Asyst Technologies VersaPort 2200, Техническое руководство

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Page 50 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 3: Diagnostics and Troubleshooting
Error Messages
a
Error Messages
This section provides a list of error messages, which a terminal or computer displays,
where the ISIM software program is running, assuming that the VersaPort has a computer
connected to it. If a problem occurs
Table 6 and Table 7 shows the displayed messages.
NOTE . . .
T
HE MESSAGE TEXT LISTED IN
Table 6 and Table 7
MAY NOT BE THE EXACT
TEXT THAT THE COMPUTER MONITOR OR TERMINAL DISPLAYS
.
T
ABLE
6 Recoverable Errors (ALCD =6)
Error Message Cause (Recovery)
“Indexer Busy” VersaPort is performing or attempting to perform some command. (Wait for busy
condition to clear.)
"Pod removed" The Pod-In-Place switch is not depressed.
"Aborted by user" User sent a command to abort the Load or Unload process. (Re-send command.)
"Cassette not present" As the Pod is opened during a load cycle:
a) The laser slot sensor did not detect the cassette (if the sensor is turned on).
b) The reticle sensor did not detect any cassette on the Pod door (if the slot sensor is
turned off). (Auto return to Home)
"Cassette present" The Pod is opened during an unload cycle and a cassette was detected by either the
slot sensor or the reticle sensor
T
ABLE
7
Non-Recoverable Errors (ALCD =5)
Error Message Cause (Recovery)
“Port Door failed to open”
After the
Port Open
command is sent, the elevator down-limit
switch is not activated within the allowable time limit.
"Port door failed to close"
After the
Port Close
command was sent, the elevator up limit
switch was not activated within the allowable time
"Port hold-down failed to open"
After an
Unlatch Pod
command is sent, the Pod hold-down
unlatched limit switch is not activated within the allowable time.
"Port hold-down failed to open"
After an
Unlatch Pod
command is sent, the Pod hold-down
unlatched limit switch is not activated within the allowable time.