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Alicat Scientific MC Series, Руководство по эксплуатации

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34

FLOW

Process

Vacuum Source

Inverse Mass Flow (or Volumetric Flow)Control with Vacuum

Process

Gas Source

Vacuum Source

Flowing Absolute Pressure Control

Back-Pressure Control

Positive Pressure Control

FLOW

Process

Gas Source

Vacuum Source

Bidirectional Mass Flow (or Volumetric Flow)Control

FLOW

FLOW

Closed Process

Gas Source

Atmosphere or Vacuum

Dead-Ended Absolute Pressure Control

FLOW

Содержание MC Series

Страница 1: ...Precision Gas Mass Flow Controllers The Fastest Flow Controller Company in the World Operating Manual MC Series MCS Series MCR Series WHISPER MCV Series ...

Страница 2: ...ation see page 51 ACCESSORIES Now that you have your Alicat instrument are you sure you ve got everything you need Alicat accessories can make your job easier Many of our customers also order Power Supplies A universal wall power supply that makes it easy to power your Alicat unit just about anywhere in the world BB9 Alicat s multi drop box that allows easy connection of up to nine Alicat instrume...

Страница 3: ...lve and are built for use with applications that require tight shut off MCE Series Mass Gas Flow Controllers MCE Series Flow Controllers are built with a proportional valve positioned within the base of the unit MCD and MCRD Series Dual Valve Mass Gas Flow Controllers MCQ and MCRQ Series High Pressure Mass Gas Flow Controllers Unless otherwise noted the instructions in this manual are applicable t...

Страница 4: ...ut Signal 11 Information for Alicat TFT Color Display Instruments 13 DISPLAYS AND MENUS 14 MAIN 15 Gas Absolute Pressure 15 Gas Temperature 15 Setpoint 15 Volumetric Flow Rate 15 Mass Flow Rate 15 Flashing Error Message 16 Choosing Engineering Units from Main Mode 16 SELECT MENU 17 CONTROL 18 Setpoint Source 18 Loop Variable 19 PID Tuning 20 ABOUT 22 DEVICE INFO 22 MFG INFO 22 DEVICE STATE 22 TARE...

Страница 5: ...oting 49 Maintenance and Recalibration 51 Option Totalizing Mode 52 Option Remote Electronics 54 Option Remote Panel Display 54 Accessory BB9 Multi Drop Box 55 Accessory Flow Vision SC 56 Accessory Flow Vision MX 56 Accessories 57 MC and MCR Technical Specifications 59 WHISPER Technical Specifications 65 MCV MCVS Technical Specifications 70 MCP Technical Specifications 72 MCE Technical Specificati...

Страница 6: ...s MC Series can usually be mounted in any position Large valve controllers MCR Series may be mounted in any orientation in fixed installations For airborne installations orient the axis of the valve parallel with the longitudinal axis of the aircraft This will minimize inertial coupling to turbulent flight conditions No straight runs of pipe are required upstream or downstream of the controller In...

Страница 7: ...ream and flow body Do not use pipe dopes or sealants on the process connections as these compounds can cause permanent damage to the controller should they get into the flow stream When changing fittings carefully clean any tape or debris from the port threads We recommend the use of in line sintered filters to prevent large particulates from entering the measurement head of the instrument Suggest...

Страница 8: ... 5Vdc 10Vdc or Basic Alarm Brown 3 Serial RS 232RX RS 485 Input Signal receive Red 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Setpoint Input Orange 5 Serial RS 232TX RS 485 Output Signal send Yellow 6 0 5 Vdc or optional 0 10 Vdc Output Signal Green 7 Power In as described above Blue 8 Ground common for power communications and analog signals Purple Note The above pin out is app...

Страница 9: ...roviding setpoint to controllers Optional 0 10 Vdc If specified at time of order a 0 10 Vdc input signal can be applied to pin 4 with common ground on pin 8 Optional 4 20 mA If specified at time of order a 4 20 mA input signal can be applied to pin 4 with common ground on pin 8 NOTE This is a current sinking device The receiving circuit is essentially a 250 ohm resistor to ground NOTE 4 20mA outpu...

Страница 10: ...ils on accessing RS 232 RS 485 input DB9 to Mini DIN Connection for RS 232 RS 485 Signals Electrical Connections and Basic Wiring http www alicat com support instructional videos 9 8 7 6 9 8 7 6 1 5 3 2 4 1 5 3 2 4 Serial Cable End PC Serial Port 1 8 7 6 5 4 3 2 8 Pin MiniDIN Cable End 8 Pin MiniDIN Connector 9 Pin Serial Connection 8 Pin MiniDIN Connection Pin Function Function Pin 5 Ground Groun...

Страница 11: ...ange Ground for this signal is common on Pin 8 Optional Current 4 20 mA Output Signal If your controller was ordered with a 4 20 mA current output signal it will be available on Pin 1 See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered The current signal is 4 mA at 0 flow and 20 mA at the controller s full scale flow The output current is...

Страница 12: ...connect this device to loop powered systems as this will destroy portions of the circuitry and void the warranty If you must interface with existing loop powered systems always use a signal isolator and a separate power supply 5 3 2 Purple Red Yellow Purple Red Yellow 5 4 3 2 1 9 8 7 6 Unit C Unit B Unit A Female Serial Cable Front Purple Ground Red Yellow ...

Страница 13: ...8 of the device s specifications YELLOW Yellow is the equivalent of the selection arrow on the monochrome display LCD Contrast LCD contrast is ranged from 0 to 11 on color displays with 11 being the greatest contrast Technical Data for TFT Color Display Meters Gauges and Controllers The following specifications are applicable to Alicat TFT color display meters gauges and controllers only All other...

Страница 14: ...alizer option page 52 pushing the TOTAL MENU button once will bring up the Totalizing Mode display Pushing MENU MAIN will bring up the Select Menu display DISPLAYS AND MENUS ThedevicescreendefaultstoMaindisplayassoonaspowerisappliedtothecontroller Note See page 31 to rotate the display 180 Select Menu From Select Menu you can change the selected gas interact with your RS 232 RS 485 settings read m...

Страница 15: ... located in the lower left of the display It is moved to the primary display by pushing the button below CCM in this example Your display may show a different unit of measure Pushing this button again will access a list of selectable engineering units Mass Flow Rate The mass flow rate is the volumetric flow rate corrected to a standard temperature and pressure typically 14 696 psia and 25 C This p...

Страница 16: ... SET WILL AFFECT DISPLAY AND SERIAL VALUES VERIFY CONNECTED SERIAL DEVICES EXPECT THE CHANGE SELECT CANCEL Show baro pressure DOWN UP Set button eng units Set device eng units Show gauge pressure Show abs pressure SELECT CANCEL DOWN UP Set device eng units Set button eng units SELECT CANCEL DOWN UP Show device eng units Set button eng units C Air Flow Temp 24 38 SETPT C 24 38 BARO 704 0 F air Flow...

Страница 17: ...reen An explanation for each screen can be found on the following pages CONTROL TARES ADV SETUP MAIN ABOUT C 21 50 0 00 CCM MENU SETPT 0 000 SCCM Air PSIA 13 60 0 00 SCCM BASIC CONFIG DEVICE STATE BACK MAIN MFG INFO DEVICE INFO COMM SETUP BACK MAIN SENSOR SETUP LOOP VAR BACK PID MAIN SETPT SOURCE SETPT 0 00 DEVICE UNITS BACK MAIN STP NTP GAS N2 AUTO TARE ON BACK MAIN TARE PRESS TARE FLOW DISP SETU...

Страница 18: ...t Panel refers to a setpoint applied directly at the controller Front Panel input must be selected prior to changing the setpoint at the device Analog refers to a remote analog setpoint applied to Pin 4 of the Mini DIN connector as described in the installation section of this manual The standard analog input is 0 5 Vdc To determine what type of analog setpoint your controller has refer to the Cal...

Страница 19: ...s to move the arrow in front of the desired option When the mass flow controller is supplied with the control valve upstream of the electronics portion of the system the unit can be set to control on outlet pressure or volumetric flow rate instead of mass flow rate The change from mass to volume can usually be accomplished without much if any change in the P and D settings When you change from con...

Страница 20: ...owing page for descriptions of the PID Loop Types PID Control Algorithms P refers to the Proportional term of the PID loop I refers to the Integral term of the PID loop D refers to the Differential term of the PID loop Press P I or D Then use SELECT to choose the digit with the arrow and the UP and DOWN buttons to change the value Press SET to record your value Press CLEAR to return to zero Before...

Страница 21: ...on the square of the rate of change of the process value 2 The damping function is applied directly to the proportional error term before that term is used in the proportional and integral functions of the algorithm This provides a certain amount of look ahead capability in the control loop Because of these differences you will note the following 1 Increasing P gain can be used to damp out oversho...

Страница 22: ...E BACK MAIN MFG INFO DEVICE INFO DEVICE STATE This diagnostic screen displays the current internal register values which is useful for noting factory settings prior to making any changes It is also helpful for troubleshooting with Alicat customer service personnel Select the DEVICE STATE button from the ABOUT screen to view a list of select register values Pressing the PAGE button will cycle the d...

Страница 23: ...condition This feature makes the device more accurate by periodically removing any cumulative errors associated with drift It is recommended that the controller be left in the default auto tare ON mode unless your specific application requires that it be turned off AUTO TARE ON BACK MAIN TARE FLOW TARE PRESS CANCEL SET PRESSING SET WILL AFFECT DEVICE MEASUREMENTS VERIFY THAT THE CHANGE IS DESIRED ...

Страница 24: ... page 46 Fuel page 45 Laser page 45 O2 Concentrator page 46 Pure Corrosive page 40 Pure Non Corrosive page 39 Refrigerant page 40 Stack page 46 Welding page 42 Press PAGE to view a new page in the gas category list Press SELECT to view the gases in the selected category Align the arrow with the desired gas Press SET to record your selection and return to the MAIN display The selected gas will be d...

Страница 25: ... until CHANGE CASE is pushed again Press SET to save the name After naming the mix press ADD GAS and select the gas category and the component gas Select the digit with arrow and adjust the with the UP and DOWN buttons Press set to save Add up to 4 more gases as needed The total must equal 100 or an error message will appear GAS OPTNS allows you to adjust the percentage of the constituents or dele...

Страница 26: ...o select the custom mix as the current gas and return to the MAIN display MAIN SELECT MIXTURE CREATE SIMILAR COMPOSER USER MIX MyGas HAS BEEN SAVED CREATE NEW DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of Air 50 00 UP DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of Ar Argon 30 00 UP DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of He Helium 20 00 UP ADD GAS CANCEL SAVE GAS OPTNS COMPOSER...

Страница 27: ...ow Verify that all connected devices expect the change See pages 47 and 48 for a full list of available units DOWN BACK SELECT Mass Flow Volumetric Flow Pressure Temperature Mass Totalizer Totalizer Time UP DOWN CANCEL SET PAGE SCCM Scm3 h Sm3 h Sm3 d Sin3 m SCFH NmL s UP PRESSING SET WILL AFFECT DISPLAY AND SERIAL VALUES VERIFY CONNECTED SERIAL DEVICES EXPECT THE CHANGE SET CANCEL DEVICE UNITS MA...

Страница 28: ... flow is calculated this allows flows measured under different conditions to be compared by calculating them using a common set of conditions Use the UP DOWN buttons to select a catagory from the displayed list as shown Press CHANGE to access the parameter s display Now use the SELECT DIGIT and UP DOWN buttons to make your changes and press SET Once a selection has been made and recorded using the...

Страница 29: ...ging may be useful to make it easier to read and interpret rapidly fluctuating pressures and flows Pressure and flow averaging can be adjusted between 1 no averaging and 255 maximum averaging These are geometric running averages where the number between 1 and 255 can be considered roughly equivalent to the response time constant in milliseconds This can be effective at smoothing high frequency pro...

Страница 30: ...T is pressed See RS 232 Communications page 36 for information about the streaming mode BAUD Both this instrument and your computer must send receive data at the same baud rate The default baud rate for this device is 19200 baud PressBAUD Use the UP and DOWN buttons to select the baud rate that matches your computer The choices are 57600 38400 19200 9600 or 2400 baud Press SET to record the baud r...

Страница 31: ...o adjust the contrast Press SET when you are satisfied Press BACK to return to DISP SETUP Press RESET to revert to the default contrast level 10 ROTATE DISP Press ROTATE DISP and select Inverted 180 if your device is inverted The display and buttons will rotate together BACK MAIN LCD CONTRAST ROTATE DISP DISP SETUP LCD CONTRAST DOWN BACK CANCEL RESET SET UP 11 LCD Contrast DOWN CANCEL Defualt 0 In...

Страница 32: ...f valve incorporates a three way solenoid valve below See pages 70 and 71 for complete dimensions Air pressure is applied to one side of the solenoid valve while the other side of the solenoid is left open to atmosphere When the solenoid is energized air pressure is delivered to the shutoff valve allowing it to open When the solenoid is returned to a relaxed state air pressure is removed from the ...

Страница 33: ...source or to vacuum Control absolute pressure or back pressure in a flowing process Control absolute pressure in a closed volume with automatic venting Application examples are shown below and on the following page Please contact Alicat if you have any questions regarding MCD use FLOW Process Gas Source Mass Flow or Volumetric Flow Control MCD top view Process Connection Inlet Valve Outlet Valve M...

Страница 34: ... Gas Source Vacuum Source Flowing Absolute Pressure Control Back Pressure Control Positive Pressure Control FLOW Process Gas Source Vacuum Source Bidirectional Mass Flow or Volumetric Flow Control FLOW FLOW Closed Process Gas Source Atmosphere or Vacuum Dead Ended Absolute Pressure Control FLOW ...

Страница 35: ... enter the COM port number and baud rate of your Alicat device as prompted The COM port number may be determined using the Device Manager on the computer and the default baud rate of an Alicat device is 19200 Additional Programs that are compatible with Alicat products Alicat products are compatible with many serial communication type software packages including PuTTy and LabVIEW A brief set of in...

Страница 36: ...th software version 4v30 or newer Only one unit on a given COM port may be in streaming mode at a time To change a unit from Polling Mode to Streaming Mode type unit ID CR This is equivalent to changing the unit ID to If data does not appear check all the connections and COM port settings When sending a command to a unit in streaming mode the flow of information will not stop while the user is typ...

Страница 37: ...ted under the Setpt Source list in the control set up menu Method 1 Setpoint may be set as a floating point number in serial communication using the setpoint command unit ID S floating point number CR For example AS4 54 CR changes the setpoint for unit A to 4 54 in the current device units Method 2 The setpoint can also be set in reference to a portion of the full scale Type unit ID integer CR Val...

Страница 38: ... checking against older data sets such as the widely distributed Air Liquide data This may generate apparent calibration discrepancies of up to 0 6 of reading on well behaved gases and as much as 3 of reading on some gases such as propane and butane unless the standard was directly calibrated on the gas in question As the older standards are phased out this difference in readings will cease to be ...

Страница 39: ... 1 0005 6 H2 Hydrogen 89 15355 0 08235 1 0005940 83 969 0 0899 1 0006 17 Kr Krypton 251 32490 3 43229 0 9979266 232 193 3 7490 0 9972 2 CH4 Methane 110 75950 0 65688 0 9982472 102 550 0 7175 0 9976 10 Ne Neon 311 12640 0 82442 1 0004810 293 822 0 8999 1 0005 8 N2 Nitrogen 178 04740 1 14525 0 9998016 166 287 1 2504 0 9995 9 N2O Nitrous Oxide 148 41240 1 80888 0 9945327 136 310 1 9779 0 9928 11 O2 O...

Страница 40: ...7202 0 985328 33 Cl2 Chlorine 134 56600 2 93506 0 9874470 125 464 3 1635 0 98407 85 CH3OCH3 Dimethylether 90 99451 1 91822 0 9816453 82 865 2 1090 0 9745473 34 H2S Hydrogen Sulfide H2S 123 86890 1 40376 0 9923556 112 982 1 5361 0 9898858 31 NF3 NF3 Nitrogen Trifluoride 175 42500 2 91339 0 9963859 162 426 3 1840 0 9951506 30 NO NO Nitric Oxide 190 05950 1 22672 0 9997970 176 754 1 3394 0 9995317 36...

Страница 41: ...ethane 104 20190 4 21632 0 9742264 95 092 4 6509 0 9640371 108 R 143a Trifluoroethane 110 86600 3 49451 0 9830011 101 344 3 8394 0 9765755 109 R 152a Difluoroethane 100 81320 2 75903 0 9785245 91 952 3 0377 0 9701025 110 R 22 Difluoromonochloromethane 126 30390 3 58679 0 9853641 115 325 3 9360 0 9801128 111 R 23 Trifluoromethane 149 13160 2 88404 0 9922734 136 997 3 1568 0 9895204 112 R 32 Difluor...

Страница 42: ... 0 9988210 195 198 1 8215 0 9983605 20 C 25 25 CO2 75 Ar 206 97630 1 67658 0 9986652 191 436 1 8309 0 9981609 142 C 50 50 CO2 50 Ar 187 53160 1 71972 0 9977484 172 843 1 8786 0 9969777 24 C 75 75 CO2 25 Ar 168 22500 1 76344 0 9965484 154 670 1 9271 0 995401 25 He 25 25 He 75 Ar 231 60563 1 26598 0 9996422 216 008 1 3814 0 9999341 143 He 50 50 He 50 Ar 236 15149 0 89829 0 9999188 220 464 0 9800 1 0...

Страница 43: ...52 Bio 40M 40 CH4 60 CO2 140 33250 1 34664 0 9962716 128 834 1 4710 0 9955239 153 Bio 45M 45 CH4 55 CO2 138 78134 1 28905 0 9964362 127 478 1 4080 0 9957564 154 Bio 50M 50 CH4 50 CO2 137 10815 1 23149 0 9966009 126 025 1 3450 0 9959779 155 Bio 55M 55 CH4 45 CO2 135 30261 1 17394 0 9967655 124 462 1 2821 0 9961886 156 Bio 60M 60 CH4 40 CO2 133 35338 1 11642 0 9969301 122 779 1 2193 0 9963885 157 Bi...

Страница 44: ...e 219 24536 0 50683 1 0001363 205 140 0 5530 1 000565 170 HeOx 40 40 O2 60 He 218 59913 0 62132 1 0000244 204 307 0 6779 1 000502 171 HeOx 50 50 O2 50 He 216 95310 0 73583 0 9999125 202 592 0 8028 1 000401 172 HeOx 60 60 O2 40 He 214 82626 0 85037 0 9998006 200 467 0 9278 1 000257 173 HeOx 80 80 O2 20 He 210 11726 1 07952 0 9995768 195 872 1 1781 0 9998019 174 HeOx 99 99 O2 1 He 205 72469 1 29731 ...

Страница 45: ...CO 20 CO2 11 CH4 155 64744 0 79774 0 9989315 144 565 0 8704 0 9992763 186 Syn Gas 2 64 H2 28 CO 1 CO2 7 CH4 151 98915 0 43715 1 0001064 142 249 0 4771 1 000263 187 Syn Gas 3 70 H2 4 CO 25 CO2 1 CH4 147 33686 0 56024 0 9991225 136 493 0 6111 0 9997559 188 Syn Gas 4 83 H2 14 CO 3 CH4 133 63682 0 24825 1 0003901 125 388 0 2709 1 000509 189 Nat Gas 1 93 CH4 3 C2H6 1 C3H8 2 N2 1 CO2 111 77027 0 70709 0...

Страница 46: ...O2 85 7 N2 1 Ar 175 22575 1 22550 0 9992625 165 222 1 3379 0 9990842 201 FG 2 2 9 O2 14 CO2 82 1 N2 1 Ar 174 18002 1 24729 0 9991056 164 501 1 3617 0 9989417 202 FG 3 3 7 O2 15 CO2 80 3 N2 1 Ar 174 02840 1 25520 0 9990536 164 426 1 3703 0 9988933 203 FG 4 7 O2 12 CO2 80 N2 1 Ar 175 95200 1 24078 0 9991842 166 012 1 3546 0 9990116 204 FG 5 10 O2 9 5 CO2 79 5 N2 1 Ar 177 65729 1 22918 0 9992919 167 ...

Страница 47: ...of water at 60 C inH2OA inH2OG inH2OD inch of water at 4 C NIST conventional inH2OA inH2OG inH2OD inch of water at 60 C atm atmosphere m asl meter above sea level only in ALT builds ft asl foot above sea level only in ALT builds V volt no conversions are performed to or from other units count count count setpoint count 0 64000 percent of full scale Flow Units Volumetric Standard Normal Notes uL m ...

Страница 48: ...US gallon cm3 Scm3 Ncm3 cubic centimeter m3 Sm3 Nm3 cubic meter in3 Sin3 cubic inch ft3 Sft3 cubic foot kSft3 1000 cubic feet uP micropoise a measure of viscosity no conversions are performed to or from other units Total Mass Units Label Notes mg milligram g gram kg kilogram oz ounce lb pound These can be used for totalized mass on gas devices These can also be used for totalized volume on liquid ...

Страница 49: ...on there is no flow Alicat MC controllers incorporate normally closed valves and require a set point to operate Check that your setpoint signal is present and supplied to the correct pin and that the correct setpoint source is selected under the SETPT SOURCE list in the control set up display Also check that the unit is properly grounded The flow lags below the setpoint Be sure there is enough pre...

Страница 50: ...5 Serial Communications is not responding Check that your meter is powered and connected properly Be sure that the port on the computer to which the meter is connected is active Confirm that the port settings are correct per the RS 232 instructions in this manual Check the RS 232 RS 485 communications select screen for current meter readings Reboot your PC See pages 10 11 and 33 for more informati...

Страница 51: ...microns for units with FS flow ranges of 0 1 slpm or more Recalibration The recommended period for recalibration is once every year A label located on the back of the controller lists the most recent calibration date The controller should be returned to the factory for recalibration within one year from the listed date Before calling to schedule a recalibration please note the serial number on the...

Страница 52: ...s of a liter is specified on a meter which is totalizing in liters the maximum count would be 99999 99 liters If the same unit were specified with a 1 liter range the maximum count would be 9999999 liters ELAPSED TIME The small numbers below the mass total show the elapsed time since the last reset in hours minutes and seconds The maximum measurable elapsed time is 9999 hours 59 minutes 59 seconds...

Страница 53: ...e these values When the active Totalizer reaches the preset Batch value flow ceases and REMAIN updates to Done Batch To start a new batch of the same size simply press RESET The Totalizer can reproduce any number of fixed Batches in this manner To stop flow with a batch in progress clear the Setpoint and press SET If the Batch value is changed while a batch is in progress the new Batch value is us...

Страница 54: ...der 100 Celsius In these applications we recommend our custom gauge calibration at a gas temperature of up to 70 Celsius This will reduce zero shift errors that occur when actual gas flow temperatures deviate substantially from the gas calibration temperature This configuration is also used in integrations that require a compact flow package at the installation point Option Remote Panel Display Ou...

Страница 55: ...e devices are powered via a terminal block on the front of the box If more than nine devices will be required additional Multi Drop Boxes can be daisy chained together with a double ended 8 pin Mini DIN cable plugged into any receptacle on both boxes BB9 Power Supply for Large Valve Controllers The PS24VHC Power Supply 24Vdc High Current is a 6 5Amp 24Vdc power supply designed for running multiple...

Страница 56: ...want with color coding zooming and printing functionality Alarms Create software alarms that will notify you of given parameter conditions Data Capture Logging Capture and log data to either a csv file or a txt file Improved Data Logging and Data Log File Splitting for easy to manage data Accessory Flow Vision MX Software Alicat s Flow Vision MX software gives you an easy way to do GAS BLENDING us...

Страница 57: ...t length DC 251 8 Pin Male Mini DIN connector cable single ended 25 foot length DC 501 8 Pin Male Mini DIN connector cable single ended 50 foot length DC 751 8 Pin Male Mini DIN connector cable single ended 75 foot length DC 1001 8 Pin Male Mini DIN connector cable single ended 100 foot length DC 32RS 8 pin Male Mini DIN connector cable double ended no analog 3 foot length DC 62RS 8 pin Male Mini ...

Страница 58: ... 1 2 3 8 SS 600 1 8 1 2 1 2 SS 810 1 8 1 2 3 4 SS 1210 1 8 1 2 6mm SS 6M0 1 8 1 2 8mm SS 8M0 1 8 1 2 12mm SS 12M0 1 8 1 2 16mm SS 16M0 1 8 3 4 1 4 SS 400 1 12 3 4 1 2 SS 810 1 12 3 4 3 4 SS 1210 1 12 3 4 12mm SS 12M0 1 12 3 4 16mm SS 16M0 1 12 Filters Elements FNPT MNPT 10 32 5μ 510053 10 32 20μ 510054 1 8 20μ ILF 1 8 20 1 4 40μ ILF 1 4 40 1 2 40μ ILF 1 2 40 3 4 40μ ILF 3 4 40 20μ element ILFE20 4...

Страница 59: ...w Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 60 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 145 psig Proof Pressure 175 psig Mounting Attitude Sensitivity MC None MCR Mount with valve cylinder vertical upright Valve Type Normally Closed Ingress Protection IP40 Wetted Materials MC 303 30...

Страница 60: ...m MC 0 5 sccm to 50 sccm approximate shipping weight 1 1 lb 0 MC 0 5SCCM D DS MSPEC 1 30 2016 DATE REV 98 98mm 3 897in 84 77mm 3 338in 26 67mm 1 050in 13 34mm 525in 8 53mm 336in M5X0 8 10 32 UNF Both Sides 4 93mm 194in 13 34mm 525in 23 50mm 925in 8 32 UNC 175in 4 45mm 3 81mm 150in 2 225in 56 52mm 3 18mm 125in MC Series Downstream Valve 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm 0 50...

Страница 61: ...in 28 58mm Both Sides 1 4 NPT 57 15mm 2 250in 1 600in 40 64mm DATE 1 MC 20SLPM D MSPEC 1 5 2016 REV 3 738in 94 95mm 4 067in 103 30mm 525in 13 34mm 350in 8 89mm 1 050in 26 67mm 1 8 Both Sides 8 89mm NPT 350in 13 34mm 525in 125in 23 50mm 56 52mm 2 225in 3 18mm 150in 3 81mm 925in 2X 8 32 UNC 350in 8 89mm MC Series 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 3 slpm 0 5 slpm 0 10 slpm 0 20 slp...

Страница 62: ...mm 36 20mm 1 425in MCR Series 0 250 slpm MCR 250 slpm approximate weight 9 0 lb 800in 20 32mm 800in 20 32mm 40 64mm 1 600in 57 15mm 2 250in 184 79mm 7 2750in DATE MCR 500SLPM D MSPEC 1 12 09 2015 REV 28 58mm 1 125in 1 120in 28 45mm Both Sides 3 4 NPT 375in 2 700in 4X 8 32 UNC 375in 9 53mm 82 550mm 3 250in 750in 68 58mm 19 050mm 4 45mm 175in 36 20mm 1 425in 47 63mm 1 875in 9 53mm 5 08mm 200in 328in...

Страница 63: ...PM D MSPEC REV 139 56mm 5 495in 226 06mm 8 900in MCR Series 0 2000 slpm MCR 2000 slpm approximate weight 12 0 lb 5 495in 139 56mm 8 100in 205 74mm 2 900in 73 66mm 2 250in 57 15mm X 8 32 UNC 4 330in 8 38mm 107 95mm 4 250in 68 58mm 2 700in 200in 5 08mm 9 53mm 6 750in 375in 171 45mm 5 08mm 68 58mm 2 700in 200in 1 875in 47 63mm 4X 8 32 UNC 328in 8 33mm 28 45mm 1 120in 1 125in 28 58mm DATE MCR 2000SLPM...

Страница 64: ...64 MCRH 5000 slpm approximate weight 28 0 lb MCRH Series 0 5000 slpm ...

Страница 65: ...municate your choice of Mass Flow Volumetric Flow Pressure or Temperature Operating Conditions Whisper MCW MCRW Mass Flow Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 60 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 45 psig Higher line pressures available please contact Alicat Proof Pressur...

Страница 66: ...8 8 53mm 336in 525in 13 34mm 3 897in 98 98mm 3 338in 84 77mm DATE 1 MCW 20SCCM D MSPEC 12 10 2015 REV 1 050in 26 67mm 8 53mm 336in 525in 13 34mm 56 52mm 2 225in 150in 3 81mm 3 18mm 125in 925in 23 50mm 2X 8 32 UNC 175in 4 45mm WHISPER MCW 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm MCW 0 5 sccm to 20 sccm approximate shipping weight 1 1 lb WHISPER MCW 0 50 sccm 0 100 sccm 0 200 sccm 0...

Страница 67: ...in 139 56mm 12 10 2015 REV 1 MCRW 20SLPM D MSPEC DATE 1 600in 40 64mm 57 15mm 2 250in 194 31mm 7 650in 5 495in 139 56mm 15 75mm 620in 126 67mm 4 987in 3 250in 82 55mm 1 425in 36 20mm 4X 8 32 UNC 375in 9 53mm 2 700in 68 58mm 9 53mm 375in 47 63mm 750in 19 05mm 1 875in 175in 4 45mm 5 08mm 4X 8 32 UNC 375 200in 1 325in REF 33 66mm 800in 20 32mm 500in 12 70mm 28 45mm 1 120in 1 125in 28 58mm Both Sides ...

Страница 68: ...205 74mm 28 58mm 1 125in 1 120in 28 45mm Both Sides 3 4 NPT 1 600in 40 64mm 57 15mm 2 250in 184 79mm 7 275in 800in 20 32mm 800in 20 32mm 8 13mm 320in 5 495in 139 56mm DATE MCRW 250SLPM D MSPEC 1 12 10 2015 REV 3 250in 82 55mm 375in 2 700in 4X 8 32 UNC 375in 9 53mm 750in 68 58mm 19 05mm 4 45mm 175in 36 20mm 1 425in 47 63mm 1 875in 9 53mm 5 08mm 200in 328in 8 33mm 4 8 32 UNC X 1 325in REF 33 66mm MC...

Страница 69: ...69 MCRHW 1000 slpm approximate weight 28 0 lb WHISPER MCRWH 0 1000 slpm ...

Страница 70: ...atic 145 psig Proof Pressure 175 psig Mounting Attitude Sensitivity None Valve Type Normally Closed Ingress Protection IP40 Wetted Materials MCV 303 302 Stainless Steel Viton Heat Cured Silicone Rubber Glass Rein forced Polyphenylene Sulfide Heat Cured Epoxy Aluminum Gold Brass 430FR Stainless Steel Silicon Glass MCVS 316LSS 303SS 430FRSS FFKM Kalrez standard Viton EPDM Buna Neoprene as needed for...

Страница 71: ...58mm 250in 4X 375in 9 53mm 1 8 NPT 15 94mm 628in 750in 19 05mm DATE MCSV 0 5SCCM D MSPEC 1 1 8 2016 REV 15 94mm 1 500in 38 10mm 628in 750in 19 05mm 15 94mm 628in 750in 19 05mm 6 721in 170 71mm 6 330in 160 78mm 4 76mm 188in 5 455in 138 54mm 240in THRU 6 10mm 5 580in 141 73mm 1 125in 28 58mm 4X 375in 9 53mm MCV Series All ranges MCV approximate weight 3 0 lb MCVS Series All ranges MCVS approximate w...

Страница 72: ...ini DIN 9 pin D sub DB9 15 pin D sub DB15 6 pin locking Supply Voltage 12 to 30 Vdc 15 30 Vdc for 4 20 mA outputs Supply Current 0 250 Amp 1 The Digital Output Signal communicates Mass Flow Volumetric Flow Pressure and Temperature 2 The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow Volumetric Flow Pressure or Temperature Operating Conditions ...

Страница 73: ... 64mm MCP Series 50 slpm 100 slpm 10 slpm to 50 slpm approximate shipping weight 3 0 lb 350in 14 29mm 563in 175in 4 45mm 8 89mm 1 425in 36 20mm 8 32 UNC 2X 136in 3 45mm 450in 11 43mm 46 04mm 1 813in 110 92mm 4 367in 96 08mm 3 783in 4 4 2017 MCP 20SLPM D MSPEC REV DATE 1 40 64mm 1 600in 20 32mm 800in 12 70mm 500in Both Sides 1 4 NPT 20 32mm 800in 12 70mm 500in MCP Series 0 10 splm 0 20 slpm 10 slpm...

Страница 74: ...n MCP Series 250 slpm 100 slpm to 250 slpm approximate shipping weight 4 4 lb 20 32mm 800in 500in 12 70mm 9 16 18 UNF 725in 18 42mm J1926 Port Both Sides 20 32mm 800in 12 70mm 500in 1 600in 40 64mm X 750in 8 32 UNC 375in 9 53mm 19 05mm 4 4 45mm 175in 36 20mm 1 425in 82 55mm 3 250in 5 772in 146 60mm 4 367in 110 92mm 1 MCP 50SLPM D SAE MSPEC 12 9 2015 DATE REV MCP Series SAE 0 50 splm 0 100 slpm 50 ...

Страница 75: ...0 mA Electrical Connection Options 8 Pin Mini DIN 9 pin D sub DB9 15 pin D sub DB15 6 pin locking Supply Voltage 12 to 30 Vdc 15 30 Vdc for 4 20 mA outputs Supply Current 0 250 Amp 1 The Digital Output Signal communicates Mass Flow Volumetric Flow Pressure and Temperature 2 The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow Volumetric Flow Pre...

Страница 76: ...m 1 125in 28 58mm 2X 8 32 UNC 350in 8 89mm 19 05mm 750in 11 18mm 440in MCE Series All Ranges MCE approximate weight 3 0 lb MCES 5SLPM D MSPEC 6 22 2016 DATE 0 REV 38 10 1 500 124 4 882 133 78 5 267 1 4 VCRM Both Sides 19 05 750 11 18 440 19 05 750 11 18 440 9 53 375 2 750 69 85 500 12 70 1 125 28 58 2X 8 32 UNC 350 8 89 MCES approximate weight 3 3 lb MCES Series All Ranges ...

Страница 77: ...utput Signal communicate your choice of Mass Flow Volumetric Flow Pressure or Temperature Operating Conditions MCD Mass Flow Controller MCRD Mass Flow Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 60 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 145 psig Proof Pressure 175 psig Mounting Atti...

Страница 78: ...78 MCD Series 0 20 slpm shown MCRD Series 0 2000 slpm shown ...

Страница 79: ... Air 1 Argon Ar 2 Methane CH4 3 Carbon Monoxide CO 4 Carbon Dioxide CO2 5 Ethane C2H6 6 Hydrogen H2 7 Helium He 8 Nitrogen N2 9 Nitrous Oxide N2O 10 Neon Ne 11 Oxygen O2 12 Propane C3H8 13 normal Butane n C4H10 14 Acetylene C2H2 15 Ethylene C2H4 16 iso Butane i C4H10 17 Krypton Kr 18 Xenon Xe 19 Sulfur Hexafluoride SF6 20 75 Ar 25 CO2 C 25 21 90 Ar 10 CO2 C 10 22 92 Ar 8 CO2 C 8 23 98 Ar 2 CO2 C 2...

Страница 80: ...25in 150in 3 81mm 2X 8 32 UNC 175in 4 45mm 8 53mm 10 32 UNF M5X0 8 Both Sdes 336in 525in 13 34mm 8 53mm 336in 525in 13 34mm 1 050in 26 67mm 3 338in 84 77mm 4 397in 111 68mm DATE REV 1 MCS 50SCCM D MSPEC 1 8 201 MCS Series 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm 0 50 sccm MCS Series 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 5 slpm 0 10 slpm 0 20 slpm 0 5 sccm to 50 sccm...

Страница 81: ...2mm 800in 20 32mm 800in 1 600in 40 64mm 57 15mm 2 250in 194 31mm 7 650in 28 45mm 1 120in 1 125in 28 58mm Both Sides 1 4 NPT 800in 20 32mm 500in 12 70mm 7 275in 184 79mm 139 56mm 5 495in 15 75mm 620in 5 687in 144 45mm 175in 4 45mm 5 08mm 200in 2 700in 750in 68 58mm 9 53mm 375in 47 63mm 1 875in 19 05mm 4X 8 32 UNC 375 3 250in 82 55mm 1 425in 36 20mm 4X 8 32 UNC 375in 9 53mm 2 REV DATE 12 09 2015 MCR...

Страница 82: ...8mm 4X 8 32 UNC 375in 9 53mm 28 45mm 1 120in 3 4 NPT Both Sides 28 58mm 188in 4 76mm 13 21mm 1 125in 520in 4X 8 32 UNC 438in 11 11mm DATE 12 10 2015 1 REV MCRS 500SLPM D MSPEC 2 250in 57 15mm 40 64mm 1 600in 5 976in 151 79mm 309in 7 85mm 139 28mm 5 484in 184 79mm 7 275in 328in 4X 8 32 UNC 8 33mm 9 53mm 375in 4X 8 32 UNC 68 58mm 2 700in 175in 4 45mm 750in 19 05mm 9 53mm 375in 200in 5 08mm 3 250in 8...

Страница 83: ...in 9 53mm 375in 5 08mm 2 700in 200in 68 58mm 330in 8 38mm 4 8 32 UNC X 328in 8 33mm 47 63mm 8 32 UNC X 4 1 350in 34 29mm 3 850in 97 79mm 1 875in REF 1 550in 39 37mm 25 40mm 1 000in Both Sides 36 83mm 1 450in 1 1 4 NPT 24 38mm 960in 24 38mm 960in 1 125in 28 58mm MCRS Series 0 3000 slpm MCRS 3000 slpm approximate weight 12 0 lb ...

Страница 84: ...Proof Pressure 175 psig Mounting Attitude Sensitivity MCQ None MCRQ Mount with valve cylinder vertical upright Valve Type Normally Closed Ingress Protection IP40 Wetted Materials MC 303 302 Stainless Steel Viton Heat Cured Silicone Rubber Glass Reinforced Polyphenylene Sulfide Heat Cured Epoxy Aluminum Gold Brass 430FR Stainless Steel Silicon Glass MCR 303 302 Stainless Steel Viton Heat Cured Sili...

Страница 85: ...36in 525in 13 34mm 1 050in 26 67mm 3 338in 84 77mm 4 397in 111 68mm DATE REV 1 MCS 50SCCM D MSPEC 1 8 2016 MCQ Series 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 5 slpm 0 10 slpm 0 20 slpm 100 sccm to 20 slpm approximate weight 1 2 lb 8 89mm 350in 13 34mm 525in 26 67mm 1 050in 3 81mm 150in 125in 3 18mm 925in 23 50mm 2 225in 56 52mm 2X 8 32 UNC 350in 8 89mm 350in 8 89mm 13 34mm 525in 1 8 N...

Страница 86: ...E 12 09 2015 MCRS 100SLPM D MSPEC MCRQ Series 0 50 slpm 0 100 slpm MCRQ 50 slpm to 100 slpm approximate weight 9 0 lb MCRQ Series 0 250 slpm MCRQ 250 slpm approximate weight 9 0 lb 2 REV DATE 12 10 15 MCRS 250SLPM D MSPEC 139 56mm 5 495in 8 13mm 320in 5 987in 152 07mm 40 64mm 1 600in 2 250in 57 15mm 194 31mm 7 650in 750in 19 05mm 82 55mm 3 250in 47 63mm 36 20mm 375in 9 53mm 14 61mm 575in 4 45mm 17...

Страница 87: ...33mm 9 53mm 375in 4X 8 32 UNC 68 58mm 2 700in 175in 4 45mm 750in 19 05mm 9 53mm 375in 200in 5 08mm 3 250in 82 55mm 1 325in REF 33 66mm 1 432in 36 36mm 47 63mm 1 875in MCRQ Series 0 2000 slpm MCRQ 2000 slpm approximate weight 12 0 lb NPT 28 45mm 3 4 Both Sides 1 120in 1 450in 36 83mm 1 REV DATE 12 10 2015 MCRS 2000SLPM D MSPEC 28 45mm 1 120in 1 125in 28 58mm 5 987in 152 07mm 205 74mm 8 100in 5 495i...

Страница 88: ...in 9 53mm 375in 5 08mm 2 700in 200in 68 58mm 330in 8 38mm 4 8 32 UNC X 328in 8 33mm 47 63mm 8 32 UNC X 4 1 350in 34 29mm 3 850in 97 79mm 1 875in REF 1 550in 39 37mm 25 40mm 1 000in Both Sides 36 83mm 1 450in 1 1 4 NPT 24 38mm 960in 24 38mm 960in 1 125in 28 58mm MCRQ Series 0 3000 slpm MCRQ 3000 slpm approximate weight 12 0 lb ...

Страница 89: ...Signal Connections Connect to the device using two DB9 connectors The female top connection is PROFIBUS The male connection on the side is power and RS 232 or RS 485 Pin out diagrams for all PROFIBUS enabled Alicat devices are shown PROFIBUSMC1SLPMshowntoprovidePROFIBUSconnectordimensionsonly Flowbodyandvalve dimensions will vary with range Please see Alicat s device specifications for complete di...

Страница 90: ...larm Brown 3 Serial RS 232RX RS 485 Input Signal receive Red 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Setpoint Input Orange 5 Serial RS 232TX RS 485 Output Signal send Yellow 6 0 5 Vdc or optional 0 10 Vdc Output Signal Green 7 Power In as described above Blue 8 Ground common for power digital communications analog signals and alarms Purple Note The above pin out is applicable...

Страница 91: ...ered Locking Industrial Connector Pin Outs If your Alicat Instrument was ordered with a Six Pin Locking Industrial connection please be sure to reference the following pin out diagram Pin Function 1 Power In 2 RS 232TX RS 485 3 RS 232RX RS 485 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Setpoint Input 5 Ground common for power communications and signals 6 Signal Out Voltage or Cu...

Страница 92: ...n for meters Analog Out 0 5Vdc Output Signal or 0 10Vdc optional Analog Out 2 5 12Vdc or Optional Secondary Analog Output TX Serial RS 232TX or RS 485 RX Serial RS 232RX or RS 485 NC Not Connected Power In Vdc Ground Common for power digital communications analog signals and alarms Additional Pinouts Pin DB9B DB9G DB9H DB9I DB9N 1 Analog Out 2 RX TX NC Power In 2 Analog Out Analog Out Analog Out A...

Страница 93: ...Ground NC Ground AnalogOut2 NC Ground Ground 11 AnalogOut2 NC AnalogOut2 Power In Ground AnalogOut2 AnalogOut2 12 NC AnalogOut2 NC Ground Ground NC RX 13 RX NC NC NC RX NC Power In 14 Ground NC RX Analog In TX RX TX 15 TX RX TX TX Ground TX Ground Analog In setpoint for controllers or remote tare function for meters Analog Out 0 5Vdc Output Signal or 0 10Vdc optional Analog Out 2 5 12Vdc or Option...

Страница 94: ...identify proper wiring pins via continuity check color when using blunt cut multi strand cables mbered Parts 410495 15pin Dsub Pannel Female IP67 AE10114 ND 3 4 5 6 MATERIAL FINISH 316L Stainless THE INFORMATION CONTAINED IN THIS DRAWING IS THE SOLE PROPERTY OF ALICAT SCIENTIFIC INC ANY REPRODUCTION IN PART OR AS A WHOLE WITHOUT THE WRITTEN PERMISSION OF ALICAT SCIENTIFIC INC IS PROHIBITED PROPRIE...

Страница 95: ...NON HAZARDOUS EXPLOSION HAZARD SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR CLASS I DIVISION 2 II 3 G Alicat CSA ATEX approved devices are equipped with either a locking six pin industrial connector IC locking D sub 15 pin connector DB15 or locking D sub 9 pin connector DB9 Please see pages 91 94 for the correct power and signal connections for each type of connector See the following pag...

Страница 96: ...ION HAZARD DO NOT DISCONNECT WHILE CIRCUIT IS LIVE UNLESS AREA IS KNOWN TO BE NON HAZARDOUS EXPLOSION HAZARD SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR CLASS I DIVISION 2 www AlicatScientific com Alicat Scientific Inc Tucson AZ USA Tel 520 290 6060 II 3 G USE of Alicat instruments L LC LCR M MW MS MC MCD MCW MCS MCR MCRW MCRS P PS PC PCD PCS PCR and PCRS product families in applications...

Страница 97: ...red by this warranty Alicat Scientific does not recommend warrant or assume responsibility for the use of the Products in life support applications or systems Alicat s warranties as herein above set forth shall not be enlarged diminished or affected by and no obligation or liability shall arise or grow out of Alicat s rendering of technical advice in connection with Buyer s order of the Products f...

Страница 98: ...5 11 Oxygen O2 205 5021 1 3088 0 9994 12 Propane C3H8 81 4631 1 8320 0 9838 13 normal Butane n C4H10 74 0536 2 4493 0 9699 14 Acetylene C2H2 104 4480 1 0720 0 9928 15 Ethylene C2H4 103 1839 1 1533 0 9943 16 iso Butane i C4H10 74 7846 2 4403 0 9735 17 Krypton Kr 251 3249 3 4323 0 9979 18 Xenon Xe 229 8483 5 3950 0 9947 19 Sulfur Hexafluoride SF6 153 5320 6 0383 0 9887 Gas Absolute Viscosity 25 C De...

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