9 Technical Data and Conformity | 9.1 Layout and Connections
ZEISS
9 Technical Data and Conformity
This chapter contains important technical data as well as information on the conformity.
9.1 Layout and Connections
A
B
D
E
F
G
1
2
3
4
5
6
C
1
Static vibration damper
A
Mains power supply
120 V, 50–60 Hz, 16 A, 1/N/PE or
230 V, 50–60 Hz, 16 A, 1/N/PE
2
Pre-vacuum pump
Equipotential bonding bar /
grounding screw terminal (Ø 8 mm)
3
Pre-vacuum pump 2 (optional)
Additional standard local mains
power sockets, max. 13 A
4
Computer workplace
Pressure reducer (nitrogen)
5
Emergency Off (EMO) box (optional)
Main shut-off valve
6
Emergency Off (EMO) button (optional)
Nitrogen supply
Exhaust line (optional)
152
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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