AML NGC3 Скачать руководство пользователя страница 5 | Manualshive

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AML NGC3 Скачать руководство пользователя страница 5

© Arun Microelectronics Ltd 2020. All rights reserved

Page 5

1.

Introduction

The NGC3 process controller is a high-accuracy Bayard-Alpert (BA) Ion Gauge controller that offers integrated pressure
measurement and process control. The controller operates from electrical supply voltages in the range 100 to 240 volts and
frequencies of 48 to 65 hertz.

The controller may be used with UHV Ion Gauges incorporating tungsten or coated iridium filaments. The controller can
operate two Ion Gauges sequentially, two AML Pirani Gauges and one Active Gauge-head via a standard RJ45 jack.

Four power relays for process control are provided as is an internal thermocouple amplifier for bakeout control.

1.1.

Scope of this manual

This manual provides installation, operation and maintenance instructions for the Arun Microelectronics Ltd Ion Gauge
Controller model NGC3. Please read this manual before attempting to install and operate the controller.

This manual contains essential safety information which supplements the safety features of the controller. Safety
procedures are highlighted as WARNING instructions by the symbol below. Failure to observe the instructions could result
in injury or death to persons.

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Содержание NGC3

Страница 1: ...NGC3 Ion Gauge Controller UHV Dual Bayard Alpert Ion Gauge Controller USER MANUAL ISSUE 20200326 For use with firmware version 7 x x...

Страница 2: ......

Страница 3: ...s 13 Ion Gauge Mode 14 Gauges 17 Relay assignment 19 Bake 19 Degas 20 7 Operation 21 7 1 Use of the Function Switch in the operating positions 21 7 2 Relay trip levels 21 7 3 Display sequence when the...

Страница 4: ...mand 31 14 7 State Error byte coding 31 14 8 Host Computer Command Characters 32 14 9 status Status report 33 15 Troubleshooting 34 15 1 Fan slow failed 34 15 2 Temperature 34 15 3 Emission Fault 34 1...

Страница 5: ...y two AML Pirani Gauges and one Active Gauge head via a standard RJ45 jack Four power relays for process control are provided as is an internal thermocouple amplifier for bakeout control 1 1 Scope of...

Страница 6: ...320 C14 Overvoltage category II Protection class 1 2 3 Environment Operating temperature 5 C to 35 C for specified performance Operation is inhibited at greater than 40 C Storage temperature 10 C to 7...

Страница 7: ...200 mBar 2 7 Active Gauge Suitable type Self powered or active gauge with 10 V full scale output Format selectable between linear 1 10 100 1000 mBar or Torr full scale or log 1 V decade 0 5 V at 1E 6...

Страница 8: ...nstruments are shipped with password protection disabled If you set a password you must record what it is The conditions set at manufacture assume that you do not require any interlocks and that the I...

Страница 9: ...ument is tolerant of and is compensated for operation at elevated ambient temperatures up to 40 C Long term accuracy and reliability will be enhanced by operation at the lowest possible temperature wi...

Страница 10: ...independently assigned to any gauge Contacts are rated at 5 A 240 V maximum The contacts of the relays are shown diagrammatically on the rear panel legend in the de energised condition adjacent to th...

Страница 11: ...t may be connected to each computer serial port a USB to RS232 serial adaptor may be required The connector is a 9 way D type female connector The pin numbering has been chosen so that a 9 way straigh...

Страница 12: ...ndividual LEDs either require a response by the user or indicate an error fault condition INC DEC and ENT are pushbutton switches with tactile feedback They select the format of pressure display modif...

Страница 13: ...mple in SETUP GAUGES you may change the filament in use without progressing through filament material overpressure etc If the instrument is waiting for a response from you then part of the display wil...

Страница 14: ...e immediately on command The chosen mode applies to both Ion Gauge 1 and Ion Gauge 2 Regardless of the selected mode the external inhibit signal on the AUX connector see section 12 is always respected...

Страница 15: ...r equal to the Interlock pressure then emission is prevented from starting if the Function Switch was just turned to an emission position or stopped immediately if emission was in progress and a warni...

Страница 16: ...tart gauge pressure and an Autostart warning message Emission will restart when the Autostart gauge pressure falls below the Autostart pressure External inhibit is not considered a fault If external i...

Страница 17: ...op emission When the external inhibit signal is present emission is suspended and the display alternates between showing the external inhibit gauge pressure and external inhibit warning message When t...

Страница 18: ...es Display Sequence Ion current in Amps will be displayed following numeric Ion Gauge pressure Pirani Gauges can be switched on or off Switching off suspends the operation of Interlock and Autostart f...

Страница 19: ...s are set to maximum on assignment Trip levels for relays are set using the TRIPS push button and can be modified when the Function Switch is at position IG1 OFF or IG2 Refer to section 7 2 for instru...

Страница 20: ...anged until manual degas has been run see section 9 and settings appropriate for your chamber and usage have been derived Quick Degas Set the maximum power used in quick degas Programmed Degas Set the...

Страница 21: ...evels or their assignment to Bake are displayed in sequence starting with Relay A and progressing to Relay D The next in the sequence is shown each time that you press ENT The status LED for the relay...

Страница 22: ...mB and prefixed with the less than character This may indicate the Active Gauge is not connected When log format is selected the pressure value is rounded according to the following rules P 1000 mB r...

Страница 23: ...tone at the suspected leak site If a pressure change is produced there may be a leak Allow the baseline restoration to restore the histogram and tone close to the centre before continuing probing Pres...

Страница 24: ...e filament reaches emission temperature the display shows the emission current If Interlock Autostart or Ext Inhibit is preventing emission from starting or a fault occurs the appropriate warning mess...

Страница 25: ...propriate If Auto Em is set to No the instrument will suggest when a manual change in emission current is appropriate It is not necessary to increase emission current until the collector current is le...

Страница 26: ...emission will not be interrupted unless degas is denied and degas will seamlessly start when the mode has been selected If the Ion Gauge is not in emission when degas is selected emission is run auto...

Страница 27: ...e time on the right of the display is in minutes and seconds In manual mode this is the time elapsed since the start of degas In other modes it is the time remaining until completion of degas Pressing...

Страница 28: ...s via a contactor If Relay D is not so assigned the display will prompt you to re assign Relay D If the password is enabled you are required to enter it If the entered password fails three times Bake...

Страница 29: ...it has to be combined with sensitivity and emission current to derive pressure 10 13 where is the recorder output voltage is the sensitivity and is the emission current in amps 12 External inhibit Op...

Страница 30: ...8 data bits 1 stop bit no parity no handshaking 14 3 Local remote control An NGC3 starts operation in local control i e using the front panel In local mode the NGC3 responds only to commands without...

Страница 31: ...All other commands are processed by the NGC3 without a response being issued 14 6 Timing of Next Command Following the transmission of a poll or status command the host computer should not begin tran...

Страница 32: ...NGC3 e g C0 release R 0 Return NGC3 to local control e g R0 reset error E 0 Reset all error flags e g E0 status S 0 Request a report of operating status for all gauges e g S0 Gauge on i 0 n Switch on...

Страница 33: ...irani 1 3 Pirani 2 4 Active Gauge 5 Ion Gauge 2 4 Gauge status All bits are set to 0 unless stated otherwise Ion Gauge Status Bit 0 gauge in emission Bit 1 0 Bit 2 gauge controlling bakeout Bit 3 gaug...

Страница 34: ...id to ground short magnetic or electric fields an unsuitable filament loss of filament coating or incorrect setup of filament type When using Yttria filaments if the filament worked previously then th...

Страница 35: ...rial number of the instrument and the version number of the program Provide a written description of the problem If the problem is related to gauges and leads quote the serial numbers and filament typ...

Страница 36: ...significant in relation to the true ion current the gauge ceases to function as a reliable pressure transducer and is said to have reached its X Ray limit A 2 Pirani Gauges The Pirani Gauge is a ther...

Страница 37: ...ribed above is in conformity with the relevant European Union harmonisation legislation Directives 2014 30 EU EMC Directive 2014 35 EU Low Voltage Directive 2011 65 EU RoHS Directive Standards Harmoni...

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