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Alcatel - High Vacuum Technology - User’s Manual ADP/ADS

Edition 04 - May 98

A 30

ADP/ADS Series One dry pumps
for semi-conductor’s industry

1/3

Clean processes

The ADP / ADS range is designed for three types
of applications :

This concerns all applications for clean pumping (particle-free)
and non-corrosive gases (load lock pumping for example).
No nitrogen purge needed.

ADP 31/ADP 81

ADS 151/301/501

equipment

Water

Anti-suckback valve

Silencer

Inlet

Motor

Exhaust

10 - Water electrovalve

12 - Water flow sensor

11 - Water flowmeter

13 - Isolation valve

(accessory)

Содержание ADP 31

Страница 1: ...allation B 20 Installing anti vibration pads B 30 Modular version Layout B 40 Filling the pump oil housings B 50 Connection to the cooling circuit B 60 Inert gas purge connection N2 plug B 70 Nitrogen...

Страница 2: ...pump stopping D 50 Pump is running No message D 60 Breaker Alarm D 70 Pressure Purge N2 Alert and alarm D 80 Gas temp Alert D 90 Pump temp Alert D 91 Consumption Alert and alarm D 100 Water flow Aler...

Страница 3: ...ing product transport installation operation and maintenance the safety instructions signalled with the following symbol Symbol Meaning Users of this equipment should be alert to level of hazards iden...

Страница 4: ...stallation and start up MANUAL REFERENCE 100 448 EDITION 04 May 1998 APPLICATIONS ALL SEMICONDUCTORS PROCESSES Stripping Etching PECVD LPCVD MOCVD Epitaxy SCIENTIFIC RESEARCH ADVANTAGES Easily adaptab...

Страница 5: ...designed for all processes 2 versions well known technology reliability no fan clean room compatible safe no gas leak quiet multi voltage bi frequency 50 60 Hz guaranteed by design guaranteed by test...

Страница 6: ...e Standard Series pumps are fully integrated in a compact and covered frame which includes the monitoring system the flowmeter panel the facilities panel an OEM interface panel and the RS 232 485 seri...

Страница 7: ...S a Roots pump is combined with an ADP 2 Silencer with check valve function 3 Compact frame May be equipped with anti vibration pads 4 Utilities panel with Quick Connectors for all utilities Water gas...

Страница 8: ...wmeter panel gas purge and cooling water Utilities panel gas purge and cooling connections Electrical box including monitoring M1 or M3 OEM interface panel Remote control By design these modules can b...

Страница 9: ...ned for three types of applications This concerns all applications for clean pumping particle free and non corrosive gases load lock pumping for example No nitrogen purge needed ADP 31 ADP 81 ADS 151...

Страница 10: ...compression stages and protect the mechanical parts of the pump Gas injection at the different stages of the pump The neutral gas usually nitrogen injection system is used to decrease the concentrati...

Страница 11: ...ainst process particulates are used in ADP and Roots ADP 81 ADS 151 301 501 801 1001 equipment N2 flow sensor optional 6 9 5 10 4 3 2 1 7 8 10 11 12 Inlet Water Neutral gas Exhaust Anti suckback valve...

Страница 12: ...40 Types of monitoring systems 1 1 2 types of monitoring system Monitoring system M1 M1 Remote monitoring system 5 or 10 meters Monitoring system M3 Monitoring system controlled by microprocessor LCD...

Страница 13: ...rinciple 1 3 The ADP pump consists of 5 Roots type stages The two rotors rotate without touching each other Water Inlet Stage 1 LP1 Stage 2 LP2 Stage 3 LP3 Stage 4 HP4 Stage 5 HP5 Silencer The three s...

Страница 14: ...erpressure zone is created around the bearing by injecting a neutral gas Purge LP1 The grease works in a less severe vacuum and thus lasts longer This pressurization also prevents pumped gases from mi...

Страница 15: ...s ensured by the motor design with built in jacket This system provides total safety regarding leaks outside the pump and requires no maintenance 1 Built in jacket 2 Motor housing 3 Electrical rotor 1...

Страница 16: ...ropneumatic Consult us Fitting See section B 90 Principle This device significantly reduces the vibration rate transmitted to the floor Vibration force to the floor by pad 0 5N Available till 150Hz Pa...

Страница 17: ...10 3 8 10 4 6 x 10 4 20 15 3 1 1 380 844 340 748 100 40 ADS 301 270 310 4509 5177 160 182 3 10 3 2 2 x 10 3 8 10 4 6 x 10 4 30 23 3 1 1 365 805 310 683 63 40 ADS 151 140 165 2338 2756 82 97 4 10 3 3...

Страница 18: ...75 830 520 909 278 1040 ADS 501 1177 1125 398 199 875 830 520 909 278 1040 ADS 801 1368 1331 398 199 960 913 650 995 278 1230 ADS 1001 1510 1445 398 199 1050 945 720 1050 278 1360 DIMENSIONS IN INCHES...

Страница 19: ...160 320 710 400 135 840 223 ADS 151MD 733 794 290 160 320 710 400 135 840 223 ADS 301MD 805 861 290 160 320 710 400 135 840 223 ADS 501MD 805 861 290 160 320 710 400 135 840 223 DIMENSIONS IN INCHES P...

Страница 20: ...ical safety chemical pollution etc isolate the product from the various energy sources electricity compressed air etc The EMC perfomance of the product is obtained on the condition that the installati...

Страница 21: ...so as to prevent any thermal risk to the user s safety However specific operating conditions may generate on the pump temperatures justifying particular attention on the part of the user external sur...

Страница 22: ...with the carrier and inform Alcatel if necessary In all cases Alcatel recommends that the packaging be saved in the event that the equipment must be transported or put into prolonged storage Risk of t...

Страница 23: ...the wheels Remove any additional packages from the crate and set aside These packages will contain cables accessories and so forth To prevent humidity from entering the pump during transport the pump...

Страница 24: ...ut off valves on the inlet exhaust and purge lines For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used The...

Страница 25: ...ng the pump in the pumping installation Remove pump covers 2 3 Edition 03 May 97 Unfasten the toggle joints located on the top of the cover 1 Unfasten the lateral fastening and raise the cover by the...

Страница 26: ...eize as a result of a strain exerted by the braces The shipping braces hold the pump to the frame during shipment They are painted yellow for easy identification Remove these bars and the threaded rod...

Страница 27: ...the 4 anti vibration pads Screw the screw jacks so that the machine rests on the pads Force transmitted to the ground by each support 0 5 N for frequencies 150 Hz In order to limit the transmission o...

Страница 28: ...with respect to the frame The sensor box located under the pump has to be set facing the silencer For safety reasons the modular ADS are now equipped with a stabilizer to avoid any risk of toppling o...

Страница 29: ...examples Exhaust Exhaust A Inlet B Inlet C Inlet D Inlet E Inlet F Inlet G Inlet H Inlet Pump block with frame Control box with integrated monitor Flowmeter panel OEM interface Utilities panel CONTROL...

Страница 30: ...d Alcatel 113 Mineral and synthetic oils cannot be used together Contact Alcatel or your service agent before making any changes Oil quantities OIL FILLING HOUSINGS REAR FRONT TOTAL ADP ROOTS ROOTS CA...

Страница 31: ...lling the machine oil housings 2 2 Edition 04 May 98 Location 1 Filling front Roots housing 2 Front Roots housing level sight glass 3 ADP filling 4 ADP housing oil level sight glass 5 Rear Roots housi...

Страница 32: ...water with the following characteristics Treated fresh water or non aggressive industrial water pH between 7 5 and 11 Hardness 7 milli equivalent dm3 Resistivity 1500 cm Solid pollution 100 mg dm3 Tem...

Страница 33: ...cuit Modular version connections 2 2 Edition 03 May 97 Waterflowrate adjustment OUT N2 IN OUT N2 IN Water IN OUT REAR VIEW The water flow will be adjusted according to the processes with the needle ta...

Страница 34: ...d version connections A filtered dry nitrogen supply is required It should have the following characteristics Dew point 22 C Dust 1 m Oil 0 1 PPM Pressure between 3 and 7 bar absolute Flowrate per pum...

Страница 35: ...tion 04 May 98 N2 flowrate adjustment The N2 flowrate will be adjusted with the pressure regulator according to the process see section B 120 The flowmeter is used to display the overall purge flow ra...

Страница 36: ...he parameter N2 FLOWRATE OPTION to be valid in the DEFINITION menu of the M3 monitoring system The setting of the sensor is done by sliding the moving part contact along the controller body For this l...

Страница 37: ...s and tightness compatible with pumped gases For free exhaust tests inert gas pumping an anti noise seal supplied with the pump can be fitted on to the silencer exhaust in order to reduce the exhaust...

Страница 38: ...lace at the pump inlet and remove it at the time of use see section B 130 This accessory avoids a reverse flow of particles to the chamber when the pump is stopped Connect the valve directly on the pu...

Страница 39: ...e of power supply voltage in relation to the initial configuration contact Alcatel Customer Service Cutt off rating of main pump switch 200 to 415 V 50 kA 460 V 20 kA 480 V 10 kA The main switch on th...

Страница 40: ...ge 1 Mains connector Standard version The pump is supplied with a female connector which is connected to the electrical connector at the lower part of the frame Connect the mains to the power supply c...

Страница 41: ...al box Remote set electrical box is connected by means of a 5 meters extension cable 1 7 6 8 3 2 4 5 Check the rotational direction of the pump at the first start up See B 130 1 Mains connector 2 Root...

Страница 42: ...sed Poly etch non CVD 35l mn 0 6 bar 60l h Ion implant source non CVD 35l mn 0 6 bar 40l h Tungsten LPCVD non CVD 45l mn 1 bar 100l h Titanium and Titanium nitride PECVD non CVD 35l mn 0 6 bar 60l h P...

Страница 43: ...ide PECVD and LPCVD CVD 50l mn 1 bar 80 C using Silane Si mono Epitaxy CVD 50l mn 1 bar 80 C Silicon oxide and doped oxide CVD 50l mn 1 bar 90 C BPSG PECVD using TEOS Silicon oxide and doped oxide CVD...

Страница 44: ...pressing START and stop it after a few seconds if the pressure indicated is less than 5 10 1 mbar the rotational direction is correct if the pressure increases invert two phases at the mains input fem...

Страница 45: ...50V 1A 100VA the monitoring parameters These contacts can be used to control automatisms When units containing control circuits are equipped with dry contact outputs it is the responsibility of the cu...

Страница 46: ...and 49 12V S1 OPEN Remote control valid Keyboard locked S1 CLOSE Keyboard valid Remote control locked S2 On ADP switching off S3 On ROOTS switching off if the selection Roots control has been validate...

Страница 47: ...ADP working 14 15 2 ROOTS working 16 17 3 Purge flow rate and ADP working 8 9 4 Exhaust pressure fault P 1450mbar 39 40 5 Purge fault 37 38 6 Temperature fault T 50 C 35 36 4 Fault One of the paramet...

Страница 48: ...remote control STOP button will stop the ADP but it will restart as the push button is released 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 1 2 Arr t 3 4 5 6 7 8 9 10 11 12 13 14...

Страница 49: ...ct 2 1 Major faults RT1 switched off 12 13 8 21 2 Pump working KM1 switched off 9 22 6 19 3 Temperature faults T 50 C 10 11 7 20 1 2 24V 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 A...

Страница 50: ...11 12 13 14 15 16 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 17 34 35 36 37 38 39 40 45 46 48 49 41 47 50 42 43 44 Arr t Marche Arr t d urgence 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 18 19 20 21...

Страница 51: ...2 13 8 21 2 Pump working KM1 switched off 8 10 14 15 3 Temperature faults T 50 C 5 7 35 36 Arr t d urgence 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 18 19 20 21 23 24 25 26 27 28 31 32 33 17 34 35 36 37...

Страница 52: ...is as follows Type RS 232 Transmission SPEED 9600 bauds Data Length 8 bits Parity NONE Stop bit 1 At the first power on the user will find the initial configuration set at factory The settings can be...

Страница 53: ...ystem M3 Multiple serial link RS232 Serial link RS485 Several M3 monitoring systems may be connected on a single link The multiple link is obtained by creating a loop Connect terminals 7 and 8 when th...

Страница 54: ...on of pumped gases and therefore the clogging of the silencer during the pump operation wich processes such as Aluminum etching Polysilicon LPCVD or PECVD Nitrid Alcatel proposes a silencer heating ki...

Страница 55: ...maintenance Section D 00 Installation and electrical connection Remove the silencer from the pump Install the two heating belts 1 using the tightening cords Install the two insulation sleeves 2 Remoun...

Страница 56: ...tion des param tres Voyants Symbol Description Functions Used to have access to Parameter setting mode the parameter setting mode access key Used to exit the various menus without validating the funct...

Страница 57: ...y of new parameters Display of the pump running time the pump status and the date when the monitoring have been set for transport Press the key Valid the code with the key Acces code can be personaliz...

Страница 58: ...the key Press the key Pumping cannot be started Seconds counter is blocked Initializing the equipment by updating the clock Set the STORAGE menu to save the internal parameters during transport or pro...

Страница 59: ...ature is greater than the alert 2 threshold without stopping the group Pump Temperature Allows to regulate ADP temperature sensor on Signals a pump temperature variation TC version an alert when tempe...

Страница 60: ...to the current application by programming the parameters pump stopped of the various menus listed on C 30 Temperature regulation occurs 10 C below the alert threshold Mini Maxi Alert Alarm mbar 600 90...

Страница 61: ...ION AUTOMATIC RESTARTING ROOTS CONTROL BUZZER CONTROL SELECT PURGE CONTROL SELECT THERMO CONTROLLED FLOW N2 OPTION Valid Disabled Valid Disabled Valid Disabled Valid Disabled ADS151 ADS301 ADS501 ADS8...

Страница 62: ...rt threshold Alarm threshold Alert threshold Alarm threshold Alert time Alarm time Alert time Alarm time 0 to 120 min 600 to 900 mbar Type Echo Address Speed Parity Stop bit Time Date menu Celsius Fah...

Страница 63: ...SILENCER OVERHAUL ROOTS 1000 34000 h 1000 17000 h 1000 17000 h 1000 34000 h Using and key input the new code and valide with Initial Config 8500 h 8500 h 2500 h 8500 h OPERATING TIME DISPLAY STORAGE...

Страница 64: ...monitoring system performs the following operations opening the inlet valve if preselection has been validated ADP pump start up opening the water valve data capture and sensor processing opening the...

Страница 65: ...oring Pumping shut down Remote control Press the STOP key the monitoring system performs the following operations pump stopping water valve closing injection of purge gas is continued during the shutd...

Страница 66: ...m cable connected at the front In this case all controls are made from the remote unit The frame mounted unit only contains the main switch the emergency stop and the monitoring system indicator light...

Страница 67: ...e remote control function is performed by means of the REMOTE remote control connector at the rear of each fixed monitoring unit It is used for The remote control of the pump START STOP Emergency Stop...

Страница 68: ...er to ensure that the level of tightness is maintained when pumping dangerous gases Depending on the case we recommend to purge the installation with dry nitrogen The flush is performed automatically...

Страница 69: ...the silencer is maintained avoid any contact with the reaction by products deposit powder strongly corrosive wear gloves even a breathing mask Cleaning procedure can produce violent reactions and dang...

Страница 70: ...ystem which close the stopping of the pumping although the STOP command has not been given the display of fault message on the screen of the M3 monitoring system a message via the RS 232 or RS 485 lin...

Страница 71: ...aintenance The replacement frequency of certain components depends directly on the type of process used See section D 20 Maintenance operations Depending on the maintenance parameters programmed when...

Страница 72: ...0 5 L Qty 2 for 301 601 Full overhaul 12 H Major kit 101109 ALCATEL 113 oil 064657 0 5 L Qty 6 A ADP 31 ADP 81 Maintenance Testing and cleaning time not included A B ADS 151 301 501 Maintenance For o...

Страница 73: ...ul 12 H Major kit 101109 ALCATEL 113 oil 064657 0 5 L Qty 6 A ADP 31 ADP 81 Maintenance Testing and cleaning time not included A B ADS 151 301 501 Maintenance For oil filling see section B 50 A C ADS...

Страница 74: ...ALCATEL 113 oil 064657 0 5 L Qty 2 for 301 601 Full overhaul 12 H Major kit 101109 ALCATEL 113 oil 064657 0 5 L Qty 6 A ADP 31 ADP 81 Maintenance Testing and cleaning time not incluede A B ADS 151 301...

Страница 75: ...User s Manual ADP ADS Diagnosis and troubleshooting 1 1 Edition 03 May 97 Pump does not start The pump is running and then is showing an alert or alarm message followed by the pumps stopping The pump...

Страница 76: ...ore 96 12 Push on the red button untill zero and release Since 97 01 Push on the blue button untill zero Isolating switch is off Check the calibration Switch it on CB1 breaker switched off NO NO Call...

Страница 77: ...NO NO Check presence or connect jumper plug RP No presence near Roots NO Check the connection Pressing on Start does not start up the pump Roots is not running Roots does not run and Roots message is...

Страница 78: ...on 1 On Remote mode No RP plug or bad connection Pump in storage mode Check the condition and the connection of the contactor See D 70 Roots KM2 Contactor Messages on the display Alarm Breaker KM2 Me...

Страница 79: ...he main power Main power is not correct Alarm Pressure Starting phase No message displayed on the screen INCIDENT CAUSE TROUBLESHOOTING NO NO Check the condition and the connection of the contactor Se...

Страница 80: ...is running and then is showing an alert or alarm message followed by the pump stopping 1 9 Alert Pressure Alert Pressure INCIDENT CAUSE TROUBLESHOOTING NO Check the connection See D 80 Exhaust pressu...

Страница 81: ...dition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping 2 9 INCIDENT CAUSE TROUBLESHOOTING NO See D 90 gas lower than alert threshold 1 Ch...

Страница 82: ...CIDENT CAUSE TROUBLESHOOTING NO See D 110 Insufficent water flow Check the connection Sensor not connected NO NO Call Alcatel customer service Sensor out of order Call Alcatel customer service Problem...

Страница 83: ...d by the pump stopping 4 9 Edition 04 May 98 Pump temp Alarm NO See D 91 Pump higher than alert threshold See D 91 Pump temp Alert Problem on the platinium sensor See D 91 Problem on the platinium sen...

Страница 84: ...by the pump stopping Motor temp Alarm ADP motor 65 INCIDENT CAUSE TROUBLESHOOTING NO See D 110 Cooling problems See E 50 ADP mechanical problems NO Motor temp Alert ADP motor 52 Call Alcatel customer...

Страница 85: ...NO See D 80 Flowmeter bad set See D 80 No nitrogen Alert or alarm Purge N2 Alert and alarm are swit ched on according to the delays programmed in M3 configuration Without flow purge sensor option Wit...

Страница 86: ...d input after configuration and not used Check the corresponding voltage See D 130 Problem on the display voltage NO Set the thresholds Thresholds not properly set Analogic input Alert or alarm Check...

Страница 87: ...iguration and not used Check the compressed air supply Check the valve condition Valve does not close when pump is stopping NO See D 150 Contact problems Valve option Alert NO Reset M3 configuration V...

Страница 88: ...d option ADP 81V ADS 801 1001 or ADS 501V when it is not necessary Pump is stopped NO Check the connection See D 160 Wiring problems Perform maintenance operation and reset the corresponding time Chec...

Страница 89: ...Call Alcatel customer service Internal oil leaks Mechanical noise No N2 purge NO Maintenance ADP Call Alcatel customer service Damaged ball bearings Maintenance ADP Call Alcatel customer service Roto...

Страница 90: ...P RT1 Breaker Set the plug and the strap Call Alcatel customer service NO NO Check its position Check ADP mechanical condition See E 50 Check that the silencer is not clogged See E 30 RT 1 breaker is...

Страница 91: ...r at the rear of M3 see D 10 Check the strap presence between the pins 41 42 43 and 44 on remote plug see B 140 If the defect still remains call Alcatel customer service Breaker EMO Alarm Emergency st...

Страница 92: ...urge Alert and alarm 1 2 Edition 04 May 98 Exhaust pressure higher than threshold Pressure Alert and alarm Check the nitrogen pressure setting according to section B 120 Check that the silencer the pi...

Страница 93: ...ere is no N2 pressure check nitrogen supply connections electrovalve and the coil and its connection If the incident is still present there is another problem on the M3 call Alcatel customer service C...

Страница 94: ...s Check that the exhaust pipe is not clogged Check the display ambient when pump is stopped 100 C in continuous operation Check the wiring and the sensor the resistance between pins 1 2 of J6 must be...

Страница 95: ...ent when pump is stopped 100 C in continuous operation Check the wiring and the sensor the resistance between pins 1 2 of J6 must be between 100 and 160 J6 unpluged 0 C 100 20 C 107 8 50 C 119 4 80 C...

Страница 96: ...s Check the threshold setting Check the flowrate the kind and the concentration of pumped gases Check that exhaust pipe are not clogged Check that there is no mechanical problem seizing or filling in...

Страница 97: ...electrovalve the flowmeter or the pipes are not clogged Check that there is no leak Either check the water supply and the connections Check the connection and the water valve coil condition NO Remake...

Страница 98: ...J5 D 120 Alcatel High Vacuum Technology User s Manual ADP ADS Motor temp Alert or alarm 1 1 Edition 04 May 98 ADP motor temperature higher than the thresholds Case of an alert Case of an alarm NO Cal...

Страница 99: ...arm 1 1 Edition 04 May 98 Wiring or display problem NO Problem on analogical sensor Check the threshold setting See C 30 Check the status of analogical sensor Customer one Check the display according...

Страница 100: ...wiring it must be continuity between pins 11 and 12 of J5 Check the sensor status Call Alcatel customer service The defect disappears Problem on M3 NO Remake the wiring it must not be continuity betw...

Страница 101: ...check valve contact condition No defect at pump stop Problem on M3 NO No defect at pump start up Call Alcatel customer service Problem on M3 Check the wiring by shunting pins 7 8 of J5 Check the conf...

Страница 102: ...1 1001 ADS 501V or ADP 81V D 160 Alcatel High Vacuum Technology User s Manual ADP ADS Variator Alarm 1 1 Edition 04 May 98 NO Check the configuration of M3 parameters See C 30 Problem on M3 Call Alcat...

Страница 103: ...at the operation for each housing Replace the drain plug and the remove the fill plug Introduce the quantity of new oil required see Section B 50 10 10 Study the safety precautions before intervention...

Страница 104: ...ll the backplate to the rear of the pumping unit and the side covers Perform the maintenance of the replaced parts on a bench Edition 04 May 98 SEE FOLIO 2 Consult the standard precautions before inte...

Страница 105: ...stop valve 5 Remove the two O rings 3 and 4 Clean all the parts in a bath of hot water using a cloth if necessary Dry in the air or with compressed air Position the Borrelly washer 1 and install a new...

Страница 106: ...repeatedly to access to MAINTENANCE MENU Valid with the key Press the key repeatedly to access the chosen MENU Press the key and pressing The fresh screen appears Press the key repeatedly to reset th...

Страница 107: ...ention See Section D 00 Remove the protective cover 1 and remove the O ring by removing the three M4 x 10 CHc screws ACCESS THE DRIVING SHAFT BEARING 3 Clean the O ring and grease it lightly with vacu...

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