Veeco Dimension 3100, Manual, Page: 107 / 376

Rev. D Dimension 3100 Manual 87
Chapter 6 Cantilever Preparation
The Dimension 3100 Scanning Probe Microscope comes furnished with etched silicon cantilever
substrates for TappingMode AFM and silicon nitride cantilevers for Contact AFM modes. The
cantilever probes should be inspected under the microscope when used for the first time to gain a
better understanding of how the probes and substrates are connected and separated. The procedure
for removing individual substrates from the wafer varies depending on the wafer. It is easier to
accomplish this task with the aid of a stereo microscope with 50 – 70x magnification.
This chapter addresses the following:
• Silicon Cantilever Substrates: Section 6.1
• Wafer Tool Kit: Section 6.1.1
• Cantilever Preparation: Section 6.1.2
• Tip Shape of Etched Silicon Probes: Section 6.1.3
• Silicon Nitride Cantilever Substrates: Section 6.2
• Tip Shape of Silicon Nitride Probes: Section 6.2.1