Varian VHS-10 Instruction Manual Download Page 14

Page: 14 / 36

Table of Contents

Section

Page

Safety Considerations

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Section I – Specifications and Installation

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1-1

1-1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1-1

1-2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1-3

Section II

–

Operation

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2-1

2-1 Start-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2-1

2-2 Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2-2

Section III – Maintenance and Service

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3-1

3-1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-1

3-2 Periodic Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-1

3-3 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-1

3-4 Cold Cap Removal/Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-2

3-5 Jet Assembly Removal/Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-2

3-6 Heater Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-4

3-7 Adding Pump Fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3-4

Section IV – Troubleshooting

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4-1

4-1 Leakage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4-1

4-2 Outgassing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4-1

4-3 Poor Pump or System Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4-1

Section V – Replacement Parts

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5-1

5-1 Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5-1

List of Illustrations

Figure

Title

Page

3-1

Jet Assembly, VHS-10 and VHS-400 Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3-2

Heater Connections, VHS-10 and VHS-400 Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

5-1

Wiring Diagram, VHS-400 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5-2

VHS-10 and VHS-400 Dimension Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5-3

VHS-10 Pump Performance Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

5-4

VHS-400 Pump Performance Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

5-5

Fill and Drain Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

List of Tables

Table

Title

Page

1-1

VHS-10 Pump Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1-2

VHS-400 Pump Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

4-1

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

5-1

Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Summary of Contents for VHS-10

Page 1: ...VHS 10 VHS 400 Diffusion Pumps Instruction Manual Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 3133 781 861 7200 800 8 VARIAN Manual No 6999 01 023 Revision H October 2000 ...

Page 2: ...69 86 38 38 Fax 33 1 69 28 23 08 Germany Varian GmbH Alsfelder Strasse 6 Postfach 11 14 35 64229 Darmstadt Germany Tel 49 06151 703 205 Fax 49 06151 703 279 Hong Kong Varian Pacific Inc Rm 1018 20 Tower A New Mandarin Plaza 14 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 2724 2836 Fax 852 2369 4280 India Varian International AG 605 606 Vishwadeep Towers 4 District Centre Janak Puri...

Page 3: ... of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorize...

Page 4: ...pproved by an industrial hygienist or chemical safety engineer Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazardous materials of any kind is the sole responsibility of the user Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved It is th...

Page 5: ... SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMANCE DAMAGE TO THE PUMP OR OTHER PROPERTY SERIOUS BODILY INJURY AND POSSIBLE DEATH USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED BY THE FOLLOWING SYMBOLS Designers of syst...

Page 6: ...el sensors with feedback to an interlock on the heater power supply Insufficient water flow through the Use water flow sensor and feedback to interlock on the heater main cooling coils power supply Water trapped between inlet and Provide vent or pressure relief valves for both quick cool coil outlet of quick cool coil or liquid and liquid nitrogen trap nitrogen trapped between inlet and outlet of ...

Page 7: ...Three elements are required fuel oxidizer and source of ignition A combination of temperature and pressure can be a source of ignition Most diffusion pump fluids except mercury are fuels Hydrocarbon oils are more prone to oxidize and explode than synthetic silicone based oil Oxidizers can be air a strong oxidizer from a leak or can be deliberately introduced in a process or can be inadvertently ad...

Page 8: ...ing different failure modes failure mechanisms and failure causes Be certain that exhaust duct materials are capable of withstanding the corrosivity temperature and pressure of exhausted products c Pressure Pumps and their components are designed for vacuum service they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities Serious accid...

Page 9: ...es tion may produce serious effects Even absorption through the skin can result in moderate toxicity Always ensure that cleaning operations are performed in large well ventilated rooms Use of self contained breathing apparatus may be necessary depending upon the solvent type and vapor concentration in surrounding air e High Voltage Diffusion pumps operate at voltages up to 480 V high enough to kil...

Page 10: ... large amount of liquid nitrogen is spilled in a small poorly ventilated room or equipment death from suffocation can result All diffusion pumps are typically cleaned with acetone or alcohol Acetone alcohol and most other solvents are very volatile unstable During cleaning the volatility of these cleaners may permit their gases to displace air and its life supporting oxygen which could cause death...

Page 11: ...ow areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin...

Page 12: ...sonnel to avoid dropping slip ping and or overturning the pump and severely injuring personnel Check weight of equipment before lifting and do not stand under equip ment being moved WARNING _____________ Hot oils can cause serious burns Wear protective gloves and long sleeved loose fitting heat resistant garments when draining pump oil WARNING _____________ If hazardous gas vapors chemicals or com...

Page 13: ...x ...

Page 14: ... Section IV Troubleshooting 4 1 4 1 Leakage 4 1 4 2 Outgassing 4 1 4 3 Poor Pump or System Performance 4 1 Section V Replacement Parts 5 1 5 1 Replacement Parts 5 1 List of Illustrations Figure Title Page 3 1 Jet Assembly VHS 10 and VHS 400 Pumps 3 3 3 2 Heater Connections VHS 10 and VHS 400 Pumps 3 5 5 1 Wiring Diagram VHS 400 Diffusion Pump 5 3 5 2 VHS 10 and VHS 400 Dimension Diagram 5 4 5 3 VH...

Page 15: ...ing Speed 5300 with std cold cap 5300 with std cold cap liters sec air 4200 with extended cold cap 4200 with extended cold cap liters sec helium 6600 with std cold cap 6600 with std cold cap 5200 with extended cold cap 5200 with extended cold cap Maximum Throughput 7 0 8 1 Torr liters sec at 0 01 Torr 13 3 Pa Maximum Forepressure No Load 0 65 Torr 86 45 Pa Full Load 0 55 Torr 73 15 Pa Backstreamin...

Page 16: ... Cooling Coils Copper Quick Cooling Coil Stainless Steel Cold cap Nickel plated copper Shipping Weight 150 pounds Table 1 2 VHS 400 Pump Specifications Power Rating 4400 watts Optimum Operating Range 1 x 10 3 to 5 x 10 9 Torr 133 to 000000655 Pa Maximum Pumping Speed 8000 with std cold cap liters sec air Maximum Throughput 8 0 Torr liters sec at 0 01 Torr 13 3 Pa Maximum Forepressure No Load 0 65 ...

Page 17: ...g a Inspect the pump to ensure that no damage has occurred during shipping Do not discard any evidence of rough handling any damage should be reported to the carrier and to Varian without delay b Diffusion pumps are factory packed to permit prolonged storage in suitably protected areas without special precautions c Remove flange covers and protective plugs from water connections Be careful not to ...

Page 18: ...ly light to medium torque enough to compress the O rings e Using the appropriate lifting apparatus align the bolt holes of the inlet flange with the bolt holes of the mating flange Using the appropriate mounting hardware tighten the bolts evenly until the O ring is compressed and the flanges make light metal to metal contact f To ensure the integrity of the vacuum connections they should be checke...

Page 19: ...he voltage is specified on the label that is mounted on the side of the pump Verify the heater rating by measuring the resistance of the heater circuit line to line and comparing it to the values in Tables 1 1 and 1 2 Specifications b Make the electrical connections in the junction box located near the foreline The electrical supply should not be more than 5 percent above the rated voltage c All e...

Page 20: ...upply In the event of overtemperature the thermal switch will open and shut off the power to the pump c The thermal switch may be reset by pressing the button located at the center of the thermal switch This should be done only after the root cause of a problem has been determined and the appropriate corrective action taken ...

Page 21: ...p a fresh charge of diffusion pump oil may go through a degassing process This may result in inlet and foreline pressure fluctuations These pressure fluctuations are normal b Visually inspect the sight glass assembly to ensure that the diffusion pump has been charged with the proper amount of diffusion pump fluid When properly filled the oil level when the pump is cold will be even with the FULL C...

Page 22: ...pump body temperature located just above the boiler plate has cooled to a temperature of 130 F c After isolating the backing pump the diffusion pump may be vented to atmosphere d If faster cooling is desired the pump can be cooled using the quick cool coil at the bottom of the diffusion pump Follow the instructions in para 1 3 3 for proper setup of the quick cool coil line The same procedure for s...

Page 23: ...rocedures and or admittance of excessive air or other gas to a hot pump 2 Inadequate water cooling 3 Prolonged operation at inlet pressures above 10 3 Torr 133 Pa 4 Failure to reinsert the foreline baffle in the pump assembly c Check the total heater power input d When the pump is cold and the power is off check to ensure that the heaters are bolted snugly to the boiler plate Also check all heater...

Page 24: ... been evacuated to a pressure below 0 5 Torr 66 5 Pa turn on the power to the diffusion pump 3 4 COLD CAP REMOVAL INSTALLATION To remove the cold cap proceed as follows a Remove the screw that secures the cold cap to the jet assembly b Loosen the bolt that secures the cold cap to the side of the pump c Lift out the cold cap To install the cold cap proceed as follows a Place the cold cap on top of ...

Page 25: ...Maintenance and Service 3 3 Figure 3 1 Jet Assembly VHS 10 and VHS 400 Pumps ...

Page 26: ...rush plate i Assemble the heater crush plate with dimples facing the heater element and clamping plate as a unit k Coat the boiler studs with an antiseize compound such as FEL PRO C5A or common milk of magnesia l Support the heater unit by the clamping plate line up the holes with the boiler studs and push the unit up against the boiler plate Use two nuts tightened finger tight to hold it in place...

Page 27: ...id level is even with the FULL COLD mark on the oil level indicator f Replace the O ring in the fill plug and lubricate it with pump fluid g Install the fill plug and tighten it moderately h Evacuate the diffusion pump and start it following the procedures outlined in previous sections Figure 3 2 Heater Connections VHS 10 and VHS 400 Pumps ...

Page 28: ...Maintenance and Service 3 6 ...

Page 29: ...system is a result of gas load divided by pumping speed P Q S If the gas load Q exceeds the maximum throughput capability of the diffusion pump the diffusion pump will not function and the pumping action will essentially be performed by the mechanical backing pump To estimate the gas load isolate the system from all pumps after evacuation and measure the rate of pressure rise The gas load created ...

Page 30: ... cause Low heat input Check heaters Low oil level Add oil Malfunctioning pump assembly Check and repair or replace Improperly located jets Damaged jet system Inlet pressure surges Incorrect heater voltage Check and correct voltage Fluid outgassing Condition fluid by operating the pump for a few hours Leak in system ahead of pump inlet Check and correct High chamber Forepressure too high Check for ...

Page 31: ...648056680 Lug 648091065 Terminal Strip 656179100 Wire 64731040 208V 2200 watt Heater Element 2 required 64731040 208V 2200 watt Heater Element 2 required 647310160 380V 2200 watt Heater Element 2 required 647310170 480V 2200 watt Heater Element 2 required 647310145 208V 2550 watt Heater Element 2 required 647310155 240V 2550 watt Heater Element 2 required 647310165 380V 2550 watt Heater Element 2 ...

Page 32: ...ng Parker No 2 338 10 Viton fill and drain O rings old style fill and drain assy Parker No 2 112 10 Viton fill and drain O rings new style fill and drain assy Parker No 2 113 1 Sight glass O ring Parker No 2 035 1 Sight glass O ring Parker No 2 226 695474005 DC 704 Diffusion Pump Fluid 500 cc container 2 required or 695475005 DC 705 Diffusion Pump Fluid 500 cc container 2 required ...

Page 33: ...Replacement Parts 5 3 Figure 5 1 Wiring Diagram VHS 400 Diffusion Pump ...

Page 34: ... ID 12 19 310 12 03 306 12 19 310 15 20 384 15 20 384 Inlet Flange thickness 0 75 19 0 67 17 1 12 28 0 50 13 0 67 17 Inlet Flange Bolt Circle 14 25 362 N A N A 12 81 325 17 75 450 N A N A Inlet Flange No of holes 12 N A 30 12 N A Inlet Flange Hole Size 0 94 24 N A N A 0 39 10 0 32 8 1 N A N A O ring Groove ID 12 50 318 N A N A N A N A 16 00 406 N A N A O ring Groove Width 0 24 6 N A N A N A N A 0 ...

Page 35: ...Replacement Parts 5 5 Figure 5 3 VHS 10 Pump Performance Curves Figure 5 4 VHS 400 Pump Performance Curves NOTE ________ Speed curves were generated according to AVS Standard 4 1 ...

Page 36: ...Replacement Parts 5 6 Old Style Typical New Style Typical Figure 5 5 Fill and Drain Assemblies ...

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