background image

 

 Find us at www.keysight.com 

 

 

 

 

 

 

 

 

 

Page 1 

 

 

 

 

M9602A and M9603A 
PXIe Precision Source/Measure Units  

15 MSa/s, 1 pA/100 fA, 60 V, 3.5 A DC/10.5 A pulse 

Introduction 

The Keysight M9602A and M9603A are PXIe precision SMUs which offer a best-
in-their-

class narrow pulse width of 10 μs, a fast sampling rate of up to 15 MSa/s, 

and a wide output range that enables dynamic/pulsed measurements for broad 
emerging applications such as VCSEL optical devices and IC testing. This table 
shows an overview of the M9602A and M9603A, product options, and associated 
accessories. This guide provides step-by-step instructions to help you configure 
the product to meet the desired test requirements. 

 

 

 

 

Model number

 

M9602A 

PXIe SMU, 15 MSa/s, 1 pA, 60 V, 3.5 A DC/10.5 A pulse 

M9603A 

PXIe Precision SMU, 15 MSa/s, 100fA, 60 V, 3.5 A DC/10.5 A 
pulse 

Accessories

 

PX0101A-001/002 

BNC-to-ferrule terminal cable, 1.5 m/ 3 m 

PX0103A-001/002 

Triaxial to SMB cable, 1.5 m/ 3 m 

PX0104A-001/002 

High current triaxial cable, 4 A, 1.5 m/ 3 m 

PX0105A-001/002 

Low inductance BNC cable, 1.5 m/ 3 m 

PX0108A-001/002 

BNC-to-SMB cable, 1.5 m/ 3 m 

Options

 

1A7 

Calib uncerta guardbanding (not accredited) 

A6J 

ANSI Z540-1-1994 calibration 

UK6 

Commercial calibration certificate with test data 

Summary of Contents for M9602A

Page 1: ...ptions and associated accessories This guide provides step by step instructions to help you configure the product to meet the desired test requirements Model number M9602A PXIe SMU 15 MSa s 1 pA 60 V...

Page 2: ...hort bar 1ea Short bar to connect low terminals to chassis common orderable part number is M9601 87001 includes 5 pcs Connector terminal block 2 5 mm 6 terminal 1ea Connector terminal block to connect...

Page 3: ...1 High current triaxial cable2 Triaxial to SMB cable3 50 s or DC High current triaxial cable High current triaxial cable Triaxial to SMB cable Two wire High current triaxial cable NA NA 1 A low induct...

Page 4: ...connection is required for low current measurement 10 nA or less measurement Do not connect the outer shield or Low Force to the chassis frame ground of the DUT when M9603A is grounded Figure 2 Connec...

Page 5: ...NC f adaptor instead PX0105A 001 002 Low inductance BNC cable 1 5 m 3 m 1 High force N1254A 106 Triaxial m to BNC f adaptor 1 Used with PX0105A Four wire connection for pulse 50 s or DC Figure 3 shows...

Page 6: ...e 4 shows the connection for 2 wire connection For this configuration select the items shown in Table 3 Table 3 Required items for 2 wire connection Product number Description Qty Note PX0104A 001 002...

Page 7: ...X0101A 001 or 002 BNC to ferrule terminal cable with a connector terminal block to connect the M9602A M9603A s interlock pins to it For more detailed information please refer to the Keysight M9602A M9...

Page 8: ...tion of calibration comes as standard The optional ISO 17025 not accredited ANSI Z540 and commercial calibration certificate with test data are available as follows Description Product number Addition...

Page 9: ...Connection between M9602A M9603A and your DUT Two wire connection or four wire connection If you are measuring very small resistances or applying a very large current you should use the four wire mea...

Page 10: ...urements 1 nA requires a guarding to prevent leakage through the measurement cable Figure 7 illustrates a simplified overview of the guarding technique Guarded measurements require the use of triaxial...

Reviews: