Agilent Technologies 8698961R001, Руководство пользователя

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Technical Information
Technical Specification
17
Turbo-V 1K-G Retrofit User Manual / 87-900-996-01 (B) 243/294
Technical Specification
Tab. 2 Technical Specification
Pumping speed (without inlet
screen) Ar:
N
2
:
He:
H
2
:
ISO 160:
750 l/s
810 l/s
950 l/s
680 l/s
ISO 200:
1040 l/s
1080 l/s
1150 l/s
730 l/s
Compression ratio
Ar:
N
2:
He:
H
2
:
>5 x 10
8
>1 x 10
8
1 x 10
5
2 x 10
4
Base pressure
with recommended forepump
< 1 x 10
-10
mbar
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
Inlet flange ISO 160, ISO 200
Foreline flange KF 25 NW (ISO 160 inlet flange)
KF 40 NW (ISO 200 inlet flange)
Rotational speed 45660 rpm
Start-up time < 5 minutes
Recommended forepump ISO 160: >20 m
3
/h (TriScroll 600, DS 602, HS 452,
HS 652)
ISO 200: >36 m
3
/h
Operating position Any
Operating ambient temperature +5 °C to +35 °C
Bakeout temperature 80 °C at inlet flange max.(ISO flange)
Vibration level (displacement) < 0.01 µ m at inlet flange
Lubricant permanent lubrication
Cooling requirements Water
Coolant water Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +30 °C
Pressure: 3 to 5 bar (45 to 75 psi)