5 First Operating Steps | 5.6 Finding Appropriate Detector Settings
ZEISS
Info
The C2D detector requires VP pressures of at least 20 Pa to acquire a good signal.
A good starting point is EHT = 20 kV, I Probe = 500 pA, Chamber pressure = 30 Pa,
WD = 10 mm, and scan speed = 5.
Procedure
1. In the SEM Controls panel, select the
Detectors
tab.
2. From the
Signal A
drop-down list, select
C2D F2
.
3. In the
Panel Configuration Bar
, select
C2D Control
.
à
The
C2D Control
panel is displayed.
4. Select
C2D Gain = Low
.
5. Adjust the
C2D Bias
scroll bar to 80 %. This is usually a good starting value.
INFO:
Too high bias can cause electrical breakdown in the detector. If you observe bright
lines or flashing in the image reduce the C2D Bias until the artifacts disappear.
6. Click
C2D Auto Level
.
INFO:
The brightness offset is canceled out and the image is readjusted to a centered his-
togram, at a brightness value of 50 %
7. Adjust the contrast of the image.
8. If you are unable to reach saturation or if the image quality is not good, increase
C2D Bias
or set
C2D Gain = High
. Repeat steps 6 and 7.
5.6.4 Setting up the C2DX Detector
NOTICE
When you manually insert the detector, there is a risk to damage the C2DX detector.
4
Use the chamberscope image to observe if there is enough space between the objective
lens and the specimen.
4
If there is not enough space between the objective lens and the specimen, then lower the
stage position before you insert the detector.
4
Insert the C2DX detector carefully and observe the moving C2DX detector via the cham-
berscope.
4
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Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
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