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Request for Return 

 

 

 

1.  A Return Authorization Number (RA#) 

WILL NOT

 be issued until this Request for Return is completely filled out, 

signed and returned to Varian Customer Service. 

2.  Return shipments shall be made in compliance with local and international 

Shipping Regulations

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Safety

 of workers at Varian

:

 (a) Drain any oils or 

other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the 
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit). 

4.  Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.   

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Lexington, MA 02421 

Phone : +1 781 8617200 

Fax: +1 781 8609252 

Europe and Middle East 

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Via Flli Varian 54 

10040 Leini (TO) – ITALY 

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Fax: +39 011 9979330 

Asia and ROW 

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Local Office 

 

CUSTOMER INFORMATION 

 

Company name: ..………………….……..……………….………………………………..……………………...…………..…. 
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Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......……….. 

Europe only

:   VAT reg. Number: ………………..……………... 

USA only:

   

 

Taxable     

 

Non-taxable  

Customer Ship To: ………………………….………   

Customer Bill To: …………………..……………... 

                 ……………..…………………...                                

 ..………………………………... 

                 ………………..………………...                                 

 ..………………………………...                      

 

PRODUCT IDENTIFICATION 

Product Description 

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Varian S/N 

Purchase Reference 

 

 

 

 

 

 

 

 

 

 

 

 

 

TYPE OF RETURN 

(check appropriate box)

 

 

 

 

 

 

Paid Exchange      

 

Paid Repair 

 

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Warranty Repair 

 

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Credit  

      

 

Shipping Error 

 

Evaluation Return 

 

Calibration  

 

Other ……………….

 

 

HEALTH and SAFETY CERTIFICATION 

Varian Vacuum Technologies 

CAN NOT ACCEPT

 any equipment which contains 

BIOLOGICAL HAZARDS

 or 

RADIOACTIVITY

. Call Varian Customer Service to discuss alternatives if this requirement presents a problem. 

The equipment listed above (check one): 
    

 

HAS NOT

 been exposed to any toxic or hazardous materials 

       OR 

    

 

HAS

 been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that      

equipment was exposed to, check all categories that apply: 

  Toxic        Corrosive        Reactive        Flammable        Explosive        Biological        Radioactive 

List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula. 

.……………………………………………………………………………………………………………………..

 

 

Print Name: ………………………………….      Customer Authorized Signature: ……………...…………………….     

Print Title: …………………………………...      Date: ..…../..…../……  

NOTE:

 If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, 

the customer 

will be held responsible

 for all costs incurred to ensure the safe handling of the product, and 

is liable

 for any harm or injury to Varian 

employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. 

 

Do not write below this line 
Notification (RA)#: ……………………….………..  Customer ID#: ……….………….  Equipment #: …………………….. 

Summary of Contents for 969-9504

Page 1: ...BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE ISTRUCCIONES MANUAL DE ISTRU ES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA INSTRUCTION MANUAL Turbo V 250...

Page 2: ...Turbo V 250 Controller...

Page 3: ......

Page 4: ......

Page 5: ...V 250 CONTROLLER DESCRIPTION 49 CONTROLLER SPECIFICATIONS 50 CONTROLLER OUTLINE 50 INTERCONNECTIONS 51 Connection P17 Mains and Input Output Interconnections 51 Connection P16 Controller to Pump Conne...

Page 6: ...lizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information Questo manuale utilizza le seguenti convenzioni I messaggi di pericolo attirano l attenzione dell...

Page 7: ...o collegamenti o particolari opzionali fare riferimento al paragrafo USE dell appendice Technical Information Alcune delle istruzioni riportate nel seguito sono possibili sul controller modello 969 95...

Page 8: ...in FRONT Mode MANUTENZIONE I controller della serie Turbo V 250 non richiedono alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato In caso di guasto possibile usufru...

Page 9: ...RATURE La temperatura del trasformatore del controller ha superato i 90 C Attendere che la temperatura ritorni al di sotto della soglia Premere due volte il pulsante START per riavviare la pompa FAULT...

Page 10: ...te technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicher itshin weise folgenderma en hervorgehoben Die Gefahrenhinweise lenken die Aufmerks...

Page 11: ...ontage des bestellbaren Zubeh rs siehe Kapitel Use im Anhang zu Technical Information Einige der nachstehenden Gebrauchshinweise lassen sich beim Controller Modell 969 9504 nur dann ausf hren wenn das...

Page 12: ...enn die Steuereinheit im FRONT Modus konfiguriert ist WARTUNG Die Controller der Serie Turbo V 250 sind wartungsfrei Eventuell erforderliche Eingriffe m ssen von dazu befugtem Fachpersonal ausgef hrt...

Page 13: ...der START Taste neustarten FAULT CONTROLLER OVERTEMPERATURE Die Temperatur des Controller Trafos hat 90 C berschritten Warten bis die Temperatur unter den Schwellenwert gesunken ist Die Pumpe durch z...

Page 14: ...ation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants Les messages de danger attirent l a...

Page 15: ...r au paragraphe Use de l appendice Technical Information Quelques unes des instructions donn es ci apr s ne sont possibles sur le contr leur mod le 969 9425 que si l accessoire Hand held terminal est...

Page 16: ...ld Terminal si le contr leur est configur en mode FRONT ENTRETIEN Les contr leurs de la s rie Turbo V 250 n exigent aucun entretien Toute op ration doit tre effectu e par un personnel agr En cas de pa...

Page 17: ...ature du transformateur du contr leur a d pass 90 C Attendre que la temp rature retourne au dessous du seuil Presser deux fois l interrupteur START pour remettre la pompe en marche FAULT TOO HIGH L0AD...

Page 18: ...s detallada se facilita en el Suplemento Technical Information Este manual utiliza los s mbolos convencionales siguientes Los mensajes de peligro atraen la atenci n del operador sobre un procedimiento...

Page 19: ...les remitimos al apartado Use del anexo Technical Information Algunas de las instrucciones citadas a continuaci n pueden realizarse en el Controler modelo 969 9504 s lo si al mismo va conectado el ac...

Page 20: ...Held Terminal si el controler est configurado en FRONT Mode MANTENIMIENTO Los controlers de la serie Turbo V 250 no necesitan ning n mantenimiento Cualquier operaci n ha de ser efectuada por personal...

Page 21: ...ara volver a poner en marcha la bomba FAULT TOO HIGH L0AD Durante el funcionamiento normal tras la fase de puesta en marcha la corriente absorbida por la bomba es superior a la programada 1 5 A Compro...

Page 22: ...n a do operador durante o uso da aparelhagem Informa es pormenorizadas s o fornecidas no ap ndice Technical Information Este manual utiliza as seguintes conven es As mensagens de perigo chamam a aten...

Page 23: ...se do ap ndice Technical Information Algumas das instru es descritas a seguir s o poss veis no controller modelo 969 9504 s se estiver ligado ao mesmo o acess rio Hand held terminal Antes de usar o co...

Page 24: ...Mode premer o bot o STOP do Hand Held Terminal MANUTEN O Os controllers da s rie Turbo V 250 n o requerem qualquer manuten o Todas as opera es devem ser efectuadas por pessoal autorizado Em caso de de...

Page 25: ...AULT CONTROLLER OVERTEMPERATURE A temperatura do transformador do controller superou os 90 C Aguardar at que a temperatura volte ao limite estabelecido Premer duas vezes o bot o START para reactivar a...

Page 26: ...om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information Deze handleiding hanteert de volgende s...

Page 27: ...lleen van toepassing op het controllermodel 969 9504 indien hierop het accessoire Hand held terminal is aangesloten Breng alvorens de controller in gebruik te nemen alle elektrische en pneumatische aa...

Page 28: ...erminal worden bediend als de controller in de FRONT Mode is geconfigureerd ONDERHOUD De controllers van de serie Turbo V 250 zijn onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel...

Page 29: ...T CONTROLLER OVERTEMPERATURE De temperatuur van de transformator van de controller bedraagt meer dan 90 C Wacht tot de temperatuur weer onder de drempelwaarde is gezakt Bedien twee maal de START knop...

Page 30: ...stop af f rvakuum pumpen blokeringssignaler til tryk og vandf ringsafbrydere osv De f lgende afsnit indeholder al information der beh ves for at garantere operat rens sikkerhed under anvendelsen Detal...

Page 31: ...ion Visse procedurer der beskrives nedenst ende kan kun udf res p styreenheden model 969 9504 n r den er udstyret med tilbeh ret Hand held terminal Inden styreenheden anvendes b r samtlige elektriske...

Page 32: ...ndstillet i FRONT funktionen VEDLIGEHOLDELSE Styreenhederne i Turbo V 250 serien beh ver ikke nogen vedligeholdelse Ethvert indgreb p pumpen skal foretages af autoriseret personale Hvis pumpen g r i s...

Page 33: ...umpen igen FAULT CONTROLLER OVERTEMPERATURE Temperaturen p styreenhedens transfor mator overskrider 90 C Vent p at temperaturen falder til under t rskelv rdi Tryk to gange p START for at starte pumpen...

Page 34: ...er driften Detaljerade uppgifter finns i bilagan Technical information I bruksanvisningen anv nds f ljande standard rubriker Varningsmeddelandena informerar operat ren om att en speciell procedur elle...

Page 35: ...ar som listas nedan kan endast utf ras p styrenheten modell 969 9504 n r den r utrustad med tillbeh ret Hand held terminal Innan styrenheten anv nds b r samtliga elektriska och pneumatiska anslutninga...

Page 36: ...p knappen STOP p Hand Held Terminal om styrenheten r konfigurerad i arbetss tt FRONT UNDERH LL Styrenheterna i Turbo V250 serien r underh llsfria Allt servicearbete m ste utf ras av auktoriserad pers...

Page 37: ...starta om pumpen FAULT CONTROLLER OVERTEMPERATURE Temperaturen p styrenhetens transfor mator verskrider 90 C V nta tills temperaturen sjunker under tr skelv rdet Tryck tv g nger p knappen START f r at...

Page 38: ...en n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Denne veiledningen bruker f lgende standard protokoll Disse meldingene skal tiltrekke seg brukerens oppme...

Page 39: ...visninger som listes nedenfor kan kun gjennomf res p styreenheten modell 969 9504 n r den er utstyrt med ekstrautstyret Hand held terminal F r styreenheten tas i bruk b r samtlige elektriske og pneuma...

Page 40: ...n er konfigurert i FRONT modus VEDLIKEHOLD Turbo V 250 seriens styreenheter er vedlikeholdsfrie Alt arbeid p styreenheten m kun utf res av autorisert personell Dersom styreenheten stanser m du ta kont...

Page 41: ...to ganger p knappen START for starte pumpen FAULT CONTROLLER OVERTEMPERATURE Temperaturen p styreenhetens transformator er over 90 C Vent til temperaturen synker under terskelverdien Trykk to ganger...

Page 42: ...an esityhjennyspumpun k ynnistys ja pys hdyss timi veden virtauksen s telykatkaisijaa jne Seuraavilla sivuilla on luettavissa tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laittee...

Page 43: ...vien toimenpiteiden suorittamista k sitt vi tietoja l yd tte kappaleesta K ytt joka on Tekniset tiedot kappaleen liitteen Jotkin seuraavista ohjeista ovat mahdollisia valvojamallille 969 9504 vain mik...

Page 44: ...ja on konfiguroitu FRONT tavalla HUOLTO Turbo V 250 sarjan valvojat eiv t kaipaa mink nlaista huoltoa Mahdolliset valvojaan teht v t toimenpiteet tulee j tt aina valtuutetun henkil n teht viksi Toimin...

Page 45: ...pumppu k ynnistyy FAULT CONTROLLER OVERTEMPERATURE Valvojan muuntajan l mp tila on ylitt nyt 90 C Odottakaa ett l mp tila putoaa kynnysarvon alapuolelle Painakaa painonappia START kaksi kertaa jolloi...

Page 46: ...guouvntai thn asfavleia tou ceiristhv katav th diavrkeia th crhsimopoivhsh th suskeuhv Leptomereiv plhroforive parevcontai sto paravrthma Technical Information Autov tov egceirivdio crhsimopoieiv ti a...

Page 47: ...ti anaferovmene sth sunevceia plhroforive mporouvn na efarmostouvn kai ston ruqmisthv movnon an autov eivnai sundedemevno me to exavrthma Hand Held Terminal Prin crhsimopoihvsete ton ruqmisthv kavnte...

Page 48: ...controler evcei suntonisteiv se FRONT Mode SUNTHRHSH Oi ruqmistj thj seir j Turbo V 250 den apaito n kamma sunt rhsh Opoiad pote epmbash qa prpei na pragmatopoihqe ap egkekrimno proswpik Se perptwsh...

Page 49: ...va tou metaschmatisthv cepevrase tou 90 C Perimevnete wvspou h qermokrasiva na katebeiv kavtw apov to anwvtato epitreptov shmeivo Pathvste duvo forev to mpoutovn START gia na qevsete xanav se kivnhsh...

Page 50: ...ailed information is supplied in the appendix Technical Information This manual uses the following standard protocol The warning messages are for attracting the attention of the operator to a particul...

Page 51: ...ontroller model 969 9504 only when the accessory Hand held terminal is available Make all vacuum manifold and electrical connections and refer to Turbo V pump instruction manual prior to operating the...

Page 52: ...ured in FRONT Mode MAINTENANCE The Turbo V 250 series controller does not require any maintenance Any work performed on the controller must be carried out by authorized personnel When a fault has occu...

Page 53: ...twice to start the pump FAULT CONTROLLER OVERTEMPERATURE The controller transformer temperature exceeds 90 C Wait until the temperature decrease below threshold value Press the START push button twice...

Page 54: ...50 60 Hz AC mains supply into a 3 phase low voltage medium frequency output which is required to power the Turbo V pump The microcomputer generates the variable output frequency and controls the 3 ph...

Page 55: ...temperature 20 C to 70 C Fuse mains T3A slow blow disregarding the mains Auxiliary connectors P17 INPUT OUTPUT mains and signals pins J16 pump connector socket P3 hand held terminal connector pins Rad...

Page 56: ...e contact closes the turbopump runs at low speed and when the contact opens the turbopump reverts to high speed mode PIN DESCRIPTION a4 a5 R2 INTERLOCK requires a permanent closed contact to set at in...

Page 57: ...56 01 B P17 I O connector Connection P16 Controller to Pump Connection The pin configuration of the cable that connectsthe controller to the pump using a 0 5 mm 2 AWG 20 wires is shown in the followin...

Page 58: ...ler model 969 9504 only when the optional hand held terminal is installed After the main is applied to the I O connector the pump starts and the display shows S O F T S T A R T O N Where the sign minu...

Page 59: ...PM is the theoretical rotational speed of the pump as a function of the controller output frequency range 3 to 56 KRPM C is the temperature of the outer ring of the upper bearing range 00 to 99 C X du...

Page 60: ...e display shows S O F T S T A R T M O D E S E L E C T I O N X X X where XXX YES or NO If YES is selected the Soft Start mode allows the pump to ramp up the Normal speed within ten steps When NO is sel...

Page 61: ...d R2 operation see the following cycle diagram and it is factory set to 32 KRPM Press the CYCLE NUMBER push button to select the first number S P E E D T H R E S H O L D S E L E C T I O N X X K R P M...

Page 62: ...p time according to the chamber volume and or operating cycle feature see the preceeding cycle diagram by pressing the CYCLE NUMBER pushbutton to select the desired number Press the PUMP CURRENT push...

Page 63: ...e elapsed operating time range 000 to 99999 hours RESET XXX YES or NO The controller is factory set to NO If YES is selected the pump life shall be reset to 000 After selecting YES press the PUMP CURR...

Page 64: ...eselected the display shows P U M P R E A D Y P U S H S T A R T B U T T O N L S where LS means low speed mode is selected After starting a LS appears on the right bottom corner of the following displa...

Page 65: ...power is restored the Turbo V controller automatically restarts the interconnected devices and the turbopump in the proper sequence The display shows P U M P I S S T A R T I N G 1 2 X X K R P M or S O...

Page 66: ...1 87 900 856 01 B ACCESSORIES AND SPARE PARTS DESCRIPTION PART NUMBER Input output mating connector 969 9855 OPTIONS DESCRIPTION PART NUMBER Controller to pump cable 3 m extension 969 9863 L0300 Hand...

Page 67: ...D DATE CHAMFER SCALE Ra um PARALLELISM PERPENDI CULARITY CONCENTRICITY ANGLE CLASS 03 660950 MAINS WIRING DIAGRAM H C CM 23 01 95 A3 ANALO G 03 660951 D N ANALOG D N 03 660951 D N 03 661158 POWER SUPP...

Page 68: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 69: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 70: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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