Ulvac C30VR Series, Installation, Operation, Maintenance And Troubleshooting Instructions

Page: 1 / 110

C30V
_
R series Compressor Unit
for Cryopump and Super Trap
Installation, Operation,
Maintenance, and Troubleshooting
Instructions
C30V
_
R, C30V
_
RT, C30PV
_
RT
C30MV
_
R, C30MV
_
RT
C30MVE
_
R, C30MVE
_
RT
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan’s Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take appropriate procedures when exporting or
re-exporting those products.
D/N.MD30XVRE, 2018MH19 ULVAC CRYOGENICS INCORPORATED