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1126117EA (2022-02)
3
Intended Use
The 62714-XE64-.... Control Valve is used in conjunction with the
627PM-16GV-000. Controller or another control device for controlling
gas flows and thus maintaining a desired pressure in a vacuum
system.
It must not be used for controlling liquid gases.
Functional Principle
The 62714-XE64-.... Control Valve opens and closes as a function of
the control voltage.
It will close or remain closed in the event of a power loss.
Example of a control loop:
VDM005A-X
Control Valve
Controller
(e.g. VCC500)
Vacuum pump
Pressure
sensor
Gas inlet
Vacuum
system
Summary of Contents for 62714-XE64-3 Series
Page 1: ...1126117EA 2022 02 1 Control Valve 62714 XE64 3 Operating Manual ...
Page 7: ...1126117EA 2022 02 7 Dimensions mm ...
Page 8: ...8 1126117EA 2022 02 ...
Page 20: ...20 1126117EA 2022 02 Procedure Unfasten the lock screw and unplug the cable socket ...
Page 22: ...22 1126117EA 2022 02 Tube connections AF 17 ...
Page 25: ...1126117EA 2022 02 25 Mount the filter ø 6 mm Circlip Filter Push in until circlip catches ...
Page 29: ...Series 627 1126117EA 2022 02 29 This page has been left blank intentionally ...