Brooks GF100 Series Installation And Operation Manual Download

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Installation and Operation Manual

X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020

RS485 L-Protocol Supplemental Manual
for GF100 Series Mass Flow Controllers
and Meters

Brooks

GF125 Series and

GF135 Series

Summary of Contents for GF100 Series

Page 1: ...n and Operation Manual X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 RS485 L Protocol Supplemental Manual for GF100 Series Mass Flow Controllers and Meters Brooks GF125 Series and GF135 Series ...

Page 2: ... and meters Should you require any additional information concerning the RS485 L Protocol Mass flow controllers and meters please feel free to contact your local Brooks Sales and Service Office see back cover for contact information or visit us on the web at www BrooksInstrument com We appreciate this opportunity to service your fluid measurement and control requirements and trust that we will be ...

Page 3: ...ow 19 3 9 Valve Drive Current 21 3 10 Calibrated Instance Process Gas Selection 23 3 11 Query for Calibration Instance Process Gas Selection 24 3 12 Query for available Calibration Instance 26 3 13 Auto Zero Enable Disable 28 3 14 Requested Zero Enable 29 3 15 Query for Requested Zero Status 30 3 16 Query for Sensor Current Zero 32 3 17 Query for Sensor Reference Zero 34 3 18 Set Sensor Reference ...

Page 4: ...4 4 Message Sequence between Master Controller and a MFC Slave Controller 50 4 5 MFC New Setpoint Conversion 51 4 6 Sensor Zero Filter 51 4 6 1 Requested Zero 52 4 6 2 Auto Zero 52 4 7 Calibration Instances 53 4 8 Analog Digital Mode 53 5 Advanced Diagnostics GF135 Only 55 5 1 New Communication Protocol Overview 55 5 1 1 Objectives and Problem Statement 55 5 1 2 Protocol Description 55 5 2 Specifi...

Page 5: ...roller to act upon a new set point when received Set Point Master controller will use this message to send a new set point to a MFC controller Ramp Time Master controller will use this message to send a ramp time to a MFC controller Filtered Set Point Master controller will use this message to get the current set point from a MFC controller Indicated Flow Master controller will use this message to...

Page 6: ...unction Query for Requested Zero Status Master controller will use this message to query if the requested zero function has been completed Query for Sensor Current Zero Master controller will use this message to query the current sensor zero offset Query for Sensor Reference Zero Master controller will use this message to query the sensor reference zero offset Set Sensor Reference Zero Master cont...

Page 7: ...acts as a slave device on an RS 485 multi drop bus It continually listens for transaction requests from the Master controller processes requests addressed to it and sends replies as needed 2 2 Communication Parameters BAUD rate 9600 19200 38400 57600 Data bits 8 Start bit 1 Stop bit 1 Parity none Byte order LSB first MAC Address assignment Master controller 0 Digital MFC controller 1 31 0x21 33 0x...

Page 8: ...iscards the carry from the byte summation calculation This message structure resembles with the one used by DeviceNet protocol MAC ID Targeted MFC Controller Address STX 0x02 Command Code 0x80 for read 0x81 for write Packet Length Class ID Instance ID Attribute ID Data 0 2 bytes Pad 0x00 Checksum All communication on the bus is done by service requests from Master controller to a specified MFC sla...

Page 9: ...Valve Drive Current 0x6A 0x01 0xB6 Calibration Instance 0x66 0x00 0x65 Query for Calibration Instance 0x66 0x00 0x65 Query for Available of Calibration Instances 0x66 0x00 0xA0 Auto Zero Enable Disable 0x68 0x01 0xA5 Requested Zero Enable 0x68 0x01 0xBA Query for Requested Zero Status 0x68 0x01 0xBA Query for Sensor Current Zero 0x68 0x01 0xA9 Query for Sensor Reference Zero 0x68 0x01 0xAA Set Sen...

Page 10: ...Section 2 Background Installation and Operation Manual Brooks RS485 L Protocol MFCs X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 6 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 11: ...llowing sub sections describe in detail the supported messages 3 1 Query for MAC ID Master controller will use this message to query the existence of a MFC controller Query message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x03 Instance ID 0x01 Attribute ID 0x01 Pad 0x00 Checksum 0x8A 7 ...

Page 12: ...s X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x04 Class ID 0x03 Instance ID 0x01 Attribute ID 0x01 MFC MAC ID Pad 0x00 Checksum 8 ...

Page 13: ...0 Brooks RS485 L Protocol MFCs 3 2 Digital Mode Selection Master controller will use this message to set a MFC controller to digital or analog mode MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x69 Instance ID 0x01 Attribute ID 0x03 Mode 1 digital 2 analog Pad 0x00 Checksum 9 ...

Page 14: ...ntrol Mode X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to query the present control mode MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x69 Instance ID 0x01 Attribute ID 0x03 Pad 0x00 Checksum 0xF2 10 ...

Page 15: ...art Number 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MFC controller to Master controller MAC ID 0 Master Controller STX 0x02 Command Code 0x80 for read Packet Length 0x04 Class ID 0x69 Instance ID 0x01 Attribute ID 0x03 Mode 1 digital 2 analog Pad 0x00 Checksum 11 ...

Page 16: ...h 2020 Master controller will use this message to configure a MFC controller to act upon or ignore a new set point when received MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x69 Instance ID 0x01 Attribute ID 0x05 FreezeFollow 1 Act on new set point immediately default 0 Ignore change in set point Pad 0x00 Checksum 12 ...

Page 17: ... Protocol MFCs 3 5 New Setpoint Master controller will use this message to send a new set point to a MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x05 Class ID 0x69 Instance ID 0x01 Attribute ID 0xA4 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum See New Setpoint conversion Table pg 51 13 ...

Page 18: ...long the MFC controller should take to reach the final set point from the current set point The unit is millisecond A zero ramp time effectively disables the ramping Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x05 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA4 Data Byte 1 LSB Data By...

Page 19: ...rotocol MFCs 3 6 1 Query for Ramp Time Setting Master controller will use this message to query the ramp time setting Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA4 Pad 0x00 Checksum 0x94 15 ...

Page 20: ...MFC eng Part Number 541B183AAG March 2020 Request message from Master controller to a digital MFC controller MAC ID 0 controller address STX 0x02 Command Code 0x80 for read Packet Length 0x07 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA4 Data Byte 1 LSB Data Byte 2 MSB Reserved Byte 1 Reserved Byte 2 Pad 0x00 Checksum 16 ...

Page 21: ... Master controller will use this message to get the current set point from a MFC controller This is the current set point after ramping has been applied Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA6 Pad 0x00 Checksum 0x96 17 ...

Page 22: ...eng Part Number 541B183AAG March 2020 Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA6 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum See New Setpoint Conversion Table Pg 51 18 ...

Page 23: ...col MFCs 3 8 Indicated Flow Master controller will use this message to get the current flow reading from a MFC controller Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA9 Pad 0x00 Checksum 0x99 19 ...

Page 24: ...eng Part Number 541B183AAG March 2020 Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x6A Instance ID 0x01 Attribute ID 0xA9 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum See New Setpoint Conversion Table Pg 51 20 ...

Page 25: ...5 L Protocol MFCs 3 9 Valve Drive Current Master controller will use this message to get the valve drive current Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for re ad Packet Length 0x03 Class ID 0x6A Instance ID 0x01 Attribute ID 0xB6 Pad 0x00 Checksum 0xA6 21 ...

Page 26: ...t Number 541B183AAG March 2020 Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x6A Instance ID 0x01 Attribute ID 0xB6 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum 22 Valve Drive Valve Drive value Hex 0 0 0000 100 0 FFFF ...

Page 27: ...tocol MFCs 3 10 Calibration Instance Process Gas Selection Master controller will use this message to select which calibration instance is to be used for flow metering MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x66 Instance ID 0x00 Attribute ID 0x65 Calibration Instance ID Pad 0x00 Checksum 23 ...

Page 28: ...Number 541B183AAG March 2020 Master controller will use this message to query the selected calibration instance which is currently being used for flow metering Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x66 Instance ID 0x00 Attribute ID 0x65 Pad 0x00 Checksum 0x50 24 ...

Page 29: ...ber 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x66 Instance ID 0x00 Attribute ID 0x65 Calibration Instance ID Reserved Byte Pad 0x00 Checksum 25 ...

Page 30: ... Series MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to query available number of calibration instances Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x66 Instance ID 0x00 Attribute ID 0xA0 Pad 0x00 Checksum 0x8B 26 ...

Page 31: ...mber 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x04 Class ID 0x66 Instance ID 0x00 Attribute ID 0xA0 Available Of Calibration Instances Pad 0x00 Checksum 27 ...

Page 32: ... X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to enable auto zero function MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x68 Instance ID 0x01 Attribute ID 0xA5 0 for enable 0 for disable Pad 0x00 Checksum 28 ...

Page 33: ...183AAG March 2020 Brooks RS485 L Protocol MFCs 3 14 Requested Zero Enable Master controller will use this message to enable requested function MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x68 Instance ID 0x01 Attribute ID 0xBA 1 for enable Pad 0x00 Checksum 29 ...

Page 34: ... Part Number 541B183AAG March 2020 Master controller will use this message to query if the requested zero function has been completed Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x68 Instance ID 0x01 Attribute ID 0xBA Pad 0x00 Checksum 0xA8 30 ...

Page 35: ...rt Number 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x04 Class ID 0x68 Instance ID 0x01 Attribute ID 0xBA 0 completed 1 in progress Pad 0x00 Checksum 31 ...

Page 36: ... MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to query the current sensor zero offset Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x68 Instance ID 0x01 Attribute ID 0xA9 Pad 0x00 Checksum 0x97 32 ...

Page 37: ...G March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MFC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x07 Class ID 0x68 Instance ID 0x01 Attribute ID 0xA9 Data Byte 1 LSB Data Byte 2 MSB Reserved Byte 1 Reserved Byte 2 Pad 0x00 Checksum 33 ...

Page 38: ... MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to query the sensor reference zero offset Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x68 Instance ID 0x01 Attribute ID 0xAA Pad 0x00 Checksum 0x98 34 ...

Page 39: ...Number 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from a digital MPC controller to Master controller MAC ID 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x68 Instance ID 0x01 Attribute ID 0xAA Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum 35 ...

Page 40: ...T RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to set sensor reference zero offset MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x05 Class ID 0x68 Instance ID 0x01 Attribute ID 0xAA Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum 36 ...

Page 41: ...0 Brooks RS485 L Protocol MFCs 3 19 Set Default Control Mode Master controller will use this message to set MFC control mode when first powered up MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x69 Instance ID 0x01 Attribute ID 0x04 Mode 1 digital 2 analog Pad 0x00 Checksum 37 ...

Page 42: ...trol Mode X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Master controller will use this message to query the MFC wakeup control mode MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x69 Instance ID 0x01 Attribute ID 0x04 Pad 0x00 Checksum 0xF3 38 ...

Page 43: ...umber 541B183AAG March 2020 Brooks RS485 L Protocol MFCs Response message from Digital MFC controller to Master controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x04 Class ID 0x69 Instance ID 0x01 Attribute ID 0x04 Mode 1 digital 2 analog Pad 0x00 Checksum 39 ...

Page 44: ...0 3 21 Query for Inlet Pressure GF125 Only Master Controller will use this message to query the current pressure transducer reading Request message from Master controller to digital MFC controller MAC ID Targeted MFC Controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x31 Instance ID 0x02 Attribute ID 0x06 Pad 0x00 Checksum 0xBE 40 ...

Page 45: ... 0 Master controller STX 0x02 Command Code 0x80 for read Packet Length 0x05 Class ID 0x31 Instance ID 0x02 Attribute ID 0x06 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum Actual Pressure Reading psia Output Value hex Output Value decimal 0 0000 0 100 6000 24576 The actual pressure reading is calculated from the output value Actual Pressure Reading Output_Value Full_scale_output_value 100 Where...

Page 46: ... March 2020 3 22 Query for Temperature Master controller will use this message to query the current temperature reading Request message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x80 for read Packet Length 0x03 Class ID 0x31 Instance ID 0x03 Attribute ID 0x06 Pad 0x00 Checksum 0xBF 42 ...

Page 47: ...80 for read Packet Length 0x05 Class ID 0x31 Instance ID 0x03 Attribute ID 0x06 Data Byte 1 LSB Data Byte 2 MSB Pad 0x00 Checksum Actual Temperature Reading psia Output Value hex Output Value decimal 0 0000 0 500 6000 24576 The actual temperature reading is calculated from the output value Actual Temperature Reading K Output_Value Full_scale_output_value 500 Where Full_scale_output_value 24576 0x6...

Page 48: ...ction 3 Message Protocol Details Installation and Operation Manual Brooks RS485 L Protocol MFCs X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 44 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 49: ...mal Transaction Scenarios 4 1 1 Read Transaction Scenario If the slave controller does not receive any response within a reasonable time 18 20 character times after sending a message it behaves as though it received an ACK If the slave controller receives an invalid response it behaves as though it received an ACK and assumes that the invalid character is the target address for a new message 45 AC...

Page 50: ...ber 541B183AAG March 2020 4 2 Abnormal Transaction Scenarios 4 2 1 Read Transaction Scenario There are two different types of abnormal read transaction scenarios packet error or read error within the MFC controller 4 2 1 1 Packet Error If the Class Instance or Attribute ID is invalid in the Read Request Packet the digital MFC controller responds with a NAK 0x16 character 46 ...

Page 51: ...AG March 2020 Brooks RS485 L Protocol MFCs 4 2 1 2 Read Error If any errors occur within the MFC controller after the first ACK is sent no packet errors a NAK 0x16 will be sent to indicate an execution error 47 Failed to Process Read Request Digital MFC Slave Controller Master Controller NAK 0x16 ACK 0x06 Read Request Packet ...

Page 52: ...narios packet error or write error within the MFC controller 4 2 2 1 Packet Error If the Class Instance or Attribute ID is invalid in the Write Request Packet the digital MFC controller responds with a NAK 0x16 character 4 2 2 2 Write Error If any errors occur within the MFC controller after the first ACK is sent no packet errors a NAK 0x16 will be sent to indicate an execution error 48 Digital MF...

Page 53: ...device can also assume that an error has occurred if a new character is expected and does not arrive within 2 character times of the preceding character s arrival Each transaction on the bus begins when the Master controller transmits a request packet on the bus following an idle gap of at least 1 character time The specified slave MFC controller replies quickly with an ACK character 0x06 to indic...

Page 54: ...t Installation and Operation Manual Brooks RS485 L Protocol MFCs X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 4 4 Message Sequence between Master Controller and a MFC Slave Controller 50 IndicatedFlow Initialization ...

Page 55: ...e calculated from the full scale percent value by NewSetpoint 327 68 full scale 16 384 or NewSetpoint 0xC000 0x4000 100 full scale 0x4000 Note that at the communication level all values are sent in binary format The decimal and hexadecimal formats shown above are for convenience Other commands that use this scaling are Filtered Setpoint Indicated flow Sensors Zero and Sensor Reference Zero 4 6 Sen...

Page 56: ...command the MFC will not return an ACK when process is completed Instead an ACK is sent to acknowledge start of execution During the process time the MFC is in an In Progress state While in the In Progress state the MFC will only accept commands from the Query Requested Zero Status command all other request to the MFC can be ignored 4 6 2 Auto Zero Auto zero process can be started under the follow...

Page 57: ...readings This protocol allows Master controller to query for number of available calibration instances supported by the digital MFC controller and select a calibration instance for digital MFC operation and calculation The detailed calibration instance internal setup is not supported through this interface and must be programmed through local MFC controller 4 8 Analog Digital Mode The default mode...

Page 58: ...ion 4 Software Design Requirement Installation and Operation Manual Brooks RS485 L Protocol MFCs X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 54 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 59: ...o perform a series of self validation at regular interval and report its status to the tool software Some of the self validation will require at least knowing the state of certain part of the tool over which the device typically had neither control nor access The capabilities of the GF135 will enable short interval control of the upstream isolation valve in a manner consistent with good safety pra...

Page 60: ...ng Attribute ID are subject to change and new attributes will likely be added by the time this document is finalized New attributes for the advanced diagnostic Attribute Access Class Instance Att ID Values isolation valve status READ ONLY 177 1 3 0 Upstream open 1 Upstream closed ROD delay Read Write 177 1 20 Delay before first ROD measurement after a setpoint change seconds Minimum default 4 sec ...

Page 61: ...abled Volatile Commissioning status Read Write 103 n 132 0 Not done or failed 1 Commissioning was successful ROD 0 Status READ ONLY 177 1 70 0 ROD Error 0 is not valid 1 ROD Error 0 is valid ROD 1 Status READ ONLY 177 1 71 0 ROD Error 1 is not valid 1 ROD Error 1 is valid ROD 2 Status READ ONLY 177 1 72 0 ROD Error 2 is not valid 1 ROD Error 2 is valid ROD 3 Status READ ONLY 177 1 73 0 ROD Error 3...

Page 62: ...OD Error 19 is valid ROD Error 0 READ ONLY 177 1 90 Float Avg error for setpoint 0 5 ROD Error 1 READ ONLY 177 1 91 Float Avg error for setpoint 5 10 ROD Error 2 READ ONLY 177 1 92 Float Avg error for setpoint 10 15 ROD Error 3 READ ONLY 177 1 93 Float Avg error for setpoint 15 20 ROD Error 4 READ ONLY 177 1 94 Float Avg error for setpoint 20 25 ROD Error 5 READ ONLY 177 1 95 Float Avg error for s...

Page 63: ...mented 5 3 Tool Device Communication The following items need to be addressed with the customer to define the new advanced diagnostic protocol Tool to provide status e g isolation valve status upstream and downstream Some operations require knowing the status of the isolation valves on both sides of the device The tool shall provide this information by writing to the isolation valve status attribu...

Page 64: ...ion The MFC is capable of running a real time clock so only occasional synchronization is required at least once per power on cycle Note At this time this is not implemented on the customer tool software Request from the tool for some trending information Data can be logged at regular interval and time stamped using the time information Data can be retrieved by the customer to provide long term tr...

Page 65: ...nfigurable MAC ID s by sending the Set MAC ID command to the current MFC controller address or the default address 0xFF Master controller will use this message to set the MAC ID of a MFC Set message from Master controller to a digital MFC controller MAC ID Targeted MFC controller address STX 0x02 Command Code 0x81 for write Packet Length 0x04 Class ID 0x03 Instance ID 0x01 Attribute ID 0x01 Data 0...

Page 66: ...pendix Tool Device Communication Installation and Operation Manual Brooks RS485 L Protocol MFCs X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 62 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 67: ...ppendix Tool Device Communication Installation and Operation Manual X DPT RS485 GF100 Series MFC eng Part Number 541B183AAG March 2020 Brooks RS485 L Protocol MFCs THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 68: ...e only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response ...

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