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OPERATING MANUAL

DFM

Digital Mass Flow Meter

Technical Data Sheet No.: 

TD0501M Rev. D

Date of Issue: 

September 2015

Содержание DFM 26

Страница 1: ...OPERATING MANUAL DFM Digital Mass Flow Meter Technical Data Sheet No TD0501M Rev D Date of Issue September 2015...

Страница 2: ...gistered trademark of Aalborg Instruments Controls NOTE Aalborg reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please co...

Страница 3: ...ng LCD and Keypad 5 3 1 Changing Units of Measurement for Temperature Pressure Reading 5 3 2 Monitoring DFM peripheries settings 5 3 3 DFM Main Menu 5 3 4 Gas Flow Engineering Units Settings 5 3 5 Gas...

Страница 4: ...0 5 Vdc analog output calibration DFM 27 37 47 7 3 7 Gas pressure 4 20 mA analog output calibration DFM 27 37 47 7 4 Temperature or and Pressure sensor Calibration 8 RS 485 RS 232 SOFTWARE INTERFACE C...

Страница 5: ...be accepted Aalborg7 reserves the right to charge a fee to the customer for equip ment returned under warranty claims if the instruments are tested to be free from warrantied defects Shipping charges...

Страница 6: ...quarter turns Avoid over tightening which will seri ously damage the Restrictor Flow Elements RFE s Caution For models DFM 27 37 47 Multi Parameter versions the maximum pressure in the gas line should...

Страница 7: ...0 of the flow meter s full scale range Multi Parameter versions DFM 27 37 47 are in addition equipped with either a cali brated 0 5 VDC 0 10VDC optional or a calibrated 4 20 mA output signal jumper se...

Страница 8: ...configured for multidrop 2 wire half duplex mode The transmitter circuit has to be enabled by TD or RTS depending on which is available on the converter adapter Settings for the receiver circuit usua...

Страница 9: ...al RS232 RX 25 Chassis Ground Figure b 1 DFM 25 Pin D Connector Configuration IMPORTANT NOTES In general D Connector numbering patterns are standardized There are however some connectors with nonconfo...

Страница 10: ...arried by the gas stream from the upstream coil to the downstream coil windings The resultant temperature dependent resistance differential is detected by the electronic control circuit The measured g...

Страница 11: ...OR DFM 26 36 46 INCLUDING LINEARITY 1 of FS at calibration temperature and pressure REPEATABILITY 0 15 of full scale FLOW TEMPERATURE COEFFICIENT 0 15 of full scale F C or better FLOW PRESSURE COEFFIC...

Страница 12: ...E SENSITIVITY Incremental deviation of up to 1 from stated accuracy after re zeroing OUTPUT SIGNALS Linear 0 5 Vdc 3000 ohms min load impedance Linear 0 10Vdc 6000 ohms min impedance Linear 4 20 mA 50...

Страница 13: ...andard 1 4 compression fittings Model DFM 36 37 standard 1 4 compression fittings Model DFM 46 47 standard 3 8 compression fittings Optional 1 8 or 3 8 compression fittings and 1 4 VCR7 fittings are a...

Страница 14: ...en at STP conditions i e 70 F F 21 1 F C at 1 atm For other gases use the K factor as a multiplier from APPENDIX 2 CODE scc min N2 CODE std liters min N2 01 0 to 10 07 0 to 1 02 0 to 20 08 0 to 2 03 0...

Страница 15: ...sid kPa DFM 26 27 up to 10 25 0 04 0 276 DFM 36 37 20 300 0 44 3 03 30 800 1 18 8 14 40 1480 2 18 15 03 50 2200 3 23 22 3 DFM 46 47 60 3100 4 56 31 4 100 5500 8 08 55 7 MODEL WEIGHT SHIPPING WEIGHT DF...

Страница 16: ...nd Relays status DFM Main Screen Note Allow the Digital Mass Flow Meter to warm up for a minimum of 15 minutes During initial powering of the DFM transducer the flow output signal will be indi cating...

Страница 17: ...F and pressure in PSI Pressing u Enter button from main screen will alter the units of meas ure to F C for temperature and kPa for pressure reading respectively In order to change units of measure ba...

Страница 18: ...evice Digital Communication interface type RS 485 or RS 232 Device RS 485 address two hexadecimal characters Device Zero DAC counts for troubleshooting purposes Device Sensor Average ADC counts for tr...

Страница 19: ...s 7 Zero Calibration Initiate Automatic Sensor Zero Calibration 8 Flow Conditions Allows the user to set the Actual or Standard Flow conditions 9 BackLight Timer Allows the user to turn On Off the Ene...

Страница 20: ...of Measure is changed the Totalizer s Volume based Unit of Measure will be changed automatically If the User defined Unit of Measure option is selected the following screen will appear Figure b 5 User...

Страница 21: ...e in to the Time base settings screen The following screen will appear Figure b 6 User Defined Unit of Measure Screen Time base Use p or q buttons to highlight desired time base option Press the u Ent...

Страница 22: ...e LCD will display the Main Menu screen If desired press the t Esc button to go back to the Main DFM screen The new gas table number and the name of the gas will be reflected on the Main DFM screen 5...

Страница 23: ...qual From the Main Menu the user would traverse the menu tree until reaching the Totalizer menu The following screen will appear Figure b 9 Totalizer Settings Mode Run Stop Allows the user to Enable D...

Страница 24: ...will increment or decrement a particular digit respectively The numbers will change from 0 to 9 and next to the decimal point Pressing the p button one more time will change the digit on the highligh...

Страница 25: ...r and also specify actions to be taken when the Process Variable is outside the specified conditions Note All three alarms are non latching That means the alarm is indicated only while the monitored v...

Страница 26: ...d The user can enable and configure Temperature and Pressure Alarms via the similar menu Main Menu Alarm Settings Temp Alarms For Temperature Alarm Main Menu Alarm Settings Pres Alarms For Pressure Al...

Страница 27: ...any events Totalizer Limit T Totalizer reached set limit volume High Flow Alarm H High Flow Alarm condition Low Flow Alarm L Low Flow Alarm condition Range between H L R Range between High and Low Fl...

Страница 28: ...From the Main Menu the user would traverse the menu tree until reaching the K Factors menu The following screen will appear Figure b 17 K Factors Screen The user selects a K factor by scrolling up do...

Страница 29: ...edure is about to be started and there is absolutely zero flow thru the meter Selecting YES confirms that user has taken the necessary precautions and starts Auto Zero algorithm Selecting NO aborts th...

Страница 30: ...flow rate the gas would be moving if the temperature and pressure were at standard condi tions It is usually the most convenient measure of the gas flow because it defines the heat carrying capacity o...

Страница 31: ...tree until reaching the Back Light Timer menu The following screen will appear Figure b 22 LCD backlit Energy saving Screen Use p or q buttons to highlight desired option and press the u Enter button...

Страница 32: ...t of the flow transducer The filter screen and the flow paths may require occasional cleaning as described below There is no other recommended maintenance required It is good practice how ever to keep...

Страница 33: ...reset amount to the sensor and main flow paths The particular RFE used in a given Mass Flow Meter depends on the gas and flow range of the instrument 6 2 2 DFM 26 27 models Unscrew the inlet compressi...

Страница 34: ...alibrations can also be per formed at customers site using available standards Factory calibrations are per formed using NIST traceable precision volumetric calibrators incorporating liquid sealed fri...

Страница 35: ...ow range changes may require a different Restrictor Flow Element RFE Consult your distributor or Aalborg7 for more information 7 2 1 Connections and Initial Warm Up Power up the Mass Flow Meter for at...

Страница 36: ...uld not be changed If a new gas table is going to be created it is recommended to start calibration from 100 full scale If only linearity adjustment is required calibration can be started in any inter...

Страница 37: ...ailable on the DFM Digital Mass Flow Meter were calibrated at the factory for the specified gas and full scale flow range see device front label There is no need to perform analog output calibration u...

Страница 38: ...essure measurement and have only one gas flow analog output 7 3 1 Initial Setup Power up the Mass Flow Meter for at least 3 minutes prior to commencing the cal ibration procedure Make sure absolutely...

Страница 39: ...current measurement to pins 2 and 15 of the 25 pins D connector 3 Write 4000 counts to the DAC channel 1 11 WRITE 1 4000 CR 4 Read current with the meter and calculate 5 Write zero counts to the DAC c...

Страница 40: ...ITE 2 0CR 6 Read offset current with the meter and calculate 7 Save TempOutScale_mA in to the EEPROM 11 MW 30 Y CR Save TempOutOffset_mA in to the EEPROM 11 MW 31 Z CR Where Y the calculated TempOutSc...

Страница 41: ...resOutOffset_mA value Note When done with the analog output calibration make sure the DAC update is enabled and the BackDoor is closed see command below Enable DAC update by typing 11 WRITE 4 N CR Uni...

Страница 42: ...o character command from the table below Arg1 to Arg4 The command arguments from the table below Multiple arguments are comma delimited CR Carriage Return character Several examples of commands follow...

Страница 43: ...1 Make sure only one device which address has to be changed is connected to the RS 485 network 2 Type the memory write command with global address 00 MW 7 XX CR where XX the new hexadecimal address ca...

Страница 44: ...40...

Страница 45: ...41...

Страница 46: ...42...

Страница 47: ...43...

Страница 48: ...44...

Страница 49: ...ted function is not installed not available 4 Wrong number of the characters in the Argument 5 Attempt to Alter Write Protected Area in the EEPROM 6 Proper Command or Argument is not found 7 Wrong val...

Страница 50: ...that the instrument is not functioning properly please check for the following common conditions first Are all cables connected correctly Are there any leaks in the installation Is the power supply co...

Страница 51: ...ge but 0 5 Vdc output signal does not change always the same read ing or around zero Output 0 5Vdc schematic is burned out or damaged Return DFM to factory for repair Analog flow output scale and offs...

Страница 52: ...een see section 6 2 Note Calibration accuracy can be affected Direction of the gas flow is reversed Check the direction of gas flow as indicated by the arrow on the front of the meter and make require...

Страница 53: ...specific heat For diatomic gases K Kgas Note in the above relationship that d and Cp are usually chosen at standard con ditions of one atmosphere and 25F C If the flow range of a Mass Flow Controller...

Страница 54: ...Mode R Enabled S Disabled 17 Total float Totalizer Volume in s updated every 6 min 18 TotalFlowStart float Start Totalizer at flow FS 0 Disabled 19 TotalVolStop float Totalizer Action Limit Volume s...

Страница 55: ...Constant Do Not Alter 53 Kgain 1 float Gain for DRC Lag Constant Do Not Alter 54 Kgain 2 float Gain for DRC Lag Constant Do Not Alter 55 Kgain 3 float Gain for DRC Lag Constant Do Not Alter 56 Kgain 4...

Страница 56: ...S A D value from sensor counts 118 SensorTbl 2 Flow float Actual Flow in PFS 0 2 119 SensorTbl 3 Sensor Value uint 30 0 F S A D value from sensor counts 120 SensorTbl 3 Flow float Actual Flow in PFS...

Страница 57: ...10 Ethylene C2H4 60 365 1 251 11 Freon 134A CF3CH2F 5096 127 4 224 12 Fluorine F2 9784 1873 1 695 13 Fluoroform Freon 23 CHF3 4967 176 3 127 14 Helium He 1 454 1 241 1786 15 Hydrogen H2 1 0106 3 419 0...

Страница 58: ...ifluoromethane Freon 13 B1 CBrF3 3697 1113 6 644 13 1 3 Butadiene C4H6 3224 3514 2 413 14 Butane C4H10 2631 4007 2 593 15 1 Butene C4H8 2994 3648 2 503 16 2 Butene C4H8 CIS 324 336 2 503 17 2 Butene C...

Страница 59: ...2H6O 3918 3395 2 055 48 Ethyl Acetylene C4H6 3225 3513 2 413 49 Ethyl Chloride C2H5Cl 3891 244 2 879 50 Ethylene C2H4 60 365 1 251 51 Ethylene Oxide C2H4O 5191 268 1 965 52 Fluorine F2 9784 1873 1 695...

Страница 60: ...ne CH4 10 L min Methane CH4 1 10 L min 7175 75 5328 5328 715 715 83 Methanol CH3 5843 3274 1 429 84 Methyl Acetylene C3H4 4313 3547 1 787 85 Methyl Bromide CH3Br 5835 1106 4 236 86 Methyl Chloride CH3...

Страница 61: ...ide SiCl4 284 1270 7 580 117 Silicon Tetrafluoride SiF4 3482 1691 4 643 118 Sulfur Dioxide SO2 69 1488 2 858 119 Sulfur Hexafluoride SF6 2635 1592 6 516 120 Sulfuryl Fluoride SO2F2 3883 1543 4 562 121...

Страница 62: ...58 APPENDIX IV COMPONENT DIAGRAM DFM Analog PC Board TOP...

Страница 63: ...59 COMPONENT DIAGRAM DFM Analog PC Board BOTTOM...

Страница 64: ...60 COMPONENT DIAGRAM DFM Digital PC Board TOP...

Страница 65: ...61 COMPONENT DIAGRAM DFM Digital PC Board BOTTOM...

Страница 66: ...62 APPENDIX V DIMENSIONAL DRAWINGS 6 32 2B 0 15 DEEP 0 50 12 7 6 27 159 3 4 25 108 0 5 00 127 0 1 63 41 3 0 63 15 9 0 69 17 5 0 28 7 1 0 53 13 5 2 69 68 3 25 PIN D CONNECTOR MALE...

Страница 67: ...32 2B 0 15 DEEP 5 25 133 4 0 63 15 9 2 00 50 8 0 50 12 7 5 25 133 4 7 27 184 6 7 49 190 2 FOR HIGH FLOW MASS FLOW METER 0 69 17 5 0 80 20 3 0 32 8 3 2 69 68 3 25 PIN D CONNECTOR MALE DIMENSIONAL DRAW...

Страница 68: ...thing to the contrary will automatically void the liability of Aalborg7 and the provisions of this warranty Defective products will be repaired or replaced solely at the discretion of Aalborg7 at no c...

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