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3.2. Principle of operation
When starting the Plasma Cleaner via the Plasma Cleaner menue the chamber to which the Plas-
ma Cleaner is attached is vented above at least 3mbar. Then the corresponding chamer is
pumped again. When the pressure approaches the preset ignition pressure of the plasma clean-
er, a valve (connected to air) in the plasma cleaner (PRS) is opened, stabilizing the pressure
close to the PRS in the chamber to the preset ignition pressure. After ignition the PRS stabilizes
the pressure to the preset plasma pressure value. When the preset plasma time is over, pump
down continues.
Ignition pressure, plasma pressure, plasma power and plasma time must be set by the user (see
also the plasma cleaner manual from XEI, the table on page 9 and the note below).
IMPORTANT
Depending on the specimen material, it is possible that the Plasma Cleaner Add On might
damage the specimen. It is recommended to test this before cleaning important speci-
mens.
