Veeco Dimension 3100, Manual

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System Overview
Dimension 3100 SPM Overview
Rev. D Dimension 3100 Manual 9
1.3.2 Optics and Motors Overview
The optic system assists you in locating the cantilever and tip relative to the sample. The
NanoScope software uses this information to engage the tip on the sample surface at the desired
location. The system automatically focuses on most samples by adjusting the SPM height; however,
the trackball is available for manual focus control.
The objective mounts on a translational tilt stage. The objective can be translated along the optical
axis with a servo motor (focus motor) to adjust the focal point approximately 1.5mm above the
cantilever to approximately 3.5mm below. The range of focus below the cantilever allows you to
focus on the sample while leaving up to 3.5mm clearance between the tip and sample.
1.3.3 Stage System
The improved Dimension 3100 X-Y stage provides substantially better positioning repeatability
(3µm unidirectional and 4-6µm bidirectional) than its predecessor, the Dimension 3000. The stage
is more than twice as fast for moving from one location to another. The improved trackball response
also makes it easier to locate features of interest for imaging.
The X-Y stage permits micron-scale positioning of samples beneath the tip with a 120mm (X
direction) by 100mm (Y direction) travel range. The stage ships with chucks for fully accessible
disks up to 8" in diameter.
The Dimension 3100 motorized Z-stage provides accurate, automatic tip engagement and
approach. The rigidity of the Z-stage permits low noise and high accuracy imaging. A motorized
lead screw drives the Z-stage for coarse approach of the head to the sample. This configuration
allows you to image samples of different thicknesses with little difficulty.
1.3.4 Dimension SPM Head
The Dimension SPM head provides accurate imaging of a stationary sample while scanning the
integrated detector probe assembly above the sample. The Dimension SPM head allows optical
correction of the laser beam path to track the movement of the probe while scanning under the fixed
laser beam assembly. The Dimension SPM head is effective in imaging samples too large or heavy
to scan by movement of the sample.
Figure 1.3b depicts the optical path of the laser beam inside a Dimension SPM head. The
Dimension SPM head places a corrective, tracking lens within the scanner tube to stabilize the laser
beam focal point atop the scanning cantilever. This patented technology sharply reduces bowing
and attenuation artifacts due to cantilever scanning across the laser beam’s otherwise stationary
focal plane.