Balzers QMG421 Скачать руководство пользователя страница 24

Содержание QMG421

Страница 1: ...EBAL2 ERS Operating Instructions QMG 421 Quadrupole mass spectrometers QMG 421C Control units QMS 421 and QMS 421C QMS 421 QMS421C BK 800 170 BE ist edition 3rd addendum 09 92 1 ...

Страница 2: ... connection 9 5 2 1 channels function group 20 5 2 L1 select function 20 3 2 Options to the OC 421 9 5 2 1 2 detect function 20 5 2 1 3 mass function 21 3 2 1 Installing removing optional boards 9 5 2 1 4 amplif function 21 3 3 Additional modules 9 5 2 1 5 aux function 21 3 3 1 Installing and removing modules 9 5 2 1 6 output function 22 5 2 1 7 trip function 22 3 4 Installing the QMS in a 19 rack...

Страница 3: ...1 console 94 8 3 2 Wamings from the QC 421 quadrupole 6 5 Integrator 79 controller 94 6 5 1 Forming the integral value 79 8 4 Error messages 95 6 5 2 Integrator operation 79 8 4 1 Error messages from the CS 421 console 95 6 5 3 Integrator background I UGND 79 8 4 2 Error messages from the QC 421 quadrupole 6 6 Using the digital output module 79 controller 95 6 7 Measurementoperation 79 8 5 Trouble...

Страница 4: ... QMN 112 114 CB Cable overview 114 D Default parametervalues 115 D1 channels Parameter 115 D2 general Parameter 116 D3 ion source Parameter 116 D4 operation Parameter 117 E Adjust 118 ET Status messages for coarse search 118 E2 Status messages for fine adjustment 120 F Installing removing options in and from the OC 421 121 G Converting the unit for other mains powers122 H Glossary 123 J Bibliograp...

Страница 5: ...tions containing information on equipment and personnel safety are marked with this triangular warning symbol This 1 5 Validity safety information must be communicated to other users These operating instructions apply to units with the following software versions The version in your unit can be taken from the information given in section 5 2 5 NOTE Gives information on possible measu rement errors...

Страница 6: ...ges to 341 amu the lower mass range to 200 amu The 6 mm when the highly stable 16 mm rod system is rod system is used here used and up into the higher mass ranges to This family of instruments is also described in 2048 amu when the 8 mm rod system is this document used This family of instruments is descibed in this document 2 2 1 System components in the 400 family 2 2 2 System components in the 1...

Страница 7: ...Electrometer lon counter Detector operation operation Electrometer ton counter Detector operation operation Faraday x Faraday 90 SEM x x 90 SEV x x 90 CD SEM Channeltron EP 112 electrometer preamplifier EP 112 electrometer preamplifier The electrometer preamplifier has the function of amplifying the ion The electrometer preamplifier has Faraday or electron current SEM the function of amplifying th...

Страница 8: ...dules This module contains the circuits necessary for ion counting Al 421 analog input module operation plus the same 12 analog DI 420 digital input module output channels contained in the DO 420 digital output module AO 421 The analog input module has 16 chan nels for analog signal inputs The digital input module has a maxi mum of 32 channels for digital signal inputs Electrometer Ion counter The...

Страница 9: ...bed Turn off the control unit and wait at least one minute in Appendix G Disconnect all cables disconnecting the mains power DANGER The mains plug shall only be inserted cable last in a socket outlet provided with a pro Unscrew the dummy backplate s module s tective earth contact The protective action shall not be negated by the use Plug in the new module s unplug the old module s of an extension ...

Страница 10: ...ewing and easier access to the SEM supply Its function is determined by the front panet ion src CTRL SEM FIL sequence entered CAUTION When setting the QMS 421 up as a INT START bench unit be sure that air circulation in through the cooling slots on the When integ TRIG EXTERN is entered the in side of the unit and out through the tegrator is started by the trigger signal coming via this back of the...

Страница 11: ...OOO EP CP 112 400 channels OOOO oc4 4H24H OOOO operation OOO OOO general OOO ion source The ion source parameters are entered here after which general they are stored as a complete parameter set in the ion The general group of functions concerns system source parameter memory A maximum of four such pa configuration and maintenance rameter sets can be stored per ion source channels operation This g...

Страница 12: ... functions concerns system in this family of mass spectrometers the ion source po configuration and maintenance tential is set on the OME 125 quadrupole electronics compare 1 2 channels This group of functions defines the measurement para operation meters and stored the parameters channebby channel These functions control the measuring unit i e turn the ion source filam and SEM sem on off and con ...

Страница 13: ...ce Photo o O OOOOO OOOOO OOOOOO OOOOO OOOO OOO OOOO OOO OOO OOO CS 421 console ln CS 421 operating mode all the front panel func tion are enabled if the OMG 421 is operated via an in terface the front panel functions are disabled but the measured value and parameter displays still function Parameter entry via the front panel is only possible ac cording to the config CTRL MODE parameter entry privi...

Страница 14: ...sa value Measured value line with mass Mass number Measured value in Field for alarms and measured value and exponential form error messages bar graph Channel informations 128 00 O 0027E 07 88IESIEL CHAHHEL 5 SCAN N MULTI CHAN 3 19 Channel operating mode TR I P 1 1 18 v w HEXT start and finish channel Next series of Switching functions ___ _ M switching function compare section 6 7 4 Operating mod...

Страница 15: ... Measured value as bar graph ment channel Mantissa value in electrometer operation Quasilog across 10 dec in ion counter operation Measured value line Mass number Measured value in Field for alarms and with mass e ponential form error messages measured value and bar graph Channel informations 42 0 0 0073E108 REEROEBRENiillEL CHAN 0 SETUP MASS MODE SPEED FIRST WIDTH RE50L Name of parameter for SCRN...

Страница 16: ...a a a i Higher contrast J Lower contrast 4 2 4 Number pad The number pad keys are used to make all parameter a a o a a value entries They comprise the following aaaaa a a a a a a to number keys for changing parameter 00000 values decimal point change sign digit exponential entry cancel a parameter entry that has not L yet been closed or return to the Measure display close a numerical entry by savi...

Страница 17: ... disconnection of the Enter the mass range for which your quadrupole protective earth terminal is likely to electronics or RF generator is configured If necessary make the apparatus dangerous select the MASS R submenu by pressing the Intentional interruption is prohibited appropriate softkey and change the parameter value using the or key The main power switch is Enter the type of ion detector mou...

Страница 18: ...and g selecting more sensitive mass ranges As vibrations could interfere with the CAUTION Before starting your measurement adjustment we recommend removing the screwdriver system refer to the information given after making the adjustment and then checking the in the operating instructions for the offset quadrupole electronics 12 a Set the filament selection switch to remote and the polarity to see...

Страница 19: ...rameters for the function First parameter for the function detect TYPE Scitkey 1 Sottkey 2 Softkey 3 So tkey 4 Softkey 5 Softkey 6 FARAD sEM MODE SCAN N SPEED FIRST WIDTH RESOL ON CNT SCAN F EXTERN STAIR MODE SAMPLE DWELL MASS AVERAGE RESOL MODE PEAK L SPEED FIRST WIDTH RESOL THRESH PEAK F PAIRAN PEN ING OO 98f8met fS Current value of the imiting parameter Any limitation on other parameters impose...

Страница 20: ...tup display 5 2 1 2 datect function Defines the detector for the measurement channel selected Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 TYPE FARAo LOCK IN PHASE TYPE seM SEM LOCK IN PHASE TYPE lON CNT SEM EXTERN TYPE PIRANL TYPE PENN1NG PE CTRL TYPE A lNPUT AWCH La Defines the detector for the measurement channel setected Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey ...

Страница 21: ...AD SEM MODE Fix RANGE CALIB FILTER PAUSE 2 OFFSET detect LOCK IN OFF MODE AUTo CALIB FILTER PAUSE 2 OFFSET MODE AUTo o RANGE L CALIB FILTER PAUSE 2 OFFSET FARAD SEM AMP 1 CALIB FlLTER PAUSE 2 detect LOCK INw ON ioN cNT CALIB PAUSE 2 CP LEV EXTERN GAIN CALIB FILTER PAUSE 2 OFFSET PIRANL PENNING A INPUT FIO PStametSTS first additional parameter level 1 AMP Softkey 1 Softkey 2 Softkey 3 Softkey 4 Sof...

Страница 22: ...tions The swit ching function status is shown in the Measure Display If a digital output module DO 420 is installed the status signal can also be assigned to any bit in that module detect sTYPE Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 FARAD SEM ION CNT EXTERN TYPE LEVEL A LEVEL 8 DO A DO 8 mass MODE SAMPLE FARAD SEM ION CNT EXTERN mase MoDE no parameters SCAN N SCAN F STAIR TYPE...

Страница 23: ...over time detect TYPE Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 FARAD SEM ION CNT EXTERN TRIG SETPT DO I INTEGRATOR maas MODE SAMPLE FARAD SEM ION CNT EXTERN mass MODE SCAN N SCAN F STAIR PEAK L PEAK F PIRANT PENNING A INPUT no parameters GMS421gg opm Operation Functions 23 ...

Страница 24: ... Softkey 3 Softkey 4 Softkey 5 Softkey 6 NEXT RETURN 2 DIG OUT Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 BIT SET CLEAR NEXT RETURN 5 2 2 2 config function 1 4co ld Defines the OMG system and control unit configuration Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 SYSTEM QMS HW INIT 6 CTRL 6 TEST 7 SIMUL first additional parameter level 3 SYSTEM Softkey 1 Softkey 2 S...

Страница 25: ...5 Softkey 6 RAM T EPROM T DISP T KEY T PRG NR RETURN 11 SERVICE Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 MODE MAss OFFSET F S F S RETUAN MODE MON OFFSET F S F S SELF RETURN RESOL MODE Ao OFFSET F S F S SELFICH RETURN MODE Aoc POS NEG FILTER RETURN MODE PonTs RS 232 LAN OMU CLA RETURN ET NOTE These service test routines require addîtional hardware and are on y for use by BALZERS ...

Страница 26: ... of the ion source operation parameters the ion source supply parameters are not defined by measurement channet parame ters An entire set of parameters must be selected The ion source is started using the filam function see section 5 2 4 5 This allows the ion source parameter sets to be reassigned quickly and easily Softkey 1 Softkey 2 Softkey 3 Softkey 4 Softkey 5 Softkey 6 MODE NORMAL TYPE FILAM...

Страница 27: ...and the only for config CTRL OMS HW HV 420 or HV 421 EXT PROT signal is being relayed via the configured ctrl connector except for config SYSTEM DETECT FARAD e cept for config CTRL SEM FIL EXTERN A warning message is output 5 2 4 5 filam function Turns the filament supply on and off emission Limitations see section 5 2 5 on off 44 CAUTION Before tuming on the degas except for config CTRL SEM FIL E...

Страница 28: ... halt key was pressed to prepare the control to accept the incoming signal and the time the cycle is triggered by the RUN IN signal at the ctrl connector LED multi Lights when a measurement cycle has been started cycle adjust Flashes when the cycle was triggered by an er temal control and when the measurement cycle start has been prepared waits for the RUN IN signal at the ctrl connector LED halt ...

Страница 29: ...OARSE Faster and less precise scan A search is made within the search range meter values for the mass number M entered under MASS FINE Fine search for the peak based on the mass number M entered under MASS within a reduced search range Higher precision than under COARSE Explanation of the parameter îf the parameter must be subdivided farther it will have one or more additional parameter levels Par...

Страница 30: ...plif function only for detect TYPE FARAD and SEM and detect LOCK IN ON AMPt AMP2 Defînes the post amplificatîon gain factor for the chopper lock in measurement signal AMP3 see section 6 7 2 Parameter values Explanations 1 10 Post amplification gain factor for the chopper lock in measurement signal lŒ NOTE An arrow after the parameter name e g AMP2t indicates an overrange situa tion If this occurs ...

Страница 31: ... for amplif MODE FIX The measured value output will be logarithmic across three decades at 3 V per decade LOG TOD only for amplif MODE AUTO The measured value output will be logarithmic across ten decades at 1 V per decade Ion counting operation detect TYPE ION CNT Parameter set Explanations LIN The output for the measured values within the measurement range defi ned under RANGE will be linear LOG...

Страница 32: ...omplete floating point factor for all other types of operation Parameter values Explanations 1 00 E 10 Calibration factor for a measured value 9 99 E 10 CATH v1 v6 function except for ion src TYPE SPEC and SPEC lon source voltage identical to V2 refer to V2 aCLEARn cycle function only for detect TYPE FARAD SEM ION CNT and EXTERN only for cycle FUNCT t UGND Cancels the background value measured for...

Страница 33: ...TEST CTRLn config function BAUD only for config CTRL MODE ASCII BIN and MODEM Definition of the data transmission rate for the RS 232 C interface Parameter set Explanations 300 Bit s Transmission rate 1200 Bît s 2400 Bit s 4800 Bit s 9600 Bit s 19200 Bit s NOTE When a console is configured it is always also possible to adjust the Baud rate from the console MODE The system can be controlled via a v...

Страница 34: ... console CS 421 or via an inter face only possible with EXT PROT HIGH L The EXT PROT signal has a common effect on all the measuring units connected when config SYSTEM OPTION QMU 112 aCTRLo ion src function only for ion arc MODE DEGAS Tum on off Degas CAUTION Optimize the emission current limit value according to section 6 7 5 the first time you turn on Degas and each time the filament is replaced...

Страница 35: ... V6 refer to V6 DETECT config function refer to SYSTEM DIG IN di do function Overview of the statuses of the digital input bits DI 420 This parameter is not defined in a measurement channel NEXT Continue to the next 32 digital input bits RETURN Retum to the dildo functíon DIG OUTn di do function Overview of the statuses while allowing the digital output bits to be manipulated DO 420 This parameter...

Страница 36: ...gnment to a digital output bit O 95 Assignment of the measurement channel switching function to a particu Iar digital output bit DO 420 DO I integ function only for detect TYPE FARAD SEM t0N CNT and EXTERN only for mass MODE SAMPLE The status of the integrator switching function can be assigned to a digital output module DO 420 bit If two or more switching functions are assigned to the same bit th...

Страница 37: ... s An average is taken during the DWELL time 2ms 1s 5ms 2s 10ms 5s 20 ms 10 s 50 ms 20 s 0 1 s 60 s Electrometer operation detect TYPE FARAD SEM or Extem Input detect TYPE EXTERN Parameter values Explanations 0 1 s 60 s Measurement times for detect LOCK IN ON An average is taken during the DWELL time lon counting operation detect TYPE ION CNT Parameter values Explanations 1 ms 60 s Measurement tim...

Страница 38: ...ssion current Parameter values Explanations OFF Emission turned off 0 01 2 00 mA Emission current END cycle function only for cycle FUNCT CYCLE and cycle MODE MULTI Defines the last measurement channel to be included in multi channel operation This parameter does not apply to single hannel operation Parameter values Explanations 0 63 Last measurement channel in a cycle ILT NOTE If the last measure...

Страница 39: ...ilament 2 is selected No switchover will be made if it falls 1 2 Filament 1 is selected while filament 2 is being preheated if filament 1 fails a switchover is made to filament 2 NOTE There is a short break in the emission during the switchover from filament 1 to filament 2 FILAMn ion src function except for config SYSTEM lS TYP AXIAL When the ion source has two filaments and the filament select s...

Страница 40: ...g interrelationships apply Filter time SPEED DWELL constant 18 µs 0 5 mslu 1 malu 0 5 ms 1 ms 85 µs 2 mslu 5 mslu 2 ms 5 ms 400 µs 10 mslu 20 mslu 10 ms 20 ms 1 7 ms 50 mslo 0 1 s u 50 ms 0 1 s 8 ms 0 2 s u 0 5 s u 0 2 s 0 5 s 40 ms 1 s u 2 s u 1 s 2 s 180 ms 5 s u 10 s u 5 s 10 s 800 ms 20 s u 60 s u 20 s 60 s 18 µs 800 ms Manual adjustment of the analog filter BŸ NOTE When the measurement range ...

Страница 41: ... F S n config function refer to TEST SERVICE F S n config function refer to TEST SERVICE FUNCTn cycle function Defines the operating mode Parameter set Explanations CYCLE Measurement operation AOJUST Peak adjustrnent for SAMPLE measurements refer to section 6 2 SETTL Transient behavior when the measurement channel is changed compare section 6 8 3 1 This parameter value can only be defined for dete...

Страница 42: ... or stop of the integration process Parameter set Explanations START The effect this parameter has is a function of the TRIG parameter INTERN The integration process is started either from the console or via an interface EXTERN No function the start is triggered by the INT START sîgnal relayed via the ctrl connector STOP The integration process is stopped CAUTION Stopping the integration process h...

Страница 43: ...r trip TYPE HYST N NOTE Any required hysteresis can be chosen for the HYST switching function as long as it is not negative and not less than 10 of the lower threshold value If this is not the case this minimum hysteresis will be set automatically LOCK IN detect function only for config SYSTEM OPTION CLA only for detect TYPE FARAD or SEM Turns the CLA 400 chopper lock in amplifier on and off When ...

Страница 44: ...he resolution is reduced as follows SPEED Measurement range to 1024 Measurement range 2048 à 10 mslu 1 ys4 1 2 5 malu 1 ja i 2 2 mslu 1 mslu 17 g 1 g 0 5 mslu At this speed it is no longer possible to run an adjust MODEn amplif function only for detect TYPE FARAD and SEM and detect LOCK4N OFF Defines the type of measurement channel switchover but the choice is limited in mass MODE scan mode Parame...

Страница 45: ...MODEu mass function except for detect TYPE PIRANI PENNING and A INPUT Defines the type of mass scan operation Parameter set Explanations SCAN N Standard mass spectrum measurement across the measurement range defined by FIRST and WIDTH at the speed defined under SPEED SCANJ Mass spectrum with FIR filter across the range defined by FIRST and WIDTH at the speed defined under SPEED STAfA Mass spectrum...

Страница 46: ...s well as for detect TYPE EXTERN Small offset deviations in the electrometer amplifier signal can be compensated OFFSET does not affect the elm output in the OC 421 quadrupole controller For an offset adjustment first set OFFSET to O and then correctly align the electrometer pre amplifier EP 112 from the offset potentiometer see section 5 1 3 Parameter values Explanations 1 99 1 99 F S Electromete...

Страница 47: ...ent system in multichannel operation the system requires a delay break to switch channels before beginning a new measurement job This time is calcuîated internally and can be influenced by the calibration factor P CAL to optimize the measurement speed see section 6 8 3 1 If it is possible to calculate the effective break time in advance measurement range switchover not on AUTO or AUTO D this time ...

Страница 48: ...and TEST QMS FtANGEn amplif function only for detect TYPE FARAD or SEM for detect LOCK IN OFF and amplif MODE FIX or for detect LOCK IN ON under AMP cycle function only for cycle FUNCT ADJUST and cycle MODE MONO and for the limitations according to the amplif function Defines the measurement channel for electrometer operation Parameter values Explanations E 12 E 5 Measurement range for detect LOCK...

Страница 49: ...e unit resolution for most RF generators HESOLn mass function except for detect TYPE PIRANI PENNING and A INPUT Compare the 400 family versions Parameter values Explanations OFF Integral mass spectrum DC is off ON Standard mass spectrum DC is on uSELFu config refer to TEST SERVICE SELFICHu config function refer to TEST SERVICE SEM detect function except for config SYSTEM DETECT FARAD only for dete...

Страница 50: ...or switching function for cutting off the integration process when the preset threshold has been exceeded The assigned DO bit is set when the integration is started and reset LOW when the switching function has responded Parameter values Explanations OFF The integrator switching function is disabled The DO bit assignment is temporarily voided and the bit is released for other uses 1 17E 38 Cutoff ...

Страница 51: ...s u 60 s u Electrometer operation detect TYPE FARAD SEM oder Extem Input detect TYPE EXTERN Parameter values Explanations 1 s u 60 s u Scan speed for detect LOCK lN ON lon counting operation detect TYPE alON CNT Parameter values Explanations 2 mslu 60 s u Scan speed for mass MODE STAIR 20 malu 60 s u Scan speed for mass MODE SCAN x and PEAK x STATE aux function Defines whether the selected measure...

Страница 52: ... multiplier only for config SYSTEM OPTION CP LaJ DETECT Defines which signal source ion detector should be used Parameter set Explanations FARAD Faraday detector SEM 90 secondary electron multiplier CH TRON Channettron LaJ IS TYP Defines the type of ion source installed in the quadrupole analyzer OMA Parameter set Explanations AXIAL Axial ion source CB Crossbeam lon source GAID Grid ion source SPM...

Страница 53: ...nd QMA 125 200 Measurement range 200 OME 125 2 and QMA 125 OPTION Defines any system expansion options Parameter set Explanations NO No expansions CLA Chopper lock4n amplifier CP lon counter preamplifier system recognizes this automatically LaJ OPTION Defines any system expansîon options Parameter set Explanations NO No expansions QMU Quadrupole multiplexer for systems with two or more analyzers C...

Страница 54: ... number is shown in the status line for approximately ten seconds RAM T RAM test The test is started by pressing the appropriate softkey During the test the message BUSY appears in the display instead of the parameter value When the test is finished the result of the test is shown in the status line for approximately ten seconds RETURN Return to config TEST DSP Digital signal processor test EPROM ...

Страница 55: ... for approximately ten seconds RAM T RAM test The test is started by pressing the appropriate softkey During the test the message BUSY appears in the display instead of the parameter value When the test is finished the result of the test is shown în the status line for approximately ten seconds RETURN Return to config TEST RETURN Retum to config function SERVICE Checks the signal processing FILTER...

Страница 56: ...lanations INTERN The measurement cycle is started and stopped from the console CS 421 or via an interface EXT AUTO The measurement cycle is started by the positive flank of the RUN IN signal coming via the ctrl connector The measurement cycle runs untH it is stopped when the halt signal is issued or until a predefined number of cycles has been completed It starts again with the positive trigget fl...

Страница 57: ...via the intemai filter and the amplifier circuit in the OC 421 in the same way as an intemal signaL PIRANI Total pressure measurement with Pirani measurement module only for config OMS HW PI 420 PENNING Total pressure measurement with cold cathode measurement module only for config QMS HW PE 420 A tNPUT Analog signal via the analog input module This signal is not transmitted via the intemal filter...

Страница 58: ...bled The DO bit assignment is temporarily voided and the bits are made available for other functions ABS Switching functions A and B are activated as individual independent functions They have only one threshold if the pressure exceeds this threshold the switching function status changes HYST Switching functions A and 8 are enabled and coupled to a common swit ching function with two thresholds hy...

Страница 59: ... Reference Parameter values Step size potential V1 IONREF VO O 150 V 1 V V2 CATH V1 0 0 125 0 V 0 5 V V3 FOCUS V1 30 0 30 0 V 0 25 V V4 F AXIS V1 0 60 V 0 25 V VS EXTRACT V1 O 450 V 2 V V6 DEF I V1 0 450 V 2 V V7 V1 0 250 V 1 V VS V1 125 125 V 1 V V9 WEHNELT V2 0 60 V 0 25 V V10 Reserve Vi l Reserve V12 Reserve lon source potentials for positive ion polarity 125 V 30V 150V V3 VB Yl V2 V5 Y6 V7 30V...

Страница 60: ... measured during a scan in SCAN or PEAK max 2047 operation as a function of the system configuration config SYSTEM MASS R 16 16 Nurnber of masses to be measured in a scan in STAIR operation ET NOTE When the WIDTH is defined as negative the scan runs backwards i e from higher to lower masses This can avoid mass discrimination problems when for example in the forward scan a smaller peak follows a la...

Страница 61: ...AN FIR filter The intensity values are subjected to a FIR Finite Im AO or pulse Response filter algorithm The filter is based on mon the theory of an optimal filter i e a filter for signals sha ped like mass peaks compare section 6 1 3 Unproces e sed signaf Because the averaging time must have elapsed before elm the scan can goe to the next mass the output of the measured intensity value is always...

Страница 62: ...me for one cycle This type of averaging has the advantage that it already provîdes an estimated intensity value over DWELL af PeakmteosMs ter the first measurement cycle This value then beco mes more and more precise as more measurement cycles are included allowing DWELL to be shortened shorter transient times without having any significant effect on the filter function Mass numbers for peeks 6 1 ...

Страница 63: ...ion to be set It also suppresses peaks that are too widek to narrow a The peak width must be wider than minimum width 6 2 Adjust mPeak nlmin ht_ When used in SAMPLE mode the Adjust function ab lows the selected measurement channel to optimi2e peaks automatically when ENABLE is set in aux b The peak width must be narrower than maximum STATE width Ammax This possibility is advantageously used for ex...

Страница 64: ...ange usually covers amu of the mass entered for M It can however be expanded under cer M vaamu M M womu M tain circumstances predictive search range expansion a Standard search range Duration of an ADJUSTn COARSE The duration of a search is a function of the parameter values entered under DWELL Because the search 20 TSOge IS sometimes wider than one mass width refer to previous section the duratio...

Страница 65: ...The status report comprises one or more symbols and a status code The interpretation of these gives informa I H 5 tion on which parameters MASS RANGE or THRESH if any must be modified to allow a suc cessful Adjust also refer to Appendix E Refer to Appendix E for details ADJUST RUNNING STATUS CH 29 10001 FUNCT MO JnC ETHRESHSANGE Nass Duration of an ADJUST FINE ADJUST MULTI COARSE 0 01 1E 05 13 46 ...

Страница 66: ...st if you have configured the AO 421 option or the IC 421 option you can record up to 1 2 measurement channels elm Pause o 2v Connect your strip chart recorder to the AO connec connector tot either via a connection cable you have fabricated DWELL time yourself for this purpose or for laboratory use via the AB 021 connection box available as an option If you have configured the AO 421 analog output...

Страница 67: ...cle FUNCT ADJUST coarse mass MODE SAMPLEn elm mon connector Pause and AO r old value i new value connectors sync connector mon DWELL connector Miust Peak mass MODE PEAK Lo and PEAK F found elm connector Leve co r ector no output old value temains mon connector Level connnecc or Pause AO connector Level sync connector 2 p FIRST g WIDTH OMS421gg opm Measuring with the GMS 421 69 ...

Страница 68: ...E LOG 3 DEC 3 31 3 h i k PEAK L 10 DEC 10 1 IL m PEAK F 6 3 3 Output format External input detect TYPE EXTERN Analog measured value signals can be output at the maas output Output format Formulas mon and AO connectors in various formats MoDE AO MODE at AO and output mon Electrometer operation MONITOR Deca V des dec detect TYPE FARAD SEM SCA N N detect LOCK IN OFF scAN F LAN 1 10 n mase output ampl...

Страница 69: ...Formula c Formula b 10 V i RANGE b U y Iog RANGE x 103 in the range of i 2 x 103 RANGE in lA 0 75 Vx 103 RANGE RANGE c Up RANGE x i 0 5 V in the range of 103 5 i 2 x 10 RANGE in Al 0 25 Vx 103 RANGE d UAO RANGE I m the range of 0 5 i 103 RANGE in Al Electrometer operation Logarithmic output across ten decades Formula f 10 14 14 y 13 g 12 g 11 10 10 10 10 10 6 10 10 4 1 1111111111 24 4 24 24 24 24 ...

Страница 70: ...mula h h Ugo log RN E 103 in the range of Rate 2 2 g E_ Rate and RANGE in cpsi 0 75 V 103 RANGE RANGE I UAO RANGE x Rate 0 5 V in the range of 10 5 Rate 2 x 103 Rate u RANGE in cps 0 25 V 103 RANGE k Ugo RANGE Rate in the range of Of Rate Rate and RANGE in laps Ion counting operation Logarithmic output across ten decades Formula m J 10 2 10 1 10 0 10 1 10 2 10 2 10 4 10 10 6 10 7 10 01111111111 00...

Страница 71: ...i I I 1 I tilII i I i illi i I i lifl 100612345678910 0 25 Formula p Formula o 10 V UExtern GAIN 10 V o UAo IOD I 10 V 103 im Bereich UExtern GAIN 0 75 V 103 GAIN 10 V 10 V p U lo v UExtem Extem 3 0 25 V 103 GAIN 10 V q Ugo 10 V Ug im Bereich 0 1 UExtem 3 GAIN Accessories A connection box with 2 mm banana sockets is available as an accessory see section 10 1 to allow easier con tacting of the AO o...

Страница 72: ...e the transient behavior when the measurement channel is changed trigger the negative flank also refer to the parameter in section 6 8 3 1 6 3 4 2 Strip chart recorder elm connector Recorder QC 42 The elm output supplies the filtered analog measu od vralue sigdn from the EP 112 electrometer amplifier Select a recorder that has a paper feed and scaling cor responding to the value entered for SPEED ...

Страница 73: ...esult in a nonlinear scale Interference at the x signal as the result of hum for example cause unfocussed or even broken peaks X Y mon 6 3 4 4 Plotter This type of presentation allows an e act mass number Plotter QC 421 assignement A strong offset compensation is required for high mass numbers because the DC coupling shifts the picture each time the FIRST parameter is changed Because of the limite...

Страница 74: ...LEVEL B xx Esxx Level B The DO B switching function status will switch to ON Switching function ON when the actual value goes above the threshold status value if you have configured one or more DO 420 modules trip DO B xx you can assign the switching function status to a DO channel c as a window monitor This application requires a digital output module Select Absolute as the type of switching func...

Страница 75: ...y channel e As window monitor with hysteresis Two measurement channels and a digital output mo dule are required for this application Select the first measurement channel x select Select Hysteresis as the type of switching function trip TYPE HYST Select the switching function for measurement channel trip LEVEL An x xxEsxx x and define the two threshold values Levels A and B trip LEVEL B x xxEsxx A...

Страница 76: ...ALZENS Other combinations including combinations with more than two switching functions are possible to allow op timum adaptation to the monitoring application 78 Measuring with the QMS 421 OMs421ag opm ...

Страница 77: ...es you can assign one or more switching function levels trip DO A trip DO B or integ DO I to each of the 32 bits per module The DO 420 module also allows the channels to be manipulated via one the interfaces refer to separate operating instructions 6 6 5 2 Integrator operation CAUTION If several switching function levels are assigned to the same DO bit these are The integrator operation is defined...

Страница 78: ...LE and STAIR ground for the same gas at DWELL 100 ms 60 s Modulating the process gas flow using a gas chopper No AUTORANGE operation such as the piezo chopper and the lock in technique solves this problem i e the flow of the gas being admit For the measurement set up CLA 400 OMS 421 the ted can be analyzed separately from the background following signal flow occurs 6 7 2 2 Measurementsetup RANGE i...

Страница 79: ...ing units to be operated with a single control unit refer to Appendix C The filaments can be preheated individually i e only the active filament selected with detect QMU CH or in parallel refer to operating instructions 23 The pre heating function allows the filament to be kept hot during the time it is not being used for measurement This avoids the type of incorrect measurements made due to degas...

Страница 80: ...his step by pressing the L key The switching functions are inactive in the halt state d If the Emission error message appears increase the off limit in steps of 0 1 A Turn the Degas function off and on again after each step The measured value output at test socket mon and any AO channel assigned to the selected measurement CAUTION If the limit value is abnormally high channel continue to function ...

Страница 81: ...the QMU channelL and AO connectors The calculated pause time is displayed under amplif PAUSE It can be adjusted individually by the user from the same menu under the P CAL parameter IElP NOTE The minimum pause time is 1 ms It cannot be set lower than that with calibration fac sync A tor 0 0 connector Pause When the measurement channel is changed the unpro cessed signal for that channel not set to ...

Страница 82: ...the types of detectors that can be used Only FARAD and SEM can be used with config SIMUL lNTERN 6 9 1 Simulating a troubleshooting operation Some tests can be carried out very easily using the Simulation function Test of the entire signal path from Mass DAC to ADC Test of the switchover 1 10 by simulating a small peak such as mass 17 at RANGE 10 6 and 10 Simulated spectrum for air IE1P NOTE The sp...

Страница 83: ...HV 420 max 1 2 SI 16 HV 421 3 slots Pi 42O 2 measurement max 1 1 slot channels PE 420 1 measurement max 1 1 slot channel Power Voltage 110 220 VAC 20 Frequency 50 to 60 Hz Power consumption max 480 VA Fuses F1 F2 110 VAC 8 0 A slow blowing 250 V e5 20 mm 220 VAC 4 0 A slow blowing 260 V ø5 20 mm Type of protection IP 30 protection from foreign bodies 2 5 mm no protection against water Safety built...

Страница 84: ... 1 10 000 repeat Time to change measurement min 0 5 ms cycles in single and multi typ 0 8 ms channel operation max 2 ms Transient time pause time min 1 ms Mass scale resolution Fractions I mass Mass range 1024 16 u at SPEED 0 5 ms amu and 1 malamu 32 u at SPEED 2 mslamu and 5 mslamu Iles u at SPEED 2 10 ms amu Mass range 2048 1 16 u at SPEED 0 5 malamu and 1 ms amu 1 32 u at SPEED 2 2 mslamu 7 2 2...

Страница 85: ...c compare FILTER parameter in section 5 2 5 or fixed in one of the following possible steps 18 µs 85 µs 400 µs 1 I ms 8 ms 40 ms 180 ms 800 ms Filter step response Tea fes Filter time constant 83 of Vatati t 4 x7 Filter transient time for 1 o of Vstat lon counting operation Measurement speed Like the measurement value resolution the measurement speed is a function of the type of operation mass MOD...

Страница 86: ...1 0 10 2 0 10 6 40 101 2 s 5 0 10 1 0 10 3 20 101 Ss 2 0 10 4 0 10 1 28 10 10 s 1 O x 10 2 0 10 6 40 100 20 s 5 0 10 1 0 10 3 20 10 60 s 1 6 10 3 3 10 1 28 10 7 2 2 3 External input Measurement speed as for electrometer operation refer to section 7 2 2 2 Measurement range amplif GAIN 1 0 10 240 V IF S R amplif GAIN 1 0 10 240 V F S R amplif GAIN 10 0 1 024 V F S R amplif GAIN 10 O 1 024 V F S R Me...

Страница 87: ...ectors signal sources y FARAD Electrometer SEM Secondary electron multiplier CD SEM Secondary electron multiplier with high voltage conversion dynode H SEM Potential free secondary electron multiplier lON CNT lon counter EXTERN Extemal analog voltage Pl Pirani PE Cold cathode Penning Al Analog signal via Al module FARAD Electrometer SEM Secondary electron multiplier CH TRON Channeltron ON CNT lon ...

Страница 88: ...is switching function per measurement channel Cut off reaction time 1 ms after measurement is completed via DO 420 Integrator refer to section 7 2 2 6 7 2 2 8 Interfaces General Measured data buffer 256 kB RS 232 C general Pin assignments Zeromodem connection refer to section 7 2 2 9 and the operating in structions 61 Data transmission rate 300 1 200 2400 4800 9600 19200 bit s Baud rate selectable...

Страница 89: ...max Initialization at power on When the OMS 421 is turned on it sets the following interface pa rameters MODE CS 421 BAUD 2400 NODE 0 Both interfaces RS 232 C and LAN are open for the reception of configuration data independent of the format in which they work ASCII or binaryL NOTE When the control unit is operated via the interface the interface must be the first unit to be configured config CTRL...

Страница 90: ...5 Pin 7 Request To Send Pin 8 Clear To Send Pin 9 Ring Indicator view to oc view to oc AO connector Pin assignments OMH ONIE connector Pin 1 CHANNEL 1 D subminiature connector Pin 2 CHANNEL 2 25 pole female Pin 3 CHANNEL 3 Pin 4 CHANNEL 4 D subminiature Pin 5 CHANNEL 5 connector Pin 6 CHANNEL 6 25 pole male Pin 7 CHANNEL 7 Pin 8 CHANNEL 8 key connector Pin 9 CHANNEL 9 female multipoint 1 Pin 10 CH...

Страница 91: ...L RUN IN signals Pull up resistor 4 7 kO to 5 V sync etm mon and scan connectors sync connector Type Digital output Signal level TTL Output impedance 1 kO scan connector Type Analog output Signal range 0 10 24 V Output impedance 2 200 O short circuit proof elm Type Analog output mon connectors Signal range O 10 24 V Output impedance 2 x 200 O short circuit proof AO connector Signal CHANNEL xx Type...

Страница 92: ...e CS 421 console Nr Warning Meaning comments 1 OP ERROR Operator error illegal entry 2 ONL Y A Parameter can only be changed with and i 3 MAX Entry higher than the maximum value 4 MIN Entry lower than minimum value 5 SYNTGIX Incorrect format 6 REMOTE Unit set to remote operation 7 CH SKIP Selected channel under aux STATE set to SKIP 8 EXTERN Control by external signal 9 HflROWARE Necessary hardwar...

Страница 93: ... GMS Contr NOVRAM defect Parameter memory defective 22 OMS Contr dual port RAM defect Access malfunction to OMS controller 23 OMS Contr buffer RAM defect Measured data memory defective 24 DSP EPROM defect Check sum set point 25 DSP dual port RAM defect Access malfunction to signal processor 26 Monitor DAC error For testing purposes only 27 Resolution DAC error For testing purposes only 28 AO DAC e...

Страница 94: ...n source supply 7 ERR 46 RF error QMH 400 OMH 410 warm up phase Wait until the generator has had time to warm up 10 11 RF generator malfunction Proceed according to the OPM for the RF generator 10 11 ERB 34 SEM error HV 420 HV 421 SEM high voltage sup Proceed according to the OPM for the ply overloaded or defective HV 420 81 or HV 421 9 ERR 35 CD error HV 421 CD high voltage unit overloaded Procee...

Страница 95: ... is in the analyzer If not troubleshoot for other causes Emission too low Increase emission current emiss EMISS For analyzers with SEM No high voltage Turn on the high voltage sem For analyzers with SEM High voltage too Increase the high voltage low detect SEM for high voltages de fined by measurement channels sem hv SEM VOLTAGE for high voltages not defined by measurement channels Field a is volt...

Страница 96: ...in the analy2er well insu Clean connector and feedthroughs ac lated collector to ilange is 1 GO cording to the OPM for the OMA 400 analyzer 15 Correct insulation error according to the OPMfortheOMA400 15 Condensed water in the electrometer or Carefully dry the electrometer and ana the analyzer connector lyzer flange with hot air not over 60 C The electrometer offset can only be adju sted for less ...

Страница 97: ...ers with SEM High voltage too increase the high voltage low detect SEM for high voltages de fined by the measurement channel sern hv SEM VOLTAGE for high voltages not defined by the measure ment channel Fuse F1 on the HV board has blown Replace fuse 12 Field axis voltage too low Increase the field axis voltage according to the OPM for the OME 125 quadrupole electronics 12 and the OMA 125 analyzer ...

Страница 98: ...densed water in the electrometer or Carefully dry the electrometer and ana the analyzer connector lyzer flange with hot air not over 60 C The electrometer offset can only be adju sted for less sensitive ranges Unsatisfactory peak shapes Low Emission 0 1 mA emission cannot Clean or replace the insulators according Unsatisfactory sensitivity be adjusted on the OME 12S to the OPM for the QMA 125 anal...

Страница 99: ...is set to interface Switch the system control to console sole but no reaction when operation operation keys are pressed config CTRL MODE CS 421 ERR 41 Parameter lost Battery in parameter memory is dead Contact Balzers Service for replacement ERR 26 Monitor DAC error ERR 27 Resolution DAC error These test routines require additional hardware and are only for use by BALZERS ERR 28 AO DAC error servi...

Страница 100: ... cause Correction ERR 3 stack overflow CS 421 console defective Contact Balzers Service for replacement ERR 4 idle error ERR 7 watchdog error ERR 14 Display RAM defect Contact Balzers Service for replacement ERR 15 EPROM defect config TEST CS EPROM T ERR 16 RAM defect config TEST CS RAM T EL La Signal processor Problem Possible cause Correction ERR 24 EPROM defect config TEST DSP EPROM T Contact B...

Страница 101: ...hen the unit is not housed in a control cabinet the filters must be cleaned from time to time The interval must be determined according to the opera ting conditions 9 1 2 Periphery components Note the information on maintenance given in the opera ting instructions for the particular unit see Appendix J OMS42100 opm Maintenance 103 ...

Страница 102: ... 360 T CS 421 console BG 442 340 T CS 421 C dummy front panel BG 442 345 T Conversion set OMS 421C OMS 421 without CS 421 console BG __ _ T Dummy backplate for one slot position BG 544 776 T Apparatus fuse F1 F2 4 0 AT 250 V e5 x 20 mm for 220 VAC B 4666 448 8 0 AT 250 V ø5 x 20 mm for 110 VAC B 4666 454 O subminiature adapter 25 pole male screw coupling female sliding coupling B 4720 787 CD Cover...

Страница 103: ...tandard Type 432 2 5 m B 4564 309 YP Schuko DIN Type 436 2 5 m B 4564 309 YT USA Type 439 1 2 5 m B 4564 309 YW UK GB Type UD 13 Al 2 5 m B 4564 309 YZ Europa apparatus connector for fabricating individual power cables B 4707 193 AA oMss21ag opm Spare parts accessories 105 ...

Страница 104: ...or range OMA 400 OMA 410 OMA 430 OMH 400 1 OMH 400 5 OMH 410 1 OMH 410 2 OMH 410 3 0 128 O 300 0 340 O 512 O 1024 O 2048 Mass Analyzer Quadrupole electronics range OMA 125 OME 125 1 OME 125 2 O 200 Analyzers can be equipped with different ion sources and detectors The combination of ion source and detector determines the types of operation possible Control units for analyzers equipped with an SEM ...

Страница 105: ...operation Analyzer with Faraday detector A 1 Analyzer with Faraday and standard SEM QC421 IS420 HV420 NOTE When an HV 421 is used instead of an HV 420 see test report the HV connector must be fitted with a shorting plug The CD connector remains open ...

Страница 106: ...is connected B2 lon counting operation with standard SEM for positive ions possible also with Faraday QC421 IS420 HV42 I QMH MA QC HV 6 EP112 EP FA 3P NOTE When an HV 421 is used instead of an HV 420 see test report the HV connector must be fitted with a when no electrometer is connected shorting plug The CD connector remains open ...

Страница 107: ...er 1 lon source supply 3 m BG 548 082 T lon source supply 10 m BG 548 083 T 2 SEM high voltage 3 m BG 541 978 T SEM high voltage 10 m BG 541 979 T 3 Control cable 3 m 4 Control cable extension 7 m BG 448 175 T 5 RF line 0 7 m BG 541 960 T 6 Field axis 0 7 m BG 541 962 T 7 Electrometer signal 0 8 m 8 Electrometer input 0 1 m BG 548 152 T Electrometer input 0 5 m BG 548 153 T 9 lon counter cable 3 m...

Страница 108: ...EIALZERG EO c System cabling C1 Electrometer operation Analyzer with Faraday CIC 421 QME 125 l en HV EP 112 QMA 125 Analyzer with Channeltron CIC 421 HV EP112 110 Appendix QMS421gg opm ...

Страница 109: ...mAt zget Analyzer with 90 SEM a Faraday operation QC421 QME 125 QME 4 3 EP112 EP QMED QMS421gg opm Appendix 111 ...

Страница 110: ...overview Connection no Purpose Cable length Order number 1 Communicati cable 100 m BG 448 171 T 2 3 Control cable cable set 1 5 m BG S74 688 T 4 Communication cable 30 200 m on request 5 Control cable 3 m BG 548 729 T Use connections 2 and 3 instead of connection 1 in conjunction with the QMU 112 114 AppendiX QMS421ggspm ...

Страница 111: ... FILTER amplif AUTO FIRST mass 0 00 GAIN amplif x1 INTEGRATOR ioteg LEVEL A trip 1 00 E 6 LEVEL B trip 1 00 E 5 LOCK IN detect OFF LOG DEC output 3 DEC MASS mass 18 00 MODE amplif FIX MODE mass SCAN N MONITOR output LIN OFFSET amplif 0 00 O RNG output E 1 P CAL amplif 1 0 PE CTRL detect OFF PHASE detect 0 PFCH detect 0 QMU CH detect 0 RANGE amplif E 5 RANGE L amplif E 9 RESOL mass 50 SEM detect SE...

Страница 112: ...ter Parameter Function Default valle Your settirgs Axial CB Grid SPM Spec I E PROT emiss 4 00 A 4 00 A 4 00 A 4 00 A 4 00 A EMISS emiss 1 00 mA 1 00 mA 1 00 mA O SO mA 1 00 mA V1 vi v6 90 V 90 V 90 V 40 V OV V2 v1 v6 70 0 V 70 0 V 70 0 V 40 0 V 0 0 V V3 v1 v6 20 0 V 20 0 V 0 0 V 0 0 V 0 0 V V4 vl v6 15 V 15 V 15 V 3 V OV V5 vt v6 0 V 250 V OV 0 V OV V6 vi v6 300 V 300 V 300 V 110 V OV V7 v7 0 V OV...

Страница 113: ... TO SET ion src SET 0 CYCLES cycle REPEAT D EMIS ion src 10 0 mA D PROT ion arc 3 00 A D TIME ion src 10 min END cycle 63 FILAM ion src 1 FIL1 ion arc O FIL2 ion arc 0 FUNCT cycle CYCLE MODE cycle MONO MODE ion arc NORMAL SEM VOLTAGE sem hv 1500 V TRIG cycle INTERN TYPE ion src xxxxx OMs421eo opm Appendix 117 ...

Страница 114: ... Bit 2 Bit 1 Bit O 11111 I I i O mass number entered is ok 1 MASS is too low 0 mass number entered is ok 1 MASS is too high 0 mass number entered is ok 1 Intensity not reduced to 2 a MASS too low O Intensity inside the allowed range 1 Intensity out of range higher or lower than F S 4 O Intensity inside the allowed range 1 Intensity lower than selected level 118 Appendix OMes21eo ...

Страница 115: ...tus 01010 Status 4 01100 F S F S F S F S MASS MASS MASS MASS Correction Increase Correction Increase Correction Increase Correction lacrease RANGE RANGE RANGE RANGE increase decrease increase MASS MASS MASS Status 10000 Status 10001 Status 10010 Status 10100 Level Level Levd Level Imax Imax Imax lmax I I I I MASS MAss MASS MASS Correction Decrease Correction Increase Correction Decrease Correction...

Страница 116: ...ge 0 Intensity within the allowed range 1 intensity out of range higher or equivalent than F S O Intensity within the allowed range 1 Intensity lower than the selected level Examples of unsuccesful Adjust runs Status 00001 Status OK 00000 Peak found Adjust successful Status 00001 No peak found but intensity ok Status 01000 Peak found but intensity out of range Status 4 01001 No peak found intensit...

Страница 117: ...power supply Disconnect the cable from the OC 421 Loosen the fixation screws and pull out the QC 421 Depending on the type of option being installed remove the appropriate connector cover on the OC 421 Mount the option as shown in Figure 1 Plug in the ribbon cable Push the OC 421 back into the chassis and tighten the fixation screws Reconnect the cable to the OC 421 Fig 1 OMs42toa opm Appendix 121...

Страница 118: ...t panel and unplug the ribbon cable Fig 2 Remove the terminal cover in the power supply Fig 3 To convert 220 V 110 V Insert jumper To convert 110 V 220 V Remove jumper Fig 4 Remount terminal covern Plug in the ribbon cable remount the front panel and screw it down Fig 2 Remount and screw ín the cover and floor panels Replace fuses F1 and F2 220 V 110 V 4 0 A slow blowing 8 0 A slow blowing 110 V 2...

Страница 119: ...for cycle Parameter Characteristic element or factor Parameter set As used in the colored sections of these operating instructions The possible settings for parameters defined as settings Parameter values As used in the calored sections of these operating instructions The values that can be assigned to parameters that can be defined with values Called with a softkey after a function has been selec...

Страница 120: ...y of Liechtenstein EBO EBO 400 i 14 Operating instructions 6 Operating instructions CP 400 lon counter preemplifier OMG 421 OMG 421C OMG 4211 Ouadrupole BG 800 354 BE 1st edition 8 1990 mass spectrometer Interfaces Balzers Limited 9496 Balzers BK 800 173 BE 1st edition 2 1992 Principality of Liechtenstein Balzers Limited 9496 Balzers 400 Pancipality of Liechtenstein 1 5 Operating instructions QMA ...

Страница 121: ...htenstein ULJ LaJ 2 I Operating instructions Pl 420 Pirani module BG 800 182 BE 2nd edition 1 1990 Balzers Limited 9496 Balzers Principality of Liechtenstein LEJ E 22 Operating Instructions PE 420 Cold cathode module BG 800 183 BE 2nd edition 1 1986 Balzers Limited 3496 Balzers Principality of Liechtenstein Oil 23 Operating instructions OMU 112 Ouadrupole multiple er BG 800 208 BE 3rd edition 1 19...

Страница 122: ...lling in a rack 10 elm 92 93 Options 121 LAN 10 92 Periphery components 10 mon 92 93 RS 232 TO 92 N scan 92 93 Mains power connection 9 17 85 sync 92 93 Maintenance 103 Mains power see MAINS POWER CONNECTION Malfunctions Contrast 16 general 96 D Measure Display seeDisPLAY Modules see EXPANSlONUNITS DANGER see SAFETY INFORMATION Detault parameter values 115 N Display 14 86 NOTE see SAFETY INFORMATI...

Страница 123: ...EMISS 40 RANGE Parameter AMP 32 END 40 RESET Parameter lNlT 44 EPROM Tu Parameter TEST CS 421 56 RESOL 51 EPROM T Parameter TEST DSP 66 RS 232 Parameter TEST SERVICE 57 EPROM To Parameter TEST QMS 57 SELF SELF CH Parameter TEST SERVICE 57 EXTRACT see VS SEM FIL Parameter CTRL 36 F AXIS see V4 SEM VOLTAGE 52 F S F S Parameter TEST SERVICE 57 SEM 51 FIL1 FIL2 41 SERVICE Parameter TEST 57 FILAM 41 SE...

Страница 124: ...9 113 114 Electrometer operation 107 110 lon counting operation 108 113 Using the QMU 112 and QMN 112 114 System overview Expansion units 8 Options 8 System components 6 T Technical data 85 Test sockets elm mon scan sync 10 Troubleshooting control unit 101 V Version of programm 5 W Warnings 94 128 Appendix OMs421go opm ...

Страница 125: ......

Страница 126: ...almora Akilongemellschaft FL 0498 Bolrors Fùtslentum Liochtonstein TalO75 44 11 Tolox089786bvail Tolofn O75 427S1 Printed in Machtensmin Products et Meers AG Dettere SpecifËcations subloci to hango without notice ...

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