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PortaSens 

III

 

 

Portable Gas Leak Detector, Model D16 

 

Operation and Maintenance Manual     
Rev-A Feb 2018

 

 

- 60 - 

 

Symptom 

Possible Cause and Corrective Action 

Alarm slow to clear 

Check that the sensor “Damping” value is set below 20.  If so, the 
sensor may have been exposed to a high concentration of target 
gas.  If so, it will require an extended period of time for to recover.  
Leave the device running while sample zero air.  If the condition 
does not clear after 6 hours, replace the sensor or contact ATI 
Service Department. 
Another possibility (although, uncommon) is that the sensor has 
been incorrectly calibrated, and the reading is no longer accurate.   
Verify the readings using certifiable zero and span gas sources. 

USB port not working 

The D16 may not be able to operate from an unpowered USB hub, 
or a hub on the front panel of a PC.  Move to a different USB port. 

Windows reports, “USB Driver 
Not Installed” 

When the D16 is first connected to a USB host, operating systems 
like Microsoft Windows will install a proper USB Mass Storage 
Device driver and enable it.  This normally takes under 4 seconds, 
after which, the D16 powers on its LCD and displays the “USB 
Mode” page.   
 
If the host reports the driver was not installed, it usually means a 
driver 

was

 installed, but that the port may have momentarily reset 

the D16 (which made it appear to lose communication).  Remove 
and re-plug the USB connector. 

·

  Move the USB connection to a different USB host port, or a 

different PC. 

·

  Replace the USB cable. 

 
This should correct the problem and the host should display the 
contents of the D16 drive reliably from then on. 

 
 

General Corrective Actions 

Troubles often stem from a few common causes.  Performing the steps 

below may help to quickly diagnose, isolate, and resolve issues. 

 

1.

 

Re-start the D16. 

2.

 

If operating from a battery, 

a.

 

Clean the battery contacts and reapply a good quality dielectric 
grease 

b.

 

Replace the battery 

c.

 

Change to a USB power source 

Otherwise, if operating from USB power, 

d.

 

Move to a different USB port, or to a USB wall charger.  USB ports 
located on the front of some PCs are usually hubs and power may be 
limited. 

3.

 

If none of the steps above resolve the problem, replace the sensor if one is 
available.  An H10 sensor rarely causes an electrical problem; however, 
contacts on the sensor may become contaminated. 

 

 

 

Содержание PortaSens III D16

Страница 1: ...ice Address Analytical Technology Inc 6 Iron Bridge Drive Collegeville PA 19426 ATI UK Limited Unit 1 2 Gatehead Business Park Delph New Road Delph Saddleworth OL3 5DE Phone 610 917 0991 800 959 0299 44 0 1457 873 318 Fax 610 917 0992 44 0 1457 874 468 Email sales analyticaltechnology com sales atiuk com ...

Страница 2: ... inspection for evidence of misuse abuse alteration improper storage or extended exposure to excessive gas concentrations Should inspection indicate that sensors have failed due to any of the above the warranty shall not apply The Manufacturer assumes no liability for consequential damages of any kind and the buyer by acceptance of this equipment will assume all liability for the consequences of i...

Страница 3: ...larms 26 DATA LOG 27 USB Mode 27 Directory Structure 28 File Structure 29 Configuring the Data Logger 30 PUMP 31 Pump Status 31 Configuring the Pump 32 SENSOR 33 Range 34 Blanking 34 Averaging 35 Configuring the Sensor 35 Calibration 37 Factory Calibration Services 37 Owner Calibrations 38 Pressurized Gas Sources 38 Sensor Calibration Steps 39 Calibration History 40 H10 Sensor Response Times 43 Ga...

Страница 4: ...________________________________________________________ 13 Figure 11 Main Display page indications example __________________________________________________ 14 Figure 12 Data log control button ________________________________________________________________ 17 Figure 13 Adjusting brightness by swiping ________________________________________________________ 18 Figure 14 Meter styles Normal a an...

Страница 5: ...s Sample Measure Self timed sample measure mode for repeatable readings Real Time Clock Battery backed accurate to approximately 1 minute per year Input Output USB 2 0 MSD Class interface with 1m mini USB cable Power D cell battery rechargeable NiMH 10 000mAH 10 12 hours continuous operation 90 days shelf life fully charged no sensor Alternate D cell alkaline External charger required available op...

Страница 6: ...ts The following items are included o D16 PortaSens III Portable Gas Leak Detector Figure 1 o 2 D cell NiMH batteries o Sampling wand Figure 2 o Outlet tube barbed fitting Figure 2 o Sensor Keeper1 Figure 5 o Flow meter Figure 6 o Storage case o USB Cable o Calibration T 1 H10 sensors are normally ordered separately ...

Страница 7: ...PortaSens III Portable Gas Leak Detector Model D16 Operation and Maintenance Manual Rev A Feb 2018 7 Reference Drawings Figure 1 PortaSens III front view ...

Страница 8: ...PortaSens III Portable Gas Leak Detector Model D16 Operation and Maintenance Manual Rev A Feb 2018 8 Figure 2 PortaSens III rear view ...

Страница 9: ...PortaSens III Portable Gas Leak Detector Model D16 Operation and Maintenance Manual Rev A Feb 2018 9 Figure 3 PortaSens III right side view ...

Страница 10: ...Leak Detector Model D16 Operation and Maintenance Manual Rev A Feb 2018 10 Figure 4 H10 gas sensor module ordered separately Replace Battery every Six 6 Months 00 0981 H10 Sensor Keeper Figure 5 Sensor Keeper Figure 6 Flow meter ...

Страница 11: ... a rechargeable NiMH D cell battery The battery should be removed and charged in an external charger after each use The battery is not used or even required when the device is connected to a USB port Inlet and Outlet Ports The inlet port located on the manifold lid is fitted with a quick disconnect fitting to connect the flexible wand see Figure 2 on page 8 The wand can be used for probing closely...

Страница 12: ...Versions Most H10 sensors are electro chemical cells which require stabilization time prior to use When installed in a D16 sensors will remain stable as long as the battery is charged Sensors may be left in the D16 but be sure to put a freshly charged battery into the unit every 2 or 3 weeks when not in regular use The D16 is supplied with a separate Sensor Keeper which keeps sensor ready to use i...

Страница 13: ...h the menu system by touching the Menu button D16 pages are normally presented on a dark background Pages depicted below appear on a white or light colored background to improve readability Startup Install a gas sensor module connect the sampling wand and hold the Wakeup switch down for one second D16 displays the pages shown below LCD and CPU revision levels and serial number Times out after four...

Страница 14: ...s concentration reading appears at the center of the display in a large easy to read font along with the chemical name units of measure nits of measure and gas temperature The gas name and units of measure are fixed based on the design of the sensor Settings in the sensor memory affect the behavior of the gas reading In particular the sensor s full scale range setting Range controls the maximum di...

Страница 15: ...anger Warning and Caution which are indicated on the Main Display only When a gas level alarm occurs the beeper sounds and the alarm name and indictor blink on and off Touching the display silences the beeper and causes the name and indicator to remain on steady until the alarm condition subsides The table below summarizes the alarm indications on the Main Display See Alarms on page 24 for details...

Страница 16: ...an be used to approximate the level of charge remaining Table 3 Battery indications Indication Description Hours Remaining NiMH Bat 1 25v 10 11 Bat 1 20 1 24v Bat 1 15 1 19v 5 6 Bat 1 10 1 14v Bat 1 05 1 09 Low Bat 1 05 Shutdown imminent Device powered by USB connection battery disabled Starting from fully charged state as instructed by the supplied optional charger Status Messages Battery and pum...

Страница 17: ...ouching the Off button places the D16 into a low power shutdown mode The H10 sensor remains powered on but the CPU and LCD display are disabled Holding the Wakeup switch down for one second or replacing the battery will restart the D16 Menu The Menu button is the entry point for accessing configuration settings other operating modes Log The Log button toggles the data logger on and off as indicate...

Страница 18: ...ightness When the D16 starts brightness is set to a default level and may be adjusted on any page by swiping a finger across the display left to right to increase brightness or right to left to decrease brightness The new value may be permanently saved as the default brightness setting see Configuring the Display on page 21 Figure 13 Adjusting brightness by swiping Increasing the display brightnes...

Страница 19: ...tion alarm is normally used to indicate excessive sensor drift and is not represented The other meter style is FS which presents the full scale range of the sensor Range a b Figure 14 Meter styles Normal a and FS b To enable the Normal meter display the alarm types and levels must conform to one of the rules listed in Table 5 Otherwise the FS meter style will be presented Table 5 Alarm setting rul...

Страница 20: ...continue to sample generate readings and log data without the display powered on which will normally have a significant effect on the operational time The display is repowered when one of the following occurs 1 Gas level alarm 2 CPU trouble see Trouble on page 57 3 Wakeup switch press 4 Power interruption battery removed and reinstalled 5 USB connected to or disconnected from a host or charger Thi...

Страница 21: ...Display Menu page as shown on the right Display Brightness On the Display Menu page touch the Bright button The numeric keypad control will appear and display the current value as shown on the right The value represents the default brightness only if it has not been adjusted by swiping It is suggested to adjust the brightness by swiping before entry then save the new value by touching Ok button To...

Страница 22: ...and return without saving Setting range Dark default better for indoor and night use Light better for outdoor use Main Display Meter On the Display Menu page touch the Main Display button and then touch the Meter button The spin edit control will appear and display the current value as shown on the right Touch the up or down arrow to change the setting then touch the Ok button to save it Touch the...

Страница 23: ...eturn without saving Setting range F C Menu Timeout On the Display Menu page touch the Menu Timeout button The numeric keypad control will appear and display the current value as shown on the right Use the keypad to enter the new value then touch the Ok button to save it Touch the Back button to close the control and return without saving Setting range 1 60 minutes Sleep On the Display Menu page t...

Страница 24: ...ing is at or above the programmed alarm level and is used to indicate an excess of toxic or otherwise dangerous gas A Low alarm is active when the gas reading is at or below the programmed alarm level It is used primarily to indicate oxygen deficiency and also used to indicate when a sensor may have drifted significantly below zero A Disabled alarm remains disabled until changed by user Table 8 be...

Страница 25: ...tration reading is at or above this level Oxygen sensors Warning is normally a low falling alarm and its level is set to 19 5 The alarm becomes active when the gas concentration reading is at or below this level Caution Alarm Toxic gas sensors Caution is normally a low falling alarm and its level is set to 10 of the full scale range This is intended to indicate excessive negative sensor drift a co...

Страница 26: ...t Touch the up or down arrow to change the setting then touch the Ok button to save it Touch the Back button to close the control and return without saving The value may be set to one of the following High active at or above the Level setting Low active at or below the Level setting Off alarm disabled Alarm Level On the Alarms Menu page touch the setting value in the Level column in the alarm s ro...

Страница 27: ...ching the Off button 3 Pressing the Wakeup button 4 Allowing the battery to run down below 1 bar 5 Removing the sensor 6 Removing the battery Stop the data logger before removing the sensor or the battery Make certain to set the D16 date and time See Configuring the Data Logger on page 30 to configure the interval for the data logger Gas readings are time stamped set the correct date and time befo...

Страница 28: ...d The year directory is at the top and log files appear in the month directories below it Filenames are simply the day of the month on which a collection of samples were taken with a csv extension Changing the date after logging has been started will change the file where readings are placed Be sure to set the correct date and time if necessary before starting the data logger The example in Figure...

Страница 29: ...es the Range of the sensor changing this setting while logging will create a new sensor information header Figure 7 below is an example of a data log file opened directly with Microsoft Excel Figure 17 Example data log file opened with Microsof Excel Device name and serial no Sensor first session Gas name full scale range units of measure part no model no gas no serial no Date Gas readings from th...

Страница 30: ...rent value as shown on the right Touch the up or down arrow to change the setting then touch the Ok button to save it Touch the Back button to close the control and return without saving The value may be set to one of the following On starts data logging Off stops data logging Clear clears data from the current day Data Logging Interval On the Logging Menu page touch the Interval button The numeri...

Страница 31: ...crease the transport time of gas to the sensor and will also decrease the battery life A flow meter is included in the accessory kit to verify the flow rate To use it connect the sampling wand and push the flow meter s tubing adapter onto the tip Hold the D16 so the meter is vertical and verify the flow rate is 250 400 cc min If required adjust the Duty Cycle setting in the Pump configuration menu...

Страница 32: ...age presents the current pump status Normal or Restricted the pump will operate at startup and will maintain 400cc min 0 85 SCFH Disabled the pump does not run even after the D16 is restarted Pump On Off Toggle On the Pump Control page touch the On Off button If the pump status was Normal it will be changed to Disabled Otherwise the control will be changed back to Normal Pump Duty Cycle On the Pum...

Страница 33: ...nsor Information page as shown in Figure 19 below This occurs at startup and when a sensor is installed and also on timeout from the Main Menu The page also appears by touching the Info button on the Sensor Menu page The D16 will display a trouble alarm whenever the sensor is removed and will automatically turn power off after 5 minutes See Trouble Messages on page 57 Figure 19 Sensor Information ...

Страница 34: ...on page shown in Figure 19 on page 33 Blanking Blanking refers to the method by which the device suppresses small reading fluctuations near zero It works by forcing the displayed reading to 0 when it is at or below the Blanking setting This also suppresses negative readings which occur when the cell output current drifts below its last zero calibration Un blanked readings are not suppressed and ar...

Страница 35: ...figuring the sensor Description Display Sensor Menu Page On the Main Display page touch the Menu button and then touch the Sensor button This will present the Sensor Menu page as shown on the right Range On the Sensor Menu page touch the Range button The numeric keypad control will appear and display the current value as shown on the right Use the keypad to enter the new value and then touch the O...

Страница 36: ...rol and return without saving Setting range The blanking value appears in the sensor s units of measure ie PPM and may be set from 0 to 10 of the Range value Changing the Range value changes the blanking value proportionally Averaging On the Sensor Menu page touch the Averaging button The numeric keypad control will appear and display the current value as shown on the right Use the keypad to enter...

Страница 37: ... sensitivity to decrease causing the D16 to produce readings lower than actual Span calibration updates the sensitivity value in memory which is then used when computing the gas reading Span calibration is recommended to be performed or checked once every 6 months This period may be extended to one year if the sensor is used infrequently and stored appropriately The concentration of the source gas...

Страница 38: ...O oxides of nitrogen and ozone may be higher in summer due to smog When in doubt use bottled zero air or Nitrogen required for O2 sensors when performing this procedure Pressurized Gas Sources Supplying gas to the device from a pressurized source requires a bypass T to be inserted between the source and the manifold Figure 20 below This is required to limit gas pressure on the intake side of the s...

Страница 39: ...easure and un blanked gas reading appear on this page so that you may double check your gas source and watch for a stable reading The page is displayed for at least 30 minutes without touching the display longer if the Menu Timeout setting is greater than 30 minutes This is normally enough time for a zero or span calibration Zero Calibration Navigate to the Sensor Cal page above Expose the sensor ...

Страница 40: ...o enter the known concentration of the gas source and then touch the Ok button to perform the span or touch the Back button to close the control and return without spanning Stop the flow of gas to the sensor Calibration History The H10 sensor has memory for 63 zero and 63 span calibration records Each record has the date of calibration and data pertaining to the type of calibration Zero calibratio...

Страница 41: ... decreases to 10 or lower Steps for viewing the calibration history are detailed in Table 15 below Table 15 Viewing calibration history Description Display Cal History Page On the Main Display page touch the Menu button followed by the Sensor button and then touch the Cal History button This will present the Cal History page as shown on the right The page presents calibration records on two contro...

Страница 42: ...ance Manual Rev A Feb 2018 42 Table 16 Viewing the Sensor Info page Description Display Sensor Info Page On the Main Display page touch the Menu button followed by the Sensor button and then touch the Info button This will present the Sensor Info page as shown on the right ...

Страница 43: ... digital damping by the device They are provided only for estimating the sampling period required for a representative reading Table 17 Gas response times Sensor Type Time to 66 seconds Time to 90 seconds OXIDANT SENSORS EXCEPT H2O2 20 60 HYDROGEN PEROXIDE 40 120S AMMONIA 30 120S CARBON MONOXIDE 10 30 HYDROGEN 20 60 OXYGEN 15 45 NITRIC OXIDE 10 20 PHOSGENE 70 300S HYDROGEN CHLORIDE 50 240S HYDROGE...

Страница 44: ... 18 Cross sensitivity factors Sensor Type NH3 CI2 O3 HF HCI HCN H2S SO2 CO H2 H2O2 O2 NO NO2 Hydride 4 SiH4 COCl2 H C NH3 0 05 0 005 CO 0 01 0 005 0 01 0 01 0 1 0 05 0 05 0 05 0 08 0 3 H2 0 002 0 01 0 01 0 0003 0 1 0 03 0 06 0 014 0 05 NO 0 08 1 5 0 4 0 08 0 1 0 09 0 04 2 0 0 1 0 8 O2 Cl2 0 5 1 2 0 05 0 2 0 4 1 0 0 01 0 1 0 2 0 1 O3 0 05 1 0 05 0 2 0 4 1 0 0 1 0 2 HCl 0 5 0 5 0 005 0 02 0 06 0 01 ...

Страница 45: ...y 1 1 for all hydrides Contact ATI for details if exact response is needed 4 Data in parenthesis refers to PPM versions of the hydride sensors relative to phosphine Response is not exactly 1 1 for all hydrides Contact ATI for details 5 The sensor column marked H C stands for hydrocarbon sensors These include ETO ethylene oxide formaldehyde alcohol acetylene and vinyl chloride sensors 6 Data in thi...

Страница 46: ...ric oxide Phosgene No simple test Must test with phosgene Hydrogen Chloride 2 drops of conc HCl in plastic bottle Hydrogen Fluoride Dry calcium hypochlorite or liquid bleach Hydrogen Cyanide Sodium bisulfite in plastic bottle Hydrogen Sulfide Sodium sulfide in plastic bottle Nitrogen Dioxide Dry calcium hypochlorite or liquid bleach Sulfur Dioxide Sodium bisulfite in plastic bottle Hydride Gases N...

Страница 47: ...nd Time The D16 contains a clock calendar chip that is accurate to within approximately 1 minute per year The clock is set at the factory and maintained by a dedicated battery so that it is unaffected by removing the primary battery The date and time appear on the Main Display and in data log files and should be set to local time prior to using the data logger Changing the date or time will not af...

Страница 48: ...ettings in the H10 sensor memory so the full scale range blanking averaging and alarm levels remain the same Configuring System Settings Table 20 Configuring system settings Description Display System Menu Page On the Main Display page touch the Menu button and then the System button The System Menu page will appear as shown on the right System About Page To view the About page touch the About but...

Страница 49: ...e Back button to exit without saving Date Format The format of the date changes when the Format button is pressed as shown to the right MONTH DAY YEAR Format DAY MONTH YEAR Format Time On the System Menu page touch the Time button The numeric keypad control will appear and display the current time as shown on the right Time is presented in the am pm format Use the keypad to enter the new value and...

Страница 50: ...ng When On is selected touching the Ok button will pop up the numeric keypad with the shutdown period displayed If necessary change the period and touch the Ok button to save it or touch the Back button to return without changing the shutdown period automatic shutdown will still be enabled Time period range 10 minutes to 18 hours Sound On the System Menu page touch the Sound button The spin edit c...

Страница 51: ...the date and time and restart the D16 On the System Menu page touch the Tools button and then touch the Restore Defaults button The spin edit control appears with Are you sure as shown on the right Touch the up or down button to select Yes and then touch the Ok button to restore the settings or touch the Back button to return without restoring Selecting Yes will perform the action and then restart...

Страница 52: ...suring appears during the second step while the reading is computed and filtered for another prescribed time interval to make certain the reading is sufficiently filtered This interval is determined by the Measure Time setting 3 Done appears at the conclusion of the second step and the reading is displayed and held 4 Clearing appears when the Ok button is touched until the reading falls below a co...

Страница 53: ...Ok button This will start the method and Sampling will appear on the display followed by Measuring and Done To Clear To clear the reading and end the method touch the Ok button after Done appears Clearing will appear and the fixed reading will be replaced with a live reading When the live reading is at or below the Clear Level the method will end and Off will reappear ...

Страница 54: ...10s 10m Measure Time On the Timed Sampling page see Table 21 above touch the Measure Time button The numeric keypad control will appear and display the current value as shown on the right Use the keypad to enter the new value and then touch the Ok button to save it Touch the Back button to close the control and return without saving Setting range 10s 10m Clear Level On the Timed Sampling page see ...

Страница 55: ...d through the configuration settings See Auto shutdown on page 47 to enable this feature USB Power The D16 is powered from the USB connection during data transfers and is even capable of normal operation Power may be supplied from a USB host or a USB charger with at least a 200mA rating Connecting USB power restarts the D16 even during normal operation The battery is effectively disconnected when ...

Страница 56: ...pped in the original kit and additional filters are available from the factory Battery Contacts The D16 is shipped with a high quality NiMH D Cell battery that should provide years of service Like many battery powered devices corrosion at the contact terminals or even the battery itself can lower the supply voltage The D16 battery contacts are coated at the factory with a dielectric grease to redu...

Страница 57: ... page Table 23 Trouble messages and corrective actions Trouble Message Corrective Action s LCD bus port error See General Corrective Actions LCD bus protocol error See General Corrective Actions LCD bus response error See General Corrective Actions LCD bus timeout See General Corrective Actions Gas sensor signal error See General Corrective Actions LCD bus error See General Corrective Actions SPI ...

Страница 58: ...ng the pump motor duty cycle control See Pump on page 31 NO PUMP The pump has malfunctioned or become disconnected Unfortunately there is no on site remedy for this problem Please call to return the unit PUMP OFF The pump has been permanently disabled by a setting change status message not a trouble User NVM1 CRC error See General Corrective Actions Factory NVM1 CRC error See General Corrective Ac...

Страница 59: ...llow with clean with deionized water Scrape or sand any large patches of corrosion and clean up any residue with 91 isopropyl alcohol Reapply dielectric grease to the battery contacts as outlined in Battery Contacts on page 56 If the D16 battery life does not match specifications perform the General Corrective Actions first Batteries have evolved over the years and so have battery chargers The opt...

Страница 60: ...it This normally takes under 4 seconds after which the D16 powers on its LCD and displays the USB Mode page If the host reports the driver was not installed it usually means a driver was installed but that the port may have momentarily reset the D16 which made it appear to lose communication Remove and re plug the USB connector Move the USB connection to a different USB host port or a different PC...

Страница 61: ...revious action to complete Sensor memory or configuration error The action resulted in an error in the sensor s non volatile memory Cannot perform this action The action is not supported in version of the D16 or H10 sensor Sensor input low The magnitude of the sensor signal is too low to complete the action Sensor input high The magnitude of the sensor signal is too high to complete the action Sen...

Страница 62: ...essage too long Noise low power or an internal failure has caused an internal data communication error Syntax error Same as above Invalid command Same as above Invalid missing or extra argument s Same as above Invalid register s Same as above Invalid service request Same as above Clock reset restore correct date and time The action cannot be completed until the date and time have been set Pump not...

Страница 63: ...ttery D Cell NiMH 29 0014 USB Cable A to Mini B 31 0216 Front Panel Overlay 34 0581 Bypass T 00 1088 Quick Disconnect Fitting 44 0096 Filter Disks pkg of 10 05 0038 Flexible Wand 03 0176 Flow Meter with Tubing Adapter 03 0107 Carrying Case 90 0009 USB Port Cap w mounting screw 03 0206 Battery Compartment Cap Assembly 03 0194 Port Barb Fitting 44 0123 ...

Страница 64: ...00 1005 EC Chlorine dioxide ClO2 200 1000 1000 1 PPM 00 1359 EC Fluorine F2 1 5 2 0 01 PPM 00 1006 EC Fluorine F2 5 200 20 0 1 PPM 00 1007 EC Hydrogen peroxide H2 O2 10 100 20 0 1 PPM 00 1042 EC Hydrogen peroxide H2 O2 200 2000 1000 1 PPM 00 1169 EC Iodine I2 1 5 2 0 01 PPM 00 1036 EC Iodine I2 5 100 20 0 1 PPM 00 1037 EC Ozone O3 1 5 2 0 01 PPM 00 1008 EC Ozone O3 5 200 20 0 1 PPM 00 1009 EC Ozon...

Страница 65: ...ne B2 H6 500 2000 1000 1 PPB 00 1026 EC Germane GeH4 10 200 10 0 1 PPM 00 1029 EC Germane GeH4 500 2000 1000 1 PPB 00 1028 EC Hydrogen selenide H2 Se 10 200 10 0 1 PPM 00 1031 EC Hydrogen selenide H2 Se 500 2000 1000 1 PPB 00 1030 EC Phosphine PH3 10 200 10 0 1 PPM 00 1033 EC Phosphine PH3 500 2000 1000 1 PPB 00 1032 EC Phosphine PH3 200 2000 1000 1 PPM 00 1034 EC Silane SiH4 10 200 10 0 1 PPM 00 ...

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