3 Product and Functional Description | 3.2 Main Components
ZEISS
Parameter
Recommended conditions
0.02 kV to 3 kV
Low-voltage applications for the compensation of charges and for
surface-sensitive imaging
3 kV to 10 kV
The average voltage range is suitable for many different applications
10 kV to 20 kV
Voltage range frequently used for analytical purposes
Working distance
Up to 10 mm
Due to the dependence on the electrostatic field of the objective lens,
the working distance should be as small as possible
2 mm to 3 mm
For low-voltage applications (100 V to 3 kV)
3 mm to 6 mm
Useful for the average voltage range (3 kV to 10 kV)
Aperture
30 μm
The standard aperture is recommended for many applications
7.0 μm to 20 μm
Limitation of the probe current for the compensation of charges, or
for the analysis of beam-sensitive specimens
60 μm and 120 μm
Only recommended for analytical purposes
Specimen tilt
Avoid large angles of tilt, if possible
Operation mode
Only suitable in high vacuum, because the beam booster is switched
off in the VP mode
Tab. 3: Summary of InLens
3.2.5.4 SE Detector
Purpose
The SE detector is an Everhart-Thornley type detector. It detects SEs as well as BSEs.
Position
The SE detector is mounted on the wall of the specimen chamber, and is therefore classified as a
“chamber detector”. Due to its position in the chamber, the SE detector views the specimen later-
ally.
1
2
4
5
3
6
Fig. 27: Schematics of the
detector
1
Preamplifier
2
Photomultiplier
3
Light guide
4
Scintillator
5
Collector grid
6
Specimen
44
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006