LN0540E2110B0
Piezo Control Valve
Instruction Manual
CV-3000 Series
Safety Precautions
Incorrect handling may cause death or injury
(1)
Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called “gas” or “fluid”).
(2)
DO NOT
apply any corrosive fluid to materials exposed to gas. Corrosion may
cause gas to leak into the atmosphere.
(3)
This device is not designed as an explosion proof structure.
DO NOT
use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1)
Observe the precautions listed in the WARNING (above).
(2)
Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3)
This device is not designed to be waterproof.
DO NOT
locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4)
DO NOT
modify this device. It may cause fire or other problems.
(5)
While a power supply is applied to the device, +15VDC and -15VDC must be
applied simultaneously. If only +15VDC or -15VDC is applied, electronic
circuits will become unstable and it may cause a malfunction.
(6)
This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(7)
This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8)
Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the piezo control valve CV-3000 series
(Hereafter, it is called "CV"). Please read through this manual carefully to
familiarize yourself with the features of this device.
2. Summary
The CV is a high-speed response valve for controlling the flow rate or pressure of
gas by the control input from an external device.
3. Features
The CV is the following features.
(1)
Equipped with a high-speed, high-performance piezoelectric actuator.
(2)
Superior corrosion resistant sealing materials make maintenance easy.
(3)
By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(4)
RoHS compliant
4. Structure
The CV consists of piezo valve, control circuit, piezo driver.
5. Specification / Dimensions
(1) Specification
Name
Piezo Control Valve
Model
CV-3102
CV-3202
Standard flow rate in
nitrogen
~5LM
~10LM
Valve operation mode
Normally open valve / Normally closed valve
Internal surface treatment
No treatment / Precision polishing (LEP)
Minimum controllable flow rate
2%F.S.
Setting input of valve-opening
0 to 5VDC
Response time
Less than 0.5 second
Operating differential
pressure
50 to 300kPa(D)
Normally open 50 to 300kPa(D)
Normally closed 100 to 300kPa(D)
Maximum operating
pressure
300kPa(G)
Withstanding pressure
1MPa(G)
Operating / Storage
temperature & Humidity
0 to 50 ºC·0 to 80%RH (Condensation should be avoided)
Leak integrity
Less than 1×10
-11
Pa · m
3
/sec (He)
Mounting direction
Free
Wetted materials
Stainless steel 316L, PCTFE, Au
Seal Materials
Au
Actuator
Piezoelectric actuator
Fittings
6.35VCR
Power supply
+15VDC±3% : 50mA -15VDC±3% : 50mA
Weight
Approx. 700g
(2) Dimensions
6. Ordering information
C V - 3 * 0 2 – M O – 4 V R 5 A A A 0 0 – d d – e e – f f
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[1] Series model: CV: Control Valve
CV-3102, CV-3202
[2] Valve mode
NO: Normally open (No treatment), MO: Normally open (LEP)
NC: Normally close (No treatment), MC: Normally close (LEP)
[3] Fitting
4VR5:6.35mm VCR86
※ Please consult for more information.
[4] Optional
Default setting is labeled “AAA00”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
CCM, LM
