K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-174
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Section 5.11.
K465i GaN Decommissioning Instructions
This section contains instructions on decommissioning (removing from use) a K465i GaN
system. It includes system shutdown, cleaning, breakdown and preparation for storage and
for shipment. This procedure can also be used for preparing the tool for shipment to another
location. A
complete
Decommissioning involves the complete shutdown and breakdown of
the system. Accordingly, there are other procedures and drawings in this manual that are
referenced in these decommissioning instructions. Only qualified technicians familiar with all
of the procedure should attempt to decommission the system. If problems, or questions
arise while decommissioning the tool, please contact the Veeco TurboDisc Operations
Customer Support group at 1-888-726-3472 for assistance.
Safety Precautions and Hazard Management
In addition to the technician responsible for performing the maintenance, a second
site-qualified technician must be present in the FAB during the maintenance
procedure.
Whenever maintenance or other system related functions are performed on Veeco
TurboDisc systems, safety procedures must be followed, including the wearing of all
required personnel protection equipment.
Cleanroom-compatible gloves should be worn when performing this maintenance.
Follow all safety precautions for individual procedures referenced from within this
procedure.
All assemblies, components and parts must be cleaned prior to shipment. Byproducts
of the reaction process within the chamber and exhaust line should be deactivated
prior to shipment.
All system, assemblies and components should be shipped in accordance with
transportation regulations.
