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BOC Edwards B735-01-000, Инструкция по эксплуатации

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12

EXT250M Turbomolecular Pump

Figure 4 - Typical pumping system

1.

Alternative position for

7.

Vacuum gauge

13. EXC300M Controller

vent-valve

8.

Flexible bellows

14. Air-cooler

2.

Vacuum system

9.

Foreline trap

15. PRX10 purge-restrictor

3.

High-vacuum gauge

10. Rotary backing-pump

16. Regulated purge

4.

Inlet-screen

11. Mist filter

gas supply

5.

EXT250M pump

12. Cooling-water connectors

17. Vent-valve

6.

Isolation-valve (optional)

Содержание B735-01-000

Страница 1: ...om EXT250M Turbomolecular Pump Description Flange size Cable length Item Number EXT250M Turbomolecular Pump with EXC300M Controller and pump to controller cable DN100ISO K 1 m B735 21 010 DN100ISO K 3...

Страница 2: ...eneralrequirements x EN101 2 2 1997 Compressors andvacuum pumps Safety requirements Vacuum pumps EN61 326 1997 Electrical equipment for measurement controlandlaboratory use 41 1998 A2 2001 EMCrequirem...

Страница 3: ...t screen 13 3 3 2 Mechanical fixing 14 3 3 3 Base mounting 14 3 3 4 Inlet connection 15 3 3 5 Backing connection 15 3 4 Vent valve connection and control 16 3 4 1 Vent configurations 16 3 4 2 Remove a...

Страница 4: ...1 Installation 34 7 4 2 BX bakeout band 34 7 4 3 FL20K foreline trap 35 7 4 4 TAV vent valve and vent port adaptor 35 7 4 5 ACX air cooler 35 7 4 6 Vibration isolators 35 7 4 7 PRX purge restrictor 3...

Страница 5: ...klist of items 11 4 Vent valve orifice diameter with atmospheric pressure at the inlet of the vent valve 17 5 Vent valve orifice diameter with 2 bar absolute 2 x 105 Pa pressure at the inlet of the ve...

Страница 6: ...This page intentionally blank iv EXT250M Turbomolecular Pump...

Страница 7: ...ons The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where fai...

Страница 8: ...ent of the rotating armature 15 and cause the drive circuit to modulate the current in the drive coils 10 18 to counter the movement The pump has safety bearings 5 8 These safety bearings are precisio...

Страница 9: ...vent restrictor fitted in the vent port 9 Earth ground screw 10 Drive coil lower 11 Water connector 12 Damper 13 Passive magnetic bearing radial 14 Active electro magnetic bearing upper 15 Rotating ar...

Страница 10: ...f vent restrictors see Section 7 4 8 have fixed orifices so venting time will depend on the volume of your vacuum system If you use a VRX vent restrictor to vent the pump the time required to vent to...

Страница 11: ...e of the electromagnetic bearing and the rotor will rebound against the safety bearings The Emergency LED on the EXC300M will go on There may be considerable noise if the pump rotor remains in contact...

Страница 12: ...he EXT250M is not suitable for this purpose CAUTION Do not use an EXT250M to pump gases which contain more than 20 oxygen unless the pump is gas purged CAUTION Do not use the EXT250M to pump mercury v...

Страница 13: ...gas specification and vent control data Although the pump may be vented to atmospheric air high relative humidity of the air may greatly increase the subsequent pumping time To reduce pump down times...

Страница 14: ...deposits or turbidity pH value 6 0 to 8 0 Maximum calcium carbonate concentration 75 parts per million Maximum chloride concentration 100 parts per million Minimum oxygen concentration 4 parts per mi...

Страница 15: ...um throughput The braking time to below 10 of normal speed without venting will be reduced if the EXC300M Controller provides the electrical supply for an air cooler or a vent valve Table 2 EXT250M te...

Страница 16: ...Turbomolecular Pump dimensions mm 1 Vent valve 5 Backing port 2 Electrical supply connector 6 Axial mounted air cooler accessory 3 Cooling water connectors 7 Side mounted air cooler accessory 4 Purge...

Страница 17: ...the items listed in Table 3 below If any of these items is missing notify your supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions as...

Страница 18: ...EXC300M Controller vent valve 8 Flexible bellows 14 Air cooler 2 Vacuum system 9 Foreline trap 15 PRX10 purge restrictor 3 High vacuum gauge 10 Rotary backing pump 16 Regulated purge 4 Inlet screen 11...

Страница 19: ...ol the vent valve with the EXC300M Controller The EXC300M Controller is supplied configured so that it opens the vent valve if the Emergency or Fail LEDs go on Construct your system so that it prevent...

Страница 20: ...be mounted on moveable equipment the maximum acceleration of the pump in any direction must be less than 1 G If the pump acceleration will be greater than 1 G the pump must be switched off before it...

Страница 21: ...isolator between the pump inlet and the vacuum system refer to Section 7 4 6 for the Item Numbers and refer to the instruction manual supplied with the vibration isolator for installation details If...

Страница 22: ...nt valve you can only vent the EXT pump when it is at full rotational speed if the vacuum system has a volume of 10 litres or more If the volume of your vacuum system is less than 10 litres you must f...

Страница 23: ...hen the EXT pump is at full speed and configure the EXC Controller to open the TAV vent valve when the EXT pump speed falls to 50 of full rotational speed If your auxiliary vent valve is connected to...

Страница 24: ...e to the tapped hole in the vent restrictor 6 then pull the screw to remove the vent restrictor from the purge port To refit the vent restrictor or fit a new vent restrictor 1 Refer to Figure 6 Fit a...

Страница 25: ...operated system to a fully automatic system with remote control Refer to the instruction manual supplied with the EXC300M Controller to complete the electrical installation 3 7 Cooling CAUTION When y...

Страница 26: ...er cooling circuit may become blocked if the cooling water contains too much calcium carbonate or if it contains particulates which are too large Corrosion of the water cooling circuit may occur if th...

Страница 27: ...ump you do not have to break the cooling water circuit Make sure that there is a layer of thermal contact grease on the water cooler before you fit it to the pump 3 7 2 Forced air cooling An air coole...

Страница 28: ...evitate the rotor assembly 2 Turn the manual vent valve clockwise to close it 3 Turn on the cooling water supply if water cooling is used 4 Start the backing pump 5 When the vacuum system pressure is...

Страница 29: ...te In an emergency only open the vent valve quickly to decelerate the pump rotor in the shortest possible time Shut down the EXT250M as described below Refer to the EXC300M Controller instruction manu...

Страница 30: ...d the EXC300M Controller automatically switches the EXT250M to operate as a generator and shuts down the pumping system safely As the EXT250M decelerates regenerative braking is used to maintain the e...

Страница 31: ...and cause the same effect 4 6 Bakeout CAUTION When you bake the EXT250M to above 70 o C at the inlet flange you must cool the pump by forced air or water cooling to prevent the pump from overheating I...

Страница 32: ...that you exchange your pump for a factory reconditioned replacement Alternatively you can send your pump to a BOC Edwards Service Centre to have the bearings replaced When you return an EXT250M pump...

Страница 33: ...inside of the EXT pump is contaminated it may not be possible to achieve the specified ultimate vacuum or pump down time may increase In these circumstances you should return the pump to a BOC Edwards...

Страница 34: ...00M Controller Check that any system interlocks are correctly made refer to the instruction manual supplied with the EXC300M Controller Check that the pump to controller cable is connected If all of t...

Страница 35: ...tion manual supplied with the EXC300M Controller If the EXC300M Controller still trips into Fail consult your supplier or your nearest BOC Edwards company The EXC300M Controller trips into Fail after...

Страница 36: ...ched Is the pressure limited by water vapour Bake the system and pump Are any of the vacuum gauges contaminated If so clean or replace them Is the pumping speed insufficient due to poor conductance be...

Страница 37: ...pump with flexible bellows Is the vibration being transmitted from the rotary pump If so fit flexible bellows or a vibration isolator in the backing line Is the EXT250M making a constant high pitched...

Страница 38: ...plastic bag together with a suitable desiccant 3 Store the pump in cool dry conditions until required for use When required prepare and install the pump as described in Section 3 6 2 Disposal Dispose...

Страница 39: ...entre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is...

Страница 40: ...rs of replacement cables are given below Cable Length Item Number EXT250M to EXC300M 1 m D396 19 010 EXT250M to EXC300M 3 m D396 19 030 EXT250M to EXC300M 5 m D396 19 050 7 4 Accessories 7 4 1 Install...

Страница 41: ...Product Item Number TAV vent valve B580 66 010 NW10 to 1 8 inch male adaptor B580 66 011 7 4 5 ACX air cooler An ACX air cooler can be fitted to the EXT250M pump However please refer to Section 3 to...

Страница 42: ...r to the inlet of a TAV vent valve or PRX purge restrictor The EXT250M pump is supplied with a VRX10 vent restrictor fitted in the vent port and purge port Refer to Section 2 3 for information on the...

Страница 43: ...t band position 14 Bakeout band 6 VRX10 vent restrictor supplied 7 Water cooler supplied 8 Air cooler side mounting version shown axial version also available 9 Purge port blanking plug supplied 1 Vib...

Страница 44: ...This page intentionally blank 38 EXT250M Turbomolecular Pump...

Страница 45: ...hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Retur...

Страница 46: ...roof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print y...

Страница 47: ...This page intentionally blank...

Страница 48: ...C EDWARDS Ammerthalstra e 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon...

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