Zeiss AURIGA Compact Crossbeam, Instruction Manual

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6.4.2. Setting detection parameters
6.4.2.1. Selecting a detector
1 Go to the Detectors tab of the SEM Control
panel.
2 Select the detector from the Detectors drop-
down menu.
The following table should serve as a help to find the required settings for your application.
Detectors EHT
Typical
WD
Detector settings Remarks
In-lens 3 kV - 20 kV 3 - 6 mm None
100 V - 3 kV 2 - 3 mm
100 V max. 4 mm
SE2 1 - 30 kV min. 4 mm Collector voltage (= bias) adjustable
from -250 V to + 400 V
Standard applications: +300 V
Pseudo BSE image: -150 to 0 V
Select the settings as
described in section 6.4.2.2.
1 kV - 5 kV 4 - 6 mm
5 kV - 30 kV min. 6 mm