G-TRAN SERIES
Ceramic Capacitance Manometer
MODEL CCMT-D SERIES
Be sure to read this manual before use and keep it in your
file for future reference.
Components Division,
ULVAC , Inc.
No.SK00-7510-
EI-102-09
2500 Hagisono, Chigasaki City, Kanagawa-ken,
Japan
http://www.ulvac.co.jp/
Prior to Operation
Upon receipt of this detector, make sure that it is the correct model you ordered
and that it is not damaged in transit.
!
WARNING
Read this manual before installation, operation,
inspection or maintenance and fully understand safety
cautions, specifications and operating procedure of
this instrument so that the unit can be used for a long
time.
!
NOTICE
No part of this manual may be reproduced for use by a
third party without written consent by ULVAC.
Safety Denotations
!
WARNING
The following denotations are used throughout this
manual to call operator's attention to safety. The
denotations are classified as follows.
!
DANGER
Failure to comply with DANGER involves possibility
of impending loss of life or serious personal injury.
!
WARNING
Failure to comply with WARNING involves the
possibility of loss of life or serious personal injury.
!
CAUTION
Failure to comply with CAUTION can lead to a
medium degree of personal injury or serious damage
to the equipment.
!
NOTICE
Failure to comply with NOTICE can lead to damage
to the equipment or malfunction.
Safety Cautions
For safe use of this Ceramic Capacitance Manometer, carefully read this
manual and comply with the warnings and cautions given in the manual.
!
WARNING
Turn OFF power.
If the unit fails, immediately turn OFF the power.
Use of a failed unit may cause fire or electric shock. For
repair, contact your local ULVAC representative or
ULVAC,Inc..
!
WARNING
Turn OFF power.
Before touching the power terminal of this unit or if there is
a possibility of touching it, turn OFF the power to this unit.
Some of the power terminals are energized with a line
voltage of +14
～
30 VDC. Contact with the terminal will
cause an electric shock. (When GM-1000, GM-2001 or GM-
2002 is used, the terminal is also energized with -15 volts.)
!
WARNING
Operating environment
Do not connect this unit, except the VCR joint type, to a test
object of which pressure is in excess of atmospheric
pressure. If the pressure in this unit exceeds atmospheric
pressure, this unit will pop out from the connection, causing
damage to the surrounding, including injury to human body.
If the pressure in this unit exceeds the maximum operating
pressure, this unit may be damaged or fail. If it is likely that
the pressure exceeds the maximum operating pressure,
provide an isolation valve so that the pressure in this unit
does not exceed the maximum operating pressure.
!
CAUTION
Don't disassemble.
Do not disassemble this unit.
!
CAUTION
Don't modify.
Do not modify this unit. If it is modified, its functions are
not warranted. Also fire or electric shock may result.
!
CAUTION
Check connection.
Ground the power ground and frame ground.
!
CAUTION
Check connection.
Prior to turning ON the power, make sure that there is no
error in wiring. Connecting incorrect power may cause
damage to this unit or fire.
!
CAUTION
Operating conditions
When you do zero point adjustment, please use the attached
p
in(max.φ1.1mm)
.
!
CAUTION
Check line voltage.
Prior to turning ON the power, make sure that this unit
operating voltage and the supply voltage are in agreement.
Connection of incorrect power can cause damage to this unit
or fire.The supply voltage is +14
～
30 VDC (pin 7 or 11).
!
CAUTION
Operating conditions
Use this unit under the environment set forth in the
specification.
!
CAUTION
Operating environment
Do not use this unit in a place where it may be splashed with
water. If it is splashed with water, failure, earth leakage or
fire can result.
!
CAUTION
Beware of impact.
Do not give an impact to this unit.
!
CAUTION
Repacking for transfer
If this unit is to be shipped to another site, repack it in the
same way as on delivery. If it is shipped bare, it may be
damaged.
!
CAUTION
Discarding
When discarding this unit, comply with your local
regulations. Especially, if this unit was used in an
atmosphere that can cause hazards to human body, it must
be disposed of by a specialist in disposal. Customer shall be
responsible for the cost relating to disinstallation.
!
CAUTION
Operating conditions
When you do zero point adjustment, please use the
attached pin(max.φ1.1mm).
Feature
The Model CCMT-D is a capacitance manometer that detects
displacement of ceramic diaphragm caused by change of gas pressure by
utilizing electrostatic capacitance.
The heart of the sensor being a mono block made of ceramics, this
manometer provides high repeatability and stability and permits high
accuracy measurement of pressure in the low and medium vacuum regions
regardless of the type of gas.
Specifications
Please refer to the spec chart.
Accessories
Pin(max.φ1.1mm)
×1
Instruction manual (this manual)
×1
Option
Display
ISG1
、
GM-2001
、
GM-2002
Display Cable
Test results certificate
Calibration certificate
Calibration certificate, JCSS Calibration
certificate
Installation of CCMT-D
1. Preliminary Operation
・
Unpack this unit and check quantities.
・
Check components to see if any of them is damaged in transit.
2. Installing this unit
Install this unit to the gauge port of a vacuum system.
2.1. Measuring position
・
This unit measures static pressure in the position where it is connected. If
there is gas flow or an outgas source or an intense electron or ion
generating source, the measurement value will be affected. So select the
measuring position carefully.
・
Note that if this unit is subjected to vibration, heat radiation, high intensity
magnetic field or intense radiation, correct pressure measurement may not
be made.
・
Be careful that the ambient temperature deviates considerably from the
calibrating temperature (25°C).
2.2. Installing this unit
・
Install this unit in such a manner that this unit mounted opening plane is
parallel with gas flow. See to it that gas does not enter this unit in the form
of beam. Avoid use in a place where vibration is at a high level, if
possible.
・
Be careful in selecting the installation place and handling this unit.
・
To install this unit, use an O-ring that releases little outgas.
・
Use of a material that releases much outgas like rubber pipe or grease for
connection of this unit can be a cause of error.
Electrical connection
Use the D-Sub 15-pin female connector (inch screw #4-40) to supply
power to this unit and to connect the output signal from this unit. Apply
power of +14
～
30 VDC to pin 7 or 11.
The signal from the capacitance manometer is outputted between pins 2
and 12.
Pin No.
Use
2
V+
5
Analog ground
7
+14
～
30V
11
+14
～
30V
12
V-
15
Frame ground
Fig.1. Capacitance manometer connection diagram
!
CAUTION
Wiring connection check
Do not connect the PIN number 1,3,4,6,8,9,10,13
and 14.
Operation
1. Turning on power to the manometer will start measurement.
<RUN> LED lighting: measuring
<RUN> LED flashing: over pressure or zero adjustment
2. However, wait for more than 30 minutes after turning on the power until
the output voltage is stabilized.
Especially when a manometer for measuring a low pressure range (for
example, Model CCMT-10D) is used or when an effective digit below
1/1000 of the full scale is required, start measurement after the
temperature equilibrium of the manometer is fully established by applying
power for several hours continuously.
Do not turn off the power when a sequence of measurements is going on.
At switch on, the output voltage value shows as -5V, in order to
initialize the inner circuit. Therefore, please import the output voltage
after 2 or more seconds from turning on.
3. This is an absolute pressure type capacitance manometer of which
measurement value is not affected by the type of gas, but its characteristics
may change if it is exposed to a chemically active gas or highly absorptive
gas.
4. The proof-pressure of the capacitance manometer is according to the table
below:
CCMT-1000D
：
4.0 x10
+5
Pa (absolute pressure)
CCMT- 100D
：
2.6 x10
+5
Pa
CCMT- 10D
：
2.6 x10
+5
Pa
CCMT- 1D
：
2.6 x10
+5
Pa
5. It is necessary to correct the zero point at a pressure sufficiently lower than
the measurement pressure before starting measurement.
If the ultimate pressure of the system in which this manometer is used is
not sufficiently low to make zero point correction, its specifications may
not be met. Refer to “Zero Point Adjustment Function.”
Specifications
Model
CCMT-1000D
CCMT-100D
CCMT-10D
CCMT-1D
Range full scale
133kPa F.S.
13.3kPa F.S.
1.33kPa F.S.
133Pa F.S.
Lowest reading
13Pa
1.3Pa
0.13Pa
1.3x10
-2
Pa
Lowest suggested reading
66.6Pa
6.7Pa
0.67Pa
6.7x10
-2
Pa
Accuracy
1)
±
0.2% of Reading
±
Temperature effect
Resolution
0.003% F.S.
Temperature effect on zero
0.005% F.S./
℃
0.015% F.S./
℃
Temperature effect on span
0.01% Reading/
℃
Ambient operating temperature
10
～
50
℃
Storage temperature
-40
～
60
℃
Max temperature at flange
2)
110
℃
Pressure max. (absolute)
4x10
+5
Pa
2.6x10
+5
Pa
Response time
≦
30msec
Materials exposed to process media
Aluminum oxide ceramic
（
Al
2
O
3
）、
Vacon70
3)
、
SUS316
、
glass ceramics solder
、
AgTiCu hard Solder
Standards
CE
Protection type
IP30
Supply voltage
DC14-30V,1W
Output signal
DC0-10V
input impedance(recommended): >10kohm,
≦
0.1uF
Flange
1/2 inch tube
、
DN 16 ISO-KF
、
8VCR
Weight
1/2 inch tube:329g
、
DN 16 ISO-KF:344g
、
8VCR:386g
Internal volume
1/2 inch tube:5.8 cm3
、
DN 16 ISO-KF:6cm3
、
8VCR:8.15cm3
Electrical connection
15 pole D-Sub. Male (inch screw #4-40)
1)Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation
、
after adjustment for
ZERO,
We recommend regular zero point adjustments before use, depending on the customer's environment.
2)non operation
3)28% Ni, 23% Co, 49% Fe
This manual is for the capacitance manometers of the
following serial numbers.
CCMT-1000D
S/N 00001
～
CCMT-100D
S/N 00001
～
CCMT-10D
S/N 00001
～
CCMT-1D
S/N 00001
～
