no 7 03 366 RS 232 to USB converter art no 9 09 122 Windows computer for readout and control Plug in Power Supply PiPS art no 7 03 422 Connect the T part cable with the 9 pin D sub connector on the side of the instrument and use the RS 232 USB converter to connect the other end of the cable with a free USB port of the computer For communicationwithaPLC orothercontrollingdevice a9 pinD sub...

Страница 18: ...power ofthepower supplyunit For all availablefieldbustypesexcept PROFIBUS DP thefieldbusconnectiononisusedtopower andoperatethe instrument For PROFIBUS DP theinstrument needstobepoweredthroughthe9 pinD subconnector onthesideofthe instrument asshowninRS232 communication For informationabout settingupafieldbusnetworkwithBronkhorst instruments consult theaccordingfieldbusmanual Ifyouneedassistancewit...

Страница 19: ...232 connection can be established with the instrument This example uses the following components EL FLOW Select BRIGHT readout and control module Plug in Power Supply PiPS art no 7 03 422 Use the 9 pin D sub connector on the side of the instrument to plug in the T part that comes with the BRIGHT module Consult theBRIGHTmanual document 9 17 048 for moreinformation Thismanual canbedownloadedfrom the...

Страница 20: ...ed green LED glows continuously the instrument is ready to measure mass flows however optimal accuracy is only reached after warming up see Powering up and powering down After powering up the control valve closes normally open or stays closed normally closed The valve stays closed until the instrument receives a setpoint from the active setpoint source The internal PID controller then immediately ...

Страница 21: ...angeability of the flow sensor for the selected fluid Rangeability of the control valve for the selected fluid Accuracy indication for the given flow range Compatibility of selected gases with the used sealing materials see Sealing material compatibility Limitations to the operating conditions After all limitation checks are passed the entered properties are stored in the instrument including the ...

Страница 22: ...ed on your instrument if applicable 3 5 Manual controls On top of the housing the instrument is equipped with two LED indicators and a multifunctional switch which can be used to monitor the instrument visually and start several functions manually 3 5 1 LED indications The LEDs on top of the instrument indicate the operational state The meaning of some indications depends on the specific fieldbus ...

Страница 23: ...used long flash 2 sec on 0 1 sec off FLOW BUS Not used PROFIBUSDP Requested parameter not available Modbus Not used DeviceNet Serious communication error manual intervention needed EtherCAT Configuration error PROFINET Configuration error e g a requested parameter is not available lGreen and lred alternating Pattern Time Indication slow wink 1 sec on 1 sec off Alarm indication minimum maximum alar...

Страница 24: ...flash red 0 2 sec on 0 2 sec off 0 2 sec on 1 sec off Communication timeout e g communication cable disconnected n a Ethernetindicators On instruments with an Ethernet based interface the RJ 45 connection sockets have two integrated LED indicators with standard Ethernet functionality Amber Ethernet speed Green Ethernet link activity 3 5 1 2 DeviceNet indications DeviceNet instruments have two bi c...

Страница 25: ...patterns where each pattern indicates a function All patterns in this sequence are continuous Each pattern is shown for a number of seconds in the table below the column labeled Holdtime indicates the time frame during which a pattern is shown To start a function release the switch when the LEDs show the pattern of the required function l green l red Hold time Function off off 0 1 sec No action of...

Страница 26: ...de readout change Reading controlmode By briefly pressing the switch 2 times within 1 second in normal operation mode the instrument shows its current control mode with a series of consecutive LED indication patterns The number of flashes corresponds to the current value of parameter Control Mode see Special parameters Step Pattern Indication 1 Green l l number of flashes indicates the tens of the...

Страница 27: ...y pressing the switch 3 times with intervals of up to 1 second in normal operation mode the instrument shows its current node address and baud rate with a series of consecutive LED indication patterns Step Pattern Indication 1 Green l l number of flashes indicates the tens of the node address 2 Red l l number of flashes indicates the units of the node address 3 Green and red simultaneous l l numbe...

Страница 28: ... the switch as soon as the required value is reached In case you lose count keep the switch pressed and wait until the flash count reaches its maximum and restarts On completion of a step the instrument automatically advances to the next step When all required steps have been completed the instrument returns to its normal operation mode If the switch is not pressed within 60 seconds after starting...

Страница 29: ... lists the supported communication modes of the EL FLOW Select Connection Type Communication standard Fieldbus protocol 9 pin D sub Analog 0 5Vdc 0 10Vdc 0 20mA 4 20mA n a Digital RS232 ProPar RS485 FLOW BUS Modbus ASCII RTU Fieldbus specific Digital RS485 FLOW BUS Modbus ASCII RTU PROFIBUS DP Can CANopen DeviceNet Ethernet EtherCAT Ethernet IP Modbus TCP IP POWERLINK PROFINET Thecommunicationstan...

Страница 30: ... up For moreinformationabout communicationthroughtheRS232 interface consult the RS232manual document no 9 17 027 3 6 2 1 FlowDDE Digital Bronkhorst instruments can be operated via RS 232 using the Bronkhorst FlowDDE server application Dynamic Data Exchange DDE provides a basic level of inter process communication between Windows applications Together with a client application either self made or w...

Страница 31: ...rst DDE client applications FlowPlot and FlowView Other software programs supporting DDE are for example MS Office LabVIEW InTouch and Wizcon Bronkhorst software applications FlowView left and FlowPlot right FlowDDE andother Bronkhorst applicationsareavailableonthesupport CD or canbedownloadedfrom theproduct pagesontheBronkhorst website www bronkhorst com products 3 6 3 Digital fieldbus operation ...

Страница 32: ...perated using third party software as a master device such as LabVIEW ModScan or a Modbus PLC PROFIBUS DP Instruments in a PROFIBUS DP system can be monitored and operated using third party software as a master device such as TIA Portal by Siemens To configure a device a so called GSD file General Station Description has to be loaded into the software The GSD file contains all necessary configurat...

Страница 33: ...witch Regardless of the preferred method once started the zeroing procedure itself takes approximately 10 seconds to complete longer if the output signal is unstable 3 7 1 Using multifunctional switch To start the autozero function with the multifunctional switch follow these instructions 1 Change the setpoint of the instrument to 0 zero 2 Press and hold the multifunctional switch After 4 seconds ...

Страница 34: ...Bronkhorst instruments consult theFLOW BUS manual seeDocumentation For moredetailedinformationontheProPar protocol consult theRS 232 manual seeDocumentation Modbus In the Modbus protocol parameters are accessed by specifying their unique decimal register number or corresponding PDU address Protocol Data Unit The PDU address is the hexadecimal translation of the register number minus 1 e g register...

Страница 35: ...yReset Alarm Enable or Reset Counter Enable Makesurethevalueisaccepted bysendingvalue0 first Wink Type Access Range FlowDDE FLOW BUS Modbus Unsigned char 27 W 0 9 1 0 0 0x0000 1 Sending any text string value between 1 and 9 to this parameter makes the indication LEDs if present blink for a couple of seconds This can be useful in order to identify a specific device in a large fieldbus network Modbu...

Страница 36: ...After enabling calibration mode by means of parameter Control Mode this parameter is used to start the autozero function of the flow sensor The following modes are supported Value Description 0 Idle no action 9 Start zeroing 255 Error result of previous calibration mode 4 1 1 Default control mode IO Status Type Access Range FlowDDE FLOW BUS Modbus Unsigned char RW B 0 255 86 114 11 0x0E4B 3660 The...

Страница 37: ...ch is an approximation of the actual media temperature Pressure Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 3 4E 38 143 33 8 0xA140 0xA141 41281 41282 In case an external pressure sensor is connected this parameter returns the actual system pressure in bar a If there is no external pressure sensor the default value of this parameter is equal to parameter Inlet pressure 4 2 1 Advanced meas...

Страница 38: ...ValveOutput Type Access Range FlowDDE FLOW BUS Modbus Unsigned long RW 0 16777215 55 114 1 0xF208 0xF209 61961 61962 This parameter represents the controller output signal for control valve operation 4 3 Device identification User Tag Type Access Range FlowDDE FLOW BUS Modbus Unsigned char 16 RW 115 113 6 0xF130 0xF137 61745 61752 With this parameter the instrument can be given a custom tag name w...

Страница 39: ...ilt in alarm functionality can be used to handle different alarm types system errors and warnings min max alarms response alarms batch alarms master slave alarms The alarm type can be set with parameter Alarm Mode When an alarm is activated the type can be read out using parameter Alarm Info An automatic setpoint change can be set using the parameters Alarm Setpoint Mode and Alarm NewSetpoint It i...

Страница 40: ... Modbus Unsigned char RW 0 255 182 97 7 0x0C27 3112 This value represents the time in seconds the alarm action will be delayed when an alarm limit has been exceeded This value also delays the alarm off action if an alarm limit is no longer exceeded Default value 0 AlarmMaximumLimit Type Access Range FlowDDE FLOW BUS Modbus Unsigned int RW 0 32000 116 97 1 0x0C21 3106 Maximum limit for Measure to a...

Страница 41: ...accessibleusingFlowSuite FlowPlot or FlowViewor aBronkhorst readout andcontrol unit Whentheinstrument ispowereddown it remembersthestateofthecounter Ifthecounter isactivewhenthe instrument ispowereddown it isactivatedwhenpoweredupandthencontinuestocount from thevalueat thetimeof power down Counter Mode Type Access Range FlowDDE FLOW BUS Modbus Unsigned char RW 0 2 130 104 8 0x0D08 3337 Available m...

Страница 42: ...nge default 1 Change setpoint to Counter newsetpoint Counter New Setpoint Type Access Range FlowDDE FLOW BUS Modbus Unsigned int RW 0 32000 127 104 6 0x0D06 3335 New safe setpoint when a counter limit is reached until reset Range 0 32000 represents 0 100 setpoint Default value 0 ResetCounter Enable Type Access Range FlowDDE FLOW BUS Modbus Unsigned char RW 0 15 157 104 9 0x0D09 3338 Available rese...

Страница 43: ...000000 125000 250000 500000 Parity 0 0 0 1 2 2 0 0 Network configuration for Ethernet based fieldbus types is done automatically via the Ethernet protocol Communication viafieldbusconnection RS485 Use the following parameters to configure the instrument for communication via the fieldbus connection Networkparameter settingsfor fieldbuscommunicationcanbeoverruledbytherotaryswitches ifpresent Fieldb...

Страница 44: ...r RW B 0 2 336 124 12 0x0F8C 3981 The following values are supported Value Description 0 No parity 1 Odd parity 2 Even parity 4 7 Fluid set For changingfluid flowrangeor operatingconditions usingtheFlowTunesoftwareisadvised FlowTunechecksany changesfor compatibilityoftheprocessconditionswiththeinstrument Whentheparametersdescribedinthissectionare changedmanually nosuchchecksareperformed andtheinst...

Страница 45: ...h m3n min m3n s scfh scfm scfs sccm slm uls h uls min uls s mls h mls min mls s ls h ls min ls s ccs h ccs min ccs s mm3s h mm3s m mm3s s cm3s h cm3s m cm3s s m3s h m3s min m3s s ul h ul min ul s ml h ml min ml s l h l min l s cc h cc min cc s mm3 h mm3 m mm3 s cm3 h cm3 m cm3 s m3 h m3 min m3 s cfh cfm cfs Becauseofthemaximum stringlength 7 characters someunit namesareabbreviated For instancemm3n...

Страница 46: ... 113 20 0xF1A0 0xF1A1 61857 61858 Thermal conductivity of the current fluid in W m K Viscosity Type Access Range FlowDDE FLOW BUS Modbus Float RW B 0 3 4E 38 252 113 21 0xF1A8 0xF1A9 61865 61866 Dynamic viscosity of the current fluid in Pa s 4 8 Master slave configuration FLOW BUS Normally there is no communication between the instruments in a fieldbus system The FLOW BUS protocol however provides...

Страница 47: ...158 33 14 n a Sets the master node for the instrument Note that this parameter is only effective in a FLOW BUS network with RS 485 communication SlaveFactor Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 500 139 33 1 0xA108 0xA109 41225 41226 The controller output from the master instrument is multiplied by SlaveFactor 100 to get the slave instrument setpoint In systems other than FLOW BUS v...

Страница 48: ...y settings In case changes to the instrument configuration leads to non recoverable erroneous behavior the instrument can be reset to the pre configured factory settings The easiest way to do this is with the multifunctional switch on top of the instrument To restore the factory settings using the multifunctional switch follow these instructions 1 Make sure electrical power to the instrument is sw...

Страница 49: ...rtional control valves supply 0 15 Vdc and operational inlet pressure to valve and slowly increase voltage If valve does not open clean parts and re adjust valve Laminar flow element clogged or blocked Return equipment to factory Sensor failure Return equipment to factory Control behavior unstable Measurement disturbed by vibrations If possible avoid installation in close proximity of mechanical v...

Страница 50: ...ondensation Decrease inlet pressure or increase gas temperature Piping filters and or control valve clogged or blocked Sensor blocked or contaminated Flush fluid system with clean dry air If problem persists contact Bronkhorst Supplied fluid type does not match configured fluid type Supply equipment with other fluid or change fluid type in instrument configuration Measured value or output signal i...

Страница 51: ...the right product for your application Contact sales by e mail sales bronkhorst com For after sales questions help and guidance our Customer Care department is available by e mail aftersales bronkhorst com No matter the time zone our experts within the Customer Care department are available to answer your request immediately or take appropriate further action Our experts can be reached at 31 859 0...

Страница 52: ...fficient precautionarymeasurestosafeguardthestaffintheir repair department All instrumentsmust bedispatchedwithacompletelyfilledin Declarationondecontamination Instrumentswithout this declarationwill not beaccepted A safetyinformationdocument containinga Declarationondecontamination form document no9 17 032 canbe downloadedfrom theService Support sectionoftheBronkhorst website www bronkhorst com I...

Страница 53: ...User Tag 38 Parameters Fluid set Capacity 100 45 Capacity Unit 45 Capacity Unit Type Pressure 45 Capacity Unit Type Temperature 45 Fluid Name 44 Fluid Set Index 44 Parameters Fluid set advanced Density 46 Fluid Temperature 46 Heat Capacity 46 Inlet Pressure 46 Outlet Pressure 46 Thermal Conductivity 46 Viscosity 46 Parameters Master Slave Master Node 47 Slave Factor 47 Parameters Measurement and c...

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