K465i Operations and Maintenance
P/N 1212831 Rev C
Page 2-18
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Figure 2-1. K465i GaN Cabinet
Section 2.2.
Seismic Specifications
Note:
The calculations below are not a complete seismic analysis. A complete analysis
might also include such factors as: stress distribution through a multiple-fastener
connection; prying action; bearing stress; and a review of weld geometry. A complete
seismic analysis should be done by a qualified engineer, licensed in local municipality of the
equipment point of use.
In accordance with SEMI S2-0200 for equipment containing hazardous production materials,
the equipment should be designed to withstand a horizontal loading of 94% of the weight of
equipment, acting at the equipment 's center of mass. And overturning moment should use
85% of the weight of the equipment.
DESIGN CONSIDERATIONS
The complete system weight < 10,000.00 Lb.
The mean of seismic restraints are 6 brackets of angular structural steel A36 with Ix =.063
In
4
and Iy =9.000 in
4
; with ultimate strength above 60KSI and yield point above 36 KSI;
bolted to the frame with 3/8-16 screws, two per bracket and provision for ¾” floor anchor
screws- two per bracket.
