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HS452, HS652 Rotary Vane Pumps User Manual / 87-900-978-01 (H)

HINWEIS

Die Pumpe wird mit einigen Standardzubehörteilen geliefert:

1 Ölflasche Agilent GP

1 9-Stift-Stecker "D" für I/O (Steckbuchse)

1 9-Stift-Stecker "D" für RS232 (Stecker)

1 Sicherung T10A

Abbildung 1

Compound High Vacuum P

Specially Formulated for Dire

fluids contact the local Varian Industrial Prod

and the fluid. For specific information concer

and reduced maintenance requirements on b

lower base pressure capability, faster pump-

These precisely distilled fluids have been de

to provide superior performance in today's hi

EUROPE

Varian vacuum pump fluids are specifically e

ONE Liter

P/N K7516301

ONE Liter

Mod. 949-9390

USA

direct drive mechanical pumps.

Содержание 949-9360

Страница 1: ...HS452 HS652 Rotary Vane Pumps Models 949 9360 949 9365 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 978 01 H 05 2011...

Страница 2: ...cument are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government...

Страница 3: ...HS452 HS652 Rotary Vane Pumps HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H 3 102 HS452 HS652 Rotary Vane Pumps...

Страница 4: ...HS452 HS652 Rotary Vane Pumps 4 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H...

Страница 5: ...li 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 13 Uso15 Manutenzione 16 Smaltimento 18 2 Anleitung zur Installation 19 Allgemeine Hinweise 20 Lagerung 21 Vor der Installat...

Страница 6: ...tenance 36 Mise au Rebut 38 4 Installation Procedure 39 General Information 40 Storage 41 Preparation for Installation 41 Installation 43 Use45 Maintenance 46 Disposal 48 5 Technical Information 49 Te...

Страница 7: ...perations 65 Section II 66 Connection to the Electric Supply66 Connections to the Inlet and Exhaust Flanges 66 Starting and Running the Pump 68 Stopping the Pump 69 Safety Rules70 Maintenance Actions...

Страница 8: ...Contents 8 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H...

Страница 9: ...r Manual 9 102 1 Procedura per l installazione Informazioni generali 10 Immagazzinamento 11 Preparazione per l installazione 11 Installazione 13 Uso 15 Manutenzione 16 Smaltimento 18 Traduzione delle...

Страница 10: ...no delle pompe rotative bistadio a palette a tenuta in bagno d olio azionate da motore elettrico trifase Queste pompe da alto vuoto sono adatte al pompaggio di gas non corrosivi Nei paragrafi seguenti...

Страница 11: ...ersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa al massimo di circa 36 Kg Durante l operazione di disimballaggio prestare particol...

Страница 12: ...aschio 1 fusibile T10A Figura 1 GP Compound High Vacuum P Specially Formulated for Dire fluids contact the local Varian Industrial Prod and the fluid For specific information concer and reduced mainte...

Страница 13: ...ssario che siano rispettate le seguenti condizioni ambientali temperatura da 12 C a 40 C umidit relativa 0 95 non condensante AVVERTENZA Per proteggere contro corto circuiti o sovraccarichi si deve in...

Страница 14: ...l installazione prestare la massima attenzione che la flangia di aspirazione sia collegata alla camera da evacuare e che la flangia di scarico non sia tappata vedere la figura seguente La pompa non d...

Страница 15: ...ar marciare per circa un ora la pompa con zavorra aperta allo scopo di eliminare l umidit nell olio L accensione della pompa non richiede particolari manovre sufficiente collegarla all alimentazione e...

Страница 16: ...igore AVVERTENZA Quando la macchina alimentata prestare attenzione per la presenza di parti in movimento e di alta tensione AVVERTENZA Nel caso si debba procedere ad operazioni di manutenzione della p...

Страница 17: ...pu essere elevata NOTA Prima di rispedire al costruttore una pompa per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente...

Страница 18: ...mbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un s...

Страница 19: ...Vane Pumps User Manual 19 102 2 Anleitung zur Installation Allgemeine Hinweise 20 Lagerung 21 Vor der Installation 21 Installation 23 Gebrauch 25 Wartung 26 Entsorgung 28 bersetzung der Originalanlei...

Страница 20: ...von einem Dreiphasenstrommotor bet tigt werden Diese Hochvakuumpumpen eignen sich f r das Pumpen von nicht korrosiven Gasen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die...

Страница 21: ...n sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht betr gt einschlie lich der Pumpe maximal 36 Kg Beim Auspacken ist darauf zu achten da die Pumpe nicht fallengelassen ode...

Страница 22: ...herung T10A Abbildung 1 GP Compound High Vacuum P Specially Formulated for Dire fluids contact the local Varian Industrial Prod and the fluid For specific information concer and reduced maintenance re...

Страница 23: ...erh hte Brandgefahr besteht W hrend des Betriebs sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 12 C bis 40 C Relative Feuchtigkeit 0 95 niederschlagsfrei WARNUNG Zum Schutz vor Ku...

Страница 24: ...st unbedingt darauf zu achten dass der Saugflansch an die zu entleerende Kammer angeschlossen ist und der Ablassflansch nicht verschlossen ist siehe nachstehende Abbildung Die Pumpe darf nicht als Ver...

Страница 25: ...htigkeit aus dem l zu entfernen Die Einschaltung der Pumpe erfordert keine speziellen Schritte sie braucht nur durch Bet tigung des zweipoligen Version mit Einphasenstrommotor oder des allpoligen Tren...

Страница 26: ...der geltenden Unfallschutzvorschriften vorzugehen WARNUNG Bei eingeschaltetem Ger t ist auf Bewegungs und Hochspannungsteile zu achten WARNUNG Falls die Pumpe im Anschlu an den Betrieb gewartet werden...

Страница 27: ...ann HINWEIS Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Handbuch auszuf llen und der lokalen Verkaufsstel...

Страница 28: ...tronischen Ger ten angebracht Das nur in EU L ndern g ltige Symbol zeigt an dass das betreffende Produkt NICHT zusammen mit normalem Haushalts und Industriem ll entsorgt werden darf sondern einem diff...

Страница 29: ...anual 29 102 3 Proc dure pour l installation Indications Generales 30 Emmagasinage 31 Pr paration pour l Installation 31 Installation 33 Utilisation 35 Maintenance 36 Mise au Rebut 38 Traduction de la...

Страница 30: ...des pompes rotatives deux stades palettes tanches en bain d huile actionn es par un moteur lectrique triphas Ces pompes vide pouss sont adapt es au pompage de gaz non corrosifs Les paragraphes suivant...

Страница 31: ...ansport contacter aussit t le bureau de vente local Le poids total de l emballage et de la pompe est au maximum de 36 Kg Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne...

Страница 32: ...2 m le 1 fusible T10A Figure 1 GP Compound High Vacuum P Specially Formulated for Dire fluids contact the local Varian Industrial Prod and the fluid For specific information concer and reduced mainten...

Страница 33: ...st n cessaire de respecter les conditions environnementales suivantes Temp rature de 12 C 40 C Humidit relative 0 95 non condensante AVERTISSEMENT Pour prot ger contre les court circuits ou les surint...

Страница 34: ...ndant l installation faire tr s attention que la bride d aspiration soit reli e la chambre vider et que la bride d vacuation ne soit pas bouch e voir la figure ci apr s La pompe ne doit pas tre utilis...

Страница 35: ...reniflard ouvert afin de supprimer l humidit de l huile La mise en marche de la pompe ne requiert aucune man uvre particuli re il suffit de la brancher l alimentation lectrique et d agir sur l interru...

Страница 36: ...en vigueur AVERTISSEMENT Lorsque la machine est sous alimentation faire attention la pr sence d organes en mouvement et de haute tension AVERTISSEMENT En cas de n cessit de proc der des op rations de...

Страница 37: ...te derni re peut tre lev e NOTE Avant de retourner une pompe au constructeur pour r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche S curit et Sant jointe la p...

Страница 38: ...symbole valable uniquement pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE DOIT PAS tre mis au rebut avec les d chets domestiques ou industriels mais doit...

Страница 39: ...Rotary Vane Pumps User Manual 39 102 4 Installation Procedure General Information 40 Storage 41 Preparation for Installation 41 Installation 43 Use 45 Maintenance 46 Disposal 48 Original Instructions...

Страница 40: ...ds The HS452 and HS652 pumps are dual stage rotary vane pumps oil sealed driven by a three phases electric motor These high vacuum pumps are suitable for pumping non corrosive gases The following para...

Страница 41: ...of damage which may have occurred during transport contact your local sales office Total weight of the pack including the pump is approx 36 Kg When unpacking the pump be sure not to drop it and avoid...

Страница 42: ...T10A Figure 1 GP Compound High Vacuum P Specially Formulated for Dire fluids contact the local Varian Industrial Prod and the fluid For specific information concer and reduced maintenance requirements...

Страница 43: ...40 C relative humidity 0 95 non condensing WARNING Protect against short circuits and overload by installing on Agilent Device electrical main line an automatic circuit breaker of proper capacity see...

Страница 44: ...er and the exhaust flange is not closed see the following figure The pump must not be used as a compressor Maximum pressure inside the oil container must not exceed 1 5 bar abs Non observance of these...

Страница 45: ...about an hour with the gas ballast valve open This will eliminate any humidity from the oil There are no special procedures for switching the pump on it needs only to be connected to the electric pow...

Страница 46: ...accident prevention regulations in force WARNING When machine is powered take care on account of moving parts and high voltages WARNING If you have to perform maintenance on the pump after a considera...

Страница 47: ...e as the oil temperature may still be high NOTE Before returning the pump to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to t...

Страница 48: ...e This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to...

Страница 49: ...5 Technical Data 60 Dimensions 62 Safety Precautions 63 Transport and Installation 64 Preliminary Operations 65 Section II 66 Connection to the Electric Supply 66 Connections to the Inlet and Exhaust...

Страница 50: ...mmunications 81 RS 232 RS 485 Communication Description 83 J2 Serial Port 83 Communication Format 84 Communication Protocol 84 Windows meaning 88 Electronic Self Test 91 Rotor Lock Test 91 Oil Level C...

Страница 51: ...These vacuum pumps are suitable for pumping non corrosive gases The main features are all parts in direct contact with the fluid pumped are free of copper alloys all materials are carefully selected t...

Страница 52: ...sealing of the parts inside facilitates heat dissipation and reduces pump noise The pump is equipped with a special anti suckback device which automatically isolates the vacuum system when the pump s...

Страница 53: ...il is drawn through a gauze filter to prevent any foreign bodies from entering the pump Shunt mounted on the delivery line is a hydraulic piston which besides actuating the anti suckback device see AN...

Страница 54: ...lve When the pump sucks in vapors these condense during compression and mix with the oil forming an emulsion an aqueous vapor for example or a solution organic solvent vapors for example A number of p...

Страница 55: ...d from each other and air can enter the pump without any risk for the vacuum produced in the system The device includes some special features namely drive obtained avoiding any form of contamination o...

Страница 56: ...5 Technical Information Anti Suckback Device 56 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H Figure 5 View of the pump...

Страница 57: ...ot 3 Screw 4 Screw 5 Screw 7 Spacer 8 Motor support 9 Handle 10 Screw 11 Right sideplate 12 Board 14 Screw 15 Support plate 16 Cylindrical pin 1 2 17 Screw 18 Rubber crown 1 2 19 Half joint with fan 2...

Страница 58: ...e vane 1 39 First stage rotor SR03700371 40 Spring 1 2 41 Tongue SR8999980401 42 Second stage vane 1 43 Second stage rotor SR03700367 44 Tie rod SR03700335 45 OR gasket 1 2 46 Bracket 47 Screw 49 Valv...

Страница 59: ...77 70 Oil pump cover 71 Screw 73 Plate 74 Filter 75 Casing 76 Exhaust flange 77 OR gasket 1 2 78 Oil fill plug 79 Oil drain plug SR03700256 80 Oil drain plug gasket SR03700256 81 Left sideplate 83 Spr...

Страница 60: ...S452 and HS652 pumps Tab 3 TECHNICAL DATA Hz UNITS HS452 HS652 FREE AIR DISPLACEMENT 66 l min m3 h 450 27 658 39 5 46 l min m3 h 327 19 6 478 28 7 PUMPING SPEED at 5 mbar inlet pressure 66 m3 h 21 29...

Страница 61: ...169 Installation category II Pollution degree 2 OPERATING TEMPERATURE RANGE C 12 40 12 40 WEIGHT Kg 33 33 lb 72 7 72 7 INLET FLANGE DN 25KF 25KF EXHAUST FLANGE DN 25KF 25KF Main Dimensions length mm 5...

Страница 62: ...Technical Information Technical Data 62 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H Dimensions The following figure shows the pump dimensions Figure 6 HS 452 and HS 652 pump dimensio...

Страница 63: ...cautions Always carry the pump by means of the handle provided The pump must be set in position taking the upmost care in order to avoid accidental falls WARNING In case of a need to handle the pump a...

Страница 64: ...e temperature is not inside this range consult Agilent technical service for the changes required Setting the pump in position should be performed as follows Pump laid on the ground There are no speci...

Страница 65: ...Ensure that the pump has not suffered any damage during shipping b Check that there are no uncovered or loose parts Preliminary Operations Before starting the pump fill up with lubricating oil as the...

Страница 66: ...e evacuated to the inlet flange using a centering ring with OR and a locking collar NOTE For guarantee reliable sealing use an OR gasket in Perbunan or Viton The inlet duct is equipped with a sieve fi...

Страница 67: ...ue forcing of the connection on the pump The exhaust duct must be connected to a pipe that will take away the pumped out gases NOTE Application of an oil trap filter is necessary to avoid pollution of...

Страница 68: ...he oil reaches its working temperature There are no special instructions for normal operation of the pump which is delivered to you after completion of a running in cycle in the factory If the pump is...

Страница 69: ...ial procedures for switching the pump off it needs only to be disconnected from the electric power by means of the bipolar switch When the pump is stopped the anti suckback device makes it possible to...

Страница 70: ...ons which if not respected and or implemented correctly may cause body harm to operators CAUTION Operating procedures technical information and precautions which if not respected and or implemented co...

Страница 71: ...emaining inside the pump in the course of repair work g In case of fire do not throw water on the pump Switch the power off and use CO2 extinguishers h Carefully inspect the flanges to ensure that the...

Страница 72: ...d surface areas of all parts stripped down until they are put back on the pump again d Always check the lubricant and that it is properly distributed through the pump inadequate lubrication may damage...

Страница 73: ...pump must be cleaned at regular intervals of time CAUTION Do not clean with Alcohol the plastic or rubber components of the pump Use only the strictly necessary amount of lubricant an excess of lubri...

Страница 74: ...with the essential design features and operation of the pump know how to use and consult the pump documentation be concerned about proper operation of the pump make a note of any irregularities in ope...

Страница 75: ...skin carefully after contact with the lubricants by washing freely with water and soap Apply a skin cream after washing Take off and change clothes or shoes on which oil has been spilled Never put ra...

Страница 76: ...the same characteristics as the previous oils Only use of lubricants of suitable quality will guarantee safe operation of the pumps CAUTION Mineral oils and the PFPE oil are incompatible To change fro...

Страница 77: ...tary Vane Fluid DS19 Type characteristics PROPERTY UNIT OF MEASURE ROTARY VANE FLUID DS19 Type Vapor pressure 25 C Torr 1 10 5 Boiling point 0 01 torr C F 112 233 Viscosity 40 C cSt SUS 55 258 Viscosi...

Страница 78: ...5 Technical Information Lubricants 78 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H Figure 7 Agilent Rotary Vane Fluid DS19 Type vapor pressure curve...

Страница 79: ...Technical Information Lubricants 5 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H 79 102 Figure 8 Agilent Rotary Vane Fluid DS19 Type viscosity curve...

Страница 80: ...nput voltage 100 120 V 50 60 Hz 200 V 240 V 50 60 Hz Output voltage 189 Vrms 3 ph Max frequency 68 Hz factory setting Starting phase maximum power 780 W maximum time 15 min Normal Operation maximum po...

Страница 81: ...ollution degree 2 EN60950 Input Output Communications Tab 5 P1 I O PIN N SIGNAL NAME IN OUT 1 Norm Status N O relay contact out 2 Speed setting 0 10V in 3 Oil level relay contact out 4 Start in 5 Grou...

Страница 82: ...ump Electronic Controller 82 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H Figure 10 NOTE The pump operation is I O signals dependent so you must always plug in the provided mating con...

Страница 83: ...J2 Serial Port Tab 6 PIN N SIGNAL NAME 1 5 V out 2 TX RS232 3 RX RS232 4 Spare 5 GND 6 A RS485 7 Spare 8 B RS485 9 Spare The communication protocol is the same see the structure below but only the RS...

Страница 84: ...E type where Host MASTER Pump SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the h...

Страница 85: ...d this field is not present The field length is variable according to the data type as per the following table Tab 7 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON Numeric N 6 0 9 right...

Страница 86: ...15 The command execution has been failed Unknown Window 1 byte 0x32 The specified window in the command is not a valid window Data Type Error 1 byte 0x33 The data type specified in the command Logic N...

Страница 87: ...s Command START Source PC Destination Pump 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Pump Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destinat...

Страница 88: ...with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Windows meaning Tab 9 WIN TYPE DESCRIPTION 000 L START STOP 1 START 0 STOP 0...

Страница 89: ...normal 6 fail 206 N ERROR CODE Bit 7 motor block Bit 6 short circuit Bit 5 undervoltage Bit 4 motor over temperature Bit 3 power fail Bit 2 controller overt Bit 1 pump overt Bit 0 spare 211 N CONTROLL...

Страница 90: ...Controller status Off Stop Green flashing Ramp Autotuning Green Normal Operation Red Fail Slow red flashing 2 Hz Oil level fail Quick red flashing 10 Hz Oil level sensor fail Orange Off Reset selftes...

Страница 91: ...p accelerate The acceleration time is a function of the oil temperature and of the chamber volume to rough down The lower is the oil temperature the longer is the time required to reach nominal speed...

Страница 92: ...against Solids Protection against accidental touch of parts under power or internal moving parts with tools wires or similar objects with a size larger than 1mm Protected against intrusion of parts l...

Страница 93: ...the D rubber plate item 1 into the pump s IEC main socket pushing it till the socket bottom 3 Screw down the two brackets spacers items 2 on the standard IEC socket spacers 4 Insert the main cable pl...

Страница 94: ...ry Kit P N 949 9367 94 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H Figure 12 WARNING To obtain the IP44 protection level you must set up the pump electrical connections as highlighte...

Страница 95: ...cap as showed in the following figure Figure 14 Accessories Tab 12 PART NUMBER DESCRIPTION 949 9390 Rotary Vane Fluid DS19 Type 1 L bottle 949 9395 Smart Pump Oil mist eliminator 949 9392 Smart Pump E...

Страница 96: ...5 Technical Information Accessories 96 102 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 H...

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Страница 102: ...6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3...

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