Aerotech ANT95LZS Series Hardware Manual Download

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Revision 2.01

ANT95LZS Series Single-Axis Z Low-Profile

Direct-Drive Nanopositioning Stage

HARDWARE MANUAL

Summary of Contents for ANT95LZS Series

Page 1: ...Revision 2 01 ANT95LZS Series Single Axis Z Low Profile Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Page 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Page 3: ...r Requirements 20 Chapter 2 Installation 21 2 1 Dimensions 21 2 2 Securing the Stage to the Mounting Surface 22 2 2 1 Setting up the Pneumatic Counterbalance 24 2 3 Attaching the Payload to the Stage...

Page 4: ...sure vs External Payload 24 Figure 2 4 Load Orientations 27 Figure 2 5 Cantilevered Load Capabilities 28 Figure 3 1 ANT95LZS Motor and Feedback Wiring 32 Figure 3 2 Machine Direction 35 Figure 3 3 Hal...

Page 5: ...3 Table 2 3 Payload to Stage Surface Hardware 26 Table 3 1 25 Pin Motor and Feedback Connector Pinout 31 Table 3 2 25 Pin Mating Connector Part Numbers 31 Table 3 3 Hall Effect Sensor Specifications 3...

Page 6: ...This page intentionally left blank List of Tables ANT95LZS Hardware Manual 6 www aerotech com...

Page 7: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Page 8: ...the product is used in a manner not specified by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and...

Page 9: ...t l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or operate equipmen...

Page 10: ...connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of th...

Page 11: ...ch environmental specifications DANGER Mechanical Hazard Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage l When the system is not electrically...

Page 12: ...l Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all m...

Page 13: ...magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace makers for e...

Page 14: ...rmation for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment and instrumentation is wr...

Page 15: ...can be operated Retain the brackets and hardware for future use DANGER Mechanical Hazard l The product can move manually without electrical power connected l When the shipping brackets are removed the...

Page 16: ...This page intentionally left blank Handling and Storage ANT95LZS Hardware Manual 16 www aerotech com...

Page 17: ...electrical resolution E4 Incremental linear encoders 1 Vpp amplified sine output high performance Mounting Plate Optional MP Mounting plate Performance Grade Required PL1 Base performance PL2 High acc...

Page 18: ...ibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These stages are not s...

Page 19: ...n Failure 30 000 Hours 1 Certified with each stage 2 In position stability is reported as 3 sigma value requires a 1 Vpp encoder 3 Payload specifications assume that the payload is centered on axis 4...

Page 20: ...d l If compressed air is used it must be filtered to 0 25 microns dry to 0 F dew point and oil free The maximum allowable input pressure specification is 0 6 MPa 87 psi The low friction air cylinder c...

Page 21: ...th the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ANT95LZS...

Page 22: ...uld be performed on the mounting surface rather than the stage Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Table 2 1...

Page 23: ...ur mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M4 SHCS stage mounting 2 0 N m 18 lb...

Page 24: ...arriage plus the additional mass Any adjustment to the mass that is carried by the counterbalance cylinders either adding or subtracting payload necessitates an adjustment to the counterbalance pressu...

Page 25: ...balance cylinder 4 Slowly increase pressure to the cylinder clockwise rotation of the regulator knob until the carriage just starts to rise Adjust the pressure with the regulator such that when you mo...

Page 26: ...gid and comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 5 m WARNING General Hazard Warning Be car...

Page 27: ...rm that all electrical power is disconnected before you make any mechanical adjustments 3 Make sure that the shipping bracket is removed from the stage 4 Adjust the air supply pressure until the table...

Page 28: ...Figure 2 5 Cantilevered Load Capabilities 2 3 Attaching the Payload to the Stage ANT95LZS Hardware Manual 28 www aerotech com...

Page 29: ...ance requirements when they integrate the ANT95LZS into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Page 30: ...tion only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for...

Page 31: ...Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted stage travel in the...

Page 32: ...and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT95LZS Motor and Feedback Wiring 3 2 Motor and Feedback Wiring ANT95LZS Hardware Manual 32 www aer...

Page 33: ...tial Incremental Encoder l Analog SIN SIN COS COS 1V pk pk into 120 terminations l Digital RS422 MRK MRK signals into 120 terminations Digital Output Incremental Encoder RS422 485 compatible Table 3 6...

Page 34: ...1 52 Maximum Bus Voltage VDC 80 80 80 80 Magnetic Pole Pitch mm in 16 00 0 63 16 00 0 63 16 00 0 63 16 00 0 63 1 Performance is dependent upon heat sink configuration system cooling conditions and am...

Page 35: ...the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while ma...

Page 36: ...tor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing Diagram 3 5 Motor and Feedback Phasing ANT95LZS Hardware Manual 36 www aerotec...

Page 37: ...gure 3 4 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 5 Encoder Phasing Reference Diagram Analog Sine Wave ANT95LZS Hardware Manual 3 5 Motor and Feedback Phasing www aerotech com 3...

Page 38: ...This page intentionally left blank 3 5 Motor and Feedback Phasing ANT95LZS Hardware Manual 38 www aerotech com...

Page 39: ...longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually ins...

Page 40: ...lubricants will be required When you clean and or lubricate components of the ANT95LZS series stage 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solvent...

Page 41: ...annels of the linear bearing rails l Use a clean lint free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubrica...

Page 42: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Ch...

Page 43: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Page 44: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Page 45: ...Appendix B Revision History Revision Description 2 01 Safety information updated 2 00 New manual ANT95LZS Hardware Manual Appendix B Revision History www aerotech com 45...

Page 46: ...This page intentionally left blank Appendix B Revision History ANT95LZS Hardware Manual 46 www aerotech com...

Page 47: ...g 14 Humidity 18 I Inspection Schedule 39 isopropyl alcohol 40 L label 14 15 Limit Switch Specifications 33 Lubrication 41 M Motor Related Warnings 11 mounting surface cleaning 22 26 securing stage 22...

Page 48: ...Thermistor Specifications 33 Troubleshooting 42 V Vibration 18 W Warnings 8 Warranty and Field Service 43 Index ANT95LZS Hardware Manual 48 www aerotech com...

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