Zeiss Crossbeam 350, Instruction Manual

Page: 35 / 126

ZEISS 3 Product and Functional Description | 3.2 Main Components
3.2.4.2 Detectors Overview
The beam scans the specimen and initiates particles to be emitted. A detector collects the emis-
sion and produces an electric signal with an amplitude proportional to the number of particles at
any given time.
Standard Detectors Detected Signals Typical Application
InLens SE Detector [
}
36]
SE1 Surface structure
SE Detector [
}
37] SE2 Topography
Optional Detectors Detected Signals Typical Application
VPSE Detector [
}
41] SE2 Topography in VP mode
SESI Detector [
}
42] SE2
Ions
Channeling contrast (crystal
orientation)
Compositional contrast
EsB Detector [
}
43] SE1
BSE
Surface structure
Material contrast
aBSD Detector [
}
44]
BSE Angular resolved BSE imag-
ing
Compositional contrast
aSTEM Detector [
}
47]
Transmitted electrons Diffraction contrast
Compositional contrast
CL Detector [
}
49] Light photons Mineralogy
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000 35