NPU=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
UK=qêçìÄäÉëÜççíáåÖ
lîÉêîáÉï
Drift
Specimen seems to be moving.
Charging effects.
Non-conducting specimen.
Ensure proper conduction of the
specimen.
Optimise specimen preparation.
Apply a charge compensation
method (e.g. Charge Compensa-
tor or GIS with Charge Compen-
sation)
Gun
Gun is switched off automatically.
Gun vacuum worse than 2 x 10
-8
mbar
Gun has been switched off for
safety reasons since gun
vacuum is too bad.
Bakeout the gun head.
Refer to section 8.3.1.
Image quality
Image quality gets worse, but
there is no change in total emis-
sion current.
Cathode has been damaged
due to arcing.
Call the local Carl Zeiss service
engineer to have the cathode
replaced.
Image quality
Image is noisy.
Noise reduction methods do not
remedy.
Cathode is used up.
Call the local Carl Zeiss service
engineer to have the cathode
replaced.
Image quality
Image is bad at low EHT
(e.g.1 kV)
Working distance is too long.
Reduce working distance.
In-lens image
In-lens image is noisy.
Working distance is too long.
Reduce working distance.
In-lens image
No In-lens image
EHT exceeds 20 kV.
Reduce EHT to a maximum of
20 kV.
SE2 image
SE2 image is noisy
Scintillator is used up.
Call the local Carl Zeiss service
engineer to have the scintillator
replaced.
Optional
specimen
current meter
Specimen current is low.
Cathode is used up.
Call the local Carl Zeiss service
engineer to have the cathode
replaced.
After emer-
gency off or
power failure
Stored position cannot be
approached correctly.
Stage needs to be initialised.
Initialise the stage.
Refer to section 8.2.1.
Keyword
Symptom
Possible reason
Recommended action/s
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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