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Sales and Service Offices

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172

Australia

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679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950

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Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961

Brazil

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Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6608 1530
Fax: (86) 10 6608 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
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France
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Fax: (33) 1 69 28 23 08

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Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

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Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd. 

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

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Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Internet Users:

Customer Service & Technical Support:

[email protected]

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www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

11/01

Summary of Contents for Turbo-V 550 ICE

Page 1: ...SHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE ISTRUCCIONES MANUAL DE ISTRU ES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA INSTRUCTION MANUAL Turbo V 550 ICE contr...

Page 2: ...Turbo V 550 ICE Controller...

Page 3: ......

Page 4: ......

Page 5: ...INTERCONNECTIONS 52 Connection P1 Logic Input Interconnections 52 Connection J2 Logic Output Interconnections 53 Connection J7 Accessories and Options Interconnections 54 Connection J10 Controller to...

Page 6: ...Selection 61 Starting the Pump 66 Monitor Relay Programming 67 Operating the Pump 67 Pump Shutdown 67 Power Failure 67 Remote Control Mode Operation 67 RS 232 422 485 Control Mode Operation 68 ACCESSO...

Page 7: ...uelli per la gestione della valvola di pulizia purge valve Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante L utilizzo dell appare...

Page 8: ...ne ed all apparato nel caso in cui la pompa sia appoggiata su di un tavolo assicurarsi che sia stabile Non fare funzionare mai la pompa se la flangia di ingresso non collegata al sistema o non chiusa...

Page 9: ...edere alla sua eliminazione nel rispetto delle normative nazionali specifiche MESSAGGI DI ERRORE In alcuni casi di guasto la circuiteria di autodiagnosi del controller presenta alcuni messaggi di erro...

Page 10: ...eratura del trasformatore del controller ha superato i 90 C Attendere che la temperatura ritorni al di sotto della soglia Premere due volte il pulsante START per riavviare la pompa FAULT TOO HIGH LOAD...

Page 11: ...schnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information ent...

Page 12: ...hlossenen Pumpe durchlesen Steht die Pumpe auf einem Tisch mu auf den stabilen Stand geachtet werden da sonst die Gefahr von Personen und Ger tesch den besteht Die Pumpe nie einschalten wenn der Einga...

Page 13: ...g defekter Controller sorgt Vor jedem Eingriff am Controller mu der Netzstecker gezogen werden Eine eventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen...

Page 14: ...des Controller Trafos hat 90 C berschritten Warten bis die Temperatur unter den Schwellenwert gesunken ist Die Pumpe durch zweimalige Bet tigung der START Taste neustarten FAULT TOO HIGH LOAD W hrend...

Page 15: ...la commande de la soupape de purge purge valve Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des rensei...

Page 16: ...plac e sur une table s assurer que cette derni re est stable Ne jamais faire fonctionner la pompe si la bride d entr e n est pas connect e au syst me ou si elle n est pas ferm e l aide de la bride de...

Page 17: ...nform ment aux r glementations natio nales en la mati re MESSAGES D ERREUR Dans certains cas de panne l ensemble de circuits d autodiagnostic du contr leur pr sente certains mes sages d erreur indiqu...

Page 18: ...sformateur du contr leur a d pass 90 C Attendre que la temp rature retourne au dessous du seuil Presser deux fois l interrupteur START pour remettre la pompe en marche FAULT TOO HIGH LOAD Au cours du...

Page 19: ...para la gesti n de la v lvula de limpieza purge valve En los apartados siguientes se facilita toda la informaci n necesaria para garantizar la seguridad del operador durante el uso del equipo Una inf...

Page 20: ...o si la bomba est apoyada sobre una mesa cerciorarse que es estable No poner en marcha nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre NOTA El...

Page 21: ...que desguazar efectuar su eliminaci n respetando las normas nacionales espec ficas MENSAJES DE ERROR En algunos casos de aver a los circuitos de autodiagnosis del controler presenta algunos mensajes...

Page 22: ...ler ha superado los 90 C Esperar a que la temperatura vuelva por debajo del umbral Apretar dos veces el pulsador START para volver a poner en marcha la bomba FAULT TOO HIGH LOAD Durante el funcionamie...

Page 23: ...o e os para a activa o da v lvula de descarga purge valve Nos par grafos seguintes est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem In...

Page 24: ...pessoas e aparelhagem caso a bomba esteja apoiada numa mesa certificar se que esteja est vel Nunca activar a bomba se o flange de entrada n o estiver ligado ao sistema ou n o estiver fechado com o fl...

Page 25: ...o de alimenta o Caso um controller deva ser destru do proceder sua elimina o respeitando as normas nacionais espec ficas MENSAGENS DE ERRO Em alguns casos de defeitos os circuitos de autodiagn stico d...

Page 26: ...MPERATURE A temperatura do transformador do controller superou os 90 C Aguardar at que a temperatura volte ao limite estabelecido Premer duas vezes o bot o START para reactivar a bomba FAULT TOO HIGH...

Page 27: ...tel heater jacket stuursignalen van de stromingsmeter en regelsignalen van de reinigingsklep purge valve In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens h...

Page 28: ...n en schade aan het apparaat te voorkomen Laat de pomp nooit werken zonder dat de ingangsflens aan het systeem is gekoppeld of de afsluitflens is gesloten OPMERKING De connector J1 moet met zijn jumpe...

Page 29: ...skabel afkoppelen Mocht de controller gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk FOUTMELDINGEN In geval van bepaalde storingen wekt het zelfdiagnose circuit van de...

Page 30: ...De temperatuur van de transformator van de controller bedraagt meer dan 90 C Wacht tot de temperatuur weer onder de drempelwaarde is gezakt Bedien twee maal de START knop om de pomp weer op te starte...

Page 31: ...ning af udluftningsventil purge valve De f lgende afsnit indeholder al information der er n dvendig for at garantere operat rens sikkerhed i forbindelse med anvendelse af udstyret Detaljeret informati...

Page 32: ...rg for at pumpen st r fast hvis den er installeret p et bord Dette er for at forebygge skader p apparatet og personer Start aldrig pumpen hvis pumpetill bet ikke er tilsluttet systemet eller er bloke...

Page 33: ...mpen skal foreg i overensstemmelse med det p g ldende lands s rlige love FEJLMEDDELELSER N r visse fejl opst r viser styreenheden ved selvdiagnose aktuelle fejl p displayet De mulige meddelelser beskr...

Page 34: ...R OVERTEMPERATURE Temperaturen p styreenhedens transformator er over 90 C Vent p at temperaturen falder til under t rskelv rdi Tryk to gange p START for at starte pumpen igen FAULT TOO HIGH LOAD Under...

Page 35: ...eng ringsventilen purge valve De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under driften Detaljerade uppgifter finns i bilagan Technical informati...

Page 36: ...den r installerad p ett bord detta f r att f rebygga skador p apparaten och personer S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till systemet eller r blockerad p plats med l sfl nsen O...

Page 37: ...a ske enligt g llande lagstiftning FELMEDDELANDEN N r vissa fel uppst r visar styrenhetens sj lvdiagnoskrets aktuellt felmeddelande p displayen De m jliga meddelandena listas i f ljande tabell Ing ngs...

Page 38: ...ta om pumpen FAULT CONTROLLER OVERTEMPERATURE Temperaturen p styrenhetens transformator verskrider 90 C V nta tills temperaturen sjunker under tr skelv rdet Tryck tv g nger p knappen START f r att sta...

Page 39: ...tyringen av spyleventilen purge valve De f lgende avsnittene inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Techni...

Page 40: ...lere at pumpen st r st tt Dette er viktig for forhindre skader p apparatet og p personer Dersom inngangsflensen hverken er tilkoplet systemet eller dersom den er blokkert av l seflensen m pumpen aldri...

Page 41: ...het skal kasseres m dette skje i henhold til nasjonale bestemmelser FEILMELDINGER N r det oppst r visse feil viser selvdiagnosekretsen i styreenheten den aktuelle feilmeldingen i displayet De aktuelle...

Page 42: ...TEMPERATURE Temperaturen p styreenhetens transformator er over 90 C Vent til temperaturen synker under terskelverdien Trykk to ganger p knappen START for starte pumpen FAULT TOO HIGH LOAD Ved normal d...

Page 43: ...smittarin ohjaussignaaleja ja puhdistusventtiilin ohjaussignaaleja Seuraavissa kappaleissa on kaikki tarpeelliset tiedot k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset...

Page 44: ...pumppu on asetettu p yd lle varmistakaa ett se on vakaa N in v ltyt n vammoilta ihmisille sek itse koneelle lk my sk n k ytt k pumppua mik li sis ntulon laippaa ei ole kytketty j rjestelm n tai mik l...

Page 45: ...hk kaapeli pistorasiasta Mik li valvoja t ytyy romuttaa toimikaa sen h vitt misess kansallisten s d sten ja normien m r m ll tavalla VIANETSINT Joidenkin toimintah iri iden yhteydess valvojan itsem ri...

Page 46: ...E Valvojan muuntajan l mp tila on ylitt nyt 90 C tta Odottakaa ett l mp tila palaa kynnysarvon alapuolelle Painakaa START painonappia kaksi kertaa jolloin pumppu k ynnistyy FAULT TOO HIGH LOAD Normaal...

Page 47: ...FHLULYGLR HJFHLULYGLR FUKVLPRSRLHLY FUKVLPRSRLHLY WLd WLd DNRYORXTHd DNRYORXTHd VXPEDYVHLd VXPEDYVHLd 35262 35262 6 0 6 6 0 6 2L VKPHLZYVHLd SHULHYFRXQ VKPDQWLNHYd SOKURIRULYHd SRX HYFRXQ DSRVSDVWHLY...

Page 48: ...GXQRd HYNUK Kd KY SXUNDJLDYd 0 C 40 C 0 95 7 7 Technical Information 5 6 5 6 7 8 9 6 6 7 6 0 6 2 VXQGHWKYUDd J1 TD SUHYSHL QD DIHTHLY VXQGHGHPHYQRd PH WK JHYIXUD DQ GHQ JLYQHWDL NDPPLYD H ZWHULNKY VXY...

Page 49: ...LYDd QWOLYDd 7 START 6WDPDYWKPD 6WDPDYWKPD WKd WKd QWOLYDd QWOLYDd 7 STOP 6817 5 6 6817 5 6 Turbo V 550 ICE Varian Varian advance exchange service 6 7 120 Vac 1 A vent device 4 EMC heater jacket RS 23...

Page 50: ...START PUMP WAITlNG INTERLOCK interlock P1 3 J1 interlock 3 J1 interlock FAULT PUMP OVERTEMP 60 80 C 6 6 START FAULT CONTROLLER OVERTEMPERATURE 90 C 6 6 START FAULT TOO HIGH LOAD 6 START FAULT SHORT CI...

Page 51: ...s contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the fol...

Page 52: ...nd damage to the equipment if the pump is laying on a table make sure it is steady Never operate the Turbo V pump if the pump inlet is not connected to the system or blanked off NOTE The input signal...

Page 53: ...ying out any work on the controller disconnect it from the supply If a pump is to be scrapped it must be disposed off in accordance with the specific national standards ERROR MESSAGES For a certain ty...

Page 54: ...oller transformer temperature exceeded 90 C Wait until the temperature decrease below threshold value Press the START push button twice to start the pump FAULT TOO HIGH L0AD In normal operation the cu...

Page 55: ...ut analog and input output section microprocessor and digital section display and keyboard circuits The power supply converts the single phase 50 60 Hz AC mains supply into a 3 phase low voltage mediu...

Page 56: ...low P1 optoisolator input Minimum ON 3mA Maximum 5mA J2 optoisolator output 24 Vdc 60 mA J7 output fan forepump coil etc 120Vac 1A disregarding the mains J11 purge flow connector 12 Vdc power supply o...

Page 57: ...ECHNICAL INFORMATION 51 87 900 903 01 G CONTROLLER OUTLINE The outline dimensions for the Turbo V 550 ICE controllers are shown in the following figures Controller models 969 9434 and 969 9534 outline...

Page 58: ...sembly as explained above extract the voltage changer and then reposition it to view the desired voltage rating INTERCONNECTIONS The following figure shows the Controller inter connections Controller...

Page 59: ...tarting the pump the interlock contact opens it has no effect on the operation and the pump continues to turn The following figure shows a typical contact logic input connection and the related simpli...

Page 60: ...of DC current drawn by the turbopump pin 8 positive pin 15 negative 1 Vdc proportional to 1A 9 10 Flow meter alarm the flow value remained below the threshold for 10 seconds or more Open collector typ...

Page 61: ...read when set in the Front Remote mode read window only enabled while it can be written to and read when set in the Serial mode write window enabled Serial Port Installation An optional RS 232 422 48...

Page 62: ...hield being terminated to the metal shroud on the O subconnector The cable should be secured to the connector with screws RS 232 422 Communication Descriptions Communication RS 232 serial port connect...

Page 63: ...request of the value contained in a window the slave answers a string equal to the one sent by the master but in addition there is the field DATA containing the value of the window The format of the...

Page 64: ...30 2E 30 30 03 39 44 STX ADD WINDOW RD 000 00 ETX CRC Command FREQUENCY Source PC Destination Inverter 02 80 32 30 33 30 03 38 32 STX ADDR WINDOW RD ETX CRC Source Inverter Destination PC 02 80 32 30...

Page 65: ...PERATURE MEASUREMENT ENABLE 0 NO 1 YES 119 X X L HOST PRINTER MODE 0 HOST 1 PRINTER 200 X N CURRENT A 201 X N VOLTAGE V 202 X N POWER W 203 X N FREQUENCY Krpm 205 X N PUMP STATE 0 6 STOP WAITING INTER...

Page 66: ...sage is only displayed when a board with optional serial ports is installed A U T O T E S T O K R E A D Y F O R L O C A L S O F T S T A R T H S The controller with the Soft Start mode allows the pump...

Page 67: ...d in SCCM Standard cubic centimeters per minute Press the PUMP CURRENT push button and the display shows L A S T A L A R M X X X X X T X X X X X h C X X X X X Where Last alarm number of alarms sounded...

Page 68: ...ed threshold will condition the S1 and S2 operation see the following cycle diagram and it is factory set to 22 KRPM Press the CYCLE NUMBER push button to select the first number Press the PUMP CURREN...

Page 69: ...0 seconds The controller is factory set to YES NOTE The Soft Start mode may be deselected selected only when the pump is stopped Press CYCLE NUMBER push button to select YES or NO S O F T S T A R T M...

Page 70: ...he display shows R S X X X B A U D R A T E X X X X where BAUD RATE XXXX means 600 1200 2400 4800 9600 baud rate for the host computer or printer communication The controller is factory set for 9600 ba...

Page 71: ...re Pump current A Pump power W S1 condition S2 condition Confirm the selection by pressing the PUMP CURRENT push button In this way you enter into an operating phase named Monitor Relay Programming de...

Page 72: ...ntifies the set point condition 1 is displayed when relay S1 is energized and the related output is 24 V 2 is displayed when relay S2 is energized and the related output is 24V XX KRPM indicates the a...

Page 73: ...uum leak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power...

Page 74: ...2 3 2 S O F T S T A R T H S The value which corresponds to the board installed will be assigned to RSXXX With or without Soft Start mode selected the START STOP LOW SPEED functions are under computer...

Page 75: ...TECHNICAL INFORMATION 69 87 900 903 01 G MAINTENANCE...

Page 76: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 77: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 78: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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