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Inverted Magnetron Pirani Gauge FRG-700 FRG-702

 

10

 

 

2 

Technical Data 

 

Measuring range (air, N

2

) 

5×10

-9

 

… 1000 mbar 

Accuracy 

±30% (in the range 

1×10

-8

 

… 100 mbar) 

Repeatability 

±5% (in the range 

1×10

-8

 

… 100 mbar) 

 

Output signal (measuring signal) 

 

Voltage range 

0 

… +10.5 V 

Measurement range 

1.82 

… 8.6 V 

Voltage vs. pressure 

logarithmic , 0.6 V/decade 

Error signal 

<0.5 V  no supply 

>9.5 V  Pirani sensor de-
fective (filament rupture) 

 

Output impedance 

2×10 

 

Minimum loaded impedance 

10 k

, short-circuit proof 

Response time 

p > 10

-6

 mbar 

(pressure dependent) 
<10 ms 

p = 10

-8

 mbar 

1000 ms 

 

Identification gauge 

85 k

,  referenced to 

supply common 

 

Status 

pin 6 

p > 10

-2

 mbar 

Pirani-only mode 

 

Low = 0 V 

p < 10

-2

 mbar 

Cold cathode not ignited 
Pirani-only mode 

 

Low = 0 V 

p < 10

-2

 mbar 

Cold cathode ignited 
Combined Pirani / cold 
cathode mode 

 

High = 15 

… 30 VDC 

LED 

High voltage on (LED on) 

 

Содержание FRG-700

Страница 1: ......

Страница 2: ......

Страница 3: ...This page is intentionally left blank ...

Страница 4: ...ta 10 3 Installation 17 3 1 Vacuum Connection 177 3 2 Power Connection 18 4 Operation 233 4 1 Gas Type Dependence 233 4 2 Ignition Delay 23 4 3 Adjusting the Gauge 244 5 Deinstallation 277 6 Maintenance Troubleshooting 288 7 Returning the Product 299 8 Disposal 30 9 Literature 31 For cross references within this document the symbol XY is used for cross references to further documents listed under ...

Страница 5: ...py that information into the space provided below Model PN SN V Hz VA Made in Liechtenstein Agilent Technologies Validity This document applies to products with the following part num bers FRG 700 FPM sealed FRG 702 all metal FRG700KF25 DN 25 ISO KF FRG702KF25 DN 25 ISO KF FRG700CF35 DN 40 CF F FRG702KF40 DN 40 ISO KF FRG702CF35 DN 40 CF F The part number PN can be taken from the product nameplate...

Страница 6: ... vacuum measurement of gases in the pressure range of 5 10 9 1000 mbar They must not be used for measuring flammable or combustible gases in mixtures containing oxidants e g atmospheric oxygen within the explosion range The gauges can be operated in connection with an Agilent AGC 100 Vacuum Gauge Controller an Agilent Turbo AG Rack Controller or with another controller Functional Principle The gau...

Страница 7: ...ent and environ mental damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 8: ...for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum com ponents are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts DANGER DANGER magnetic fields Strong magnetic fields can disturb electronic devices like heart pacemakers or impair their funct...

Страница 9: ...ocument use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the product documentation The end user assumes the responsibility in conjunction with the process media used Gauge failures due to contamination or wear and tear as well as expendable parts e g seals filament are not covered b...

Страница 10: ...c 0 6 V decade Error signal 0 5 V no supply 9 5 V Pirani sensor de fective filament rupture Output impedance 2 10 Minimum loaded impedance 10 k short circuit proof Response time p 10 6 mbar pressure dependent 10 ms p 10 8 mbar 1000 ms Identification gauge 85 k referenced to supply common Status pin 6 p 10 2 mbar Pirani only mode Low 0 V p 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V...

Страница 11: ...p 2 Adjustment Potentiometer HV Potentiometer ATM adjustment under 10 4 mbar adjustment at atmospheric pressure Electrical connection FCC68 socket 8 pin Sensor cable 8 pin shielded Line length 50 m 8 0 14 mm Operating voltage 3 3 kV Operating current 500 µA Grounding concept Electrical Connection Vacuum connection measuring common connected via 10 k max voltage differential with respect to safety ...

Страница 12: ...er Sn Ag Mo stainless steel Ni Au W Internal volume 20 cm Pressure 10 bar absolute limited to inert gases Temperatures Operation FRG 700 FRG 702 Bakeout Pirani filament Storage 5 55 C 5 150 C 3 150 C without electronics and magnetic shielding 120 C 40 65 C Relative humidity 80 at temperatures 31 C decreasing to 50 at 40 C Mounting orientation any Use indoors only altitude up to 2000 m Degree of pr...

Страница 13: ...Inverted Magnetron Pirani Gauge FRG 700 FRG 702 13 Dimensions mm 18 DN 25 ISO KF 18 5 DN 40 ISO KF DN 40 CF F 24 105 32 55 60 75 15 5 ø 63 5 92 ø 63 5 28 55 60 75 ...

Страница 14: ...re Pressure p 1E 04 1E 02 1E 00 U V 0 0 0 5 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 1E 02 1E 04 1E 06 1E 08 sensor error underrange overrange sensor error Pa mbar torr p 101 667U d Measurement signal U V p 10 1 667 U d U c 0 6log10 p mbar Pa Torr d 11 33 9 33 11 46 c 6 8 5 6 6 875 valid in the range 5 10 9 mbar p 1000 mbar 3 8 10 9 Torr p 750 Torr 5 10 7 Pa p 1 10 5 Pa ...

Страница 15: ...FRG 702 15 Gas Type Dependence 102 8 6 4 2 101 8 6 4 2 100 8 6 4 2 10 1 8 6 4 2 10 2 p mbar peff mbar 10 3 2 4 6 10 2 2 4 6 10 1 2 4 6 100 2 4 6 101 2 4 6 102 H2 He Ne Xe Ar Freon 12 Water vapor Air O2 CO N2 Kr Indication range 10 2 mbar CO2 ...

Страница 16: ...ange 10 6 10 1 mbar peff mbar 10 6 2 4 6 10 6 2 4 6 10 4 2 4 6 10 3 2 4 6 10 2 2 4 6 10 1 In the range below 10 5 mbar the pressure indication is linear For gases other than air the pressure can be determined by means of a simple conversion formula peff K pressure reading Where Gas type K mean values Air O2 CO N2 Xe Kr Ar H2 Ne He 1 0 0 4 0 5 0 8 2 4 4 1 5 9 ...

Страница 17: ... if clamps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings provided ...

Страница 18: ... ac cording to EN 61010 CF flanges fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof wi...

Страница 19: ...ation and remove the electronics unit The gauge may be mounted in any orientation To keep condensates and particles from getting into the measur ing chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter If adjustment should be possible after the gauge has been installed be sure to install it so that potentiometers HV and ATM can be acce...

Страница 20: ...tron Pirani Gauge FRG 700 FRG 702 20 When making a CF flange connection it can be ad vantageous to temporarily remove the electronics and the magnet unit Hex socket AF 1 5 AF 7 Protective lid Keep the protective lid ...

Страница 21: ...tron Pirani Gauge FRG 700 FRG 702 21 Remove the protective lid and connect the product to the vacuum system or Protective lid Clamp Seal with centering ring Seal with centering ring and filter Keep the protective lid ...

Страница 22: ...ensor cable is available make one according to the following diagram Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c 8 pin FCC 68 1 8 10 10 Ident 3 5 4 1 2 6 10 k Signal Connect the gauge to the controller using the sensor cable ...

Страница 23: ... and is activated only at pressures 1 10 2 mbar 4 1 Gas Type Dependence The measurement value depends on the type of gas being measured The value displayed is accurate for dry air O2 CO and N2 It can be mathematically converted for other gases Technical Data If the gauge is operated in connection with an Agilent vacuum gauge controller a calibration factor can be entered for correction of the read...

Страница 24: ...measurement circuit which is dominant for low pressures 1 10 3 mbar is factory calibrated By way of con trast the Pirani measurement circuit can be adjusted Any ad justment has a negligible effect on the pressure range between approx 10 2 mbar and 10 2 mbar If you are using a seal with centering ring and filter check that they are clean or replace them if necessary Dein stallation Activate the gau...

Страница 25: ...mm adjust the HV potentiometer by means of a 1 5 mm screwdriver to 4 20 V or to 5 10 4 mbar After that turn the potentiometer counter clockwise by 1 3 of a turn Vent the gauge with air or nitrogen to atmospheric pres sure and wait at least 10 minutes Turn the nameplate clockwise until the mechanical stop is reached ...

Страница 26: ...Inverted Magnetron Pirani Gauge FRG 700 FRG 702 26 Using the 1 5 mm screwdriver adjust the ATM potentiometer to 8 60 V or to 1 10 3 mbar Turn the nameplate back to its original position it catches ...

Страница 27: ... the necessary precautions when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint f...

Страница 28: ...flange connection it can be ad vantageous to temporarily remove the electronics and the magnet unit 20 6 Maintenance Troubleshooting Operating Manual tqna74e1 under www agilent com If operated at high pressures or under dirty conditions the gauge must be regularly cleaned Gauge failures due to contamination or wear and tear as well as expendable parts e g seals filament are not covered by the warr...

Страница 29: ...s returned to Agilent should preferably be free of harmful substances Adhere to the for warding regulations of all involved countries and forwarding companies and enclose a duly com pleted declaration of contamination Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declaration of co...

Страница 30: ... mechanical and electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be ...

Страница 31: ...ture 1 www agilent com Operating Manual Inverted Magnetron Pirani Gauge FRG 700 FRG 702 tqna74e1 Agilent Technologies Lexington MA 02421 USA 2 www agilent com Operating Manual AGC 100 Vacuum Gauge Controller tqnb15e1 Agilent Technologies Lexington MA 02421 USA ...

Страница 32: ...Inverted Magnetron Pirani Gauge FRG 700 FRG 702 32 Notes ...

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Страница 36: ...t q ma 7 4 e 1 ...

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