Calibration
X-Y Calibration using Capture Calibration and Autocalibration
Rev. D
Dimension 3100 Manual
321
17.5 X-Y Calibration using Capture Calibration and
Autocalibration
17.5.1 Capture Calibration
Scanners are calibrated by setting parameters in the NanoScope software using the
Capture
Calibration
command. The basic calibration procedure using version 5.XX software and a 10-
micron calibration reference (see
1. With the
Scan rate
set to
2.44 Hz
and
Number of samples
parameter to
256
, a full
Capture
Calibration
requires approximately 70 minutes.
Note:
Increasing the
Number of samples
or decreasing the
Scan rate
significantly
increases the required time.
2. Using the mouse, click on
Realtime
>
Capture
>
Calibration
. The
Capture Calibration
dialog box lists twelve parameters used in the calibration procedure (see
Figure 17.5a
Capture Calibration Prompt
3. If this is a first-time calibration, or if the microscope’s calibration has not been checked
within the last three months, verify that all parameters are selected.
4. Click on
CAPTURE
to initiate the automatic calibration routine.
Note:
The microscope begins an automatic series of scans on the reference which
require approximately one hour to complete. During each scan, the scanner
moves the piezo using carefully calculated movements. Many of these
movements are unusual, giving rise to a variety of images which do not
resemble the normal reference. For example, pits may resemble trenches and
features may be presented at various angles.
5. As each routine is executed, adjust the scan slightly to optimize the calibration image using
the
Capture Control
dialog box displayed on the control monitor throughout the calibration
).
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Summary of Contents for Dimension 3100
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