Agilent Technologies TwisTorr 305 FSQ, Руководство пользователя

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Technical Information
188 Agilent TwisTorr 305 FSQ & 305 SF User Manual
Compliance with: EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive
2014/30/EU
Directive 2011/65/EU
NOTE
When the TwisTorr 305 FSQ has been stored at a temperature less than 5°C, wait
until the system has reached the above mentioned temperature before switch the
TwisTorr 305 FSQ on.
Table 2 TwisTorr 305 SF (X3513-64067) - Technical Specification
Technical data TwisTorr 305 SF (X3513-64067)
Pumping speed
N
2
He
H
2
Main Flange (ISO 100)
250 l/s
255 l/s
220 l/s
Side Port (KF40)
N
2
: 11 l/s
He: 15 l/s
H
2
: 14.5 l/s
Max gas flow rate (N
2
): 450 sccm
Note: value refer to water-cooling pump version with:
• water temperature between 15°C and 20°C (non condensing,)
• backing pump with pumping speed equal or above 5 m
3
/h
Compression ratio
N
2
He
H
2
Total Foreline/Side Port
2 x 10
8
N
2
: 2.1 x 10
2
1 x 10
5
He: 1.4 x 10
2
2 x 10
4
H
2
: 1 x 10
2
NOTE: For all other technical specifications, please refer to table 1.