background image

Varian, Inc. 

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell
Operations Manager
Vacuum Technologies

We
Wir
Nous
Nosotros
Wij
Noi

Lexington, MA, 02421-3133 USA 

121 Hartwell Avenue

Vacuum Technologies

Lexington, Massachusetts, USA

Varian, Inc. 

IMG-300 Inverted Magnetron Gauge

EN 55011

1991 . . . . . . . . . . . . . . . . . . . . . . . . Group 1 Class A ISM emission requirements

EN 61010-1

1993 . . . . . . . . . . . . . . . . . . . . . . . . Safety requirements for electrical equipment for measurement, control, and 

laboratory use incorporating Amendments Nos 1 and 2.

EN 50082-2

1995 . . . . . . . . . . . . . . . . . . . . . . . . EMC heavy industrial generic immunity standard

October 2003

Содержание IMG-300

Страница 1: ...D R A F T vacuum technologies IMG 300 Inverted Magnetron Gauge Manual No 699908230 Revision A March 2009 INSTRUCTION MANUAL 505 872 0037 www idealvac com...

Страница 2: ...D R A F T Copyright 2009 Varian Inc IMG 300 Inverted Magnetron Gauge...

Страница 3: ...epresentatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty...

Страница 4: ...IMG 300 Inverted Magnetron Gauge This page intentionally left blank D R A F T...

Страница 5: ...D R A F T v Contents Preface viii Hazard and Safety Information viii IMG 300 General Purpose Inverted Magnetron Gauge 1 1 Description 1 1 Application 1 1 Technical Specifications 1 3 Ordering Informat...

Страница 6: ...IMG 300 Inverted Magnetron Gauge This page intentionally left blank D R A F T...

Страница 7: ...Richtlinie n bereinstimmt auquel se r f re cette d claration est conforme la auz norme s ou au x document s normatif s al que se refiere esta declaraci n es conforme a la s norma s u otro s documento...

Страница 8: ...t NOTE Notes contain important information Before operating or servicing equipment read and thoroughly understand all operation maintenance manuals provided by Varian Be aware of the hazards associate...

Страница 9: ...and Vacuum System Connections Use with Combustibles and Mixtures WARNING As with all ionization gauges this device is not intrinsically safe Exercise extreme care when using this vacuum gauge while pu...

Страница 10: ...r free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces Do not clean any aluminum parts with Alconox AIconox is not compatible with aluminum and will cause damage NOT...

Страница 11: ...igned to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and...

Страница 12: ...IMG 300 Inverted Magnetron Gauge This page intentionally left blank...

Страница 13: ...virtually unbreakable compared to that of typical glass Bayard Alpert gauges A lack of excess electrons photons and heat which can be important is some applications Extremely rapid response A standard...

Страница 14: ...from the IMG 300 can be felt it is sufficiently far away Exercise care in mounting and handling to prevent the gauge from contacting other objects especially steel hand tools as these are strongly at...

Страница 15: ...rr 100 5 5x 10 6 Torr Measurement Range 10 3 to 10 11 Torr Maximum Operating Temperature 250 C CFF metal gasket with magnet Electrical Connector SHV style 5kV rated Feedthrough UHV Ceramic brazed Igni...

Страница 16: ...IMG 300 Inverted Magnetron Gauge 1 4 D R A F T Fringe Field Contours Figure 1 2 and Figure 1 3 represent fringe field contours Figure 1 2 Fringe Field Contour...

Страница 17: ...IMG 300 Inverted Magnetron Gauge D R A F T 1 5 Figure 1 3 Fringe Field Contour...

Страница 18: ...IMG 300 Inverted Magnetron Gauge This page intentionally left blank D R A F T...

Страница 19: ...and package the product carefully to avoid damage in transit You are responsible for loss or damage in transit Varian Inc is not responsible for returning customer provided packaging or containers Cl...

Страница 20: ...IMG 300 Inverted Magnetron Gauge This page intentionally left blank D R A F T 4 2 1 0 9...

Страница 21: ......

Страница 22: ...apan Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Toll Free 0...

Отзывы: