Aerotech ABL9000 Series, Руководство пользователя

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Operating Specifications ABL/ABLH9000 Series Stage User's Manual
3.2. Basic Specifications
Basic ABL/ABLH9000 series positioning stage specifications are shown in Table 3-2. Motor specifications
are shown in Table 3-4.
Table 3-2: ABL/ABLH9000 Series Specifications
Basic Model ABL90300-300 ABL90500-500
Total Travel 300 mm x 300 mm 500 mm x 500 mm
Drive System Linear Brushless Servomotor
(Bridge Axis: BLM-142-A, Gantry Axis: BLM-142-A)
Feedback Noncontact Linear Encoder (LN) or Laser Inter-
ferometer (LZR)
Resolution 1 nm - 1.0 µm
Maximum Travel Speed
(1)
500 mm/s
Maximum Linear Acceleration (no load) 1 g - 10 m/s
2
Maximum Load
(2)
30.0 kg
Accuracy
(3)
LN ±0.5 µm ±0.75 µm
LZR Standard ±10 ppm; Com-
pensated ±1.5 ppm
(4)
Contact Aerotech for fur-
ther details
Repeatability
(3)
LN ±0.1 µm
Straightness and Flat-
ness
(5)
Maximum Deviation ±0.50 µm ±1.5 µm
Pitch/Roll/Yaw 2 arc sec 3.5 arc sec
Stage Mass 320 kg 690 kg
Moving Mass Bridge 9.5 kg
Gantry 44.0 kg 57.0 kg
Orthogonality 2 arc sec 3 arc sec
Operating Pressure
(6)
551.6 kPa + 0, -34 kPa
Air Consumption
(7)
45 SLPM
Material
(8)
Aluminum
Finish Hard Coating (62 Rockwell Hardness Teflon® Impreg-
nated)
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system res-
olution.
(2) Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
(3) Requires Aerotech controllers and HALAR Calibration option.
(4) Requires environmental compensation.
(5) Requires HALSF option
(6) To protect air bearing against under-pressure, an in-line pressure switch tied to controller E-stop input is recommended.
(7) Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
(8) Optional construction materials include ceramic, invar, stainless, and titanium.
(9) Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard applications.
12 Chapter 3 www.aerotech.com