Aerotech ANT130LZ Series Hardware Manual Download

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Revision 2.01

ANT130LZ Series Single-Axis Z Direct-Drive

Nanopositioning Stage

HARDWARE MANUAL

Summary of Contents for ANT130LZ Series

Page 1: ...Revision 2 01 ANT130LZ Series Single Axis Z Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Page 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Page 3: ...4 Air Requirements 20 Chapter 2 Installation 21 2 1 Dimensions 21 2 2 Securing the Stage to the Mounting Surface 22 2 2 1 Setting up the Pneumatic Counterbalance 24 2 3 Attaching the Payload to the St...

Page 4: ...alance Pressure vs External Payload 24 Figure 2 4 Load Orientations 28 Figure 2 5 Cantilevered Load Capabilities 28 Figure 3 1 ANT130LZ Motor and Feedback Wiring CN1 Option 34 Figure 3 2 ANT130LZ Moto...

Page 5: ...edback Connector Pinout CN1 31 Table 3 2 25 Pin Mating Connector Part Numbers 31 Table 3 3 4 Pin Motor Connector Pinout CN2 Option 32 Table 3 4 4 Pin Motor Mating Connector Part Numbers 32 Table 3 5 2...

Page 6: ...pment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006...

Page 7: ...Basic concepts general principles for design EN 60204 1 2010 Safety of Machinery Electrical equipment of machines Part 1 General requirements and furthermore declares that it is not allowed to put th...

Page 8: ...by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and symbols are placed throughout this manual to w...

Page 9: ...this equipment l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or ope...

Page 10: ...d l Do not connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibi...

Page 11: ...nglement hazards or rotational mechanical hazards DANGER Hot Surface Hazard l The stage motor frame temperature could exceed 70 C in some applications l Do not touch the stage motor frame while it is...

Page 12: ...chanical Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access t...

Page 13: ...mble the magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace mak...

Page 14: ...e information for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment and instrumentation...

Page 15: ...mation for later reference Red anodized aluminum shipping brackets have been installed to prevent unwanted motion damage that could occur during shipment The brackets must be removed before the ANT130...

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Page 17: ...d sine output E2 Incremental linear encoders digital RS422 output 5 nm electrical resolution E3 Absolute linear encoder E4 Incremental linear encoders 1 Vpp amplified sine output high performance Conn...

Page 18: ...Use the system in a low vibration environment Floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These...

Page 19: ...sufficient voltage and current 3 In position stability is reported as 3 sigma value requires a 1 Vpp encoder 4 Payload specifications assume that the payload is centered on axis 5 Specifications are f...

Page 20: ...Recommended l If compressed air is used it must be filtered to 0 25 microns dry to 0 F dew point and oil free The maximum allowable input pressure specification is 0 6 MPa 87 psi The low friction air...

Page 21: ...ccordance with the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure...

Page 22: ...h a lint free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry Gently place the stage on the mounting surface IMPORTANT The stage is precision machined and verif...

Page 23: ...2 2 are typical values and may not be accurate for your mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typic...

Page 24: ...or the mass of the carriage plus the additional mass Any adjustment to the mass that is carried by the counterbalance cylinder either adding or subtracting payload necessitates an adjustment to the co...

Page 25: ...pressure to the counterbalance cylinder 4 Slowly increase pressure to the cylinder clockwise rotation of the regulator knob until the carriage just starts to rise Adjust the pressure with the regulato...

Page 26: ...ur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance Table 2 3 Payload Mounting Surface Flat...

Page 27: ...eets specifications before you continue ANT130LZ Payload Mounting Steps 1 Secure the ANT130LZ to the mounting surface refer to Section 2 2 2 Confirm that all electrical power is disconnected before yo...

Page 28: ...Figure 2 4 Load Orientations Figure 2 5 Cantilevered Load Capabilities ANT130LZ Hardware Manual 28 www aerotech com...

Page 29: ...they integrate the ANT130LZ into a completed system Failure to do so could expose the operator to electrical or mechanical hazards Electrical installation requirements will depend on the ordered prod...

Page 30: ...r frame ground protection only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installe...

Page 31: ...or Phase B 13 Motor Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted s...

Page 32: ...rved 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame Ground motor protective ground Table 3 4 4 Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P N Third Party P N Backshell ECK...

Page 33: ...achine positive or machine clockwise direction 13 Reserved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Encoder Options E1 E2 E4 Rese...

Page 34: ...3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT130LZ Motor and Feedback Wiring CN1 Option ANT130LZ Hardware Manual 34 www aerotech com...

Page 35: ...Figure 3 2 ANT130LZ Motor and Feedback Wiring CN2 Option Hardware Manual ANT130LZ www aerotech com 35...

Page 36: ...250 mA typical Output Signals Differential Sinusoidal Type Incremental Encoder l Analog SIN SIN COS COS 1V pk pk l Digital RS422 MRK MRK signals Digital Output Incremental Encoder TTL Encoder line dr...

Page 37: ...rent Stall 3 Amppk Amprms 20 68 14 62 Force Constant Sine Drive 4 8 N Amppk lb Amppk 7 83 1 76 N Amprms lb Amprms 11 07 2 49 Motor Constant 2 4 N W lb W 3 35 0 75 Resistance 25 C Line Line ohms 5 2 In...

Page 38: ...coder and motor are mounted and the electrical wiring connections in the stage Programming Direction Your system controller defines the programming direction of the stage and is application specific A...

Page 39: ...3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram Hardware Manual ANT130LZ www aerotech com 39...

Page 40: ...Figure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Digital Encoder Phasing Reference Diagram Sine Wave ANT130LZ Hardware Manual 40 www aerotech com...

Page 41: ...need for a longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l V...

Page 42: ...e with standard lubricants will be required When you clean and or lubricate components of the ANT130LZ series stage 1 Use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solv...

Page 43: ...t from the v channels of the linear bearing rails l Use a clean lint free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous...

Page 44: ...ion or preventive maintenance other than ensuring that the system is balanced per the instructions in Section 2 2 1 Setting up the Pneumatic Counterbalance The mechanical components are aligned at the...

Page 45: ...tibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter...

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Page 47: ...Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our...

Page 48: ...eriods then special rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair sect...

Page 49: ...00 l Declaration of Conformity updated l Product update to Gen 2 version l Safety information updated 1 01 The pneumatic counterbalance has been updated to account for pressure drop across the regula...

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Page 51: ...6 EU 2015 863 6 F Flatness 19 H Hall Effect Sensors Specifications 36 Handling 14 Humidity 18 I In Position Stability 19 Inspection Schedule 41 isopropyl alcohol 42 L label 14 15 Limit Switch Specific...

Page 52: ...19 stabilizing stage 15 stage distortion 22 stabilizing 15 Storage 14 Symptom 45 T Table of Contents 3 Temperature Effects 18 Thermistor Specifications 36 Travel 19 Troubleshooting 45 V Vibration 18...

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