Calibration
SPM Calibration Overview
Rev. D
Dimension 3100 Manual
309
Figure 17.1a
Scanner Crystal Voltage and Photodiode Voltage
The
Microscope
>
Calibrate
>
Scanner
function displays the
Scanner Calibration
dialog box,
allowing users to enter the sensitivity of their scanner’s X-Y axes. Sensitivity is measured in terms
of lateral displacement for a given voltage (nm/volt). In addition, the NanoScope software employs
various derating and coupling parameters to model scanners’ nonlinear characteristics. By precisely
determining points along the scanner’s sensitivity curve, then applying a rigorous mathematical
model, full-range measuring capabilities can be achieved with better than 1 percent accuracy.
Consider the sensitivity curve represented in
-220 VDC
0 VDC
+220 VDC
Laser
Photodiode
Scanner
Cantilever
-220
0
+220
Scanner Voltage
Photodiode V
oltage
-3.0
0
+3.0
Detector Sensitivity
array
Photodiode voltage
Summary of Contents for Dimension 3100
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