Olympus MX63 Instructions Manual Download | Manualshive

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Instructions

Notes

This instruction manual is for the Olympus microscope.
To ensure safety, obtain optimum performance and to familiarize yourself fully with the use of this
product, we recommend that you study this manual thoroughly before operating this product, and
always keep this manual at hand when operating this product.
Retain this instruction manual in an easily accessible place near the work desk for future reference.
For details of products included in the configuration of this microscope, see page 18.

Semiconductor/FPD/Industrial Inspection

Microscopes

MX63/MX63L

Optical Microscope and Accessory

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Summary of Contents for MX63

Page 1: ...study this manual thoroughly before operating this product and always keep this manual at hand when operating this product Retain this instruction manual in an easily accessible place near the work desk for future reference For details of products included in the configuration of this microscope see page 18 Semiconductor FPD Industrial Inspection Microscopes MX63 MX63L Optical Microscope and Acces...

Page 2: ...cy energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this product in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense FCC WARNING Changes or modifications not expressly approved by the party responsible for...

Page 3: ... 5 Placing a sample 27 1 Placing a sample 27 2 Moving the stage 27 3 6 Selecting the objective 28 3 7 Focusing 29 1 Focusing 29 2 Adjusting the tension of the coarse focusing knob 29 3 Attaching detaching the fine focusing knob 29 4 Using the pre focusing lever 30 5 Using the focus aid MX FA 31 3 8 Adjusting the brightness 32 1 When the LED lamp housing is combined 32 2 When the mercury lamp housi...

Page 4: ...htfield observation procedures 44 1 Notes for observation 46 2 Adjusting the transmitted light illumination 46 3 Using the field diaphragm for transmitted light illumination 47 4 Using the aperture diaphragm for transmitted light illumination 48 5 Using the filters for transmitted light illumination 49 5 2 Reflected light differential interference contrast DIC observation procedures 50 1 Setting t...

Page 5: ...ving and attaching the eyepiece 63 6 2 Replacing the objective 65 6 3 Replacing the halogen bulb 68 6 4 Replacing the mercury burner 70 6 5 Replacing the filter 75 7 Troubleshooting 76 8 Specifications 82 9 Optical performance list UIS2 series 84 10 Assembly 88 10 1 Assembly diagram 88 10 2 Assembly procedures 89 1 Attaching the stage 89 2 Attaching the holders 90 3 Attaching the objective 91 4 At...

Page 6: ... 104 1 Connecting the interface cable 104 2 Start procedures Exit procedures 104 11 Maintenance parts 105 12 Preventive inspection sheet for illumination devices 106 13 Proper selection of the power supply cord 107 Appendix Units attached by Olympus 109 1 Transmitted light illumination unit MX TILLA MX TILLB 109 2 Setting the OP light path 110 3 Attaching the reflected light filter 26ND0 5 111 4 A...

Page 7: ...the UIS2 optical systems If you use an eyepiece objective or condenser etc together with this microscope be sure to use those of UIS2 optical system series Using inappropriate units restricts the performance There are other units usable with the UIS series Contact Olympus or refer to the latest catalogs This instruction manual applies to users of this product and Olympus distributors However some ...

Page 8: ...on an unstable table or a tilted table the microscope may topple and you may get injured Install the product on an desk where the tilt of the top surface of the desk meets following conditions Otherwise the stage may move spontaneously MX63 1 or less MX63L 20 or less For safety do not place a mat etc under the device Use of the adjuster The center of gravity changes depending on the sample weight ...

Page 9: ... Otherwise the light coming out from the MIX slider for reflected light observation enters your eyes through the eyepiece and your eyes may be damaged a CAUTION Electric safety Always use the power cord provided by Olympus If the proper the power cord and cables are not used the electric safety and the EMC Electro Magnetic Compatibility performance of the product cannot be assured If no power cord...

Page 10: ... the microscope secure the sufficient space 100mm or more around the lamp housing particularly on the top and bottom surfaces Also if the power cord or cables contact the lamp housing they may melt and cause electric shock Be sure to lay out the power cord and cables sufficiently away from the lamp housing As the UV ray of the mercury burner is harmful to your eyes do not light the mercury burner ...

Page 11: ... not touch the product with wet hands In particular if you touch the main switch of the power unit or the power cord with wet hands electric shock ignition or failure of the product may be caused CAUTION Prevention of injury Be careful not to drop the glass plate If you are using the glass plate be careful not to drop the glass plate If the glass plate drops and is broken you may get injured by th...

Page 12: ...scope frame Center on the rear of microscope frame Right side of microscope frame External power supply for halogen bulb TH4 100 TH4 200 Motorized Revolving nosepiece U P5REMC U D6REMC U D5BDREMC U P5BDREMC U D6BDREMC Caution for electric safety 3 Caution for prevention of electric shock 5 Mount of lamp housing for reflected light illumination DF converter U RCV Adapter for the mercury lamp housin...

Page 13: ...e as shown in the lower left picture Attach the screw hole caps provided with microscope frame to the screw holes left by removing the carrying rods Do not slide on the top surface of the table Do not move the microscope by sliding it on the top surface of the table The rubber legs may be damaged If you need to pack this product for shipping to a distant location etc the dedicated transport tools ...

Page 14: ...e range The dimensions marked vary depending on the lamp housing to be combined For maintenance you can secure a larger work space by changing the direction of the observation tube or moving the stage The following installation space is set according to the SEMI standard guidelines SEMI S8 0915 It is recommended to secure the appropriate installation space suitable for your operation referring to ...

Page 15: ...9 MX63 MX63L 9 MX63L installation space Unit mm ...

Page 16: ...r of gravity Unit mm The center of gravity is an approximate position in the standard combination for transmitted light observation Note that the position varies depending on the sample weight stage position and other units to be combined TIP ...

Page 17: ... center of gravity Unit mm The center of gravity is an approximate position in the standard combination for transmitted light observation Note that the position varies depending on the sample weight stage position and other units to be combined TIP ...

Page 18: ...ooled down sufficiently and keep it covered with a dust cover during storage 5 Before disposing of this product be sure to check the regulations and rules of your local government and follow them Contact Olympus for any questions 6 If the hour counter of the power supply U RFL T shows 300 hours set the main switch to OFF for safety purpose wait 10 minutes or more and replace the lamp See page 70 T...

Page 19: ... instruction manuals provided separately For other units combinable with the microscope which are not described here contact Olympus or refer to the latest catalogs TIP Observation tube Breath shield Stage Intermediate attachment Hand switch Microscope frame Stage Light source for reflected light illumination Eyepiece Revolving nosepiece Objective series ...

Page 20: ...WHPR86 Rotary wafer holder For 3 or 4 inches BH2 WHR43 For 4 or 5 inches BH2 WHR54 For 5 or 6 inches BH2 WHR65 6x6 inch stage MX SIC6R2 8x8 inch stage MX SIC8R X axis Y axis knobs page 27 Coarse adjustment grip page 27 with a crutch Coarse adjustment grip page 27 Coarse adjustment grip page 27 with a crutch with a crutch with a crutch Coarse adjustment grip page 27 with a crutch ...

Page 21: ...63L 6 inch mask holder MX MH6 Glass plate MX SPG1412 Rotary wafer holder for 8 inch and 12 inch MX WHPR128 14x12 inch stage MX SIC1412R2 X axis Y axis knobs page 27 X axis Y axis knobs page 27 Coarse adjustment grip page 27 with a crutch ...

Page 22: ...3 Reflected light fluorescence U MWBS3 U MWGS3 U MWUS3 U MF2 optional idle mirror unit frame Transmitted light simple polarization U MDICT3 U MDIC3 Install the hand switch at the position from which it will not drop NOTE Display area of the magnification of objective currently selected Operation area of MIX slider for reflected light observation Function button Arbitrary functions can be assigned ...

Page 23: ...denser without obstacle TIP Condenser height adjustment ring page 47 with 6 control grooves Aperture diaphragm lever page 48 Anti reflection shutter page 48 Aperture diaphragm ring page 48 Aperture diaphragm lever page 48 Anti reflection shutter page 48 Field diaphragm lever page 47 Filter insertion slot page 49 Filter insertion slot page 49 Field diaphragm centering screws page 47 Light guide LG ...

Page 24: ...rization Microscope frame MX63 F MX63L F Observation tube U TR30 2 U ETR 4 U TTR 2 U SWTR 3 U SWETTR 5 MX SWETTR U BI30 2 U TBI 3 U TLU U TR30IR U TLUIR Intermediate attachment U CA U ECA U EPA2 U DP U DP1XC Illuminator option U RCV MX HGAD U DULHA U LLGAD Light source for transmitted light illumination LG LSLED Light source for reflected light illumination BX3M LEDR U LH100L 3 U LH100IR U LH100HG...

Page 25: ...e polarization Light sources U LLG150 U LLG300 MX LLHECBL MX TILLA MX TILLB LG SF Revolving nosepiece U P5REMC U D6REMC U D5BDREMC U P5BDREMC U D6BDREMC Objective adapter BD M AD Stage MX SIC6R2 MX SIC8R MX SIC1412R2 Stage option BH3 WHP6 BH2 WHR43 BH2 WHR54 BH2 WHR65 BH3 SP6 MX WHPR86 BH3 SPG6 MX WHPR128 MX SPG1412 MX MH6 Slider for reflected light illumination U 25ND6 U 25ND25 U 25ND50 U 25LBD U...

Page 26: ...U MIXRCBL Polarizing element U AN360 3 U PO3 Filter 25LBD 25ND6 25ND25 30 5S LBD Mirror unit U MDIC3 U MDICAF3 U MWBS3 U MWGS3 U MWUS3 U MF2 U MDICT3 Focus aid MX FA Camera adapter U TV1XC U TV0 63XC U TV0 5XC 3 U TV0 35XC 2 U TV0 25XC U CMAD3 U TV1X 2 Controller DP2 SAL Hand switch BX3M HS U HSEXP TH4 HS Breath shield MX BSH ESD 2 Eyepiece WHN10X WHN10X H CROSSWHN10X SWH10X H CROSS SWH10X Immersi...

Page 27: ...21 MX63 MX63L 21 Memo ...

Page 28: ...witch 1 Select BF reflected light brightfield or DF reflected light darkfield according to observation purposes 2 Place a sample for observation on the stage 5 Engage the 5X or 10X objective in the light path using the objective selection button and bring the sample into focus 6 Engage the objective with the magnification to be used in the light path and bring the sample into focus 10 Adjust the b...

Page 29: ...ment scale P 35 7 11 Light intensity knob P 32 10 Objective selection button P 28 13 Aperture diaphragm open close button P 38 6 10 Coarse focusing knob P 29 6 10 Fine focusing knob P 29 detachable 4 Analyzer insertion slot P 51 9 Diopter adjustment ring P 35 Interpupillary distance adjustment scale P 35 5 Stage plate P 27 6 10 Coarse focusing knob P 29 13 Aperture diaphragm open close button P 38...

Page 30: ...conds If following units are combined set the main switch of the respective unit to ON Combinable units Unit to set to ON Mercury lamp housing Main switch of the power supply for mercury burner U RFL T Halogen lamp housing Main switch of the power supply for halogen bulb TH4 100 TH4 200 Light source Main switch of the light source U HGLGPS LED light source for light guide Main switch of the LED li...

Page 31: ...cally DF Darkfield observation The aperture diaphragm is set to the OPEN position automatically The 2 level selection BF DF is set as factory default However if the optional mirror unit is attached by the Olympus representative the 3 level selection is available 1 a When the hand switch is combined The lighting of the CUBE indicator b of the hand switch BX3M HS is changed according to the selectio...

Page 32: ...ed light path Trinocular tube Light path selection knob position Eyepiece Camera MX SWETTR U ETR 4 Pressed in 100 0 Pulled out 0 100 U SWTR 3 U TR30 2 Pressed in 100 0 Middle position 20 80 Pulled out 0 100 U TR30IR for infrared observation Pressed in 100 0 Middle position 0 0 Pulled out 0 100 U TTR 2 Pressed in 50 50 Middle position 100 0 Pulled out 0 100 U SWETTR 5 Pressed in 100 0 Pulled out 20...

Page 33: ... the stage The stage moves approx 50 mm in Y axis vertical direction by one turn of the knob and approx 37 mm in X axis horizontal direction by one turn of the knob Using the grip clutch You can move the stage with light force and freely by grabbing this grip clutch c If you do not grab the clutch firmly to the end the X axis Y axis knobs may rotate together abruptly to cause the damage If the exc...

Page 34: ...jective selection button a on the front panel will rotate the revolving nosepiece in the direction by one step To rotate it in the opposite direction press the other objective selection button b to rotate in direction Pressing this objective selection button for multiple times consecutively allows you to select the desired objective NOTE 1 TIP 3 6 Selecting the objective When the hand switch is co...

Page 35: ...weight or the focus obtained with the fine focusing knob is lost soon the coarse focusing tension adjustment ring is set too loose In this case rotate the coarse focusing tension adjustment ring a clockwise to increase the tension TIP 2 Adjusting the tension of the coarse focusing knob The fine focusing knob is designed to be detachable This prevents your hand from contacting the fine focusing kno...

Page 36: ...LOCK The current stage position is set to the upper limit when rotating the coarse focusing knob 1 2 Focusing in LOCK status Rotate the coarse focusing knob to lower the stage position and place the different sample on the stage Rotate the coarse focusing knob to lower the stage and when the stage touches the upper limit stop rotating the coarse focusing knob If the thickness of the sample is almo...

Page 37: ...larization observation When observing the sample with uneven surface or low reflectivity the pattern of the graticule may not be projected with good contrast Press in the focus aid knob a to insert the graticule in the light path While looking through the eyepieces rotate the coarse focusing and fine focusing knobs to bring the sample into focus so that the lines b of the graticule are clearly vis...

Page 38: ... collector lens focusing knob a to make the entire field of view brightest evenly If the field of view is too bright insert the ND filter U 25ND50 U 25ND25 U 25ND6 to adjust the brightness For details see 3 11 Using the filter sliders for reflected light illumination on page 39 Do not turn OFF the burner for two hours after turning it ON because the burner s lifetime will be shortened When turning...

Page 39: ...thod is selected Procedure to store the brightness Press the LIM switch a to set the Store mode LIM switch a is OFF Select the brightfield observation method For procedures to select the observation method see 3 3 Selecting the observation method BF DF on page 25 Press the objective selection button on the front panel b to engage the objective with low magnification in the light path and bring the...

Page 40: ...ressing both the LIM switch a and the SET switch b Keep pressing the LIM switch a and the SET switch b The buzzer is heard three times after 5 seconds and the stored brightness returns to the factory default setting If you release the LIM switch and the SET switch within 5 seconds the stored brightness LIM function does not return to the factory default setting and the microscope starts normally T...

Page 41: ... equipped with the eyepiece micrometer While pressing the lower part a of the eyepiece rotate the diopter adjustment ring b to set the index c to 0 Perform this operation for right and left eyepieces Adjust the interpupillary distance Place the sample Engage the 10X objective in the light path and rotate the coarse fine focusing knobs to bring the sample into focus Change to the 40X objective or h...

Page 42: ...e 10X objective in the light path While looking through the eyepiece equipped with the eyepiece micrometer rotate the coarse fine focusing knobs to bring the sample into focus While looking through the eyepiece which is not equipped with the eyepiece micrometer rotate the diopter adjustment ring b to bring the sample into focus 1 2 3 4 When the observation tube is equipped with the interpupillary ...

Page 43: ...upper or lower limit stop position the system may be damaged When storing the microscope keep the eyepieces raised up in order to prevent the eyepieces from falling The intermediate attachment is not available with U TBI 3 If you observe scratches or dirt on the mirror surface in the darkfield observation with U TBI 3 ghosts may appear in some cases 1 NOTE When wearing eyeglasses Use the eye shade...

Page 44: ... close buttons b and c on the front panel are used for fine adjustment during BF observation If you keep pressing the aperture diaphragm open close button b or c the aperture diaphragm opens or close at a constant speed If you release your finger from the button the aperture diaphragm is set at the current position TIP 1 Checking the setting status The current setting can be confirmed by ON or OFF...

Page 45: ... 30 5S LBD Converts the illumination light of the halogen bulb to the daylight color U 25LBA Converts the illumination light of LED to the illumination color of the halogen bulb Green filter U 25IF550 Increases the contrast of the observed monochromic image Use when taking monochromic photographs Yellow filter U 25Y48 Contrast filter for semiconductor wafer observation Light intensity adjustment f...

Page 46: ...jective change When using the halogen bulb you can set the aperture diaphragm to the CLOSE position during objective change to prevent the glare However the speed to change objectives drops slightly comparing to the case when this function is not set For setting procedures see Setting the DIP switch AS PRESET switch P 98 3 12 Setting the glare prevention ...

Page 47: ...lumination on page 39 If the mercury burner is kept turning ON for long hours while the filter is inserted the filter and its metal frame will be heated Be careful not to burn yourself Do not leave the filter for a long time at locations other than the click position 26ND0 5 Transmittance 0 5 filter If you perform the fluorescence observation using the mercury lamp housing engage this filter in th...

Page 48: ...phragm completely and look at the objective pupil in the observation tube Remove bubbles by moving the sample or the stage up down right left Depending on the sample the immersion oil may be adhered to the sample and bubbles may not be removed easily After use lower the stage and rotate the revolving nosepiece and remove the objective attached with oil from the specimen Wipe off the immersion oil ...

Page 49: ...tion range is determined by the size of the image sensor used in the camera and the magnification of the camera adapter For details refer to the instruction manual for the camera and the camera adapter When using the camera adapter be sure to adjust the parfocality of the camera adapter and eyepieces Otherwise the focusing of the image through eyepieces will not match with that of the image acquir...

Page 50: ...sample for observation on the stage 5 1 Transmitted light brightfield observation procedures 5Observation methods The dummy slider in the DIC prism insertion slot is effective for preventing flare in observations other than the DIC observation It is therefore recommended to leave it mounted in any observation method Setting the DF light path prevents the half mirror from entering the transmitted l...

Page 51: ... insertion slot P 51 9 Interpupillary distance adjustment scale P 35 7 Coarse focusing knob P 29 7 Fine focusing knob P 29 detachable 6 6 Y axis knob P 27 6 X axis knob P 27 13 Filter insertion slot P 49 14 Aperture diaphragm lever or aperture diaphragm ring P 48 14 Field diaphragm lever MX TILLB P 47 14 Condenser height adjustment ring MX TILLB P 47 5 Main switch P 46 13 Filter insertion slot P 4...

Page 52: ...he image becomes dark due to insufficient NA 2 Adjusting the transmitted light illumination 1 Notes for observation Set the main switch a of the microscope frame to ON and rotate the light intensity knob b counterclockwise completely Set the main switch c of the LED light source for light guide LG LSLED to ON and adjust the brightness using the light intensity volume knob d Rotate the light intens...

Page 53: ...bring the field diaphragm image into focus If it is difficult to rotate the condenser height adjustment ring c insert the the Allen screwdriver d into the groove of the condenser height adjustment ring c and move like a lever If the center of the field diaphragm is deviated from the center of the field of view adjust the centering by inserting the Allen screwdriver into the field diaphragm centeri...

Page 54: ... 70 Pupil of objective Depending on the sample you observe the contrast may be improved by narrowing down the aperture diaphragm furthermore However if the aperture diaphragm is narrowed down excessively with the low magnification objective the illumination unevenness may occur in observed images or photographs Attach the eyepiece to the original position Reflected light observation of the sample ...

Page 55: ... LBA filter is attachable For details refer to the instruction manual provided with the light source LG LSLED d e a b f g h 5 Using the filters for transmitted light illumination c Attaching the filter at the tip of light guide Loosen the clamping screw d of the light guide holder using the Allen screwdriver and remove the light guide holder by holding the knob e Hold the filter holder f at the ti...

Page 56: ...nce Adjust the diopter Adjust the brightness illumination voltage Engage the objective with the magnification to be used in the light path and bring the sample into focus Observation Adjust the brightness Push in the light path selection knob to the OP position and select the DIC observation light path Adjust the aperture diaphragm Trinocular tube only Push in the light path selection knob Main sw...

Page 57: ...the analyzer U AN360 3 b in the analyzer insertion slot a Analyzer insertion position Light path First level pulled out Empty hole Second level pressed in Analyzer Rotate the analyzer rotation dial c to adjust the analyzer Observation with crossed nicols Set the index of the dial to the position shown in the picture on the right Observation without crossed nicols Rotate the dial while looking at t...

Page 58: ...lever d depending on the objective in use Position of light path selection lever d Applicable objectives Pressed in UIS2 MPLFLN MPLFLN BD series MPLAPON series UIS UMPlanFI UMPlanFI BD series MPlanApo20X 100X MPlanApo100XBD Pulled out UIS2 LMPLFLN LMPLFLN BD series UIS LMPlanFI LMPlanFI BD series LMPlanApo LMPlanApo BD series With the U DICRH or U DICRHC without selection lever the applicable obje...

Page 59: ...t the gray color for the background color you can observe the three dimensional image with high contrast in the gray sensitive color with the highest sensitivity If you select the magenta sensitive color for the background color even a small phase difference can be viewed as a variation of the color The detection sensitivity during DIC observation is very high Be careful particularly for dirt or d...

Page 60: ...the diopter Adjust the brightness illumination voltage Engage the objective with the magnification to be used in the light path and bring the sample into focus Observation Adjust the brightness Select OP optional mirror unit Adjust the aperture diaphragm Trinocular tube only Push in the light path selection knob Main switch P 24 Observation light path selection knob P 25 Light path selection knob ...

Page 61: ...CAUTION NOTE Set the main switch to ON Place a sample for observation on the stage Engage the 5X or 10X objective in the light path using the objective selection button and bring the sample into focus Adjust the interpupillary distance Adjust the diopter Insert the required filters Adjust the brightness illumination voltage Observation Trinocular tube only Push in the light path selection knob Sel...

Page 62: ...ght infrared U BP1100IR or U BP1200IR in the light path on the light source side to prevent the polarizer from tarnish With the trinocular observation tube U TR30IR the middle position of the 3 level light path selection is used for the shutter CAUTION Observation Set the main switch to ON Bring the sample top surface into focus with the visible wavelength Engage the objective with the magnificati...

Page 63: ...elect BF reflected light brightfield observation Remove the analyzer mirror unit etc from the light path Adjust the brightness Insert the MIX slider for reflected light observation Main switch P 24 Observation light path selection knob P 25 Light path selection knob P 26 Light intensity knob P 32 X axis Y axis knobs P 27 Light intensity knob P 32 Filter insertion slot P 39 5 6 Reflected light simu...

Page 64: ...n IN You can check the state whether the MIX slider for reflected light observation is engaged in or removed from the light path by the POSITION indicator d of the hand switch BX3M HS Tighten the mounting knob a to secure the slider 1 2 3 d a 1 c b 2 1 Inserting the MIX slider for reflected light observation a b c If you press the ON OFF button a of the hand switch BX3M HS to set it to ON the illu...

Page 65: ...edetermined quantity Long press Darken continuously Short press Brighten by predetermined quantity Long press Brighten continuously Indicator The light intensity state can be checked by the indicator b Brightness OFF Light intensity value 0 Brightness Maximum Light intensity value 100 Turns ON in blue Turns ON in white Turns OFF 1 3 Adjusting the illumination brightness a b ...

Page 66: ...t operate the dial c and the ON OFF button d 2 NOTE c a Press the MODE button a of the hand switch BX3M HS to select the illumination pattern The indicator b turns ON according to the illumination pattern State Indicator b c Function ON Turns ON The illumination turns ON OFF Turns OFF The illumination turns OFF Long press Short press The illumination turns ON and the indicator turns ON in blue 1 4...

Page 67: ...F reflected light darkfield position or the OP optional mirror unit position Adjust the brightness Adjust the brightness Adjust the interpupillary distance Adjust the diopter Place a sample for observation on the stage Set the main switch of the microscope frame to ON and set the light intensity knob to the low voltage position Set the analyzer and the polarizer Light intensity volume knob P 46 X ...

Page 68: ...ider is attached to the analyzer insertion slot or the polarizer insertion slot remove it Insert the analyzer U AN360 3 a in the analyzer insertion slot Analyzer insertion position Light path First level pulled out Empty hole Second level pressed in Analyzer Rotate the analyzer rotation dial to set to 0 Insert the polarizer U PO3 b in the polarizer insertion slot Analyzer insertion position Light ...

Page 69: ... direction to remove it Depending on the case the reticle holder may be tightened too firmly and it cannot be rotated If you grab the reticle holder too firmly it will be deformed and cannot be rotated furthermore Grab around the reticle holder lightly with equal force to rotate or push it to the rubber sheet placed on the desk to rotate and remove it Insert the eyepiece micrometer b in the remove...

Page 70: ... with a positioning pin When using the eyepiece equipped with the micrometer insert the eyepiece into the right eyepiece sleeve In this case attach the eyepiece so that the eyepiece positioning pin c enters the groove d below the eyepiece sleeve The super widefield eyepiece SWH10X H has a positioning pin Attach it by inserting the positioning pin to the positioning groove of the eyepiece sleeve 1 ...

Page 71: ...ing nosepiece Set the main switch of the microscope frame to OFF Rotate the coarse focusing knob a to lower the stage sufficiently Loosen the revolving nosepiece clamping screw b using an Allen screwdriver If the clamping screw is loosened too much the revolving nosepiece is caught with the clamping screw and it cannot be removed And if the clamping screw is loosened furthermore the clamping screw...

Page 72: ...lure may result Remove the cap from each objective mount screw hole Attach the caps to the unused objective mounting screw holes The revolving nosepiece can be rotated smoothly by attaching the objectives uniformly Therefore the objectives that are not used frequently should also be attached Using the brightfield objective adapter When attaching a brightfield objective to the revolving nosepiece f...

Page 73: ...cope frame and push it until it touches the end When attaching the revolving nosepiece lower the stage sufficiently so that objectives do not touch the stage Push in the revolving nosepiece mount dovetail completely until it touches the end If the clamping screw is tightened without inserting the revolving nosepiece completely the mount section may be deformed and the revolving nosepiece cannot be...

Page 74: ...screwdriver provided with microscope frame Be careful if the mounting screw is loosened too much it may come off Remove the lamp housing For details of the power supply for halogen bulb TH4 100 TH4 200 refer to the instruction manual provided with the unit 1 2 3 NOTE 4 2 Replacing the halogen bulb The bulb lamp housing and areas around the lamp housing are extremely hot during and right after use ...

Page 75: ...a 2 positions on the microscope frame using the Allen screwdriver Insert the halogen lamp housing in the light source mount hole until it touches the end Attach the lamp housing with the heat radiating fin b facing up and secure he sufficient space above below and at rear of the lamp housing Otherwise fire may be caused Tighten the mounting screw using the Allen screwdriver Do not tighten the scre...

Page 76: ... may come off Remove the lamp housing For details of the power supply for mercury burner U RFL T refer to the instruction manual provided with the unit 1 2 3 NOTE 4 6 4 Replacing the mercury burner 1 Removing the mercury lamp housing Loosen the mounting screw a on the top of the lamp housing using the Allen screwdriver 1 2 b Hold the upper section of the lamp housing and pull it upward to remove t...

Page 77: ...ide Be careful not to touch the burner directly with your hand and avoid leaving fingerprints or stains on the burner Otherwise the burner may be exploded due to the glass distortion caused by stains If fingerprints or stains are attached to the burner clean it by wiping gently with a piece of cleaning paper slightly moistened with absolute alcohol Tighten the burner mounting screws d 2 positions ...

Page 78: ...d by the Olympus representative Connect the cable of the mercury lamp housing to the power supply U RFL T For details refer to the instruction manual provided with the unit Perform the centering of the mercury burner For centering procedures see page 73 1 CAUTION 2 3 3 Attaching the mercury lamp housing USH 103OL 300 hours This value is based on the cycle of turning ON for 2 hours and turning OFF ...

Page 79: ...he main switch to ON Wait until the arc image stabilizes 5 to 10 minutes after ignition before centering Engage the light shielding plate of the filter slider to block the illumination light Use the observation light path selection knob to set the BF light path Engage the 10X objective in the light path place the centering target U CST on the stage with the cross line side facing up and align the ...

Page 80: ...or lens focusing knob of the mercury lamp housing because it is placed at the back of the microscope insert the extension handle U CLA c in the knob and use the knob Rotate the burner centering knobs b to move the arc image to the center of the right left half of the field of view Picture B Fit the Allen screwdriver into the mirror focusing screw d on the rear of the lamp housing and rotate the sc...

Page 81: ...en the cover Insert the arbitrary filter in the filter mounting hole b of the slider If the orientation of the filter to use is specified insert the filter so that the filter surface of the light source side faces up Insert the precision screwdriver in the notch a and raise and slide the cover with the precision screwdriver to return the cover to the original position At this time slide the cover ...

Page 82: ...on 26 The observation light path selection knob is at the middle position Set the light path securely using the observation light path selection knob 25 The aperture diaphragm is not centered Center the aperture diaphragm 103 c Dust or dirt is visible in the field of view The tip of the lamp is dirty Clean them sufficiently 12 Dust or dirt is attached to the sample The top surface of the condenser...

Page 83: ...tment ring to the appropriate tightness 29 b The stage is lowered on its own and the focus is lost during observation The course focusing tension adjustment ring is loosened too much Tighten the coarse focusing tension adjustment ring to the appropriate tightness 29 c The coarse focusing knob does not rise to the upper limit The pre focusing lever is locked at the lower position Unlock the pre foc...

Page 84: ...ight observation U MIXR cannot be controlled by operating the hand switch BX3M HS The MIX slider for reflected light observation U MIXR is not engaged in the light path Engage the MIX slider for reflected light observation in the light path You can check whether the MIX slider for reflected light observation is engaged or not by the POSITION indicator of the hand switch 58 The hand switch BX3M HS ...

Page 85: ...device driver from the installation media of the application software The device is not detected properly Scan the device again with the device manager of the operation system The USB cable is connected to the USB connector of PC for the first time Install the device driver in accordance with the installation wizard The communication between the microscope frame and PC is disconnected Remove the i...

Page 86: ...e blinking starts when the aperture diaphragm close button is pressed The aperture diaphragm reaches the minimum limit If the minimized aperture diaphragm is visible this is not a failure 103 3 and 4 are OFF d The aperture diaphragm button is turned OFF and does not function The aperture diaphragm button is set to disabled Set the DIP switch No 3 to OFF 98 The aperture diaphragm is damaged Contact...

Page 87: ...e DIP switch is not set properly Set the DIP switch properly 98 The objective interferes with the sample or the stage Make sure that the objective does not interfere the sample or stage and turn OFF the power supplies of the microscope and turn ON again The connection between the revolving nosepiece and the microscope frame is disconnected Attach the revolving nosepiece again properly 65 The revol...

Page 88: ...SEWTTR 5 Field number 26 5 tilting type MX SWETTR Field number 26 5 tilting type Light source for reflected light illumination LED light source BX3M LEDR White LED Maximum current 700mA Average lifetime Approx 60 000 hours designed value in normal operation Halogen lamp housing U LH100L 3 U LH100IR Applicable bulb 12V100WHAL L long life type made by PHILIPS Co 7724I Lifetime Approx 2 000 hours Use...

Page 89: ...For differential interference contrast U DICR Standard type U DICRHC High resolution type U DICRHC High contrast type For MIX U MIXR Equipped with LED ring illumination light control by hand switch Stage MX SIC8R Coaxial flexible knob at lower right Grip clutch mechanism Movable range 210 mm Y x 210 mm X MX SIC6R2 Movable range 158 mm Y x 158 mm X MX SIC1412R2 Movable range 356 mm Y x 305 mm X Ope...

Page 90: ...me Magnification Brightfield Darkfield BF DF simultaneously Polarization DIC Fluorescence Infrared MPLN M Plan Achromat 5X 10X 20X 50X 100X MPLN BD M Plan Achromat BD 5X 10X 20X 50X 100X MPLFLN M Plan Semi Apochromat 1 25X 1 2 5X 1 5X 10X 20X 40X 2 50X 100X MPLFLN BD M Plan Semi Apochromat BD 5X 10X 20X 50X 100X 150X MPLFLN BDP M Plan Semi Apochromat BDP 5X 10X 20X 50X 100X LMPLFLN Long working di...

Page 91: ... 55 400X 0 67 50X 0 80 1 0 0 500X 0 44 500X 0 53 100X 0 90 1 0 0 1000X 0 22 1000X 0 27 MPLFLN BD M Plan Semi Apochromat BD OFN26 5 MPlanFLN BD 5X 0 15 12 0 50X 4 4 50X 5 3 10X 0 30 6 5 100X 2 2 100X 2 65 20X 0 45 3 0 0 200X 1 1 200X 1 33 50X 0 80 1 0 0 500X 0 44 500X 0 53 100X 0 90 1 0 0 1000X 0 22 1000X 0 27 150X 0 90 1 0 0 1500X 0 15 1500X 0 18 MPLFLN BDP M Plan Semi Apochromat BDP OFN26 5 MPlan...

Page 92: ...ng working dsistance M Plan Achromat OFN22 LMPlan IR 5X 0 1 23 50X 4 4 50X 5 3 10X 0 3 18 100X 2 2 100X 2 65 LCPLN IR IR M Plan Achromat OFN22 LCPlan IR 20X 0 45 8 3 0 1 2 200X 1 1 200X 1 33 50X 0 65 4 5 0 1 2 500X 0 44 500X 0 53 100X 0 85 1 2 0 0 7 1000X 0 22 1000X 0 27 For liquid crystal panel Optical performance Series name Notation Magnification Numerical aperture Working distance mm Cover gla...

Page 93: ...rture diaphragm is narrowed down and decreases when the numerical aperture of the objective becomes larger Field number Indicates the diameter of the image area visible by the eyepiece in mm Actual field Indicates the diameter of the field area on the sample surface in mm Abbreviations used for objective Ex M PL Plan FL N 100 BD None For brightfield BD For brightfield darkfield BDP For brightfield...

Page 94: ...t catalogs Before assembling the microscope remove dust and dirt from the mount of each unit and assemble carefully to prevent from scratches The procedures to assemble the units shown by numbers are described on the next page and after Assemble the units using the Allen screwdriver opposite side 3 mm and the Allen wrench opposite side 3mm provided with the microscope frame Do not use the Allen wr...

Page 95: ...belt will stick together and the clutch function will not work smoothly If this phenomenon occurs remove the stickiness according to Stickiness between clutch and belt P 27 Attaching the Y stroke limit stopper For the transmitted light observation using the MX SIC1412R2 stage only when MX TILLA is used it is required to attach the stopper that limits the Y axis stroke to 10 inches in order to prev...

Page 96: ...cure the mask holder by tightening the holder clamping screw d on the left side of the stage using the flathead screwdriver Attaching the black plate or glass plate Place the plate on the top surface of the stage carefully and tighten the holder clamping screw on the left side of the stage When attaching the glass plate do not tighten the clamping screw excessively to prevent the glass plate from ...

Page 97: ... P 58 or Setting the DIC slider P 52 Loosen the tube clamping screw a sufficiently using the Allen screwdriver Fit the circular dovetail at the bottom of the observation tube into the tube mount on the top surface of the arm Tighten the tube clamping screw a to secure the observation tube 1 2 3 6 Attaching the observation tube a 7 Attaching the eyepiece For attaching procedures see 6 1 Removing an...

Page 98: ...de or the mercury lamp housing the optional adapter MX HGAD is required Loosen the clamping screws a 2 positions of the microscope frame using the Allen screwdriver Insert the adapter MX HGAD in the light source mounting hole of the microscope frame until it touches the end and tighten the mounting screw a 2 positions Loosen the mounting screw b 2 positions of the adapter MX HGAD using the Allen s...

Page 99: ...using adapter U DULHA so that the illuminator a comes to the left side horizontally when facing to the back side of the microscope frame NOTE Attaching to MX63 Adapter MX HGAD Darkfield converter U RCV Liquid light guide adapter U LLGAD Double lamp housing adapter U DULHA Reflected LED light source BX3M LEDR Halogen lamp housing U LH100L 3 Mercury lamp housing U LH100HG U LH100HGAPO a ...

Page 100: ... U LH100HG U LH100HGAPO Layout of the extension cable for reflected LED light source If you want to connect the light source for reflected LED to the microscope frame using the double lamp housing adapter U DULHA the extension cable MX LLHECBL is required Attach the cable holder b provided with the extension cable as shown in the picture and lay out the cable so that the cable does not contact the...

Page 101: ...hey are attached completely the breath shield cannot be attached to the microscope frame Align the breath shield clamping screw holes c with the mount holes d of the mounting fixture and secure using the provided screws longer ones Tighten the screws completely that were secured temporarily Do not tighten the screws excessively to prevent the breath shield from cracking NOTE 1 NOTE 2 3 NOTE 9 Atta...

Page 102: ...ug last Cables are vulnerable when bent or twisted Never subject them to excessive force Be sure to connect only cables specified by Olympus to the connectors Connect the connectors in the correct orientation paying attention to the shape of the connector If the connector is attached with clamping screws be sure to tighten them When connecting PC to the microscope frame connect only either of the ...

Page 103: ...slider for reflected light observation U MIXR into the cable holder and close the cable holder If you disconnect the connector from the MIX slider for reflected light observation store the cable in the cable holder as shown in c When the connector is disconnected the indicator d of the MIX slider for reflected light observation turns OFF Indicator of MIX slider for reflected light observation When...

Page 104: ...ic electricity by lightly touching any metallic objects around you with hand NOTE CAUTION 11 Setting the DIP switch AS PRESET switch Factory default setting DIP switch Function Setting ON OFF OFF U D5BDREMC U P5REMC U P5BDREMC Revolving nosepiece type Number of holes ON U D6REMC U D6BDREMC Buzzer sound OFF The buzzer sound is heard ON The buzzer sound is not heard Aperture diaphragm open close but...

Page 105: ...n the darkfield observation the AS diameter is fixed at the open position automatically The AS diameter can be set using the AS PRESET switches while the main switch is set to ON Setting the AS diameter Insert a precision flathead screwdriver etc into the center of the AS PRESET switch b that corresponds to the objective mounting screw No and move the arrow to the intended setting value See Table ...

Page 106: ...S MPLN MPLN BD Series 5X AS maximum AS minimum 10X 20X 50X 100X MPLFLN MPLFLN BD MPLFLN BDP Series 1 25X 2 5X 5X 10X 20X 40X 50X 100X 150X LMPLFLN LMPLFLN BD Series 5X 10X 20X 50X 100X LMPLN IR LCPLN IR Series 5X 10X 20X 50X 100X LCPLFLN LCD Series 20X 50X 100X SLMPLN Series 20X 50X 100X MPLAPON Series 50X 100X 100XO2 Setting the AS value to 0 allows you to lock the AS interlocking in association ...

Page 107: ...s Insert the power cord connector b in the connector c Connect the power cord to the grounded triplex outlet If the outlet is not grounded the electric safety performance intended by Olympus cannot be assured Connect the power cord s plug d to the power outlet e on the wall NOTE 1 CAUTION 2 12 Connecting the power cord e d a Shapes of the power cord plugs and power outlets are different by country...

Page 108: ...tion as long as possible 8 mm or more is recommended 1 CAUTION The center of gravity changes depending on the sample weight sample position or stage movement etc In particular as MX63L uses a large size stage the center of gravity changes significantly To prevent the microscope from unexpected overturning adjust the adjuster at the bottom of the microscope to take the overturning prevention action...

Page 109: ...en close button c to adjust so that the aperture diaphragm image becomes approximately 70 of the pupil of the objective as shown in the picture below Aperture diaphragm image 30 70 Pupil of eyepiece If the center of the aperture diaphragm is deviated insert the Allen screwdriver provided with the microscope frame to loosen the aperture diaphragm clamping screw d approximately one to two turns Then...

Page 110: ...ctors the color of the terminal part is blue or SS is printed on Connecting the RS 232C cable Connect the connector of the RS 232C cable to the RS 232C connector of PC NOTE 1 USB 3 0 USB 2 0 NOTE 1 To control this system from PC PC must be connected to the microscope frame with the interface cable USB cable or RS 232C cable In addition the application software to control this system must be instal...

Page 111: ...t source JCR12V 100WB made by Ushio Co 1000 h Filter Filter name Model type Average lifetime Reflected light band pass filter for IR U BP1100IR U BP1200IR made by Olympus 500 h Immersion oil Olympus immersion oil IMMOIL F30CC Olympus immersion oil IMMOIL F30CC Obtain the Safety Data Sheet from the Website of Olympus Corporation Absolute alcohol commercially available product Neutral detergent comm...

Page 112: ...sing time exceeds 20 000 hours of use 2 Light flickers when you move a lamp cable or illumination devices only when using the halogen bulb 3 Dirt or substances are attached around the main switch 4 The light flickers if you move a lamp cable or illumination devices 5 Lamp cable is unusually hot to the touch 6 Burning or smoke odor 7 The light still flickers even though the lamp is replaced only wh...

Page 113: ... approved by one of the agencies mentioned in Table 1 please use replacements approved by any other equivalent and authorized agencies in your country Country Agency Certification mark Country Agency Certification mark Argentina IRAM Italy IMQ Australia SAA Japan JET Austria ÖVE Netherlands KEMA Belgium CEBEC Norway NEMKO Canada CSA Spain AEE Denmark DEMKO Sweden SEMKO Finland FEI Switzerland SEV ...

Page 114: ...ic Cables BASEC BASEC HAR 10 10 30 N V KEMA KEMA KEUR HAR 10 30 30 SEMKO AB Svenska Elektriska Materielkontrollanstalter SEMKO HAR 10 10 50 Österreichischer Verband für Elektrotechnik ÖVE ÖVE HAR 30 10 50 Danmarks Elektriske Materialkontroll DEMKO DEMKO HAR 30 10 30 National Standards Authority of Ireland NSAI NSAI HAR 30 30 50 Norges Elektriske Materiellkontroll NEMKO NEMKO HAR 10 10 70 Asociacio...

Page 115: ...ocks smoothly Loosen the hexagon socket head cap screws 3 x 6 of the cover plate on the right of the base using the Allen wrench 2 5 mm and remove the cover plate Raise the focusing unit to the upper limit align the dovetail groove e of the illuminator unit d with the internal dovetail insert it until it touches the end and tighten the clamping screws of the internal dovetail using the Allen screw...

Page 116: ... unit c upside down Loosen the mirror unit clamping screw e using the Allen screwdriver insert the desired mirror unit f into the mount dovetail so that the product name on the side of the unit is upside down and tighten the clamping screw e Remove the screw g that limits the light path selection stroke using the Allen wrench 3 mm This screw should be retained by the user because it will be reused...

Page 117: ...switching stroke to the original setting Remove the hexagon socket head cap screws 4 x 16 d 4 positions of the observation light path unit c using the Allen wrench 3 mm and place the unit c upside down Remove the screws f 2 positions that clamp the filter frame e using the Phillips screwdriver and remove the filter frame e Insert the filter g into the filter holding slit long slit of the filter fr...

Page 118: ...row direction d in the picture facing from the right side of the microscope and secure it using the clamping screws e 2 positions Clean the place to attach the sticker f for focus aid on the side panel using the cleaning paper etc moistened with absolute alcohol and attach the sticker using the mount hole as a guide Insert the focus aid knob g from the insertion slot and rotate clockwise to attach...

Page 119: ......

Page 120: ...AX8974 02 Issued in May 2019 Distributed by Manufactured by Shinjuku Monolith 2 3 1 Nishi Shinjuku Shinjuku ku Tokyo 163 0914 Japan www olympus global com ...

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