Aerotech MPS75SL, Руководство по оборудованию

Страница: 22 / 56

Mechanical Specifications and Installation MPS75SL/SLE Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The MPS75SL/SLE must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the MPS75SL/SLE stage. When it is mounted to a non-flat surface, the stage can be
distorted as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments
to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm.
N O T E : The MPS75SL/SLE is precision machined and verified for flatness prior to product assembly at
the factory. If machining is required to achieve the desired flatness, it should be performed on the
mounting surface rather than the MPS75SL/SLE. Shimming should be avoided if possible. If shimming is
required, it should be minimized to retain maximum rigidity of the system.
Mount the stage to the mounting surface using M4 socket head cap screws (SHCS) in the [QTY 4] outer
mounting holes. Additional mounting holes are hidden under the stage table and should only be used for
mounting XY assemblies or, in special cases, when advised to by Aerotech. Securing the stage using the
inner mounting holes requires special instructions, refer to
Section 2.3.1.
Refer to Section 2.2. for the dimension drawing for mounting hole locations and screw lengths.
D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical
power prior to performing any maintenance or making adjustments to the equipment.
W A R N I N G : An unsecured MPS75SL/SLE could be dragged off of a mounting surface by its
unsupported cable.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware
Typical Screw
Torque
MPS75SL Outer Mounting
Holes
M4 x 14 mm 2.0 N·m
22 Chapter 2 www.aerotech.com