Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email
www.vatvalve.com
271149EA
2007-06-12
33/77
Gasflow calculation for LEARN:
Do not apply a different gasflow for learn than determined below. Otherwise pressure control
performance may be insufficient.
Choose the applicable formula depending on units you are familiar with.
p
SFS
•
C
min
•
n
q
L
=
2000
q
L
gasflow for learn [Pa m
3
/s]
p
SFS
sensor full scale pressure [Pa]
C
min
min. controllable conductance of valve [l/s], (refer to «Technical data»)
n number of valves in valve cluster
p
SFS
•
C
min
•
n
q
L
=
2
q
L
gasflow for learn [mbar l/s]
p
SFS
sensor full scale pressure [mbar]
C
min
min. controllable conductance of valve [l/s], (refer to «Technical data»)
n number of valves in valve cluster
q
L
= 39.4
•
p
SFS
•
C
min
•
n
q
L
gasflow for learn [sccm]
p
SFS
sensor full scale pressure [Torr]
C
min
min. controllable conductance of valve [l/s], (refer to «Technical data»)
n number of valves in valve cluster
3.7 Close
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Push CLOSE button
Send CLOSE VALVE
3.8 Open
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Push OPEN button
Send OPEN VALVE
3.9 Position
control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Select or enter position setpoint
Send POSITION CONTROL
