Anest Iwata DVSL-100C, Инструкция по эксплуатации

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For safe operation
CAUTION
Start or stop
after closing
isolation valve
Danger of vacuum break and
pollution
Be sure to close isolation valve between
vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the
open position can draw back gas and
debris attached to inside of pump to
vacuum chamber due to pressure
differential, resulting in vacuum break and
pollution on vacuum chamber side.
B e w a r e
t e m p e r a t u r e
o f i n t a k e g a s
Danger of exceeding permissible
temperature of intake gas
If intake gas temperature is over 50
℃
, be
sure to install a chiller or trap between
vacuum pump and vacuum chamber so
that gas intake temperature of vacuum
pump keeps below 50
℃
. If not, vacuum
pump temperature can increase, resulting
in failure.
Operate while
opening air-flush
port
Danger of remaining moisture
When evacuating moisture, be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port is
closed, condensed moisture will remain
inside vacuum pump and cause failure.
Caution after
exhausting vapor
Danger of insufficient vapor
exhaust
After evacuating vapor, do air-flush
operation for at least one hour. If you close
air-flush port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Beware of intake
gas volume
Danger of exceeding permissible
intake gas volume
When sending N
2
gas or dry air into
air-flush port, pressure should be the
same as atmospheric pressure and flow
rate should be less than 10NL/min. If not,
it can increase pressure inside vacuum
pump, resulting in failure.