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AGILENT TWISTORR 304 FS

QUICK REFERENCE GUIDE

Agilent TwisTorr 304FS

A quick, detailed reference guide to install and

operate the TwisTorr 304 FS.

1. Accessories and Configuration
2. Preparation for installation
3. Controller Connection and Start up sequence
4. Purge & Vent valve
5. How to enable the soft start
6. Troubleshooting: Pump and Controller

Vacuum Products

Содержание TwisTorr 304 FS

Страница 1: ...tailed reference guide to install and operate the TwisTorr 304 FS 1 Accessories and Configuration 2 Preparation for installation 3 Controller Connection and Start up sequence 4 Purge Vent valve 5 How...

Страница 2: ...ary Vane Technology Aluminium Block Valves Controller Unit Suggested Agilent Foreline pumps SH 110 IDP 15 TS 300 DS 42 DS102 202 302 Active Gauges Vent Valve Water Cooling Air Cooling Purge Valve On b...

Страница 3: ...100 160 4xM10 Claw Clamps with fixing torque 22Nm CFF6 16 screws with fixing Torque 20Nm CFF 8 20 screws with fixing torque 20Nm For water cooling flow of 50 l hr is mandatory if ambient temperature i...

Страница 4: ...Vent procedure paragraph 2 Plug and pump Connect the power supply Connect the pump cable to controller Start the primary backing pump and reach a vacuum pressure of 1 mbar Connecting the 15 pin mating...

Страница 5: ...tings 304 AG RACK CONTROLLER PURGE VALVE There are several models of purge valve available with different inlet flanges and orifices 10 or 20 SCCM to protect the bearings from particulates corrosive g...

Страница 6: ...e when powered on To operate the pump via SERIAL and activate the soft start click on Remote button If a PC is not available the soft start can be still be activated by using the 15 pin mating connect...

Страница 7: ...system Verify vent and purge screws valves to be closed or properly working Check the gas load in the chamber Check if rotor spins freely if not replace the pump PUMP OVERTEMPERATURE Navigator LED is...

Страница 8: ...or code 64 Rack AG message I displayed Loss of insulation motor windings in relation to ground Ramp currents too high Vbus control not correct One or more Mosfet is are faulty shorted after start or i...

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