1
INTRODUCTION
1.1
Scope and definitions
This manual provides installation and maintenance instructions for the Disposable Liners for the
BOC Edwards Model 250 Water-Cooled Exhaust Trap. You must use the Disposable Liners as
specified in this manual.
Read this manual before you install the Disposable Liners. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The
use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the
equipment, associated equipment and process.
1.2
Description
The Disposable Liners are designed to fit the Model 250 Water-Cooled Exhaust Trap.
The exhaust trap cools the exhaust gases from the pump and causes particulates to collect on the
liners in the trap. This minimises the collection of particulates in the exhaust-system, where they
may lead to blockage and so result in downtime of your pumping system. When fully coated, the
liners can be easily removed from the trap and be replaced with new liners.
The Water-Cooled Exhaust Trap and the Disposable Liners are particularly suitable for use with
a pump which is used for an LPCVD nitride process.
2
TECHNICAL DATA
Liner construction materials
Zinc coated mild steel
Disposable Liners
3
