
Nov 02
Issue A
XDS Dry Pump
MAINTENANCE
PAGE
27
27
5.8.2
The pump has failed to achieve the
specified performance
• Allow 1 hour from cold for the pump to warm
up to full operating temperature. If the pump
does not achieve the performance specified in
Section 2, make sure that this is not because
of your system design before you contact
your supplier or BOC Edwards for advice. In
particular, the vapour pressure of all materials
used in your vacuum system must be lower
than the specified ultimate vacuum of the
pump. Refer to Section 5.8 for a list of
possible causes for failure to achieve the
specified performance.
• If the electrical supply voltage is more than
10% below the lowest voltage specified on the
voltage indicator, the pump may operate
yielding a degraded vacuum performance.
• There is a leak in your vacuum system.
• Your pressure measurement technique or
gauge head is unsuitable or gives an incorrect
indication of pressure.
• Your vacuum fittings are dirty or damaged.
• The inlet strainer is blocked.
• There is a blockage or high pressure in the
exhaust line.
• The pump contains traces of process vapours.
• The pump is outside the specified range of
operating conditions.
• The gas ballast control is not properly closed.
• The tip seals need replacing.
• The inverter is current limiting the supply.
• The pump is in idle mode.
5.8.3
The pump is noisy
• The pump is contaminated with solid
particles.
• The bearings are worn.
• Following tip seal replacement, the pump has
not been vented and a build up of eroded tip
seal dust is reducing running clearances. Refer
to Section 5.6 for further information.
5.8.4
The pump surface temperature is
high
• The ambient temperature is too high.
• The cooling air supply is insufficient or is too
hot.
• The process gas is too hot or the throughput
is too high.
5.8.5
The pumping speed is poor or if
pump down time is too long
• The connecting pipelines are too small in
diameter.
• The connecting pipelines are too long.
• The inlet strainer is blocked.
• There is a leak in the system.
• The inverter is current limiting the supply.
• The pump is in idle mode.
Содержание A730-01-983
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