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3.5. Technical data
3.5.1. Specifications
Performance
SEM Resolution
High resolution configuration
(max.probe current 20 nA)
Optimum Working distance:
0.9 nm at 30 kV (STEM mode)
1.0 nm at 15 kV
1.9 nm at 1 kV
Acceleration voltage
Range: 0.02 kV - 30 kV (SEM)
Adjustment:
Continuously variable in 10 Volt steps.
Probe Current
SEM
5 pA to 20 nA High resolution option
12 pA to 100 nA High Current option
Magnification
Range: 12x – 2.000.000x (SEM)
Adjustment
: Continuously variable in either coarse or fine modes.
Auto-Compensation
: Magnification is precisely corrected
automatically for changes in working distance or acceleration
voltage.
Electron optics
Electron source
Filament
: Schottky field emitter.
Alignment
: Two stage electromagnetic emitter alignment utilizing emission
imaging mode
Automatic Emitter Run-Up
: Safe controlled run-up of the target emitter
conditions
Indicators
: Status information in Software to indicate all emitter parameters
Lens control
Patented GEMINI I VP electromagnetic/electrostatic objective lens system
(68º conical final-lens) with water cooling for best thermal stability and
reproducibility
Hysteresis Correction
: Built-in, for the removal of lens hysteresis
Summary of Contents for Crossbeam 340
Page 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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